TW200505768A - Cassette for substrate - Google Patents

Cassette for substrate

Info

Publication number
TW200505768A
TW200505768A TW093117662A TW93117662A TW200505768A TW 200505768 A TW200505768 A TW 200505768A TW 093117662 A TW093117662 A TW 093117662A TW 93117662 A TW93117662 A TW 93117662A TW 200505768 A TW200505768 A TW 200505768A
Authority
TW
Taiwan
Prior art keywords
substrate
cassette
molded product
supporting columns
receiving member
Prior art date
Application number
TW093117662A
Other languages
English (en)
Inventor
Toshio Yoshida
Hironobu Fukumoto
Satoshi Yamamoto
Akihiro Yamanaka
Original Assignee
Yodogawa Hu Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yodogawa Hu Tech Co Ltd filed Critical Yodogawa Hu Tech Co Ltd
Publication of TW200505768A publication Critical patent/TW200505768A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW093117662A 2003-06-18 2004-06-18 Cassette for substrate TW200505768A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003173103A JP2005011924A (ja) 2003-06-18 2003-06-18 基板用カセット

Publications (1)

Publication Number Publication Date
TW200505768A true TW200505768A (en) 2005-02-16

Family

ID=34097025

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093117662A TW200505768A (en) 2003-06-18 2004-06-18 Cassette for substrate

Country Status (4)

Country Link
JP (1) JP2005011924A (zh)
KR (1) KR20040111085A (zh)
CN (1) CN1572672A (zh)
TW (1) TW200505768A (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7951693B2 (en) * 2006-12-22 2011-05-31 Philips Lumileds Lighting Company, Llc III-nitride light emitting devices grown on templates to reduce strain
JP6050038B2 (ja) * 2012-06-29 2016-12-21 Hoya株式会社 ガラス基板ホルダ、及び電子機器用カバーガラスのガラス基板の製造方法
US8997996B2 (en) 2013-03-18 2015-04-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Drawer type cushioning packaging device for liquid crystal glass
CN103144859B (zh) * 2013-03-18 2016-03-02 深圳市华星光电技术有限公司 抽屉式液晶玻璃缓冲包装装置
KR102133328B1 (ko) * 2018-09-18 2020-07-13 (주)상아프론테크 사이드 지지구조체 및 이를 구비한 기판 적재용 카세트
KR102342156B1 (ko) * 2020-04-16 2021-12-22 주식회사 글린트머티리얼즈 미끄럼 방지 패드를 포함한 반도체 웨이퍼 이송용 캐리어
CN112319986A (zh) * 2020-09-28 2021-02-05 德清远泰钢结构有限公司 一种便于钢板堆叠的钢板放置架

Also Published As

Publication number Publication date
KR20040111085A (ko) 2004-12-31
JP2005011924A (ja) 2005-01-13
CN1572672A (zh) 2005-02-02

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