TW200506207A - Vacuum chamber - Google Patents
Vacuum chamberInfo
- Publication number
- TW200506207A TW200506207A TW093109541A TW93109541A TW200506207A TW 200506207 A TW200506207 A TW 200506207A TW 093109541 A TW093109541 A TW 093109541A TW 93109541 A TW93109541 A TW 93109541A TW 200506207 A TW200506207 A TW 200506207A
- Authority
- TW
- Taiwan
- Prior art keywords
- vacuum
- passage
- vacuum chamber
- vacuum pump
- room
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
- F04B37/085—Regeneration of cryo-pumps
Abstract
The vacuum chamber comprises a vacuum room (11) with a passage (14) at which a vacuum pump (15) is directly arranged. The vacuum room (11) includes heat radiators (16). To prevent heat radiation from entering into the interior of the vacuum pump (15), a radiation screen (17) is arranged over the passage, which shades the passage but is permeable to gases. Thereby, a deterioration of the operational conditions of the vacuum pump is prevented.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2003117837 DE10317837A1 (en) | 2003-04-16 | 2003-04-16 | vacuum chamber |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200506207A true TW200506207A (en) | 2005-02-16 |
Family
ID=33103502
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093109541A TW200506207A (en) | 2003-04-16 | 2004-04-07 | Vacuum chamber |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE10317837A1 (en) |
TW (1) | TW200506207A (en) |
WO (1) | WO2004092585A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009059824A1 (en) * | 2009-12-21 | 2011-06-22 | Inficon GmbH, 50968 | Method and device for determining the leak |
DE202011100428U1 (en) | 2011-04-26 | 2011-07-14 | Vacom Vakuum Komponenten & Messtechnik Gmbh | Device for the protection of vacuum equipment |
DE102011100311A1 (en) * | 2011-05-03 | 2012-11-08 | Pfeiffer Vacuum Gmbh | Device with a guide structure |
GB2600479A (en) * | 2020-11-02 | 2022-05-04 | Edwards Vacuum Llc | Cryopumps and inlet flow restrictors for cryopumps |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1051295A (en) * | ||||
US3338063A (en) * | 1966-01-17 | 1967-08-29 | 500 Inc | Cryopanels for cryopumps and cryopumps incorporating them |
KR960005772A (en) * | 1994-07-20 | 1996-02-23 | 제임스 조셉 드롱 | Vacuum chamber for ultra-high vacuum at high temperatures |
US5537833A (en) * | 1995-05-02 | 1996-07-23 | Helix Technology Corporation | Shielded cryogenic trap |
JP3604228B2 (en) * | 1996-02-02 | 2004-12-22 | アネルバ株式会社 | Vacuum exhaust device |
JPH09280174A (en) * | 1996-04-11 | 1997-10-28 | Sony Corp | Cryopump generating method |
DE19632123A1 (en) * | 1996-08-09 | 1998-02-12 | Leybold Vakuum Gmbh | Cryopump |
-
2003
- 2003-04-16 DE DE2003117837 patent/DE10317837A1/en not_active Withdrawn
-
2004
- 2004-04-02 WO PCT/EP2004/003525 patent/WO2004092585A1/en active Application Filing
- 2004-04-07 TW TW093109541A patent/TW200506207A/en unknown
Also Published As
Publication number | Publication date |
---|---|
DE10317837A1 (en) | 2004-11-04 |
WO2004092585A1 (en) | 2004-10-28 |
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