TW200428689A - Organic electro-luminescent device array and fabrication method thereof - Google Patents
Organic electro-luminescent device array and fabrication method thereof Download PDFInfo
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200428689 五、發明說明(1) 【發明所屬之技術領域】 本發明是有關於一種有機電激發光元件陣列及其製造 方法,且特別是有關於一種具有較高開口率與發光效率之 有機電激發光顯示器。 【先前技術】 平面顯示器為人與資訊的溝通界面,目前平面顯示器 主要有下列幾種:有機電激發光顯示器(Organic Electro-Luminescent Display, 0ELD)、電槳顯示器 (Plasma Display Panel, PDP)、液晶顯示器(Liquid Crystal Display, LCD)、發光二極體(Light Emitting Diode, LED)、真空螢光顯示器(Vacuum Fluorescent Display)、場致發射顯示器(Field Emission Display, FED)以及電變色顯示器(Electro-chromic Display)等。 其中,有機電激發光顯示器以其自發光、無視角依存、省 電、製程簡易、低成本、低操作溫度範圍、高應答速度以 及全彩化等優點而具有極大的應用潛力,可望成為下一代 的平面顯示器之主流。 有機電激發光顯示器係一種利用有機發光材料自發光 的特性來達到顯示效果的顯示元件。其發光結構主要是由 一對電極以及有機官能性材料層所構成。當電流通過陽極 及陰極間,使電子和電洞在有機官能性材料層内結合而產 生激子時,便可’以使有機官能性材料層依照其材料之特 性,而產生不同顏色之放光機制,此即為有機電激發光元 件的發光原理。為獲得高效率發光特性的有機電激發光元200428689 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to an organic electro-excitation light element array and a manufacturing method thereof, and particularly to an organic electro-excitation having a high aperture ratio and luminous efficiency. Light display. [Previous technology] Flat displays are communication interfaces between people and information. At present, flat displays mainly include the following: Organic Electro-Luminescent Display (0ELD), Plasma Display Panel (PDP), LCD Display (Liquid Crystal Display, LCD), Light Emitting Diode (LED), Vacuum Fluorescent Display, Field Emission Display (FED), and Electro-chromic Display) and so on. Among them, the organic electroluminescent display has great application potential due to its self-emission, no viewing angle dependence, power saving, simple process, low cost, low operating temperature range, high response speed, and full color, etc., and is expected to become the next The mainstream of the first generation of flat panel displays. An organic electroluminescent display is a display element that utilizes the self-luminous properties of an organic light-emitting material to achieve a display effect. The light emitting structure is mainly composed of a pair of electrodes and an organic functional material layer. When the current passes between the anode and the cathode, the electrons and holes are combined in the organic functional material layer to generate excitons, so that the organic functional material layer can produce different colors of light according to the characteristics of its material. Mechanism, which is the light-emitting principle of the organic electro-excitation light element. Organic electro-excitation photons for high-efficiency light-emitting characteristics
11204twf.ptd 第6頁 200428689 五、發明說明(2) 件,最普遍的方法係將小分子有機電激發光材料以真空蒸 鍍方式製成發光層。 第1 A圖至第1 C圖所繪示為習知有機電激發光元件其有 機發光層選擇成膜之流程剖面示意圖。請共同參照第1 A圖 至第1C圖所示,首先在一基板100上形成一陽極110、一圖 案化絕緣層120、一陰極隔離(cathode separator)層 1 3 0,並以一遮罩1 4 0之開口 1 4 5對準預定形成有機發光層 的區域,以形成一紅色有機發光層R 1 0。接著,移動遮罩 1 4 0之開口 1 4 5對準下一預定形成有機發光層的區域,以形 成一綠色有機發光層G10。最後,移動遮罩140之開口145 對準最終預定形成有機發光層的區域,以形成一藍色有機 發光層B 1 0。在此習知方法中,遮罩1 4 0需要高精密性地自 動對位機制,且為彌補對位誤差,時常採用增加陰極隔離 層1 3 0之寬度的方法,造成有機電激發光顯示器的開口率 明顯減少。 第2圖所繪示為另一習知有機電激發光元件之示意 圖。請參照第2圖所示,有機電激發光元件2 0 0係由一基板 210、電極層220a-220d、一紅色有機發光層R20、一綠色 有機發光層G20、一藍色有機發光層B20所交互堆疊構成。 在此習知有機電激發光元件中,要將四層電極層 2 2 0 a - 2 2 0 d分別拉線至控制電路是很困難的,且由於紅光 與綠光需經過許’多膜層才能透出基板,其中的光耗損非常 嚴重,再加上需要適當計算與控制各膜層的光學厚度,都 使其製造困難且品質不盡理想。11204twf.ptd Page 6 200428689 V. Description of the invention (2) The most common method is to form a light-emitting layer by vacuum evaporation of a small molecule organic electro-excitation light material. Figures 1A to 1C are schematic cross-sectional views showing the process of selecting and forming an organic light-emitting layer for a conventional organic electroluminescent device. Please refer to FIG. 1A to FIG. 1C together. First, an anode 110, a patterned insulating layer 120, and a cathode separator layer 1 3 0 are formed on a substrate 100, and a mask 1 is formed. The opening 1 40 of 40 is aligned with a region where the organic light emitting layer is to be formed to form a red organic light emitting layer R 1 0. Next, the opening 1 4 5 of the mask 140 is aligned with the next area where the organic light emitting layer is to be formed to form a green organic light emitting layer G10. Finally, the opening 145 of the moving mask 140 is aligned with the area where the organic light emitting layer is finally scheduled to be formed to form a blue organic light emitting layer B 1 0. In this conventional method, the mask 1 40 needs a high-precision automatic alignment mechanism, and in order to compensate for the alignment error, a method of increasing the width of the cathode isolation layer 1 3 0 is often used to cause the organic electroluminescent display. The aperture ratio is significantly reduced. FIG. 2 is a schematic diagram of another conventional organic electro-optic light emitting element. Please refer to FIG. 2, the organic electroluminescent device 200 is composed of a substrate 210, electrode layers 220a-220d, a red organic light emitting layer R20, a green organic light emitting layer G20, and a blue organic light emitting layer B20. Interactive stack composition. In this conventional organic electroluminescent device, it is very difficult to wire the four electrode layers 2 2 a-2 2 0 d to the control circuit separately, and because red light and green light need to pass through many films The layer can penetrate the substrate, and the light loss is very serious. In addition, the optical thickness of each film layer needs to be properly calculated and controlled, which makes it difficult to manufacture and the quality is not satisfactory.
11204twf.ptd 第7頁 200428689 五、發明說明(3) 第3圖所繪示為另一習知有機電激發光元件之示意 圖。請參照第3圖所示,有機電激發光元件3 0 0係由一基板 3 1 0、一藍色有機發光層B 3 0、一藍-綠色變換層3 2 0、一綠 -紅色變換層3 3 0所構成。其中綠光係由藍色有機發光層 B 3 0所發出之藍光,經由藍-綠色變換層3 2 0之作用而形 成,紅光係再經由綠-紅色變換層3 3 0之作用而形成。在此 習知的有機電激發光元件中,由於紅光與綠光係藉由色變 換的方式轉換而得,故仍存在發光效率低之缺點。 【發明内容】 因此,本發明的目的就是在提供一種有機電激發光元 件陣列及其製造方法,適於增加有機電激發光顯示器的開 口率與發光效率。 基於上述目的,本發明提出一種有機電激發光元件陣 列,此有機電激發光元件陣列主要係由一基板、一第一圖 案化電極層、一介電層、一有機發光元件層與一第二圖案 化電極層所構成。其中,第一圖案化電極層係配置於基板 上。介電層係配置於基板上並覆蓋第一圖案化電極層,介 電層具有多個開口以及位在對應於基板邊緣處之至少一注 入溝槽,而這些開口暴露出第一圖案化電極層,且這些注 入溝槽係分別與部分開口連通。有機發光元件層係配置於 開口所暴露出之第一圖案化電極層上。第二圖案化電極層 係配置於有機發·光元件層上。 此外,第一圖案化電極層包括多個第一條狀電極,第 二圖案化電極層包括多個第二條狀電極’,且第一條狀電極11204twf.ptd Page 7 200428689 V. Description of the Invention (3) Figure 3 shows a schematic diagram of another conventional organic electro-optical light emitting element. Please refer to FIG. 3, the organic electroluminescent device 3 0 0 is composed of a substrate 3 1 0, a blue organic light-emitting layer B 3 0, a blue-green conversion layer 3 2 0, and a green-red conversion layer. 3 3 0. The green light is formed by the blue light emitted by the blue organic light-emitting layer B 3 0 through the action of the blue-green conversion layer 3 2 0, and the red light is formed by the action of the green-red conversion layer 3 3 0. In the conventional organic electroluminescent device, since red light and green light are converted by color conversion, there is still a disadvantage that the light emission efficiency is low. [Summary of the Invention] Therefore, an object of the present invention is to provide an organic electroluminescent device array and a manufacturing method thereof, which are suitable for increasing the aperture ratio and luminous efficiency of an organic electroluminescent display. Based on the above objectives, the present invention provides an organic electroluminescent device array. The organic electroluminescent device array is mainly composed of a substrate, a first patterned electrode layer, a dielectric layer, an organic light emitting device layer, and a second Consists of a patterned electrode layer. The first patterned electrode layer is disposed on the substrate. The dielectric layer is disposed on the substrate and covers the first patterned electrode layer. The dielectric layer has a plurality of openings and at least one implanted trench corresponding to the edge of the substrate, and these openings expose the first patterned electrode layer. And these implanted trenches are respectively communicated with part of the openings. The organic light emitting element layer is disposed on the first patterned electrode layer exposed by the opening. The second patterned electrode layer is disposed on the organic light-emitting element layer. In addition, the first patterned electrode layer includes a plurality of first strip electrodes, the second patterned electrode layer includes a plurality of second strip electrodes, and the first strip electrode
11204twf.ptd 第8頁 200428689 五、發明說明(4) 的延伸方向與第二條狀電極的延伸方向垂直。而有機電激 -發光元件陣列更包括一電極分隔層,配置於開口之間的介 電層上,且電極分隔層係與第二條狀電極的延伸方向平 行。 基於上述目的,本發明更提出一種有機電激發光元件 陣列的製造方法,此有機電激發光元件陣列的製造方法係 首先提供一基板。接著,於基板上形成一第一圖案化電極 層。隨後,於基板上形成具有複數個開口、一第一注入溝 槽以及一第二注入溝槽之一介電層,以覆蓋第一圖案化電 極層。其中,開口暴露出第一圖案化電極層,且第一注入 溝槽及第二注入溝槽係分別與部分開口連通。之後,注入# 一第一液態有機官能材料於第一注入溝槽,使第一液態有 機官能材料流動至與第一注入溝槽連通之部份開口 ,以形 成一第一有機發光元件層。隨後,於未形成第一有機發光 元件層之其餘開口内,例如係採用蒸鍍方式形成一第二有 機發光元件層與一第三有機發光元件層。最後,於第一有 機發光元件層、第二有機發光元件層與第三有機發光元件 層上形成一第二圖案化電極層。 此外,於形成介電層以及形成第一有機發光元件層、 第二有機發光元件層與第三有機發光元件層之間,更包括 於開口之間的介電層上形成一電極分隔層。而且第二有機 發光元件層亦可#用注入一第二液態有機官能材料之方 _ 式,形成於與第二注入溝槽連通之部份開口。 值得注意的是,在本發明中由於採用注入溝槽的設11204twf.ptd Page 8 200428689 V. Description of the invention (4) The extending direction is perpendicular to the extending direction of the second strip electrode. The organic electroluminescent-light emitting element array further includes an electrode separation layer disposed on the dielectric layer between the openings, and the electrode separation layer is parallel to the extending direction of the second strip-shaped electrode. Based on the above objective, the present invention further provides a method for manufacturing an organic electroluminescent device array. The method for manufacturing the organic electroluminescent device array firstly provides a substrate. Next, a first patterned electrode layer is formed on the substrate. Subsequently, a dielectric layer having a plurality of openings, a first implantation trench and a second implantation trench is formed on the substrate to cover the first patterned electrode layer. The opening exposes the first patterned electrode layer, and the first implantation trench and the second implantation trench are respectively communicated with a part of the opening. After that, a first liquid organic functional material is injected into the first injection trench, so that the first liquid organic functional material flows to a part of the opening communicating with the first injection trench to form a first organic light emitting element layer. Subsequently, in the remaining openings where the first organic light emitting element layer is not formed, for example, a second organic light emitting element layer and a third organic light emitting element layer are formed by evaporation. Finally, a second patterned electrode layer is formed on the first organic light emitting element layer, the second organic light emitting element layer and the third organic light emitting element layer. In addition, an electrode separation layer is formed on the dielectric layer formed between the dielectric layer, the first organic light emitting element layer, the second organic light emitting element layer, and the third organic light emitting element layer, and the dielectric layer between the openings. In addition, the second organic light-emitting element layer can also be formed by injecting a second liquid organic functional material in an opening that is in communication with the second injection trench. It is worth noting that in the present invention, since
11204twf.ptd 第9頁 200428689 五、發明說明(5) 計,使液態有機官能材料能因毛細現象的作用’而自動流 至與注入溝槽相連通之發光區域。因此本發明與習知有機 電激發光元件陣列的製造方法相比,可大幅減少遮罩之精 確對位要求,更可減少為避免對位誤差而增加之電極分隔 層寬度,而提高本發明所提出之有機電激發光元件陣列的 開口率與發光效率。 為讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂,下文特舉一較佳實施例,並配合所附圖式,作詳 細說明如下: 【實施方式】 第4圖所繪示為根據本發明所提出之第一較佳實施例 的有機電激發光元件陣列之示意圖。請參照第4圖所示, 有機電激發光元件陣列4 0 0主要係由一基板4 1 0、一第一圖 案化電極層420、一介電層430、一電極分隔層440、一有 機發光元件層450與一第二圖案化電極層460所構成。其 中,第一圖案化電極層420係配置於基板410上。介電層 4 3 0係配置於基板4 1 0上並覆蓋第一圖案化電極層4 2 0,介 電層4 3 0具有多個開口 4 3 2以及位在對應於基板4 1 0邊緣處 之一注入溝槽434,而這些開口 432暴露出第一圖案化電極 層4 2 0,且注入溝槽4 3 4係與部分開口 4 3 2連通。電極分隔 層4 4 0係配置於開口 4 3 2之間的介電層4 3 0上。有機發光元 件層4 5 0係配置於開口 4 3 2所暴露出之第一圖案化電極層 4 2 0上。第二圖案化電極層4 6 0係配置於有機發光元件層 4 5 0 上011204twf.ptd Page 9 200428689 V. Description of the invention (5) It is planned that the liquid organic functional material can automatically flow to the light-emitting area communicating with the injection groove due to the action of the capillary phenomenon '. Therefore, compared with the conventional manufacturing method of the organic electroluminescent device array, the present invention can greatly reduce the precise alignment requirements of the mask, and can also reduce the width of the electrode separation layer which is increased to avoid the alignment error, thereby improving the The aperture ratio and luminous efficiency of the organic electro-excitation light element array are proposed. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below in conjunction with the accompanying drawings to describe in detail as follows: [Embodiment Mode] FIG. 4 A schematic diagram of an organic electroluminescent device array according to a first preferred embodiment of the present invention is shown. Please refer to FIG. 4, the organic electroluminescent element array 400 is mainly composed of a substrate 4 10, a first patterned electrode layer 420, a dielectric layer 430, an electrode separation layer 440, and an organic light emitting device. The element layer 450 and a second patterned electrode layer 460 are formed. The first patterned electrode layer 420 is disposed on the substrate 410. The dielectric layer 4 3 0 is disposed on the substrate 4 1 0 and covers the first patterned electrode layer 4 2 0. The dielectric layer 4 3 0 has a plurality of openings 4 3 2 and is located at an edge corresponding to the substrate 4 1 0 One of the trenches 434 is implanted, and the openings 432 expose the first patterned electrode layer 4 2 0, and the implanted trenches 4 3 4 are in communication with part of the openings 4 3 2. The electrode separation layer 4 4 0 is disposed on the dielectric layer 4 3 0 between the openings 4 3 2. The organic light emitting element layer 4 50 is disposed on the first patterned electrode layer 4 2 0 exposed by the opening 4 3 2. The second patterned electrode layer 4 6 0 is disposed on the organic light emitting element layer 4 5 0.
11204twf.ptd 第10頁 200428689 五、發明說明(6) 此外,第一圖案化電極層4 2 0例如係由多個第一條狀 〜 電極所構成。由於電極分隔層4 4 0的作用,使電極分隔層 440與有機發光元件層450上之第二圖案化電極層460,自 然形成不互相電性連接之多個第二條狀電極,且第一條狀 電極的延伸方向例如與第二條狀電極的延伸方向垂直。基 板4 1 0的材質例如為玻璃或塑膠等,第一圖案化電極層4 2 0 與第二圖案化電極層4 6 0之材質例如為銦錫氧化物(I T 0 )、 銦鋅氧化物(IZO)或金屬等。 第5圖所繪示為根據本發明所提出之第二較佳實施例 的有機電激發光元件陣列之示意圖。請參照第5圖所示, 根據本發明所提出之第二較佳實施例的有機電激發光元件0 陣列中,主要係更增加一注入溝槽,其餘與第一較佳實施 例相同處在此即不再贅述。有機電激發光元件陣列5 0 0主 要係由一基板510、一第一圖案化電極層520、一介電層 530、一電極分隔層540、一有機發光元件層550與一第二 圖案化電極層560所構成。其中,介電層530具有多個開口 5 3 2以及位在對應於基板5 1 0邊緣處之一第一注入溝槽5 3 4 與一第二注入溝槽5 3 6,且第一注入溝槽5 3 4與第二注入溝 槽5 3 6係分別與部分開口 5 3 2連通。 第6 A圖至第6 E圖所繪示為根據本發明所提出之第一較 佳實施例的有機電激發光元件陣列之製造方法沿I - Γ的流 程剖面圖。首先碱共同參照第4圖與第6 A圖所示,提供一 € 基板410並於基板410上形成一第一圖案化電極層4 2 0,隨 後於基板4 1 0上形成具有複數個開口 4 3 2與一注入溝槽4 3 411204twf.ptd Page 10 200428689 V. Description of the invention (6) In addition, the first patterned electrode layer 4 2 0 is composed of a plurality of first stripe electrodes, for example. Due to the function of the electrode separation layer 440, the electrode separation layer 440 and the second patterned electrode layer 460 on the organic light emitting element layer 450 naturally form a plurality of second strip electrodes that are not electrically connected to each other, and the first The extending direction of the strip electrode is, for example, perpendicular to the extending direction of the second strip electrode. The material of the substrate 4 1 0 is, for example, glass or plastic, and the material of the first patterned electrode layer 4 2 0 and the second patterned electrode layer 4 60 is, for example, indium tin oxide (IT 0), indium zinc oxide ( IZO) or metal. FIG. 5 is a schematic diagram of an organic electro-optical light emitting element array according to a second preferred embodiment of the present invention. Please refer to FIG. 5. According to the second preferred embodiment of the present invention, an organic electroluminescent device 0 array is mainly added with an injection trench, and the rest is the same as the first preferred embodiment. This will not repeat them here. The organic electroluminescent element array 500 is mainly composed of a substrate 510, a first patterned electrode layer 520, a dielectric layer 530, an electrode separation layer 540, an organic light emitting element layer 550, and a second patterned electrode. Consists of layers 560. The dielectric layer 530 has a plurality of openings 5 3 2 and one of the first implantation trenches 5 3 4 and a second implantation trench 5 3 6 located at an edge corresponding to the substrate 5 10. The grooves 5 3 4 and the second injection grooves 5 3 6 are respectively communicated with the partial openings 5 3 2. 6A to 6E are cross-sectional views taken along the flow path of I-Γ in a method for manufacturing an organic electro-optical light emitting element array according to a first preferred embodiment of the present invention. First, referring to FIG. 4 and FIG. 6A together, the base is provided with a substrate 410 and a first patterned electrode layer 4 2 0 is formed on the substrate 410, and then a plurality of openings 4 are formed on the substrate 4 1 0 3 2 and an implanted trench 4 3 4
11204twf.ptd 第11頁 200428689 五、發明說明(7) 之一介電層430 ,以覆蓋第一圖案化電極層420。其中,開 口 432暴露出第一圖案化電極層420,且注入溝槽434係與 部分開口 4 3 2連通。之後,於開口 4 3 2之間的介電層4 3 0上 形成一電極分隔層440,電極分隔層440係具有逆斜度 (T a p e r )形狀之結構。接著請共同參照第4圖與第6 B圖所 示,以滴入或喷墨的方式注入一液態有機官能材料於注入 溝槽4 3 4,使液態有機官能材料因毛細現象的作用,而能 夠自動流至與注入溝槽4 3 4連通之部份開口 4 3 2,以形成一 第一有機發光元件層4 5 2。隨後請共同參照第6 C圖與第6 D 圖所示,使用蒸鍍方式,藉由圖案化之一遮罩470,於未 形成第一有機發光元件層452之其餘開口 432内,形成一第 二有機發光元件層454與一第三有機發光元件層456。最後 請參照第6 E圖,於第一有機發光元件層4 5 2、第二有機發 光元件層454與第三有機發光元件層456上形成一第二圖案 化電極層4 6 0 。 第7 A圖至第7 E圖所繪示為根據本發明所提出之第二較 佳實施例的有機電激發光元件陣列之製造方法沿Π - Π ’的 流程剖面圖。根據本發明所提出之第二較佳實施例的有機 電激發光元件陣列之製造方法中,主要係改變有機發光元 件層之形成方法,其餘與第一較佳實施例之製造方法相同 處在此即不再贅述。首先請共同參照第5圖與第7 A圖所 示,於基板5 1 0上形成具有複數個開口 5 3 2、一第一注入溝 槽534與一第二注入溝槽536之一介電層530 ,以覆蓋第一 圖案化電極層520 。其中,開口532暴露出第一圖案化電極11204twf.ptd Page 11 200428689 V. Description of Invention (7) One of the dielectric layers 430 covers the first patterned electrode layer 420. The opening 432 exposes the first patterned electrode layer 420, and the injection trench 434 is in communication with a part of the opening 4 3 2. Then, an electrode separation layer 440 is formed on the dielectric layer 4 3 0 between the openings 4 3 2. The electrode separation layer 440 has a structure having a reverse slope (T a p e r) shape. Next, please refer to FIG. 4 and FIG. 6B together, and inject a liquid organic functional material into the injection groove 4 3 4 by dripping or ink jetting, so that the liquid organic functional material can be caused by capillary action. Automatically flows to a portion of the opening 4 3 2 communicating with the injection trench 4 3 4 to form a first organic light emitting element layer 4 5 2. Subsequently, please refer to FIG. 6C and FIG. 6D together, and use evaporation to form a first mask 470 by patterning one of the remaining openings 432 in which the first organic light emitting element layer 452 is not formed to form a first Two organic light-emitting element layers 454 and a third organic light-emitting element layer 456. Finally, referring to FIG. 6E, a second patterned electrode layer 4 60 is formed on the first organic light emitting element layer 4 52, the second organic light emitting element layer 454, and the third organic light emitting element layer 456. 7A to 7E are cross-sectional views of a method for manufacturing an organic electro-optic light emitting element array according to a second preferred embodiment of the present invention, which is taken along the flow of Π-Π '. In the method for manufacturing an organic electroluminescent device array according to the second preferred embodiment of the present invention, the method of forming the organic light-emitting element layer is mainly changed, and the rest are the same as the manufacturing method of the first preferred embodiment. That is not repeated. First, please refer to FIG. 5 and FIG. 7A together to form a dielectric layer having a plurality of openings 5 3 2 on a substrate 5 1 2, a first implant trench 534 and a second implant trench 536. 530 to cover the first patterned electrode layer 520. The opening 532 exposes the first patterned electrode.
11204twf.ptd 第12頁 200428689 五、發明說明(8) 層5 2 0 ,且第一注入溝槽5 3 4與第二注入溝槽5 3 6係分別與 部分開口 5 3 2連通。接著請共同參照第5圖、第7 B圖與第7 C 圖所示,分別注入一第一液態有機官能材料與第二液態有 機官能材料於第一注入溝槽5 3 4與第二注入溝槽5 3 6。使第 一液態有機官能材料自動流至與第一注入溝槽5 3 4連通之 部份開口 5 3 2,以形成一第一有機發光元件層5 5 2。第二液 態有機官能材料則自動流至與第二注入溝槽5 3 6連通之部 份開口 5 3 2,以形成一第二有機發光元件層5 5 4。最後請共 同參照第7D圖與第7E圖所示,藉由圖案化之一遮罩570形 成一第三有機發光元件層5 5 6,然後形成一第二圖案化電 極層5 6 0。 雖然本發明已以多個較佳實施例揭露如上’然其並非 用以限定本發明,任何熟習此技藝者,在不脫離本發明之 精神和範圍内,當可作些許之更動與潤飾,因此本發明之 保護範圍當視後附之申請專利範圍所界定者為準。11204twf.ptd Page 12 200428689 V. Description of the invention (8) The layer 5 2 0, and the first injection trench 5 3 4 and the second injection trench 5 3 6 are respectively communicated with the partial opening 5 3 2. Next, please refer to FIG. 5, FIG. 7B and FIG. 7C together, and inject a first liquid organic functional material and a second liquid organic functional material into the first injection groove 5 3 4 and the second injection groove, respectively. Slot 5 3 6. The first liquid organic functional material is automatically flowed to a part of the opening 5 3 2 communicating with the first injection trench 5 3 4 to form a first organic light emitting element layer 5 5 2. The second liquid organic functional material automatically flows to the portion opening 5 3 2 communicating with the second injection trench 5 3 6 to form a second organic light emitting element layer 5 5 4. Finally, referring to FIG. 7D and FIG. 7E together, a third organic light-emitting element layer 5 5 6 is formed by a patterned mask 570, and then a second patterned electrode layer 5 60 is formed. Although the present invention has been disclosed above in a number of preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.
11204twf.ptd 第13頁 200428689 圖式簡單說明 第1 A圖至第1 C圖所繪示為習知有機電激發光元件其有 機發光層選擇成膜之流程剖面示意圖; 第2圖所繪示為另一習知有機電激發光元件之示意 圖 第3圖所繪示為另一習知有機電激發光元件之示意 圖 第4圖所繪示為根據本發明所提出之第一較佳實施例 的有機電激發光元件陣列之示意圖; 第5圖所繪示為根據本發明所提出之第二較佳實施例 的有機電激發光元件陣列之示意圖; 第6 A圖至第6 E圖所繪示為根據本發明所提出之第一較 佳實施例的有機電激發光元件陣列之製造方法沿I - Γ的流 程剖面圖;以及 第7 A圖至第7 E圖所繪示為根據本發明所提出之第二較 佳實施例的有機電激發光元件陣列之製造方法沿Π - Π ’的 流程剖面圖。 【圖式標示說明】 110、2 1 0 \ 3 1 0 :基板 1 1 0 :陽極 1 2 0 :圖案化絕緣層 1 3 0 :陰極隔離層 1 40 :遮罩· 145 :開口 R 1 0、R 2 0 :紅色有機發光層11204twf.ptd Page 13 200428689 Brief description of the diagrams Figures 1A to 1C are schematic cross-sectional schematic diagrams of the process of selecting and forming an organic light-emitting layer for a conventional organic electroluminescent device; FIG. 2 is shown as The schematic diagram of another conventional organic electroluminescent device is shown in FIG. 3. The schematic diagram of another conventional organic electroluminescent device is shown in FIG. 4. The schematic diagram of the first preferred embodiment according to the present invention is shown in FIG. 4. Schematic diagram of an electromechanical excitation light element array; FIG. 5 shows a schematic diagram of an organic electroluminescent light element array according to a second preferred embodiment of the present invention; and FIGS. 6A to 6E show as A cross-sectional view of a method for manufacturing an organic electro-optical light emitting element array according to a first preferred embodiment of the present invention along the flow of I-Γ; and FIGS. 7A to 7E are shown as proposed according to the present invention. The manufacturing method of the organic electroluminescent element array of the second preferred embodiment is a cross-sectional view along the flow of Π-Π '. [Illustration of diagrammatic symbols] 110, 2 1 0 \ 3 1 0: substrate 1 1 0: anode 1 2 0: patterned insulating layer 1 3 0: cathode isolation layer 1 40: mask · 145: opening R 1 0, R 2 0: red organic light emitting layer
11204twf.ptd 第14頁 200428689 圖式簡單說明 G 1 0、G 2 0 :綠色有機發光層 BIO、R20、R30 :藍色有機發光層 2 0 0 :有機電激發光元件 2 2 0 a > 2 2 0 b、220c、220d ··電極層 3 2 0 :藍-綠色變換層 3 3 0 :綠-紅色變換層 4 0 0、5 0 0 ··有機電激發光元件陣列 4 1 0、5 1 0 :基板 420 、520 :第一圖案化電極層 430 、 530 :介電層 440、540 :電極分隔層 4 5 0、5 5 0 :有機發光元件層 4 6 0、5 6 0、:第二圖案化電極層 4 3 2、5 3 2 :開口 4 3 4 :注入溝槽 452、552 :第一有機發光元件層 454、554 :第二有機發光元件層 4 5 6、5 5 6 :第三有機發光元件層 470 、 570 :遮罩 5 3 4 :第一注入溝槽 5 3 6 :第二注入溝槽11204twf.ptd Page 14 200428689 Brief description of the drawings G 1 0, G 2 0: Green organic light-emitting layers BIO, R20, R30: Blue organic light-emitting layer 2 0 0: Organic electro-luminescent element 2 2 0 a > 2 2 0 b, 220c, 220d ·· electrode layer 3 2 0: blue-green conversion layer 3 3 0: green-red conversion layer 4 0 0, 5 0 0 · organic electro-excitation light element array 4 1 0, 5 1 0: substrates 420, 520: first patterned electrode layers 430, 530: dielectric layers 440, 540: electrode separation layers 4 50, 5 5 0: organic light emitting element layers 4 6 0, 5 6 0 ,: second Patterned electrode layer 4 3 2, 5 3 2: Opening 4 3 4: Injection trenches 452, 552: First organic light emitting element layer 454, 554: Second organic light emitting element layer 4 5 6, 5 5 6: Third Organic light emitting element layers 470, 570: mask 5 3 4: first injection trench 5 3 6: second injection trench
11204twf.ptd 第15頁11204twf.ptd Page 15
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