TW200427868A - Electric dischagre surface treating electrode, manufacture and evaluation methods thereof, electric dischagre surface treating device, and electric discharge treating method - Google Patents

Electric dischagre surface treating electrode, manufacture and evaluation methods thereof, electric dischagre surface treating device, and electric discharge treating method Download PDF

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TW200427868A
TW200427868A TW093104220A TW93104220A TW200427868A TW 200427868 A TW200427868 A TW 200427868A TW 093104220 A TW093104220 A TW 093104220A TW 93104220 A TW93104220 A TW 93104220A TW 200427868 A TW200427868 A TW 200427868A
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Taiwan
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electrode
discharge
powder
surface treatment
film
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TW093104220A
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Chinese (zh)
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TWI284682B (en
Inventor
Akihiro Goto
Masao Akiyoshi
Katsuhiro Matsuo
Hiroyuki Ochiai
Mitsutoshi Watanabe
Takashi Furukawa
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Mitsubishi Electric Corp
Ishikawajima Harima Heavy Ind
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Priority claimed from JP2002304730A external-priority patent/JP3847697B2/en
Priority claimed from PCT/JP2004/000848 external-priority patent/WO2004108990A1/en
Application filed by Mitsubishi Electric Corp, Ishikawajima Harima Heavy Ind filed Critical Mitsubishi Electric Corp
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Abstract

An electric discharge surface treating electrode (12) for electric discharge surface treating is formed by using a pressed power of pressed form of the powders from metal, metal compound or ceramic as electrode (12), and electric discharge is generated between the electrode (12) and a work (11), and then based on the discharged energy to deposit electrode material or reactant material from the electrode material by discharge energy on work surface to form a coating film (14), wherein, such electric discharge surface treating electrode(12) is characterized as the followings: powders with an average particle radium of 5 to 10 μm; containing the mixture of ingredients for forming coating(14) film on work(11) and 40 volume% ingredients hard to or not to form carbon compound; forming to have the hardness of B to 8B by pencil scratch test for coating film.

Description

200427868 狄、發明說明 [發明所屬之技術領域] 本發明有關以金屬、金屬化合物或陶瓷之粉末壓縮成 型之壓粉體所成放電表面處理用電極與加工物之間發生脈 衝狀之放電,並藉由該放電能量,而於加工物表面形成由 電極材料或電極材料因放電能量而反應的物質所成被膜的 _放電表面處理中所使用之放電表面處理用電極、及其製造 方法與評價方法。又,亦有關使用該放電表面處理用電極 的放電表面處理裝置及放電表面處理方法。 [先前技術] 為航空飛機用燃氣渦輪引擎(gas turbine engine)之 w ——/ ^ 輪機葉等之表面處理,由於需要將具有高溫環境下的強度 與潤滑性的材料加以塗佈或加厚之故,向來採用焊接或火 焰噴塗(flame spray coating)等方法。藉由焊接或火焰噴塗 等方法,而將含有周知能在高溫環境下氧化而變成氧化 物,並發揮潤滑性的Cr(鉻)或Mo(鉬)作為基材的材料之被 膜,加厚於加工物(以下,稱為工件)上。在此,焊接,係 2藉由工件與焊接條之間的放電而使焊接條之材料熔融附 著於工件上的方法之意,❿火焰f塗,係指將金屬材料作 成熔融的狀態,並按喷霧狀方式噴塗於工件上,以形成被 膜的方法之意。 然而,由於此種焊接或火焰噴塗之任何一種方法均為 依靠人工的作業而需要熟練之故,作業之流程(Une)化上有 困難,而有成本高漲的問題。又,特別是焊接,係由於熱 315550 6 200427868 量集中而灌入工件中的方法之故,當處理厚度較薄的情 形.,或處理如單結晶合金或單向凝固合金 士 =lcatlng all〇y)等之方向控制合金等的易破裂材料 寸谷易發生焊接裂開,而有收率差的問題。 作為解決此種問題的技術,提案有藉由液中放電,將 身為件的孟屬材料表面加以塗層的方法。例 如’在第1種先前技術中揭示有,首先,作為1次加工, 使用含有將形成在卫件的被膜成分的電極材料實施液中放 包後作為2次加工係使用其他鋼電極或石墨等不易消耗 的電極,對工件上所堆積的電極材料實施再熔融放電加工 者(例如,參考專利文獻丨)。如照此文獻,則對本身為工件 的鋼材可製得堅硬且密接度良好的被覆層。然而,對如超 硬合金等的燒結材料表面則難於形成具有堅固的密接力的 被覆層。又,在此方法中,需要形成被膜的丨次加工、及 將被膜加以再熔融放電加工以使密接於工件的2次加工之 方式的2階段之步驟,以致有處理上變成複雜的問題。 在第2種先前技術中揭示有,依此種2階段之加工以 形成被膜的處理中,不改換電極之下僅靠放電電氣條件之 變更即能於金屬表面形成硬質之陶瓷被膜的技術(例如,參 考專利文獻2)。在此第2種先前技術中,係將成為構成電 極的陶瓷粉末’按能成為理論密度之至9之方式, 以1 Ot/cm2之極咼壓力壓縮成型並經煅燒結者作為電極使 用。 在第3種先前技術中,則將形成丁丨(鈦)等之硬質碳化 7 315550 物的材料作為電極,使在鱼 生放雷,一枣身為工件的金屬材料之間發 生欲尾,即可不經過在第 再熔融之、ft π 弟2種先前技術中所需要的 丹/合喊之過矛王,而於今屬主 A A .f 、 、形成堅固的硬質被膜(例如, 芩考專利文獻3)。此乃係利 ,^ ^ ]用因放電所消耗的電極材料盥 加工液中之成分的C(碳)起沒座l^ ^ 者。又,Τ_Ή π μ生成TiC(碳化鈦)的現象 者 又,TiHj^化鈦)等, 雷朽,#命士 ό 精由孟屬之氫化物之壓粉體 笔極,使與本身為工件 金屬材枓之間發生放電,則可形 =使用Tl等金屬材料時為快速且密接性良好的硬質被 ^再者h使用TlH2等之氯化物中混合有其他金屬或陶 竞的壓粉體電㉟,而使與本身為工件的金屬材料之間發生 電則亦可迅速形成具有高硬度、財磨耗性等種種性 的硬質被膜。 、 X ’在第4種先前技術巾,將㈣粉末壓縮成型,並 •藉由預備燒結以製造強度高的壓粉體電極,使用該電極並 癱藉由放電表面處理以形成Tic等之硬質材料之被膜(例 •如’參考專利文獻4)。作為該第4種先前技術之一例,就 製造由經混合wc(碳化鎢)粉末與c〇(鈷)粉末的粉末所成 w 放電表面處理用電極(以下,簡稱電極)的情形加以說明。 /❿6 WC物末與Co粉末並壓縮成型所成壓粉體,可為僅 混合WC粉末與Co粉末並壓縮成型者,惟如摻入臘(〜以) 後加以壓縮成型時即可改善壓粉體之成型性之故而更合 適。但,由於臘係絕緣性物質之故,如大量殘留在電極中 時’則由於電極之電阻會增大之故,放電性會惡化。於是, 需要將臘去除。此種臘,如將壓粉體放入真空爐内加熱, $ 315550 200427868 即可去除。此時,如加熱溫度過低時即不能去除臘、而溫 度過高時則臘即變成碳屑而劣化電極純度之故,需要保持 加熱溫度為能熔融臘的溫度以上且能分解臘而成為碳屑的 溫度以下。其次,使用高頻線圈將真空爐中之壓粉體加熱, 並燒成至賦與能耐機械加工的強度,且不致於過份硬化的 程度,例如粉筆程度之硬度。此種燒成,稱為預備燒結。 此時,碳化物間之接觸部會有互相間之結合,惟因燒結溫 度較低而不會到達本燒結的溫度之故,其結合較弱。如使 用經此種預備燒結所燒成的強度高的電極實施放電表面處 理即可於工件表面形成緻密且均質的被膜。 (專利文獻1) 曰本專利特開平5-148615號公報 (專利文獻2) 曰本專利特開平8-300227號公報 (專利文獻3 ) 曰本專利特開平9-192937號公報 (專利文獻4) 國際公開第99/58744號手冊200427868 D. Description of the invention [Technical field to which the invention belongs] The present invention relates to a pulse-shaped discharge between a discharge surface treatment electrode and a processed object formed by compacting a metal, metal compound, or ceramic powder compacted powder, and borrows From this discharge energy, an electrode for discharge surface treatment used in _discharge surface treatment for forming a film made of an electrode material or a material that reacts with the discharge energy due to discharge energy is formed on the surface of a processed object, and a manufacturing method and an evaluation method thereof. The present invention also relates to a discharge surface treatment apparatus and a discharge surface treatment method using the discharge surface treatment electrode. [Previous technology] For the surface treatment of gas turbine engines for aviation aircrafts w —— / ^ turbine blades and other surface treatments, because of the need to coat or thicken materials with strength and lubricity under high temperature environments For this reason, methods such as welding or flame spray coating have been used. Coatings made of materials known as Cr (chromium) or Mo (molybdenum), which are known to be oxidized under high temperature environments to become oxides, and exhibit lubricity by welding or flame spraying, are thickened for processing. (Hereinafter referred to as a workpiece). Here, welding refers to the method by which the material of the welding rod is fused and adhered to the workpiece by the discharge between the workpiece and the welding rod. The flame f coating refers to the state in which the metal material is melted and pressed. The method of spraying on a workpiece to form a coating. However, since any method of this welding or flame spraying requires manual work and requires proficiency, it is difficult to make the work process (Une), and the cost is high. In addition, especially welding, it is the method of pouring into the workpiece due to the concentration of heat 315550 6 200427868. When dealing with a thin thickness, or processing such as single crystal alloy or unidirectional solidified alloy = lcatlng all〇y ) And other directions control alloys and other fragile materials, such as alloys, are prone to welding cracking, and there is a problem of poor yield. As a technique for solving such a problem, a method of coating a surface of a mongolian material as a piece by discharge in a liquid is proposed. For example, it is disclosed in the first prior art that firstly, as a secondary process, an electrode material containing a coating material component to be formed on a guard is used in a coating solution, and other steel electrodes or graphite are used as a secondary process system. For electrodes that are not easily consumed, those who perform remelting discharge machining on electrode materials deposited on a workpiece (for example, refer to Patent Documents 丨). According to this document, it is possible to obtain a hard coating layer with good adhesion to the steel material itself. However, it is difficult to form a coating layer having a strong adhesive force on the surface of a sintered material such as a cemented carbide. In addition, in this method, a two-step process of a secondary process of forming a film and a secondary process of remelting and discharging the film to make close contact with a workpiece are required, so that the processing becomes complicated. In the second type of prior art, a technique for forming a hard ceramic coating on a metal surface without changing the electrical conditions under the electrode without changing the electrode under the two-stage processing to form a coating (for example, See Patent Document 2). In this second prior art, the ceramic powder which is to be used as an electrode is compression-molded at a pole pressure of 1 Ot / cm2 in such a manner as to achieve a theoretical density of 9 and used as an electrode after being calcined and sintered. In the third prior art, a material that forms a hard carbonized 7 315 550 material such as Ding (titanium) is used as an electrode, so that tailing occurs between the fish and the lightning, and the metal material of the date is a workpiece, that is, It is possible to form a firm hard coating without passing through the Dan / Crossing Spear King, which is required in the previous remelting and ft π brothers of the two previous technologies (for example, Examine Patent Document 3 ). This is for the benefit of ^ ^] using C (carbon) of the components in the electrode material toilet processing fluid consumed by the discharge. In addition, the phenomenon that Τ_Ή π μ generates TiC (titanium carbide), TiHj ^ titanium oxide, etc., Lei Xian, # 命 士 ό refined by the hydride of the genus powder powder pen, so that itself is the workpiece metal If a discharge occurs between the materials, it can be shaped = a hard quilt that is fast and has good adhesion when using metal materials such as Tl ^ Furthermore, the use of TlH2 and other chlorides mixed with other metals or ceramic powder compacts In addition, when electricity is generated between the metal material which is a workpiece and the hard film having various properties such as high hardness and abrasion resistance, it can be quickly formed. , X 'In the fourth kind of prior art towels, the osmium powder is compression-molded, and the sintering is used to produce a high-strength compact powder electrode. This electrode is used to form a hard material such as Tic by discharging the surface treatment. (For example, 'refer to patent document 4). As an example of the fourth prior art, a description will be given of a case of manufacturing a w discharge surface treatment electrode (hereinafter, simply referred to as an electrode) formed by mixing a powder of wc (tungsten carbide) and a powder of co (cobalt). / ❿6 Compressed powder formed by WC powder and Co powder and compression molding. It can be a mixture of WC powder and Co powder and compression molding, but it can be improved when waxing (~) is added to compression molding. It is more suitable because of its moldability. However, if a wax-based insulating substance is left in the electrode in a large amount, the resistance of the electrode will increase, and the discharge performance will deteriorate. Therefore, the wax needs to be removed. This wax can be removed by putting the pressed powder into a vacuum oven and heating it at $ 315550 200427868. At this time, if the heating temperature is too low, the wax cannot be removed, and when the temperature is too high, the wax becomes carbon shavings, which deteriorates the electrode purity. It is necessary to maintain the heating temperature above the temperature that can melt the wax and decompose the wax into carbon The temperature of the chips is below. Second, a high-frequency coil is used to heat the compacted powder in the vacuum furnace and sintered to a degree that imparts resistance to mechanical processing and does not cause excessive hardening, such as chalk. This firing is called preliminary sintering. At this time, the contact portions between the carbides will be combined with each other, but because the sintering temperature is low, the sintering temperature will not be reached, and the bonding is weak. If a high-strength electrode fired by such preliminary sintering is used to perform discharge surface treatment, a dense and homogeneous film can be formed on the surface of the workpiece. (Patent Literature 1) Japanese Patent Laid-Open No. 5-148615 (Patent Literature 2) Japanese Patent Laid-Open No. 8-300227 (Patent Literature 3) Japanese Patent Laid-Open No. 9-192937 (Patent Literature 4) International Publication No. 99/58744

異的問題。又難於形成緻密的膜。 對於此種差異之原因之一,可能仓 示’可藉由使用將壓粉體 成緻欲的硬質被膜。但, 厚膜時,即使依照第4種 仍有電極之特性上呈現大 ,可能係因構成電極的素材 315550 9 200427868 &末粒仫之刀佈不相同所引起。此乃如所製造的各電極 有粉末上的粒徑之分佈之差異,則即使以同一加壓機 (ples^)壓力加壓以成型電極,由於各電極的結硬程度不同 的關係,最後在電極強度上會發生差異之故。X,因上述 之電極特性上所引起的差異之其他原因之—者,可能係因 形成在工件上的被膜材質之改變使所實施的電極材質(成 刀)之k更。此乃如改變電極之材質時,因物性值之差異而 電極強度即與改變前之電極強度產生不同之故。 又’如猎由纟電表面處王里以形成厚料,一般認為來 自—電極侧的材料之供給、及其所供給的材料在工件表面的 溶融及與工件材料的結合之方式對被膜性能最有影響。對 此種電極材料之供給上有影響的一個指標,即為電極之硬 又例女在第4種先别技術中,係將放電表面處理用電 極之硬度,作成能耐機械性加工的強度且不過分硬化的程 度的硬度(例如粉筆程度之硬度)。藉由此種硬度之電極, 即可抑制因放電所引起的電極材料之供給,而所供給的材 料會充分溶融之故,能在玉件表面實現硬㈣隸膜之形 成。 又’作為放電表面處理用電極之硬度指標的粉筆程度 之硬度’係非常含糊者。並且,亦有因此種電極之硬度等 的特性’而工件表面所形成的厚膜上產生差異的問題。如 «電極的粉末之材質或大小改變’則電極之成型條件會 不同。因此’有需要按各種電極之材質多次改變電極之成 型條件以實施被膜之形成試驗’藉以決定作為適合於其材 315550 10 200427868 質之放電表面處理用電極之使用的成型條件的過程的問 題。亦即,按構成電極的材質之種類,需要求出為形成良 好被膜所需電極之成型條件,因而有耗費工夫的問題。其 他’即使使用同樣材質之粉末並依同樣製造方法以製造電 極,由於因季節(溫度或濕度)之不同❿粉末之體積會變化 之故,仍然與上述之材質變化時同樣,需要分別加以實際 加工以形成被膜,並將其電極評價,以致頗費勞力。 *又,此等先前之放電表面處理,係主要著重於硬質被 膜^形成,尤其是接近常溫時的硬f被膜之形成,而現狀 °係以形成硬貝喊化物為主成分的被膜者。在此方法 中’僅能形成IG/zm程度之薄膜,而未能將被膜厚度為數 10 // m以上之厚度。以# ’係多含有容易形成碳化物的材 料之比例,例如,電極中如含有Ti等材料,則因油中的放 電而起化學反應,被膜即成為如Tic(碳化鈦)的硬質碳化 物。隨著表面處理之進展,工件表面之材質即從鋼材(對鋼 材加以處理時)變成本身為陶瓷的Tic,係隨著熱傳導或熔 點等的特性變化之故。 、然而,如依本發明人等之實驗發現,如對電極材質之 成分中添加不會形成碳化物或難以形成碳化物的材料後, 則可增厚被膜之現象。此乃由於對電極添加不會碳化或難 2碳化的材料,則不會成為碳化物而保持金屬狀態的材料 會增加所致者。並且發現,此種電極材料之選定,對被膜 7增加厚度上具有重要意義。於此同時,所形成被膜具有 硬度、緻密性及均一性。但,以往之放電表面處理,如上 315550 11 200427868 所述,係主要著曹於Τι· r > 、Tic或wc(碳化鎢)等接近常溫時能發 =質性的被膜之形成者,而關於如航空飛機用燃氣满輪 引擎之渦輪機葉等的用途等在高溫環境下具有潤滑性之緻 在且較厚被膜(10Mm層級以上之厚膜)之形成,則並未加 以者重二而有不能形成如此厚度的被膜的問題。 方面在第2之S前技術中,使用將成為構成電 極的材料的陶磁粉末按能成為理論密度之50%至90%之方 式’以如10t/cm2般之極高堡力壓縮成型並經锻燒結的電 極。此乃仙⑴以形成薄的硬質被膜為目的之故,電極堅 硬則可使形成的被臈愈強、⑺由於材f之主成分為陶α 故’可提兩將構成電極的陶究粉末壓縮成型時之廢力,等 理^。但,如欲藉由放電表面處理以形成緻密的金屬之厚 膜%貝!不月b使用依帛2之先前技術所示方法所製造之電 極。此乃因如將金屬粉末按第2先前技術所示以;編2 般的高壓力刚’則電極結硬,以致不能藉由放電表面 處理而形成被膜,如使用此種電極以實施放電表面處理, 則成為切削工件表面的彫型放電加工之故。亦即,由於在 第2之先前技術中使用陶究粉末之故,如以上述般的高舞 △ 力加壓以製造放電表面處理用電極時並不會有問題,惟不 能將其條件直接適用於由金屬粉末所成放電表面處理用電 極上,對私用放電表面處理以形成緻密的金屬之厚膜用之 放電表面處理用電極之製造方法,則至今尚無人開發。 本發明係鑑於上述情形所開發者,以製得能藉由放電 表面處理方法,於加工物上容易地形成緻密的厚^的放電 315550 12 表面處理用電極為目的。 又,以製得在放雷本二$ ± ^ ^面處理時能在高温環境下形成具 有潤滑性的厚被膜的放電 、让 电表面處理用電極為目的。並且, 以獲得可正確評價其放雷 _ . 表面處理用電極能否使用為被膜 形成的放電表面處理用電 < ϋ干饧方法為目的。 再者,以製得將金屬4八 主. 焉&末作為壓粉體電極使用的放電 表面處理時,不致降低 ^ ^ •面杻“度之下能實施安定的放電以 堆積厚被膜的放電表面處 包π囬/处理用電極為目的。 再者’又以獲得使用itl· ^ i-r-.. 等放電表面處理用電極的放電 表面處理裝置、及其方法為目的。 [發明内容] 為達成上述目的’有關本發明之放電表面處理用電 係以金屬、金屬化合物或陶瓷粉末壓縮成型的壓粉體 作為電極’在加工液中或裔 戍體中,使前述電極與加工物之 間發生放電,藉由JL放雷鉍旦 ’、 匕里,而於前述加工物表面形成 由電極材料或電極材料因放 ㈣敌電月匕置而反應的物質所成被膜 /為放電表面處理的放電表面處理用電極,其特徵為: 別述粉末’具有…〇”之平均粒徑之同時,含 7加工物上形成被膜的成分,與4G體積%以上之不會 碳化物或難以形成碳化物的成 θ J风刀的此合物,並經成型為依 2用錯筆刮痕試驗的硬度能成為U8B範圍之硬度之 、其次,有關本發明之放電表面處理用電極,係以金屬 或金屬化合物之粉末壓縮成型的壓粉體作為電極,在加工 315550 13 200427868 液中或氣體中,使前述電極與加工物之間發生放電,藉由 其放電能量,而於前述加工物表面形成由電極材料或電極 材料口放免肊里而反應的物質所成被膜之用為放電表面處 理的放電表面處理用雷 、 電極’其特徵為:前述電極之壓縮強 度’為16〇MPa以下者。 、/、人有關本發明之放電表面處理用電極,係以本身 為至屬或至屬化口物之粉末的電極材料壓縮成型之壓粉體 乍為電和在加工液中或氣體中,使前述電極與加工物之 間t生放電’藉由其放電能量,而於前述加工物表面形成 由前述電極材料或前述電極材料因放電能量而反應的物質 所成被膜之用為放電表面處理的放電表面處理用電極,苴 特徵為:前述電極材料對前述電極之體積所佔的體積比” 例,為25%至65%。 、/、人有關本發明之放電表面處理用電極,係以金屬 或金屬化合物之粉末壓縮成型的壓粉體作為電極,在加工 液中或氣體中,使前述電極與加工物之間發生放電,藉由 其放電能量,而於前述加工物表面形成由電極材料或電極 材料口放電此里而反應的物質所成被膜之用為放電表面處 理的放電表面處理用電極,其特徵為:熱傳導率為胸 以下。 又,為達成上述目的起見,有關本發明之放電表面處 _電極之製造方法之特徵為··包含以金屬、金屬化合物 、或陶究之粉末粉碎的第1步驟、及為將經粉碎的前述粉末 綾聚所成塊分解為極間距離以下之大小而過篩的第2步 315550 14 200427868 再者,為達成上述目的起見,有關本發明之 處理用電極之製造方法,係以金屬、金屬化合物或陶^面 縮成型的壓粉體作為電極,在加工液中或氣體中之 使:述電極與加卫物之間發生放電,藉由其放電能量,’ 於珂述加工物表面形成由電極材料或電極材料因放: :反應的物質所成被膜的放電表面處理方法,其特徵:* 河述粉末,具彳5至1〇/im之平均粒徑之同時 :· 刖,加工物上形成被膜的成分、與40體積%以上之不二^ 成奴化物或難以形成碳化物的成分的混合物並使用贫: ==刮痕試驗的硬度能成為…範圍之方式所: ^的電極,以形成前述被膜。 入其次,有關本發明之放電表面處理方法,係以金屬或 金屬化合物之粉末壓縮成型的壓粉體作為電極, 5 | ★ ^ 产 刀口 或乳體中,使前述電極與加工物之間發生放電, 访雷Ab旦 精由其 、、此里,而於前述加工物表面形成由電極材料或電極材 料因放電能量而反應的物質所成被膜的放電表面處理方 法,其特徵為:使用具有16〇MPa以下之壓縮強度的電極, 以形成前述被膜。 其次’有關本發明之放電表面處理方法,係以本身為 至屬或i屬化合物之粉末的電極材料壓縮成型的壓粉體作 為電極,在加工液中或氣體中,使前述電極與加工液之間 發生放電,藉由其放電能量,而於前述加工物表面形成由 315550 15 二電桎材料或刖述電極材料因放電能量而反應的物質所 ::的放電表面處理方法,其特徵為:㈣ :述電極之體積所佔的體積比例為25至65抑 形成前述被膜。 全屬:二:有關本發明之放電表面處理方法,係、以金屬或 由“勿之粉末㈣成型的壓粉體作為電極,在加工液 ’:體中,使珂述電極與加工物之間發生脈衝狀之放 *志:由、放屯此夏’而於前述加工物表面形成由電極材 ;、、「極材料因放電能量而反應的物質所成被膜的放電表 方法其特彳政為:使用熱傳導率為i 〇 W/mK以下之 電極’以形成前述被膜。 4成上述目的起見,有關本發明之放電表面處理 :置’係在加工液中或氣體中配置有以金屬、金屬化合物 或陶竟之粉末廢縮成型的壓粉體所成電極、及將形成被膜 的加工物’而藉由與前述電極及前述加工物按電氣性連接 勺電、尿衣置,而使刖述電極與前述加工物之間發生脈衝狀 之放電’並藉由其放電能量’而於前述加工物表面形成由 電極材料或電極材料因含雷Ab旦 ^ 卄口放電此x而反應的物質所成被膜的 放電表面處理農置,其特徵為:前述電極,係將含有用於 加工物上形成被膜的成分、與40體積%以上之不會形成碳 化物或難以形成碳化物的成分的混合物的平均粒徑5至 以m之粉末,成型為依塗膜用鉛筆刮痕試驗的硬度能成為 B至8B範圍之硬度之方式。 其次’有關本發明之放電表面處理褒置’係在加工液 315550 16 200427868 :或α +配置有以金屬或金屬化合物之粉末壓縮成型的 Μ粉體所成電極、及將开彡士、扯 料成㈣的加n藉由與前述 二+ 物按電氣性連接的電源裳置而使前述電極 f :物之間發生脈衝狀之放電,並藉由其放電能 加工物表面形成由電極材料或電極材料因放 電此里:反應的物質所成被膜的放電表面處理裝置,其特 u為·别述電極,具有16GMPa以下之壓縮強度。 =有關本發明之放電表面處理裝置,係在加工液 詩驴所士 * 离义至屬化合物之粉末壓縮成型的 ::及%L 及將形成被膜的加工物,而藉由與前述 ::::述加工物按電氣性連接的電源裝置,而使前述電 工物之間發生脈衝狀之放電,並藉由其放電能 電一二ΐ加工物表面形成由電極材料或電極材料因放 ::里=的物質所成被膜的放電表面處理裝置,其特 :二=極,係作成對該電極之體積所伯前述電極材 料之脰積比例,為25至65% 〇 其乂 ’有關本發明之妨雷本=士 中或氣體中配置有以農置’係在加工液 、,屬次主屬化合物之粉末壓縮成型的 土如體所成電極、及將形成 電極及一+、 办烕被膜的加工物,而藉由與前述 :前= 按電氣性連接的電源裝置而使前述電極 Γ::::之間發生脈衝狀之放電,並藉由其放電能 電r旦而=加工物表面形成由電極材料或電極材料因放 =里…的物質所成被膜的放電表面處 W述電極,具有卿mK以下之熱傳導率。 315550 17 200427868 又,為達成上述目的起成,有關本發明之放電表面處 理用電極之評價方法,係以金屬或金屬化合物之粉末壓縮 成型的壓粉體作為電極,在加工液中或氣體中,使前述電 極與加工物之間發生放電,藉由其放電能量,而於前述加 工物表面形成由電極材料或電極材料因放電能量而反應的 物質所成被膜之用為放電表面處理用之放電表面處理電極 之評價方法,其特徵為:對前述電極徐徐加壓既定負荷, 根據前述電極表面即將產生龜裂時之壓縮強度,以評價能 否將既疋之被膜形成於前述被加工物表面之電極。 [實施方式] 以下,簽考所附圖示,就有關本發明之放電表面處理 用電極、放電表面處理用電極之製造方法與評價方法、放 電表面處理裝置以及放電表面處理之合適的實施形態,加 以詳細說明。 實施形態1 首先,就本發明所用之放電表面處理與其裝置之概 要加以ΰ兒明。第1圖,係表示在放電表面處理用裝置中 的放電表面處理之概略圖。放電表面處理裝置丨係具備: 欲形成被膜14的加工物(以下,簡稱工件)u、及為於工件 11表面形成被膜14之用的放電表面處理用電極12、以及 經按電氣性連接於工件Η及放電表面處理用電極12,而 為使兩者間發生電弧(arc)放電而對兩者供給電壓的放電 表面處理用電源13所構成。如在液中實施放電表面處理 時,按工件1 1及放電表面處理用電極丨2之與工件11相對 315550 18 200427868 向的部分能以油等之加工;夜 Μ ^ 尸^衣/雨之方式,再設置加工 曰。,如在氣體中實施放電表面處理時, 之;:以下之說”,將例示加工液中實施放電表面處理 <r月升/。又,在下述中,有日卑 電極。再者,在下、十、由τ將放電表面處理用電極簡稱 u相對Λ 放電表面處理用電極12與工件 相:向的面之間的距離,稱為極間距離。 就:匕種構成之放電表面處理裝置i中的放電表面處理 / 兄明M列如,以欲形成被膜14的工件u作為 陽極’以成型有成為被膜14之供給源的金 平 均粒徑10nm至數以m之扒士 mi 』文寺之干 〃之如末的放電表面處理用t極12作 :…將此等電極藉由未圖示的控制機構在加工液Η 中按兩者不致於接觸之方式控制極間距離之下,使兩者門 in 使兩者間 如在放電表面處理用電極12與工件u之間發生放 電,則由於此種放電之熱而工件u及電極12之一 炼融。在此…極12之粒子間結合力弱時1因放電所 引起的爆風或靜電力而所熔融的電極12之一部分(以下, 簡稱電極粒子)21,即從電極12疏遠,而朝向工件 私動:、、、後1極粒+ 21到達工件11表面,則再行凝J, 並成為被膜14。又,疏遠的電極粒子21之—部分在加工 液15中或氣體中之成分 风刀22起反應者23,亦將在工件u 表面形成被膜14。如此方式,即在工件u表面形成被膜 14仁如電極12之粉末間之結合力強時,則僅靠因放電 315550 19 200427868 =爆風或靜電力尚不能剝取電極12,以致不能供給電極材 料於工件11。亦即,能否依放電表面處理形成厚膜之形 成’係受來自電極12側的材料供給與其所供給材料在工件 表面的烙岫及與工件n材料的結合方式之影響。在此, 會對此電極材料之供給上有影響者,即為電極12之結硬程 度,亦即硬度。 ,广此’就用為放電表面處理的放電表面處理用電極 =製造方法之一例’加以說明。第2圖,係表示放電表面 炎理用電極之製造過程的流程圖。首先,將具有欲於工件 上形成被膜之成分的金屬或陶_亮等的粉末,加以粉 碎陳υ。如由複數種成分所成時,則按能成為所希望 比例之方式將各種成分之粉末混合並加以粉碎。例如,使 用球磨(Ban mill)裝置等粉碎機,將市面上流通的平均粒徑 文十# m之金屬或陶瓷等球形粉末加以粉碎為平均粒徑3 =:。粉碎可在液體中實施’惟此時,則蒸發液體以 以粉末(步驟S2)。由於乾燥後之粉末,係粉末與粉末互 相凝聚而形成大塊之故’為將此大塊解碎之同時,為能使 下過程所使用的臘與粉末充分混合起見,加以過筛(步驟 b 3 )。例如,於殘留有經凝螯 入 頁、、二嘁♦的粉末之師網上放置陶瓷球或 孟屬球,並加以振動時’則經凝聚所成塊即因振動之能量 ,與球之踫衝而解散’並通過網筛。通過網篩的粉末,始 能使用於下述步驟中。 在此,就經步驟3所粉碎的粉末過篩的工作,加以說 明。放電表面處理中’為使發生放電而施加於放電表面處 315550 20 200427868 理用電極1 2盘工株11 ^ ΛΑ ^ Γ-Different question. It is also difficult to form a dense film. For one of the reasons for this difference, it may be indicated that the pressed powder can be made into a hard film which is desired by use. However, when the film is thick, the characteristics of the electrode are still large even in accordance with the fourth type, which may be caused by the difference in the material of the electrode 315550 9 200427868 & This is the difference in the particle size distribution of the powders produced by each electrode. Even if the electrodes are formed by pressing with the same press (ples ^) pressure, due to the relationship between the hardness of each electrode, the final There may be differences in electrode strength. X, among other reasons due to the differences in the electrode characteristics mentioned above, may be due to the change in the material of the film formed on the workpiece to make k of the electrode material (knife) implemented. This is because when the material of the electrode is changed, the strength of the electrode is different from the strength of the electrode before the change due to the difference in physical properties. Also, if you hunt thickly on the surface of the electric power to form a thick material, it is generally believed that the supply of material from the electrode side and the melting of the supplied material on the surface of the workpiece and the combination with the material of the workpiece have the best performance on the coating. influential. An indicator that has an influence on the supply of this electrode material is the hardness of the electrode. In the fourth advanced technology, the hardness of the electrode for discharge surface treatment is made into a strength that can withstand mechanical processing and is not too strong. The degree of hardness (for example, the degree of chalk). With such a hardness electrode, the supply of electrode material caused by the discharge can be suppressed, and the supplied material will be fully melted, so that a hard film can be formed on the surface of the jade. Also, "the hardness of the degree of chalk as an index of the hardness of the electrode for discharge surface treatment" is very vague. In addition, there is a problem that a difference is caused in a thick film formed on the surface of the workpiece due to the characteristics of the hardness and the like of the electrode. If «the material or size of the powder of the electrode is changed ', the molding conditions of the electrode will be different. Therefore, 'there is a need to change the electrode forming conditions multiple times according to the material of various electrodes to perform a film formation test' to determine the process that is suitable for the forming conditions of the electrode used for the discharge surface treatment of 315550 10 200427868 quality. That is, depending on the kind of material constituting the electrode, the molding conditions of the electrode required to form a good coating film are required, and therefore there is a problem that it takes time. Others "Even if the same material powder is used and the electrode is manufactured according to the same manufacturing method, the volume of the powder will change due to different seasons (temperature or humidity). It is still the same as the above material change, and it needs to be processed separately. In order to form a film and evaluate the electrodes, it was laborious. * Also, these previous discharge surface treatments mainly focused on the formation of hard coatings, especially the formation of hard f coatings near normal temperature, and the current situation is those who form hard coatings as the main component. In this method, ′ can only form a thin film of about IG / zm, and the thickness of the coating film cannot be more than 10 // m. The # ′ ratio is a proportion that contains more materials that are likely to form carbides. For example, if materials such as Ti are contained in electrodes, chemical reactions occur due to the discharge of electricity in the oil, and the coating becomes a hard carbide such as Tic (titanium carbide). With the progress of surface treatment, the material of the surface of the workpiece changes from steel (when the steel is treated) to Tic which is ceramic itself, which changes with the characteristics of heat conduction or melting point. However, according to experiments by the inventors, if a material that does not form carbides or is difficult to form carbides is added to the components of the electrode material, the phenomenon of thickening the film can be achieved. This is because the addition of a material that does not carbonize or is difficult to carbonize to the electrode will increase the number of materials that do not become carbides and remain metallic. It was also found that the selection of such electrode materials is of great significance for increasing the thickness of the coating 7. At the same time, the formed film has hardness, compactness and uniformity. However, the previous discharge surface treatment, as described in 315550 11 200427868 above, is mainly about the formation of coatings that can be produced at near normal temperature, such as Tr · r >, Tic or wc (tungsten carbide), etc., and about For example, the use of turbine blades of gas-filled full-engine engines for aviation and aircraft, etc., which are lubricating under high temperature environments and have a thick film (thick film with a thickness of 10Mm or higher), has not been emphasized. A problem that a film of such a thickness cannot be formed. In the second pre-S technology, the ceramic magnetic powder that will be the material constituting the electrode is compressed and formed in a high fortress force such as 10t / cm2 in such a way that it can become 50% to 90% of the theoretical density. Sintered electrodes. This is why Xianxian aims to form a thin, hard coating. The hardness of the electrode can make the formed quilt stronger. Because the main component of the material f is ceramic α, two ceramic powders that make up the electrode can be compressed. Waste force during molding, etc. ^. However, if you want to form a dense metal thick film by discharge surface treatment! The electrode manufactured by the method shown in the prior art of 帛 2 is used. This is because the metal powder is as shown in the second prior art; the high pressure pressure of 2 is used to make the electrode hard, so that the coating cannot be formed by the discharge surface treatment. If such an electrode is used to perform the discharge surface treatment, , It becomes the reason for the engraved electrical discharge machining of the cutting workpiece surface. That is, since ceramic powder is used in the second prior art, there is no problem when manufacturing the electrode for discharge surface treatment by pressing with high △ force as described above, but the conditions cannot be directly applied. No one has developed a method for manufacturing a discharge surface treatment electrode for a discharge surface treatment electrode made of metal powder to treat a private discharge surface to form a dense metal thick film. The present invention has been developed by the developer in view of the above-mentioned circumstances, and has as an object to produce a dense and thick discharge 315550 12 surface treatment electrode which can be easily formed on a processed object by a discharge surface treatment method. In addition, the purpose is to produce an electrode for surface treatment that can form a thick, lubricating film with high lubricity under a high temperature environment during surface treatment. And, in order to obtain a correct evaluation of the lightning discharge, it is possible to use the surface treatment electrode for the discharge surface treatment of the coating film formation < dry method. In addition, in order to obtain a metal surface, the metal powder can be used as a powder electrode for the discharge surface treatment, which will not decrease ^ ^ • stable discharge can be implemented below the surface "degree to deposit thick film discharge The surface is provided with a π return / treatment electrode for the purpose. Furthermore, the purpose is to obtain a discharge surface treatment device using itl · ^ ir- .. and other discharge surface treatment electrodes, and a method thereof. [Summary of the Invention] To achieve The above-mentioned object "the electrical system for the discharge surface treatment of the present invention uses a metal powder, a metal compound, or a ceramic powder as a compact" as an electrode, to cause a discharge to occur between the electrode and the processed object in a processing fluid or a substrate. With JL, the bismuth dendrite is used to form a coating on the surface of the aforementioned processed material, which is formed by the electrode material or the material that the electrode material reacts to due to the discharge of the enemy ’s electricity / discharge surface treatment. The electrode is characterized in that the powder has an average particle diameter of "0", and also contains a component that forms a film on the processed product, and does not carbide or is difficult to form with 4G vol% or more. This compound is formed by the θ J air knife, and is formed into a hardness in the U8B range according to the scratch test using two wrong pens. Secondly, the electrode for discharge surface treatment of the present invention is made of metal or A metal powder compacted powder compact is used as an electrode. During the processing of 315550 13 200427868 in liquid or gas, a discharge occurs between the electrode and the processed object, and an electrode is formed on the surface of the processed object by the discharge energy. The electrode or electrode is characterized in that the compressive strength of the aforementioned electrode is not more than 160 MPa. The electrode for discharge surface treatment of the present invention is a compacted powder compacted with electrode material which is a powder of a material belonging to or belongs to a chemical industry, and is used in a processing fluid or a gas, so that A discharge is generated between the electrode and the processed object through its discharge energy, and a film formed by the electrode material or a substance that the electrode material reacts with due to the discharge energy is formed on the surface of the processed object and is used as a discharge surface treatment discharge. The surface treatment electrode is characterized in that the volume ratio of the foregoing electrode material to the volume of the foregoing electrode is 25% to 65%. For example, the electrode for discharge surface treatment according to the present invention is a metal or A compacted powder compact of powder of a metal compound is used as an electrode, and a discharge occurs between the foregoing electrode and the processed object in a processing fluid or a gas, and an electrode material or electrode is formed on the surface of the processed object by the discharge energy. The electrode formed on the material port and reacted with the film formed therein is used as a discharge surface treatment electrode for discharge surface treatment, which is characterized in that the thermal conductivity is below the chest. In order to achieve the above-mentioned object, the method for manufacturing the discharge surface electrode according to the present invention is characterized by including a first step of pulverizing a metal, a metal compound, or a refined powder, and a method for pulverizing the pulverized powder as described above. The second step of sieving the powder aggregate into pieces below the distance between the electrodes 315550 14 200427868 Furthermore, in order to achieve the above purpose, the manufacturing method of the processing electrode of the present invention is metal, metal Compounds or ceramic compacted powders are used as electrodes in the processing fluid or gas to cause a discharge between the electrode and the guard, and the discharge energy is used to form the surface of the processed product. Electrode material or electrode material due to discharge :: The surface treatment method of the discharge film formed by the reacting substance, characterized by: * Heshu powder, with an average particle size of 彳 5 to 10 / im while: · 刖, on the processed product The composition of the film-forming component and a mixture of 40% by volume or more ^ a compound that is a slave compound or a component that is difficult to form a carbide, and is used lean: == the hardness of the scratch test can be in the range of: ^ electrode In order to form the aforementioned film, the second aspect is the discharge surface treatment method of the present invention, which uses a metal or metal compound powder compacted compact as the electrode, 5 | ★ ^ produced in the knife edge or milk body, the aforementioned electrode and processing Discharge occurs between objects, and the method of surface treatment of discharge is to form a film made of electrode material or a substance that reacts with the discharge energy of the electrode material on the surface of the aforementioned processed object. : Use an electrode with a compressive strength of 16 MPa or less to form the aforementioned film. Secondly, the "discharge surface treatment method of the present invention is a compacted powder body formed by compressing an electrode material that is a powder of a compound of type i or a compound of i type". As an electrode, a discharge occurs between the electrode and the processing fluid in a processing fluid or a gas, and the discharge energy is used to form a surface of the processed object with a discharge energy of 315550 15 or an electrode material. The reacting substance :: discharge surface treatment method is characterized by: ㈣: the volume ratio of the electrode volume is 25 to 65 Forming the film. All belong to: Two: The discharge surface treatment method of the present invention is based on metal or pressed powder body formed by "Do not powder powder" as the electrode, in the processing fluid ': body, between the Kos electrode and the processed object A pulse-like discharge will occur: the electrode material is formed on the surface of the aforementioned processed object by putting on this summer; "the discharge meter method of a film formed by a material that reacts with the discharge energy of the electrode material is characterized by: : The electrode with a thermal conductivity of i 0 W / mK or less is used to form the aforementioned film. 40% of the purpose of the present invention is related to the electrical discharge surface treatment of the present invention: the electrode is disposed in a processing fluid or a gas with a metal or metal Compounds or electrodes made of ceramic powders are formed by compaction of compacted powders, and processed products that will form coatings are described by electrically connecting the electrodes and the processed objects with a spoon or a diaper. A pulse-like discharge occurs between the electrode and the processed object, and the surface of the processed object is formed by the discharge energy of the electrode material or a substance that reacts due to the discharge of this x by the lightning-containing Ab densities at the mouth. Enveloped The discharge surface treatment farm is characterized in that the electrode is an average particle diameter of a mixture containing a component for forming a film on a processed product and a component of 40% by volume or more that does not form carbides or is difficult to form carbides. The powder of 5 to m is molded into a hardness in the range of B to 8B according to the pencil scratch test of the coating film. Secondly, the "discharge surface treatment device of the present invention" is in the processing fluid 315550 16 200427868: Or α + is equipped with an electrode made of M powder compressed and formed by powder of metal or metal compound, and plus n that will open the driver and pull the material through a power source that is electrically connected to the foregoing two + objects. In order to cause a pulse-shaped discharge between the electrodes f and the objects, the surface of the object can be processed by the discharge to form an electrode material or an electrode material due to the discharge. Here: a discharge surface treatment device of a film formed by the reacting material, which has special characteristics u is a special electrode, which has a compressive strength of 16 GMPa or less. = The discharge surface treatment device of the present invention is based on the processing fluid of the Shizizi *. :: and% L and the processed object that will form a film, and by the power supply device electrically connected to the aforementioned :::: said processed object, a pulse-shaped discharge occurs between the aforementioned electrical objects, and by this The discharge energy is one or two. The surface of the processed object forms a discharge surface treatment device formed by the electrode material or the electrode material due to the discharge of the material :: = = pole, which is made of the volume of the electrode. The volume ratio of the electrode material is 25 to 65%. 乂 It is related to the present invention. Ranben = Shizhong or the gas is equipped with a farming system in the processing fluid, and the powder is a secondary main compound. The electrode formed by the earth, and the processed product that will form the electrode and a +, act as a film, and the aforementioned electrode Γ :::: occurs between the aforementioned electrodes: front = electrically connected power supply device. A pulse-shaped discharge, and its discharge energy is used to form a surface of the processed object. The electrode at the discharge surface of the film formed by the electrode material or the electrode material is placed inside the substrate. The electrode has a heat conduction below mK. rate. 315550 17 200427868 In order to achieve the above-mentioned object, the method for evaluating the electrode for discharge surface treatment of the present invention uses a compacted powder compacted from a metal or a metal compound powder as an electrode in a processing fluid or a gas. A discharge is generated between the electrode and the processed object, and the discharge energy is used to form a film on the surface of the processed object made of an electrode material or a substance that reacts with the discharge energy due to the discharge energy. The discharge surface is used as a discharge surface treatment. An evaluation method of a processing electrode is characterized in that the electrode is slowly pressurized with a predetermined load, and based on the compressive strength of the electrode surface when cracks are about to occur, it is possible to evaluate whether the existing film can be formed on the surface of the object to be processed. . [Embodiment] In the following, the attached drawings are applied to the appropriate embodiments of the discharge surface treatment electrode, the manufacturing method and evaluation method of the discharge surface treatment electrode, the discharge surface treatment device, and the discharge surface treatment of the present invention. Explain in detail. Embodiment 1 First, the outline of the discharge surface treatment and the device used in the present invention will be described. Fig. 1 is a schematic diagram showing a discharge surface treatment in a discharge surface treatment apparatus. The discharge surface treatment apparatus 丨 includes: a workpiece (hereinafter, simply referred to as a workpiece) u to form a coating film 14; a discharge surface treatment electrode 12 for forming a coating film 14 on the surface of the workpiece 11; and an electrical connection to the workpiece The electrode 12 and the discharge surface treatment electrode 12 are constituted by a discharge surface treatment power source 13 that supplies a voltage to both to cause an arc discharge between them. For example, when the discharge surface treatment is performed in liquid, the part facing the workpiece 11 according to the workpiece 11 and the electrode for discharge surface treatment 315550 18 200427868 can be processed by oil, etc .; the method of night M ^ corpse ^ clothing / rain , And then set processing. For example, when the discharge surface treatment is performed in a gas, the following will be described: "The discharge surface treatment in the processing fluid will be exemplified < r month rise /. Also, in the following, there is a Ribe electrode. Furthermore, in the following 10. The discharge surface treatment electrode is referred to as τ relative to τ. The distance between the discharge surface treatment electrode 12 and the workpiece phase: the distance between the electrodes is called the inter-electrode distance. The discharge surface treatment device i Discharge surface treatment / Brother Ming M. For example, take the workpiece u to form the film 14 as the anode ', and shape the average particle diameter of gold to be the supply source of the film 14 from 10nm to several meters. The dry discharge surface treatment is done with t-pole 12: ... these electrodes are controlled by a control mechanism (not shown) in the processing fluid Η to control the distance between the poles so that the two The gate in causes a discharge between the discharge surface treatment electrode 12 and the workpiece u to melt one of the workpiece u and the electrode 12 due to the heat of the discharge. Here, the particles of the electrode 12 are bonded together. When the force is weak 1 due to explosive wind or electrostatic force caused by discharge A part of the fused electrode 12 (hereinafter referred to as electrode particles) 21, that is, estranged from the electrode 12 and moved privately toward the workpiece: ,,,, and 1 pole particle + 21 reaches the surface of the workpiece 11 and then coagulates J and becomes a coating 14. In addition, the distant electrode particles 21-part of the components in the processing fluid 15 or gas reacting with the wind knife 22 will also form a film 14 on the surface of the workpiece u. In this way, a film is formed on the surface of the workpiece u When the binding force between the powders of the electrode 12 and the electrode 12 is strong, the electrode 12 cannot be peeled off only by the discharge 315550 19 200427868 = explosive wind or electrostatic force, so that the electrode material cannot be supplied to the workpiece 11. The formation of a thick film by surface treatment is affected by the material supply from the electrode 12 side, the soldering of the supplied material on the workpiece surface, and the combination with the material of the workpiece n. Here, the supply of this electrode material will have The influencer is the degree of hardening of the electrode 12, that is, the hardness. This is explained by 'using an electrode for discharge surface treatment for discharge surface treatment = an example of a manufacturing method'. Figure 2 shows a discharge meter. Flow chart of the manufacturing process of the electrode for facial inflammation. First, crush the powder of metal or ceramics with components to form a coating on the workpiece. If it is made of multiple components, press Powders of various ingredients can be mixed and pulverized in a desired proportion. For example, using a pulverizer such as a ball mill, a spherical powder such as a metal or ceramic with an average particle size of 10 m in the market can be added. Crushing to an average particle size of 3 = :. Crushing can be performed in a liquid 'but at this time, the liquid is evaporated to powder (step S2). Because the dried powder, the powder and the powder are agglomerated to form a large block' In order to disintegrate this large piece, and to thoroughly mix the wax and powder used in the next process, it is sieved (step b 3). For example, when a ceramic ball or a mongolian ball is placed on the net of the powder that has been condensed into the page, and the powder is vibrated, the block formed by the condensation is the energy of the vibration, and it is the same as the ball. Immediately dissolve 'and pass through a mesh screen. The sieved powder can be used in the following steps. Here, the sieving operation of the powder crushed in step 3 will be described. Discharge surface treatment 'is applied to the discharge surface to generate a discharge 315550 20 200427868 Physical electrode 1 2 plate factory 11 ^ ΛΑ ^ Γ-

一 ” 之間的電壓,通常係在80V至400V 之範圍。如將此範圍之電壓施加於電極12與工件u之間, 則放電表面處理中之電極12與工件u之間的距離將^為 私度士口上述’放電表面處理中,可能因兩極間所 產生的電弧放電’而構成電極12的經凝聚所成塊,亦有照 原樣大小從電極12脫離的情形。在此,如成塊之大小在極 間距離以下(0.3mm以下)時’則即使在極間存在有成塊 時,仍可使下一個放電發生。又,由於放電係在距離近之 處發生之故’存在有成塊之處發生放電以致可能因放電 之熱能量或爆發力而可將其成塊細碎。 仁如構成電極12的成塊之大小在極間距離以上 (0·3_以上)時’則因放電而其成塊照原樣大小從電極12 離脫,以致堆積於卫件u上,或漂游在電極12與工件η 間之加工液15所充滿的極間。如前者之方式大塊堆積時, 則由於放電係於電極工件u之距離最近之處發生之故,在 此部分集中放電而不會在其他處所發生放電,以致不能將 被膜均句堆積於工件"表面。又,此種大塊,由於過 大之故,放電之熱不能完全炼㉟。因4匕所形成的被膜μ 非常脆弱,可以手指所剝削之程度。又,如後者之方式, 大塊漂游在極間時,則引起電極12與工件u間之短路, 以致不月b 1生放電。換言之,如欲獲得均勻形成被膜丄* 且安定的放电B守,則構成電極的粉末中不可存在有因粉末 凝聚所形成之較極間距離以上為大的成塊。此種粉末之凝 聚容易發生在金屬粉末或導電性陶竟之情形,而非導電性 315550 21 200427868 之情形則不容易發生。又, 右末之平均粒徑愈小,粉末之 凝聚愈容易發生。因此,Λ 為防止因此種粉末之凝聚所生成 之成塊所引起的放電表而步Τ田山 取 处 中之缺點起見,需要有將步 驟S3中所凝聚的粉末加 有將/ 以過師的步驟。從以上之結論可 知,如實施過篩時,則需要 μ 而要使用較極間距離為小的尺寸之 篩目。 其後,如欲改善在之你取+ 後步騄中之加壓時對粉末内部的 加壓壓力傳遞時,視需 十私末才乡入石臘(paraffin)等臘 按重量比1%至10%程度(牛 又(v驟S4)。如將粉末與臘混合時, 雖然可改善成型性,惟由 田方、叔末周圍再度為液體所包覆之 故’因其分子間力或靜電力之作用而凝聚,以致形成大塊。 於是’再度為了將所凝聚的成塊解散起見,加以過篩(步驟 S5)。在此之過篩之方法係與上述的步驟s3的方法相同。 接著,將所得粉末使用壓縮加壓成型(步驟S6)。第3 圖,係依模式性表示將粉末成型時之成型器之狀態的剖面 圖。將下衝床1〇4從形成在金屬模具(仏,鎮)1〇5的孔下 部插入’並對此等下衝床1G4與金屬模具(鎮)1()5_所形成的 空間十填充經上述步驟S5所過筛的粉末(由複數種成分所 成時,則為粉末之混合物)101。然後,將上衝床1〇3從形 成在孟屬k具(鍈)i 〇5的孔上部插入。然後,使用加麼器等 從填充有此種粉末101的成型器之上衝床1〇3及下衝床 1〇4之兩側施加壓力,並將粉末1〇1壓縮成型。以下,將 經壓縮成型的粉末101簡稱壓粉體。此時,如增高加壓壓 力時,則電極102變硬,如降低加壓壓力時,則電極1〇2 315550 22 200427868 士包桎材料之粉末101之粒徑小時,則電極12 文硬,、如粉末101之粒徑大時’則電極12變軟。 r埶從成型為取出壓粉體,使用真空爐或氮氣氛之 :力:熱(步夠。在加熱時,如提高加熱溫度,則電極12 :石如降低加熱溫度,則電極12變軟。又,由於加敎, 亦可降低電極12之電阻。因此,即使在步驟S4中样入 赋而壓縮成型日夺,加熱仍有 / *的粉末間之結合,而”得::導爾體 用電極12。 八付具有V電性之放電表面處理 另外’如省略上述之步驟s 1之粉碎步驟的情形,亦 即直=平均粒徑數十…粉末的情形,或省略步驟 S3之過師步驟而湛為古 此在有0.3mm以上之大塊的情形,仍麩 :成:放電表面處理用電極12。但,其電極12,仍然存在 有如表面硬度稍高而中心部之硬度低等硬度不均的問題。 又,由於難氧化的〜或Ni(銻),此等合金、 免之千均粒k 3 # m以下之粉末多在市面上流通 之故,如使用此種粉末時,可省略上述步驟§1之 驟與步驟S2之乾燥步驟。 夕 其-人沈依上ϋ方法所製豸的放電表面處理用電極之 實施形態:加以說明。實施形態1巾,就構成電極 、、之平均粒徑在5至10" m時’不會形成碳化物或難 於形成碳化物的材料之比例、與電極之硬度、與由其電極 所形成的被膜厚度之間的關係,加以說明。 在本Ά施形怨1中,就改變不會形成碳化物的 315550 23 200427868 難於形成碳化物的材料之成分的放電表面處理用電極,將 試驗其電極硬度、及依放電表面處理方法形成於加工物上 的被膜厚度之變化的結I,表示如下。用為試驗的放電表 面處理用電極之基材的材質,係碳化鉻)粉末,而對 作為不會形成碳化物或難於形成碳化物的材料而添加 Co粉末。所添加的c〇係按體積在〇至8〇%之間改變,所 试驗的放電表面處理用電極之硬度則作成後述的既定硬 度。在此,電極係從粒徑在5 # m之Cqq粉末與粒徑在5 # m之Co粉末並按照第2圖之流程圖所製造者,惟在步 驟S1之粉末之粉碎步驟中,係依能製得粒徑為5“瓜之粉 末的條件下進行粉碎,在步驟S4之與臘的混合步驟中, 此合2至3重量%之臘,在步驟S6之加壓步驟中,以約 1〇〇MPa之加壓壓力將粉末壓縮成型,而在步驟S7之加熱 步驟中,則以40(TC至80(rc之範圍改變加熱溫度。在此”,、、 加熱溫度,係CqC2粉末之比例愈高,作成溫度愈高,C〇 本刀末之比例愈高則作成溫度愈低。此乃因Cr3c2粉末之比 例夕日守所製造的電極容易變脆,如以較低溫度加熱時則立 即崩潰,相對於此,如Co粉末之比例多時,即使加熱溫 度低,電極之強度仍然容易變強之故。 在此,本說明書中所用的體積比(體積。/〇),係指將所混 合的材料分別以其材料之密度相除的值之比例之意。具體 而言’如將材料複數種混合時’為各別之體積之比例本身, 而如材料係合金時,將合金中所含之各材料(金屬元素), 以各密度(比重)相除的值之比例作為體積❶/。。換言之,體積 315550 24 200427868 比(體和%)’係指將以作為目的成分之重量%除以其成分之 始、度的值,除以放電表面處理用電極所使用的各成分之重 里%分別除以其成分之密度所相除的值加以合計的值之 〜例士 本例之ChC2粉末與Co粉末之混合物中的c0 粉末之體積比(體積%),可以下式表示。The voltage between "1" is usually in the range of 80V to 400V. If the voltage in this range is applied between the electrode 12 and the workpiece u, the distance between the electrode 12 and the workpiece u in the discharge surface treatment will be ^ The above-mentioned 'in the surface treatment of the discharge, the electrode 12 may be aggregated and formed into agglomerates due to the arc discharge generated between the poles', and may be separated from the electrode 12 as it is. Here, if it is agglomerated When the size is below the inter-electrode distance (0.3 mm or less), the next discharge can occur even when there is a block between the poles. Also, because the discharge occurs near the distance, there is an existence A discharge occurs at the block so that it may be broken into pieces due to the thermal energy or explosive force of the discharge. When the size of the block forming the electrode 12 is greater than the distance between the electrodes (0 · 3_ or more), the discharge is caused by the discharge. The block is detached from the electrode 12 as it is, so that it accumulates on the guard u, or floats between the electrodes filled with the working fluid 15 between the electrode 12 and the workpiece η. When the block is stacked in the former way, Discharge is the distance of the electrode workpiece u For nearby reasons, the discharge is concentrated in this part, but will not occur in other places, so that the film cannot be stacked on the surface of the workpiece. Moreover, because of this large block, the heat of discharge cannot be Completely refining. Because the film μ formed by the 4 dagger is very fragile and can be exploited by fingers. Also, as the latter method, when a large block floats between the electrodes, it causes a short circuit between the electrode 12 and the workpiece u, so that There is a discharge at month b. In other words, if a uniform discharge film * is to be obtained and a stable discharge is maintained, the powder constituting the electrode must not have a block larger than the distance between the electrodes due to powder aggregation. This This type of powder aggregation easily occurs in the case of metal powder or conductive ceramics, but not in the case of non-conductive 315550 21 200427868. Also, the smaller the average particle diameter at the right end, the more easily the powder aggregation occurs. Therefore , Λ In order to prevent the discharge meter caused by the agglomeration caused by the agglomeration of this kind of powder, the disadvantages in the field should be followed. It is necessary to add the powder agglomerated in step S3 to Follow the steps of the teacher. From the above conclusions, it can be seen that if sieving is implemented, μ is required and a mesh with a smaller size than the distance between the poles is used. After that, if you want to improve it after you take + When the pressurizing pressure in the powder is transmitted in the step, the waxes, such as paraffin, need to be introduced into the paraffin according to the weight ratio of about 1% to 10% (bovine (VStep S4)). For example, when powder is mixed with wax, although the formability can be improved, the surrounding area of Tian Fang and Shu Mi is covered with liquid again. 'It is condensed due to its intermolecular force or electrostatic force, so that it forms a large block.' In order to dissolve the agglomerated aggregate again, it is sieved (step S5). The sieving method here is the same as the method of step s3 described above. Next, the obtained powder is compression-pressed and molded (step S6). ). Fig. 3 is a cross-sectional view schematically showing a state of a molder when powder is molded. Insert the lower punch 1104 from the lower part of the hole formed in the metal mold (仏, town) 105, and fill the space formed by the lower punch 1G4 and the metal mold (town) 1 () 5_ through the above. The powder sieved in step S5 (when it is made of a plurality of ingredients, it is a powder mixture) 101. Then, the upper punch 103 was inserted from the upper part of the hole formed in the Monk k (i) i 05. Then, using a dispenser, pressure is applied from both sides of the upper punch 103 and the lower punch 104 of the former filled with the powder 101, and the powder 101 is compression-molded. Hereinafter, the compression-molded powder 101 is simply referred to as a compact. At this time, if the pressing pressure is increased, the electrode 102 becomes hard. If the pressing pressure is decreased, the electrode 102 is 315550 22 200427868, and the particle diameter of the powder 101 of the packing material is small. If the particle diameter of the powder 101 is large, the electrode 12 becomes soft. r 埶 Take out the pressed powder from the molding, use a vacuum furnace or nitrogen atmosphere: Force: Heat (steps are enough. During heating, if the heating temperature is increased, the electrode 12: If the heating temperature is reduced, the electrode 12 becomes soft. In addition, the resistance of the electrode 12 can be reduced due to the addition of urethane. Therefore, even if the molding is performed in step S4 and the compression molding is performed, the heating still has a combination of / * powders, and the result is: Electrode 12. Eight discharge surface treatments with electrical properties of V. In addition, 'if the pulverization step of step s 1 is omitted, that is, straight = average particle size tens of ... powder, or the step of step S3 is omitted. However, in the case of a large block of more than 0.3mm in Zhanwei, the bran: Cheng: discharge surface treatment electrode 12. However, the electrode 12 still has hardness such as slightly higher surface hardness and lower hardness in the center. In addition, due to ~ or Ni (antimony) which is difficult to oxidize, these alloys and powders with a uniform particle size of less than k 3 # m are mostly circulated on the market. If this powder is used, it can be omitted. The step of the above step §1 and the drying step of step S2. An embodiment of the electrode for discharge surface treatment made by the Shen method is described below. In the first embodiment, the electrode is formed, and the average particle diameter is 5 to 10 " The relationship between the ratio of carbide-forming materials, the hardness of the electrode, and the thickness of the film formed by the electrode will be explained. In this application note 1, 315550 23 200427868 that does not form carbide is changed. The electrode I for surface treatment of a component of a material that is difficult to form a carbide is tested as follows. The junction I of the electrode hardness and the thickness of the film formed on the processed product according to the discharge surface treatment method is shown below. The material of the substrate of the processing electrode is a powder of chromium carbide), and Co powder is added as a material that does not form carbides or is difficult to form carbides. The added C0 is between 0 and 80% by volume. The hardness of the tested electrode for discharge surface treatment was changed to a predetermined hardness described later. Here, the electrode system was changed from a Cqq powder having a particle size of 5 # m and a Co powder having a particle size of 5 # m. Produced according to the flow chart in Figure 2. However, in the step of pulverizing the powder in step S1, it is pulverized under the conditions that the powder with a particle size of 5 "can be obtained, and the step of mixing with wax in step S4 In the pressing step of step S6, the powder is compacted at a pressing pressure of about 100 MPa, and in the heating step of step S7, the powder is compressed at 40 (TC). Change the heating temperature to 80 (rc). Here, the heating temperature is the higher the proportion of CqC2 powder, the higher the preparation temperature, and the higher the proportion of C0, the lower the preparation temperature. This is because The proportion of Cr3c2 powder made by Yuri Mori is easy to become brittle. If it is heated at a lower temperature, it will collapse immediately. On the other hand, if the proportion of Co powder is large, the strength of the electrode is still easy to become stronger even if the heating temperature is low. Therefore. Here, the volume ratio (volume /%) used in the present specification means a ratio of a value obtained by dividing the materials to be mixed by the density of the materials. Specifically, 'if multiple materials are mixed' is the proportion of each volume itself, and if the material is an alloy, each material (metal element) contained in the alloy is divided by each density (specific gravity). The ratio of the values is taken as the volume ❶ /. . In other words, the volume 315550 24 200427868 ratio (body and%) 'refers to the value divided by the weight percentage of the target component by the initial and degree of its component, divided by the weight% of each component used in the electrode for surface treatment of discharge. The volume ratio (vol.%) Of the c0 powder in the mixture of the ChC2 powder and the Co powder in this example is divided by the value divided by the density of the components and the total value is expressed by the following formula.

Co之重量%Co% by weight

Co之體積% = 一_—下。之_ <〇3(:2之重量。/〇 + co之重量〇/〇、 、03(32之逸、度 Co之密度〉 從此式可知’如作為合金混合的材料之原來之密度係 相接近的材料,則當然與重量%略為相同的值。 在此’就本實施形態1的放電表面處理時之放電脈衝 ,件,加以說明。第4A圖及第4B圖,表示放電表面處理 吟之放電脈衝條件之一例的圖,第4A圖表示放電時施加 於放電表面處理用電極與工件之間的電壓波形,而第4b 圖表示放電時對放電表面處理裝置所流動的電流之電流波 形如第4A圖所示,在時刻t〇對兩極間施加無負荷電壓 U1惟在放電滯後時間(time lag)td經過後之時刻t!,對兩 極間開始流動電流,而開始放電。此時之電壓為放電電壓 ,而此時所流動的電流為峰值(peak)電流值ie。然後, 如在日^刻h對兩極間的電壓之供給停止時,電流即不會流 動亦即,放電即停止。在此,匕…稱為脈衝寬度te。將 此犄刻tG至^的電壓波形,隔著靜止時間%反複施加於兩 極間。亦即,如第4A圖所示,在放電表面處理用電極工2 25 315550 200427868 與工件11之間,施加脈衝狀之電壓。在本例中,在放電表 面處理時所使用的放電脈衝條件,係作成峰值電流值 ie=·、放電持、續時間(放電脈衝寬度)t,s,靜止時間 t0=128#s。又,在試驗時,使用i5mmx i5mm之面積之電 極,對工件丨丨實施放電表面處理丨$分鐘。 、第5圖,係表示對本身為碳化物的粉末中使難 以形成碳化物的Co粉末量改變以製造的放電表面用電極 中的因C〇量之變化所引起的被膜厚度之關係圖。在第5 圖中,橫軸表示放電表面處理用電極中所含c。之體積%, 縱軸係以對數刻度表示形成於加工物的被膜之厚度b m) 〇 依據上述之放電脈衝條件以形成被膜時,因所製造的 電極内所含有的Co之體積%而形成於工件上的被膜之厚 f不相冋。在第5圖中’表示如c〇含量在1〇體積%以下 呀被膜厚度在10…呈度者’從c〇含量3〇體積%程度起 逐漸增厚’從Co含量超過4〇體積%附近起會增厚至1〇,〇〇〇 # m的情形。 關於此點,再詳細加以探討。如依據上述條件,在工 件上形成被膜時’如電極内之C。含量在0體積%時,亦即 ChC2粉末為100體積%時,能形成被膜之厚度係程 度為其界限,而不能再增加其厚度。 山第6圖,係表示放電表面處理用電極中未含不會形成 反化物的材料或難以形成碳化物的材料情形對處理時間的 被膜形成之情況圖。在第6圖中,橫轴表示對每單位面積 315550 26 200427868 之貫施放電表面處理的處理時間(分鐘/cm2)、縱轴表厂、 實施放電表面加工處理前之工件表面之位置作為基準昉X 被膜厚度(工件之表面位置)(# m)。如第6圖所示,在=^ 表面處理之初期階段,被膜將隨著時間一起成長而增$電 惟在某處(約5分鐘/cm2)即飽和。其後被膜厚度暫時不^ 成長,惟如某時間(約20分鐘/cm2)以上繼續放電曰處理日士曰, 則被膜厚度開始減少,最後被膜厚度即成為負*,而:、 挖深亦即去除加工。但,即使變成去除加工的狀熊下” 際上仍然存在有工件上之被膜,而具有心m^之^ 度。亦即,被膜之厚度幾乎與以適t時間(處理時間為: 2〇分鐘/W之間)處理的狀態相同。從此種結果來看,5 至20分鐘之間的處理時間較為適當。 回頭看第5圖可知,電極内隨著增加難以形成 的材料之Co量即可開始增厚被膜,而如電極中的。人旦 =3。體積%即所形成的被膜厚度開始增厚,並超過: ::即可安定並容易形成厚膜。“圖中,雖記载為c〇 ==〇體積%程度開始順利增厚膜厚,惟此記載乃係進 :丁,數以试驗的平均值’而實際上,如c。含量在3〇 %程度時,有被膜不會增厚 1、 膜強度仍然脆弱,•即容易以全屬丄 =厂予的情形被 =:以致不能安定。因而,較佳為。。含量 如此方式增加被膜中作炎入 人士 + 膜干作為金屬殘留的材料,即可护 3有未成為碳化物的金屬成 y 7被膜,而谷易安定地形 315550 27 200427868 厚膜。 第7圖表示使用Co含量在70體積%之電極實施放電 表面處理時所形成的被膜照片。該照片係例示厚膜之形成 1 ^而顯示形成有2mm程度之厚膜的情形。該被膜係經 、、里之處理日守間所形成者,惟如增長處理時間,則可形 成更厚的被膜。 私如此方式,如使用電極内含有Co等之難以形成碳化 Μ才料或不會形成碳化物的材料體積%以上的電 極’即可依放電表虛 ^ 慝理而在工件上安定地形成厚的被 4之例係、就作為難以形成碳化物的材料而使用Co “X說明者’惟如使用Ni、Fe(鐵)、卵呂)、Cu(銅)、 n(鋅)等時,亦獲得同樣結果。 另外在此所%厚膜,係指組織内部(因脈衝狀之放電 所形成的被膜之故,最外矣 r表面之面粗糙度不佳,外觀似乎 不具有光澤)能具有金屬井、、I + 、 / 9緻岔的被膜之意。例如,如The volume% of Co = one _-down. _ ≪ 〇3 (: 2 by weight. / 〇 + co by weight 〇 / 〇,, 03 (32, the density of Co)> From this formula, we can know 'as the original density of the alloy mixed material phase The material that is close is of course slightly the same value as the weight%. Here, the discharge pulses and components during the discharge surface treatment of the first embodiment will be described. Figures 4A and 4B show the discharge surface treatment. An example of a discharge pulse condition. FIG. 4A shows the voltage waveform applied between the discharge surface treatment electrode and the workpiece during discharge, and FIG. 4b shows the current waveform of the current flowing to the discharge surface treatment device during discharge. As shown in Figure 4A, no-load voltage U1 is applied between the two poles at time t0, but at time t! After the discharge time lag td elapses, a current starts to flow between the two poles and the discharge starts. The voltage at this time is The discharge voltage, and the current flowing at this time is the peak current value ie. Then, if the supply of the voltage between the two poles is stopped at the moment h, the current will not flow, that is, the discharge will stop. Therefore, dagger ... Pulse width te. This voltage waveform engraved from tG to ^ is repeatedly applied between the two poles at rest time%. That is, as shown in FIG. 4A, the electrode working surface 2 25 315550 200427868 and the workpiece 11 In this example, a pulse-like voltage is applied. In this example, the discharge pulse conditions used in the surface treatment of the discharge are such that the peak current value ie =, the discharge duration, the duration (discharge pulse width) t, s, and the standstill Time t0 = 128 # s. Also, during the test, an electrode with an area of i5mmx i5mm was used to perform a discharge surface treatment on the workpiece 丨 $ minutes. Figure 5 shows that it is difficult to make carbide powder itself. A graph showing the relationship between the thickness of the film due to a change in the amount of Co in the discharge surface electrode produced by changing the amount of carbide-forming Co powder. In FIG. 5, the horizontal axis represents c contained in the discharge surface treatment electrode. The volume percentage, the vertical axis represents the thickness of the coating film formed on the processed object on a logarithmic scale bm) 〇 When the coating film is formed according to the above-mentioned discharge pulse conditions, it is formed by the volume% of Co contained in the manufactured electrode The thickness f of the film on the workpiece does not differ. In the fifth figure, 'indicates that if the content of c0 is less than 10% by volume, the thickness of the film is 10 ... The degree' gradually increases from the level of c0 to 30% by volume. Thickness "When the Co content exceeds about 40% by volume, the thickness will increase to 100,000 mm. This point will be discussed in more detail. For example, when a film is formed on a workpiece according to the above conditions, such as an electrode When the content of C is 0% by volume, that is, when the volume of ChC2 powder is 100% by volume, the thickness of the film that can form a film is its limit, and the thickness cannot be increased. Figure 6 shows the surface treatment for discharge. The case where the electrode does not contain a material that does not form a counter compound or a material that is difficult to form a carbide versus the processing time. In Fig. 6, the horizontal axis represents the processing time (minutes / cm2) of applying the discharge surface treatment per unit area of 315550 26 200427868, the vertical axis of the watch factory, and the position of the surface of the workpiece before performing the discharge surface processing as a reference. X Film thickness (surface position of workpiece) (# m). As shown in Fig. 6, in the initial stage of the surface treatment, the film will grow with time and increase electricity, but it is saturated somewhere (about 5 minutes / cm2). After that, the thickness of the film does not increase temporarily. However, if the discharge continues for more than a certain time (about 20 minutes / cm2), the thickness of the film begins to decrease, and the thickness of the film finally becomes negative *, and: Remove processing. However, even if it is removed under the condition of processing, there is still a film on the workpiece, and it has a degree of heart m ^. That is, the thickness of the film is almost equal to the appropriate t time (processing time: 20 minutes). / W) The processing state is the same. From this result, the processing time between 5 and 20 minutes is more appropriate. Looking back at Figure 5, it can be seen that the amount of Co in the electrode that is difficult to form can be started in the electrode. Thicken the film, as in the electrode. Human denier = 3. Volume% means that the thickness of the formed film begins to thicken and exceeds: :: to stabilize and easily form a thick film. "Although it is described as c in the figure 〇 == 〇Volume% began to increase the thickness of the film smoothly, but this record is advanced: D, the number is the average value of the test 'and in fact, such as c. When the content is about 30%, the coating will not thicken. 1. The strength of the film is still fragile, that is, it is easy to be treated as if it belongs to 丄 = factory, so that it cannot be stabilized. Therefore, it is preferable. . The content is increased in this way as a person who enters the film + dry film as a metal residue material, you can protect 3 non-carbide metal y 7 film, and Gu Yi stable terrain 315550 27 200427868 thick film. Fig. 7 shows a photograph of a coating film formed when an electrode having a Co content of 70% by volume is subjected to discharge surface treatment. This photograph illustrates the formation of a thick film, and shows that a thick film of about 2 mm is formed. The film is formed by the processing of the morin between the inside and the inside, but if the processing time is increased, a thicker film can be formed. In this way, if the electrode contains Co and other materials that are difficult to form carbides or do not form carbides, the electrode's volume% or more can be used to form thick and stable parts on the workpiece in accordance with the principle of the discharge meter. In the case of Example 4, Co is used as a material that is difficult to form carbides. "X-specifier" is also obtained when Ni, Fe (iron), selenium), Cu (copper), n (zinc), etc. are used. The same result. In addition, the “thick film” here refers to the inside of the tissue (the surface roughness of the outermost surface is not good due to the film formed by the pulsed discharge, and the appearance does not seem to have gloss). ,, I +, / 9 means a bifurcation. For example, such as

Co等難於形成碳化物的材曰 技% A 何科之含置較少的情形,如減弱電 極強度(硬度),有時工侔 4 „ 之附著物能增厚。但此種附著 物亚非緻密的被膜,而如八 ^ ., .. .. ^ ^ 孟屬片等摩擦時即會容易去除 者,此種被fe不屬於本發明 1明所稱之厚膜。同樣,由於上述 之專利文獻1等所記载的堆 R ^ ^ m u ^ ^ s 積層貝係並非緻密的被膜,容 易以金屬片等之摩擦所去险 政α / l广i ,、有之故,此種被膜亦不屬於本 發明所稱的厚膜。 又,在上述說明中,秒#〆 H Ί Cr3C2粉末壓縮成型後加 315550 28 200427868 熱以製造電極的情形加以說明者,惟有時直接將經遷缩成 型的壓粉體作為電極使用。但,為形成緻密的厚膜時,則 電和之更度過硬或過軟均不宜,而需要適當硬度之故,— 般需要加熱處理。壓粉體之加熱直接對成型 化有益。 了 a u心 為電極之硬度,係與電極材料之粉末之結合強度有 關,關係到因放電所引起的電極材料對工件側的供:量。 如電極硬度高時’由於電極材料之結合強之故 放電仍然僅能釋出少晉雷相^士 μ L " 心里電極材枓,以致不能實施充分的被 以成。相反地,如電極強度低時,由於電極材料之結合 弱=故’如發生放電時則供給大量材料,而如此量過多時, =㈣料不能充分由放電脈衝之能量所熔融,以致不能形 成緻密的被膜。 如使用同樣原料而同樣粒徑之粉末時,對電 亦即電極材料之結合狀態有 厂錢力與加熱溫度。在本實二崎r),係加 牡不貝轭形悲1中,係作為加壓壓力 之例而使用約1 OOMPa去,蚣丄#, 准如將此加壓壓力增高,則即 =低=溫度仍能獲得同樣硬度。相反地,如降低加麼 1力,則而要设定加熱溫度為較高之方式。 千又’在本實施形態1中,係作為放電表面處理時之放 脈衝條件之例而表示以丨種條件下的試驗結果者,惟被 度雖會有所不同,在其他條件下,當然亦可獲得同 稼結果。 如上所述,可知在厚膜形成上,材料方面的條件甚為 315550 29 200427868 重要,惟亦已知在放電表面處理、特別是厚膜形成時,其 他條件亦屬極為重要者。通常,放電表面處理用電極,係 遵循上述的第2圖之流程圖,將粉末材料壓縮成型、加熱 以製造電極。其時,一般多以壓縮成型時之加壓壓力與加 熱處理時之加熱溫度以決定電極之狀態。亦即,先前之電 極狀態之管理係使用以加壓壓力與加熱溫度等既定條件= 成型的電極以進行被膜形成,並依其狀態而加以判斷者。 但’此種方法係為電極狀態之管理起見需要形成被膜,而 頗費工夫。於是,本發明人等為作為管理電極狀態 電極之電阻、⑺電極之彎曲試驗,以及(3)電極之硬度試驗 方法’加以檢討。 百先’(1)之電阻,係將放電表面處理用電極 定㈣,以载電阻之方法。電阻具有如放電表面處= ,極恩堅固結硬則會愈小的傾向’故耗可成為放電表面 處理用之強度之良好指許 卜么 从 良好才4,惟由於測定上容易有偏差,受 ㈣之物性值影響之故,不同材料時會有不同|,需要ς 母種不同材料掌握最適狀態時之值等,有諸多問題。 其次’(2)之彎曲試驗,俏 係將放電表面處理用電極按既 疋之形狀裁切並實施牧既 的方法。本方法㈣定上 」阻力 等問題。 勿頁偏差,測疋上耗費較大, 而,最後之(3)之硬声巧^入 , , 更度式氣,有對放電表面處理用電極 枚住壓頭(mdenter),佑i廠广 a 依其壓痕之形狀測定硬度的方法,赤 使用鉛筆等之量具抓傷放 或 表面處理用電極並由有否傷痕 315550 30 200427868 以判斷的方法等。 一此等3種方法係互相具有強相關者,惟由測定之簡易 f生等之理纟兔現採用(3)之錯筆等量具的硬度試驗以判斷 放電表面處理用電極之狀態的方法最為合適。於是,就電 極之硬度與由該電極所形成的被膜之性質之關係、,加以說 月士下在此’下述之作為電極之硬度之基準所使用的指 標,如係構成電極的粉末之粒徑大且電極軟時,採用US K5600-5-4中的塗膜用紹筆抓傷試驗,如係構成電極的粉 末之粒徑小且電極硬時,則採用洛式硬度(R0ckwellMaterials such as Co, which are difficult to form carbides, have a low content of A. For example, if the electrode strength (hardness) is weakened, sometimes the attachment can be thickened. Dense film, such as eight ^., .. .. ^ ^ Meng slabs will be easy to remove when rubbed, this kind of fe is not a thick film referred to in the present invention. Similarly, due to the above patent The stack R ^ ^ mu ^ ^ s described in Document 1 etc. is not a dense coating, and it is easy to remove it by the friction of metal plates, etc., and for some reason, this coating is not It belongs to the so-called thick film of the present invention. In the above description, the case where the second # 〆H Ί Cr3C2 powder is compression-molded and heated by 315550 28 200427868 to make an electrode will be described, but sometimes the compression-molded compact is directly used. The powder is used as an electrode. However, in order to form a dense thick film, it is not appropriate to make it too hard or too soft, and appropriate hardness is required. Generally, heat treatment is required. The heating of the pressed powder is directly used for molding. Beneficial. The Au core is the hardness of the electrode, which is related to the electrode material. The binding strength of the powder is related to the supply of the electrode material to the workpiece side caused by the discharge. For example, when the electrode hardness is high, 'the discharge can still only release a small amount of lightning due to the strong combination of electrode materials. L " The electrode material in the heart is too large to be fully implemented. Conversely, if the electrode strength is low, the combination of electrode materials is weak = so 'a large amount of material is supplied when a discharge occurs, and when this amount is too much, = The material cannot be fully melted by the energy of the discharge pulse, so that a dense film cannot be formed. When using the same raw material with the same particle size, there is a factory power and heating temperature for the combination of electricity, that is, the electrode material. This real Nisaki r) is a compressive pressure of about 1 100 MPa, which is used as an example of the compressive pressure, 蚣 丄 #, if this pressure is increased, then = low = The same hardness can be obtained at the same temperature. On the contrary, if the force is reduced, the heating temperature should be set to a higher value. In the first embodiment, it is used as the discharge pulse condition during discharge surface treatment. Example For those who show the test results under different conditions, although the degree will be different, of course, under the other conditions, the same crop results can be obtained. As mentioned above, it can be seen that the material conditions for thick film formation are very different. It is important for 315550 29 200427868, but it is also known that other conditions are also very important in the surface treatment of discharge, especially in the formation of thick films. Generally, the electrode for discharge surface treatment follows the flowchart in Figure 2 above, and The powder material is compression-molded and heated to manufacture the electrode. At this time, the pressure of the compression molding and the heating temperature during the heat treatment are generally used to determine the state of the electrode. That is, the previous management of the electrode state was used to pressurize Predetermined conditions, such as pressure and heating temperature, are determined based on the shape of the electrode to form a film. However, this method requires the formation of a film for the management of the state of the electrodes, which is quite laborious. Then, the present inventors reviewed the resistance of the electrode as a management electrode, the bending test of the rubidium electrode, and (3) the method of testing the hardness of the electrode '. The resistance of Baixian '(1) is a method in which the electrode for discharge surface treatment is fixed and the resistance is loaded. The resistance has a tendency that if the discharge surface =, the pole will be firmer and harder, so the consumption can be a good indication of the strength of the surface treatment of the discharge. Good is good, but it is easy to have deviations in the measurement. Due to the influence of the physical property value of ,, it will be different when different materials are used, and it is necessary to grasp the optimal value of different materials for different kinds of mothers, etc., and there are many problems. Next, the bending test of '(2) is a method of cutting the electrode for discharge surface treatment into a conventional shape and implementing a conventional method. This method fixes problems such as resistance. Do not have page deviation, it takes a lot of time to measure, and the final sound of (3) is intricate, and it has a more formal style. There is an electrode for the surface treatment of the discharge (mdenter). a The method of measuring the hardness according to the shape of the indentation. The method is to use a measuring tool such as a pencil to scratch or place the electrode for surface treatment and determine whether there is a flaw 315550 30 200427868. These three methods have a strong correlation with each other, but the simple method of measurement is to use the hardness test of (3) the wrong pen and other gauges to determine the state of the electrode for surface treatment of discharge. Suitable. Therefore, regarding the relationship between the hardness of the electrode and the properties of the film formed by the electrode, the following indicators used by Yukitsu here as the reference for the hardness of the electrode are described below, such as the particles of the powder constituting the electrode When the diameter is large and the electrode is soft, use the scratch test of the coating film in US K5600-5-4. If the particle size of the powder constituting the electrode is small and the electrode is hard, use Rockwell hardness (R0ckwell

Wdness)。Λ述之JISK56〇〇 5_4之規格,本來係塗被臈 之評價上所使用者,惟硬度低的材料之評價上很合適。當 然’其他硬度評價方法之結果與此種塗膜用鉛筆抓傷試: 之結果係可互為換算者,當'然,可將其他硬度評價方法作 為指標使用。 、— 丨w丨丨々叫禾仟甚為重要 視實驗的情形,如係厚卿成的情料其他條件,特別 電極之硬度亦極為重要。就藉由放電表面處理的厚臈之 成與放電表面處理用電極之硬度之間的關係,作為例而 按Cr3C2遵至Co鳩之體積比所製造的放電表面處理 電極之情形,加以舉例說明。第8圖,係表示改變 =C〇、鳩之體積比之放電表面處理用電極之硬度時㈣ 用=之狀悲圖。在第8圖中’橫軸表示依硬度之評價 由膜㈣筆之硬度所測定的放電表面處理用電極之 度’愈往左方愈硬,愈往右方愈軟、縱轴表示/ 315550 3] 200427868 處理用電極所形成的姑日替 成的被膑之厚度之評價狀態。當實施此種 評價試驗時之放電表面虚视奸 此種 处理日守所使用的放電之脈衝條丰, 係聲值電流值ie = 1 0A、放電持、續時間(放電脈衝時間) # s、靜止時間t 28 // ς。V 丄 又,在評價試驗中,係使用丨5仍^ X 15mm之面積之電極,形成被膜。 如弟8圖所示,放雷矣 本 双冤表面處理用電極之硬度在4β LB程曰度之硬度之情形下被膜之狀態非·常良好,而形成有緻 沧的厚膑。又’放電表面處理用電極之硬度在B至 =亦可形成良好的厚膜。❻,在此範圍下,隨著結硬, 子、之形成速度有緩慢的傾向,B程度之硬度下,則 之形成將相當困難。如再“為硬時,則不可能形成厚:、 以致隨著放電表面處理用電極之硬度結硬,即去 工件(work),一邊進行加工之方式。 玄丨示 另一方面’即使放電表面處理用電極之硬度在 度之硬度’仍然能形成良好的厚膜,惟如分析組 發現被膜中有逐漸增加空穴的傾向。再者,如放電表面产 理用電極之硬度較9B程度為軟’則有電極成分不能充: 炼融而直接附著於工件上的現象’則被膜即成為非緻:之 多孔性(—)者。在此,上述之放電表面處理用電J之 硬度與被膜之狀態間的關係,係、視所使用㈣電脈衝 而多少會變化’而如使用適當的放電脈衝條件時,則可擴 大能形成某些程度良好的被膜的範圍。本發明人等確認:、 上述傾向,並不因構成電極之材料,而從平均粒徑$至^ // m大小之粉末所製造的電極所具有。 315550 32 200427868 如採用本實施形態〗, 太,料姐丄、 用拉徑在5至1 〇 之粉 對構成放電表面處理用· AI r 處用電極的材❹添加C〇、Ni、Fe、 1、Cu、Zn等不會形成碳 材料40〜。/、… 物的材科或難以形成碳化物的 月且積/〇以上,按能成為 度在R ρ ^ π m 土 M用鉛葦到痕試驗的硬 度在B至8B之間,較佳為能 方式制1 + 、、 至7B之間的硬度之 乃式衣造放電表面處理用雷士 用雷朽…並使用此種放電表面處理 用電極以貫施放電表面處理, 成,® μ 4田 了〆、有在工件上安定地形 成厗膑的效果。如使用此種放 妳阳&上 裡双冤表面處理用電極,即能替 代知接或火焰噴塗法之作 噴淨、並能將先前依靠焊接或火焰 育塗法所作的作業加以製程化。 f施形熊2 、% w八包炫悴出電極材 料,端視構成電極的粉末之結人 、〇 口強度。亦即,如結合強度 強,則粉末難於因放電之能晋斛猱 电心此里所釋出,惟如結合強度弱, 則容易釋出。又’此種結合強度係因構成電極的粉末之大 小而有所不同。例如,構成電極的粉末之粒徑大時,由於 在電極中的粉末互相結合的點之數目減少之故,電極強度 έ減弱’惟構成電極的粉末ψ☆彡了 I 士 木芝粒徑小打,由於在電極中的 知末互相結合的點之數目增多之故雷} 而,能否因放電而能否從電極釋出電極材料,係因粉末之 粒徑之大小而有所不同。上述的實施形態丨中:γ晴 在5至心mm度之粉末時,依塗膜用錯筆刮痕試驗㈣ 度下在B纟8B之硬度者成為最適值’惟在本實施形態2 中’則就粒徑在1 i 5"m時之電極硬度與被膜厚度加以 曰夕又S艾,冤極強度會增強。因 315550 33 200427868 說明。 ’例舉按既定比例含有Co、Cr、Ni等成分的合 金粉末,例L »4- ^ 々使用務化(atomize)法或磨子(mill)等(按粉粒 能成為3 // m # + ^度之方式)加以粉碎、混合,依照實施形態 1 第9同 回之流程圖以製造放電表面處理用電極的情形。 <在y ‘ S 4之與臘的混合步驟中,係將2至3重量%之 臘混合,在步驟S6之加壓步驟中,依約1〇〇Mpa之加壓壓 力將衣作電極時之粉末壓縮成型,在步驟之加熱步驟 中,係使加熱溫度在6⑽。C至800°C之範圍變化。另外,在 此種電極之製造中,可省略步驟S7之加熱步驟,而將混 合粉末壓縮成型並將所得壓粉體作為電極使用。又,上述 之口孟籾末之組成,係Cr 2〇重量%、Ni 1〇重量%、W(鶴)^ 重量%、Co 55重量%,而此時之c〇體積%為4〇%以上。 使用所製造白勺電極實施方文電表面處王里時之纟電脈衝條 件,係在第4A圖及第4B圖中,作成峰值電流值ie=i〇A、 放電持續時間(放電脈衝寬度)te==64//s、靜止時間%=ΐ28 // s °又’使帛15mmx l5mm之面積之電極,形成被膜。 其結果,雖然電極材料係由粉末所構成者,惟由於使用合 金粉末化者而材質均一無偏差之故,能形成於成分上無: 差的良質被膜。 當然,按能成為既定之組成之方式所枰量的各材料之 粉末(在此為Cr粉末、Ni粉末、w粉末、c〇粉末)混合以 製造電極時’亦能製造同樣的電極。但,由於會有粉末之 混合偏差等問題之故’不能避免性能會若干降低。 315550 34 200427868 上述說明中,係使用使Cr 20重量%、Ni ι〇重量%、 W 1 5重量。/〇、其餘為c〇之比例之粉末化的材料者,惟可 粉末化之合金組成並不限定於此,而可為例如Cr 25重量 %、Ni 1 〇重量%、w 7重量%、其餘為c〇之比例之合金、 或Mo 28重量%、Cr 17重量%、Si(矽)3重量%、其餘為 Co之比例之合金、或Cr 15重量%、Fe8重量%、其餘為 Ni之比例之合金、或Cr 21重量%、Mo 9重量。/。、Ta(纽)4 重里%、其餘為Ni之比例之合金、或Crl9重量%、犯53 重量%、Mo 3重量%、(Cd(鎬)+ Ta)5重量%、Ti 〇·8重量%、 A1 0.6重量。/。、其餘為Fe之比例之合金等,按體積%含有 屬於難以形成碳化物的元素之Co、Ni、Fe、Al、Cu、 為40%以上者即可。 但’由於合金比例不相同,則材料之硬度等之性質會 不相同之故,電極之成型性或被膜之狀態上多少會產生差 /、例如電極材料之硬度硬時,則使用加壓的粉末之成 型將有困難。又,如藉由加熱處理以增加電極之強度時, 則需要設法將加熱溫度增高一些。舉例而言,Cr 25重量 %、Νι 1 0重量%、w 7重量%、其餘為c〇之比例之合金係 幸乂权,而Mo 28重量%、Cr 17重量%、si 3重量%、其餘 為Co之比例之合金係較硬的材料,但在為給與電極所需 要的電極之加熱處理中,需要將後者之溫度較前者為平均 約高l〇〇°C前後之方式設定溫度。 又厚膜之形成之容易度,係如實施形態丨所示,隨 被膜中所含金屬夕旦以古& Φ & 屬之里增问而更為容易。電極成分之合金粉 315550 35 ZUU^Z/b06Wdness). The specifications of JISK56〇5_4 described in Λ are originally used for the evaluation of coatings, but the evaluation of materials with low hardness is very suitable. Of course, the results of other hardness evaluation methods and the scratch test of this coating film with a pencil: The results can be converted into each other. Of course, other hardness evaluation methods can be used as indicators. , — 丨 w 丨 丨 Howling is very important. Depending on the experimental situation, such as Hou Qingcheng ’s other conditions, the hardness of the special electrode is also very important. The relationship between the thickness of the discharge surface treatment and the hardness of the discharge surface treatment electrode is taken as an example to describe the case of a discharge surface treatment electrode manufactured according to the volume ratio of Cr3C2 to Co. Fig. 8 is a graph showing the change in the hardness of the electrode for discharge surface treatment when the volume ratio of = C0 and the dove is changed. In Fig. 8, the "horizontal axis represents the degree of the electrode for discharge surface treatment measured by the hardness of the film stylus pen according to the evaluation of hardness", the harder it is to the left, and the softer it is to the right, the vertical axis is / 315550 3 200427868 Evaluation status of the thickness of the quilt formed by the treatment electrode. When this kind of evaluation test is performed, the discharge surface is imaginary, and the pulse pulses of the discharge used in this kind of treatment are the sound current value ie = 1 0A, the discharge duration, and the duration (discharge pulse time) # s, Rest time t 28 // ς. V 丄 In the evaluation test, an electrode with an area of 5 x 15 mm was used to form a coating. As shown in Figure 8 below, when the hardness of the electrode for surface treatment of this dual-layer surface treatment is 4β LB, the condition of the coating is abnormal and very good, and a thick thick layer is formed. Also, the hardness of the electrode for discharge surface treatment is B to =, and a good thick film can be formed. Alas, in this range, as the hardening, the formation speed of the seeds tends to be slow, and the hardness of the B degree, the formation will be quite difficult. If it is “hard”, it is impossible to form a thick layer: so that the hardness of the electrode for discharge surface treatment becomes hard, that is, the work is performed while the work is being performed. The hardness of the electrode used for processing can still form a good thick film, but if the analysis group finds that there is a tendency to gradually increase the voids in the film, further, the hardness of the electrode for discharge surface production is softer than 9B. 'The electrode components cannot be charged: the phenomenon of direct adhesion to the workpiece during smelting', and the coating becomes non-porous: (-). Here, the hardness of the above-mentioned discharge surface treatment electricity J and the hardness of the coating The relationship between states will vary depending on the amount of galvanic pulses used. 'If the appropriate discharge pulse conditions are used, the range in which a good film can be formed can be expanded. The inventors have confirmed that: The tendency is not due to the material that constitutes the electrode, but the electrode made from powder with an average particle size of $ to ^ // m. 315550 32 200427868 If this embodiment is adopted, too, Adding C0, Ni, Fe, 1, Cu, Zn, etc. to the material that constitutes the electrode for discharge surface treatment and AI r with powder with a diameter of 5 to 10 will not form a carbon material 40 ~ .... The material family of the material or the monthly accumulation product / 0 which is difficult to form carbides, and the degree of hardness can be R ρ ^ π m. The hardness of the lead test using lead reeds is between B and 8B. The hardness of 1 +,, and 7B is for Nishiki-made discharge surface treatment of Nishiki for thunder and decay ... and using this type of electrode for discharge surface treatment to continuously apply the discharge surface treatment, it becomes ® μ 4 田 了 〆, It has the effect of stably forming radon on the workpiece. If you use this type of electrode for surface treatment, it can replace the spraying method of Zhizhi or flame spraying, and can be used to rely on welding. Or the process of the flame breeding method is used to process. F Shi Xingxiong 2,% w eight packs of the electrode material, the end of the powder that constitutes the electrode, the strength of the mouth. 0. That is, if the bonding strength is strong, It is difficult for the powder to be released here because of the power of discharge. However, if the bonding strength is weak, then Easily released. Also, this type of bonding strength varies depending on the size of the powder constituting the electrode. For example, when the particle size of the powder constituting the electrode is large, the number of points where the powder in the electrode is bonded to each other decreases. The strength of the electrode is reduced, but the powder that constitutes the electrode ψ ☆ has a small particle size, and the number of dots in the electrode that are combined with each other increases. Therefore, can it be discharged due to discharge? Whether the electrode material is released from the electrode depends on the particle size of the powder. In the above embodiment 丨: In the case of powder with a γ of 5 to heart mm, use the wrong pen scratch test according to the coating film㈣ The hardness of B 纟 8B is the most suitable value. However, in the second embodiment, the hardness and coating thickness of the electrode when the particle size is 1 i 5 " m are added, and the strength is increased. . Note 315550 33 200427868. 'For example, alloy powder containing Co, Cr, Ni and other components in a predetermined ratio, such as L »4- ^ 々Atomize method or mill (such as powder can be 3 // m # (+ ^ Degree method) pulverization and mixing, in accordance with the flow chart of the ninth embodiment of the first embodiment to manufacture the electrode for discharge surface treatment. < In the mixing step of y'S 4 with wax, 2 to 3% by weight of wax is mixed. In the pressing step of step S6, when the clothing is used as an electrode at a pressure of about 100 MPa, The powder is compacted. In the heating step of the step, the heating temperature is set to 6 ° F. C to 800 ° C range. In addition, in the production of such an electrode, the heating step of step S7 can be omitted, the mixed powder can be compression-molded, and the obtained compact can be used as an electrode. In addition, the composition of the above-mentioned mouth Meng Huan is Cr 20% by weight, Ni 10% by weight, W (Crane) ^% by weight, and Co 55% by weight, and at this time, c0% by volume is 40% or more . Using the manufactured electrode to implement the electric pulse conditions of Wang Lishi on the surface of Fangwen Electric, the peak current value ie = ioa and the discharge duration (discharge pulse width) are shown in Figures 4A and 4B. te == 64 // s, quiescent time% = ΐ28 // s °, and the electrode with an area of 帛 15mm × 15mm is formed to form a film. As a result, although the electrode material is made of powder, it is possible to form a non-defective, good-quality film because the material is uniform and has no deviation due to the use of an alloy powder. Of course, when the powder of each material (here, Cr powder, Ni powder, w powder, and co powder) is mixed in an amount to achieve a predetermined composition, the same electrode can also be manufactured. However, there is a problem such as the mixing deviation of the powder, and the performance cannot be reduced slightly. 315550 34 200427868 In the above description, 20% by weight of Cr, 5% by weight of Ni, and 15% by weight of W were used. / 〇, the rest of the powdered material in the proportion of c0, but the powdery alloy composition is not limited to this, but can be, for example, Cr 25% by weight, Ni 100% by weight, w 7% by weight, the rest Alloys with a proportion of c0, or Mo 28% by weight, Cr 17% by weight, Si (silicon) 3% by weight, the rest being Co-based alloys, or Cr 15% by weight, Fe8% by weight, and the rest being Ni ratios Alloy, 21% by weight of Cr, 9% by weight of Mo. /. , Ta (new) 4% by weight, the rest are Ni-based alloys, or Crl9% by weight, 53% by weight, Mo 3% by weight, (Cd (pick) + Ta) 5% by weight, Ti 0.8% by weight , A1 0.6 weight. /. For alloys such as Fe in the balance, Co, Ni, Fe, Al, and Cu, which are elements that are difficult to form carbides, may be contained in an amount of 40% by volume or more. But 'because the alloy ratios are not the same, the hardness and other properties of the material will be different. The electrode moldability or the state of the film will be somewhat different. For example, when the hardness of the electrode material is hard, pressurized powder is used. It will be difficult to shape it. In addition, if the strength of the electrode is increased by heat treatment, it is necessary to increase the heating temperature. For example, Cr 25% by weight, Nim 10% by weight, w7% by weight, and the rest are ratios of C0 are alloys, while Mo 28% by weight, Cr 17% by weight, si 3% by weight, and the rest The alloy with a proportion of Co is a harder material, but in the heat treatment of the electrode required to give the electrode, the temperature of the latter needs to be set about 100 ° C higher than the former on average. The ease of formation of a thick film is as shown in the embodiment 丨, and it becomes easier as the metal contained in the film increases with age & Φ & Alloy powder for electrode composition 315550 35 ZUU ^ Z / b06

末所含材料& + M 而吕,屬於難以形成碳化物的材料之Co、Ni P e、AI、c 、 n恐多’愈容易形成緻密的厚膜。 ,與實w 化物的材料之1Γ1Γ形成碳化物的材料或不會形成碳 厚膜。並且^ 4〇體積%,則能容易安定地形成 因能形h的C〇之合讀過50體積%, 此形成足夠厚度之厚膜之故較佳。 又,即使難以形成碳化物的材料的c〇、犯、h、^、 的::以=:合金之成分所混合的材料係會形成碳化物 =:被膜中將含有一,、…… 孟屬成分,而C〇、Ni、Fe、A1 能形成緻密的厚膜。 &之比例’至少再 極中=由之與co之2元素所成合金的情形,發現如電 膜。二3置將超過2〇體積%起時,開始容易形成厚 比^係會形成碳化物的材料’惟如與Ti等活性的材料 二:,則係較為難以形成碳化物的材料。亦即,在& f月形,雖然係屬於容易碳化 較時,其容易碳化的程度:與Materials & + M and Lu, Co, Ni P e, AI, c, n, which are materials that are difficult to form carbides, are more likely to form dense thick films. The material that forms a carbide with 1Γ1Γ of a material that does not form a carbon thick film. And ^ 40% by volume, it can be easily and stably formed. Because the sum of C0 of the energy shape h has been read by 50% by volume, it is preferable to form a thick film of sufficient thickness. In addition, even if it is difficult to form carbides of materials such as c0, Cr, h, ^, :: The materials mixed with =: alloy components will form carbides =: the film will contain one, ... Composition, while Co, Ni, Fe, A1 can form a dense thick film. The ratio of & at least in the middle = the case where it is alloyed with 2 elements of co, and it is found to be an electric film. When the ratio of 2 to 3 is more than 20% by volume, it is easy to form a material with a thickness ratio of ^, which is a material that will form carbides. 'However, if it is an active material such as Ti, it is a material that is more difficult to form carbides. That is, in the & f-moon shape, although it is easy to carbonize, the degree of easy carbonization is:

具一部分將成為碳化物,而一部分 、J 成為被膜。如從rnw 金屬之Cr之狀態 巧被膜h上迷結果考察時,可認為,在形成 马暝時,需要被膜中作為金屬所留 " 積計,存在雇程度以上。存的材料之比例為按體 將调查使用從粒徑i至5" 粉末所製造的電極以 315550 36 200427868 不 形成被膜時之電極硬度與被膜之厚度的關係之 如下。在此,如使用粒徑在6 又71 雷朽护 度大小之粉末以製造 電極日守,可採用上述的JISK56〇〇_5_4 # €,Ι ^ ^ ^ ΚΛ. 所規疋的塗膜用鉛 聿刮痕減驗,惟如使用粒徑較此 目丨丨Ij的粉末製造電極時, j不-適用此種試驗。於是,本例中,係採用從將】 之鋼球按15kgf之壓力按壓時之壓 ^ 民距離h(" ηι)所求得硬 又H-l〇(M〇〇〇xh之硬度之指標。 其結果,電極硬度在25至35程戶 狀能爭牡二又之更度%之被膜之 圍成緻密的厚度。但,即使多少偏離其範 仍然有能形成厚膜的範圍,硬的方向係至%程度之硬 二為止尚能形成厚膜’而軟的方向則至2 〇程度之硬度為止 尚能形成厚膜。但,隨著硬度增 ^ 則有被膜之形成诘声 ^緩慢下來的傾向,惟在5〇程度 又 ^ ^ 硬度,則厚膜之形成會 相虽困難。如再增加硬度則不能形成厚膜,而隨著硬度之 增加’會開始工件側之去除加工。又,在軟的方向,至2〇 程度為止的硬度下,雖能形成厚膜,惟有未熔融之材料合 增加之傾向’如電極較2G程度為軟時,則可發現電極成: 尚未十分溶融之下直接附著於工件側的現象。在此,此種 電極硬度與被膜之狀態之關係 ',會因所使用的放電脈衝停 件而多少變化,如使用適當的放電脈衝條件時,則亦可某 些私度擴大能形成良好的被膜的範圍。 μ 另外,如本實施形態2之粉末粒徑成為程度〇 心至5# m程度)’則放電表面處理上適當的電極之硬声 亦會增高’以實施形態、i所示的JISK56〇〇_5_4之塗膜用又 315550 37 200427868 鉛筆刮痕試驗則難於測定。因此,在此,則使用洛式硬度 / . ¾ /σ氏硬度试驗,係將球按既定荷重按壓,而從壓痕 之形狀求得硬度者。如荷重過重時,則會引起電極之破損 之,,需要作成適當的強度。硬度試驗,其他尚有維氏硬 度試驗(Vicker,shardnesstest)等,當然可用為電極硬度之 測定,惟在此情形則有屢痕之端部會崩潰等難於觀察的問 題,故壓頭形狀仍然以球狀者較佳。 ::採用本實施形態2 ’而從含有不會形成碳化物的材 枓或難以形成碳化物的材料4〇體積%以上, 極的粉末之平均粒徑為1 $ S A 再风电 _ # m的粉末,按將硬度能成 為20至50之方式製诰於雷本 電表面處理用電極,並使用此雷 極以貫施放電表面處理, 被膜。 卩了於工件表面形成緻密且厚的 實施形熊3 A將與實施形態2同樣材料之粉末作成平均丨…製 造電極。雖然係同一種材料, " 击η * l 由於將粉末粒徑改小,即可 表面處理上所適當的電極硬度。在此情形 :4: 會形成碳化物的材料或難於形成碳化物的 材料40體積%以上’則能容易形成厚膜。火化物的Some of them will become carbides, and some of them will become coatings. For example, when examining the results of the Cr of the rnw metal and the results of the film h, it can be considered that when forming a stirrup, the film must be left as metal in the film, and there is more than employment. The ratio of the existing materials is per body. The relationship between the hardness of the electrode and the thickness of the film when the electrode made from the particle size i to 5 " powder, and 315550 36 200427868 is not formed is investigated as follows. Here, if the powder with a particle size of 6 to 71 is used to manufacture the electrode guard, the above-mentioned JISK56〇〇_5_4 # €, 1 ^ ^ ^ ΚΛ. Coating lead for coating film减 Scratch reduction test, but if the electrode with a particle size smaller than Ij is used to make the electrode, j is not applicable to this test. Therefore, in this example, an index of hardness H10 (M00 × hh) obtained from the pressure when the steel ball is pressed by a pressure of 15 kgf ^ distance h (" ηι) is used. As a result, the hardness of the electrode between 25 and 35 strokes can make the thickness of the coating more dense. However, even if it deviates from its range, there is still a range that can form a thick film. The hard direction is A thick film can be formed up to a degree of hardness of 2%, and a thick film can be formed up to a hardness of about 20 degrees in a soft direction. However, as the hardness increases, the squeak of the film formation tends to slow down, However, at a degree of hardness of 50, it is difficult to form a thick film. If the hardness is increased, a thick film cannot be formed, and as the hardness increases, the removal process on the workpiece side will begin. Also, in soft In the direction, the thickness is up to 20 degrees, although a thick film can be formed, but there is a tendency to increase the amount of unmelted materials. If the electrode is softer than 2G, you can find that the electrode is: directly attached to the electrode before it is fully melted. The phenomenon on the workpiece side. Here, the hardness of this electrode and The relationship of the state of the film 'will vary to some extent due to the use of the discharge pulse stopper. If appropriate discharge pulse conditions are used, the range in which a good film can be formed can also be expanded by some privacy. Μ In addition, as in this The particle size of the powder in the second embodiment is in the range of 0 to 5 m.) 'The hard sound of an appropriate electrode on the discharge surface treatment will also increase.' For the coating film of JISK56〇_5_4 shown in the embodiment and i 315550 37 200427868 pencil scratch test is difficult to determine. Therefore, here, the Rockwell hardness /. ¾ / σ hardness test is used to determine the hardness from the shape of the indentation by pressing the ball under a predetermined load. If the load is too heavy, it will cause the electrode to be damaged, and it is necessary to make the appropriate strength. Hardness test, other still have Vickers hardness test (Vicker, shardness test), etc., of course, can be used to measure the hardness of the electrode, but in this case there are problems such as the end of the repeated marks will be difficult to observe, so the shape of the indenter is still Spherical ones are preferred. :: Using this embodiment 2 ', from a material containing no carbides or a material that is difficult to form carbides to 40% by volume or more, the average particle diameter of the pole powder is 1 $ SA and wind power_ # m of powder , It is made on the electrode of Raben electric surface treatment so that the hardness can be 20 to 50, and the lightning electrode is used to perform the discharge surface treatment, and the film is coated. In order to form a dense and thick surface on the surface of the workpiece, Embodiment 3 A made the powder of the same material as that of Embodiment 2 into an average 丨 ... to make an electrode. Although it is the same material, " click η * l As the particle size of the powder is reduced, it is possible to obtain a suitable electrode hardness for surface treatment. In this case: 4: A material that can form a carbide or a material that is difficult to form a carbide is 40% by volume or more ', and a thick film can be easily formed. Cremated

在此ί月形下,電極硬度在3〇至程度之硬 之狀態最佳,而能形成緻密又夸U 範圍,仍然有能形成厚膜的範广但’即使多少偏離其 乂子勝的乾圍,硬的方向係至 硬度為止尚能形成厚膜, 王又 年人的方向則至2 5裎声夕邡奋盔 止尚能形成厚膜。但n 又之硬度為 & $日阿,則有被膜之形成速 315550 38 200427868 :厂:反下來的傾向,惟在60程度之硬度,則厚膜 困難。如再增加硬度則不能形成厚膜,而隨著硬度 =加’會成為去除工件側的去除加卫。又,在軟的方向, 材料度為止的硬度下’雖能形成厚膜,惟有未炼融之 '、’ s a加之傾向,如電極較25程度為軟時,則可發現帝 域分尚未十分熔融之下直接附著於工件侧的現象。在- 二:T極硬度與被膜狀態之關係,會因所使用的放電 件而多少變化’如使用適當的放電脈衝條件時,則 =某:程度擴大能形成良好的被膜的範圍。又,關於從 結果:仅在1V m以下之粉末所製造的電極,獲得同樣之 料,Γ用本實施形態3,而從含有不會形成碳化物的材 桎二:形成石反化物的材料40體積%以上,並作成構成電 =粉末之平均粒徑為1…下之粉末,按將硬度能成 朽至60之方式製造放電表面處理用電極,並使用此電 ^貫施放電表面處理’即可於工件表面形成緻密且厚的 被膜。 f施形熊4 本實施形態4中,就藉由放電表面處理方法而能將工 件上所形成的被膜增厚的放電表面處理用電極加以說明。 w先ί尤d構成放電表面處理用電極的粒徑大小所引 起的硬度之變化加以說明。在第2圖之流程圖之步驟% 之加愿步驟中,將粉末加麼成型時,麼力將從與加塵面或 金屬模具面相接的粉末往電極内部傳遞,其時,粉末會微 3J5550 39 200427868In this moon shape, the electrode has a hardness of 30 to a degree of hardness, and it can form a dense and exaggerated U range. There is still a wide range that can form a thick film. Around, the hard direction can form a thick film up to the hardness, and the direction of Wang Younian can form a thick film up to 25 裎 sound Xi Xi Fen helmet. However, the hardness of n is & $ 日 阿, the formation speed of the coating is 315550 38 200427868: factory: the tendency is reversed, but at a hardness of 60 degrees, thick films are difficult. If the hardness is further increased, a thick film cannot be formed, and as the hardness = plus', it becomes a removal guard on the side of the workpiece to be removed. Also, in the soft direction and the hardness up to the material level, although a thick film can be formed, there is a tendency of "unmelted" and "sa". If the electrode is softer than 25 degrees, it can be found that the emperor domain is not very molten. The phenomenon that the bottom directly adheres to the workpiece side. In -2: The relationship between the T-pole hardness and the state of the film will vary slightly depending on the discharge device used. If a proper discharge pulse condition is used, then = =: The extent to which a good film can be formed is enlarged. Regarding the results: The same material was obtained for electrodes made of powders less than 1 V m. Γ was used in this embodiment 3 from a material containing no carbides. Second: a material that forms stone reactants. 40 Vol% or more, and make a powder with an average particle size of 1 = powder, make the electrode for surface treatment of discharge in such a way that the hardness can decay to 60, and use this electricity to apply the surface treatment of discharge Forms a dense and thick film on the surface of the workpiece. fAppearance Bear 4 In the fourth embodiment, an electrode for discharge surface treatment capable of thickening a film formed on a workpiece by a discharge surface treatment method will be described. First, the change in hardness due to the particle size of the electrode for the surface treatment of the discharge will be described. In the adding step of step% of the flow chart in FIG. 2, when the powder is molded, the force is transferred from the powder contacting the dusting surface or the mold surface to the inside of the electrode. At this time, the powder is slightly fine. 3J5550 39 200427868

日士動Λ &,如粉末之平均粒徑為數十// m程度的大小 :二:粉末與粉末之間所形成的空間將增大,而與加遷面 n拉具面相接的(電極表面之)粉末,即按能填充其空 方式私動,存在於電極表面的粒子密度將增高,而並 =之摩擦將增大。亦即’健靠電極表面即可保持對力: 莖壓力的反作用力,以致壓力不會傳遞至電極内部。此乃 電極中形成有硬度之分佈的原因。 如使用此種具有硬度分佈的放電表面處理用電極以實 把處理時,則會成為下述兩種中之任—種狀態。第1種, 係電極之外周部為最適當的硬度,而内部為過軟的情形。 在此種情形下,在電極之外周部即可在卫件上堆積被膜, 惟在其内部則不能在工件上形成被膜或形成鬆懈不堪的被 膜。第2種’係電極之外周部為過硬,而内部為軟的情形。 在此情形下,纟外周部由於放電表面處理中不會消耗電極 之故’會成為去除加工,惟在其内部則在工件上形成鬆懈 不堪的被膜。又,在電極外周部過硬以致成為工件表面之 去除加工的情形下,則由於電極内部雖然消耗,但外周部 不會消耗之故,電極放電側之面,將成為外周部突出的形 狀,而在外周部將發生多數之放電。如發生此種情況則 容易引起放電集中而放電會成為不安定。此等情況均在放 電表面處理上甚為不宜。 於是,就使用粒徑小的粉末所製造的放電表面處理用 電極之硬度與被膜之形成,進行試驗。在此,僅使用平均 粒徑1 ·2 // m之合金粉末,依照第2圖所示步驟製造$〇 315550 40 200427868 x 11 mmx 5 ·5mm之形狀之放電表面處理用電極。此時所使 用的的合金粉末,係Cr 25wt%、Ni 1 Owt%、W 7wt%、C 0·5 wt%、其餘為Co之比例之合金。又,此種組成之合金 粉末之外,亦可使用Mo 28wt%、Cr 17wt%、Si 3wt〇/〇、其 餘為Co之比例之合金、或者Cr 28wt%、Ni 5wt%、W 19wt%、其餘為Co之比例之合金等。在此,在第2圖之步 驟S6之加壓步驟中,以67MPa之壓力將粉末壓縮成型, 又,為製得具有不同的硬度的電極起見,在步驟S7之加 熱步驟中,以73 0°C及75 0°C之各溫度,使用真空爐將壓粉 體加熱一小時。 首先,就改變加熱溫度所製造的各種電極之硬度加以 研究。在此,在本實施形態4中,採用電極之壓縮強度作 為電極之硬度。第9圖,係表示測定電極之壓縮強度的實 驗裝置之概要的照片。在第9圖之實驗裝置,係按每秒ιΝ 之比例增加對電極施加負荷的力量,並藉由電極上部之測 力傳感器(load cell)以測定對電極(Electrode)所施加負荷 之力量。如到達某種力量時,則由於電極表面會發生龜裂 而所負荷的力量會釋放之故,從即將發生龜裂時之力量, 算出電極之壓縮強度。其結果,在73(rc下所加熱的電極 之i縮強度為1 〇〇MPa,在75 0°c下所加熱的電極之壓縮強 度為 180MPa。 其次’就從合金粉末所製造的電極之壓縮強度與被膜 厚度的關係,加以說明。此時之放電表面處理條件,係將 峰值電流值作成10A,將放電持續時間(放電脈衝寬度)作 315550 41 200427868 成 4 yi/ S 〇 第u圖,係表示依上述條件實施放電表面處理電 極之壓墙& ώ: Ρ 一 '、、強度與被膜厚度的關係的圖。在第i i圖中,橫軸 表不放雷本工本 ’、 电衣面處理用電極之壓縮強度(MPa),縱軸表示使 有松軸所不的壓縮強度的放電表面處理用電極以實施 方電表面處理時,在工件表面所形成的被膜厚度(mm)。 Z較縱轴之被膜厚度―為小的值,係表示不會形成被 雪表刀削工件表面的去除加工。士口亦在該圖中所示,如放 =處理用電極之壓縮強度在lGGMPa日夺,可在工件表 面上實轭堆積加工,惟如壓縮強度在i 8〇Mp“夺,則會成 =件表面之去除加工。特別是,在工件上形成厚度0.2mm 之厚被膜時,電極之壓縮強度需要在1〇〇Mpa以下。 另外’如電流之峰值或放電時間增大時,由於僅增大從電 極所供給的電極粉末量, _ 而攸電極剝取電極粉末的力量不 會增加之故,在直# ‘ τ μ ,, 在八他加工條件下仍然與第11圖同樣的結 果。 將粉末壓縮成型戶斤制、生^ α i 所I &的放電表面處理用電極之壓縮 強度,可由每單位體籍、 、 積中所含的粒子與粒子之結合數目所 決定。如平均粒徑增大拉 3大蚪,由於單位體積中所含的粒子盥 粒子之結合數目會減少之 一 之故,壓縮強度會下降。亦即,表 示祇要是平均粒徑相同,^ Mw a — 乂 如將壓細強度作成能形成厚被膜 的某值以下’則無論任何 材貝均可形成厚被膜之意。例如, 關於此種電極硬度加以者宛士 可%日可’發現使用平均粒徑約1 “ m 之合金粉末之壓粉體電極沾+ 勺放電表面處理中,作為適當的 315550 42 200427868 被膜形成的電極評價之一指針,需要管理壓縮強度為 l〇〇MPa以下之方式,惟此種能形成厚被膜的電極評價之 一指針的壓縮強度,祇要是平均粒徑相同,則即使材質改 變仍然不會改變。但,改變材質時,則需要改變電極製造 上的加熱溫度或加壓壓力等成型條件。 如上所5兒明,經確認能決定可否藉由放電表面處理而 形成厚的被膜的主要因素之一,在於電極之硬度。亦即, :使用平均粒徑在❸i " m之粉末時,改變壓縮成型時之 壓力或加熱溫度,並使用壓縮強度能成為1〇〇Mpa以下之 方式所製造的放電表面處理用電極實施放電表面處理,則 可在工件上形成厚被膜。因放電所發生的力量,會按拉門 電極粉末之方式作用,而此種力量所及範圍,心數 至0數mm。亦即,f要能以此種層級之大小而測知電極m 之強度,為此,能掌握電極之整體的硬度之壓縮 再者如電極之粉末之粒徑較小時,則即使 力同樣加熱溫度下製造電極,由於每單位體 子數增加,雖鋏一個抑;沏甘田a , 紐積之粒 …、個粒子與其周圍之粒子結合的面 不會改變’惟單位體積中所含總結合 極會變硬。 曰曰加之故,電 近年來,由於粉末之成型技術之進步,已 l 〇nm至⑽譲之平均粒徑的金屬粒末或陶兗粉末。於0 就使用平均粒徑50_之犯粉末以製造放電表二 極時之壓縮強度盘# 处里用電 〜破Μ厚度的關係,加以實驗。另外,如 315550 43 200427868 使用平均粒徑在奈米層級之粉末以製造電極時,由於僅靠 加壓即可製得具有充夠強度的電極之故,可省略第2圖之 步驟S7之加熱步驟,在本例中省略加熱步驟。又,使用 所製造的電極下的放電表面處理的放電之脈衝條件,係依 π與上述第1 〇圖所示者同樣條件下實施者。實驗之結果, 經確認如壓縮強度較l6〇MPa為低時,雖然在工件表面實 靶堆積加工,惟較此壓縮強度以上時,則會變成工件表面 之去除加工之情況。 在此,如關於平均粒徑50nm之Ni粉末之電極強度加 以考察時,發現在使用Ni粉末之壓粉體電極的放電表面處 理上,作為適當的被膜形成用的電極評價之一指針,需要 苔理壓备百強度為能成為l6〇MPa以下之方式。Japan's movement Λ &, if the average particle diameter of the powder is about tens of // m: two: the space formed between the powder and the powder will increase, and the surface of the The powder (of the electrode surface), which moves privately in such a way as to fill its empty space, the particle density existing on the electrode surface will increase, and the friction will increase. That is to say, the force against the surface of the electrode can be maintained: the reaction force of stem pressure, so that the pressure will not be transmitted to the inside of the electrode. This is why a distribution of hardness is formed in the electrode. If such a discharge surface treatment electrode having a hardness distribution is used for actual treatment, it will be in one of the following two states. In the first type, the outer peripheral part of the series electrode has the most suitable hardness, while the inner part is too soft. In this case, it is possible to deposit a coating on the guard on the outer periphery of the electrode, but it is not possible to form a coating on the workpiece or to form a loose coating on the inside of the guard. The second type is a case where the outer peripheral portion is too hard and the inner portion is soft. In this case, since the outer periphery of the cymbal does not consume electrodes during the discharge surface treatment, it is a removal process, but a loose film is formed on the workpiece inside. In addition, in the case where the outer peripheral portion of the electrode is too hard to be removed from the surface of the workpiece, although the inner portion of the electrode is consumed, but the outer peripheral portion is not consumed, the surface on the electrode discharge side will have a protruding shape on the outer peripheral portion, and Most discharges will occur in the outer periphery. If this happens, the concentration of the discharge is likely to occur, and the discharge may become unstable. In these cases, the surface treatment of the discharge is not suitable. Then, the hardness of the electrode for discharge surface treatment and the formation of the film using the powder having a small particle diameter were tested. Here, only an alloy powder having an average particle diameter of 1 · 2 // m is used, and an electrode for discharge surface treatment having a shape of $ 〇 315550 40 200427868 x 11 mmx 5 · 5mm is manufactured according to the procedure shown in FIG. 2. The alloy powder used at this time is an alloy of 25 wt% Cr, Ni 1 Owt%, W 7 wt%, C 0. 5 wt%, and the rest being Co proportions. In addition to alloy powders of this composition, Mo 28wt%, Cr 17wt%, Si 3wt〇 / 〇, alloys with the remaining Co ratio, or Cr 28wt%, Ni 5wt%, W 19wt%, and the rest can be used. Co alloys and the like. Here, in the pressing step of step S6 in FIG. 2, the powder is compression-molded at a pressure of 67 MPa, and in order to obtain electrodes having different hardnesses, in the heating step of step S7, a pressure of 73 0 is used. ° C and 75 0 ° C, use a vacuum furnace to heat the pressed powder for one hour. First, the hardness of various electrodes manufactured by changing the heating temperature was studied. Here, in the fourth embodiment, the compressive strength of the electrode is used as the hardness of the electrode. Fig. 9 is a photograph showing the outline of an experimental device for measuring the compressive strength of an electrode. The experimental device in Fig. 9 increases the force applied to the electrode at a rate of 1N per second, and the load cell on the upper part of the electrode is used to measure the force applied to the electrode. If a certain force is reached, the load on the electrode surface will be released due to cracks on the electrode surface, and the compressive strength of the electrode will be calculated from the force at the time of the crack. As a result, the shrinkage strength of the electrode heated at 73 ° C was 100 MPa, and the compressive strength of the electrode heated at 7500 ° C was 180 MPa. Next, the compression of the electrode manufactured from the alloy powder was performed. The relationship between intensity and film thickness will be explained. The discharge surface treatment conditions at this time are based on the peak current value of 10A, and the discharge duration (discharge pulse width) as 315550 41 200427868 into 4 yi / S. A graph showing the pressure-relief wall of the electrode that is subjected to a discharge surface treatment under the above conditions & The compressive strength of the electrode (MPa), the vertical axis represents the thickness (mm) of the coating film formed on the surface of the workpiece when the surface treatment electrode for discharge surface is treated with the compressive strength that loosened the loose axis. Z is longer than the vertical axis The thickness of the coating film is a small value, which indicates that the removal process of the surface of the workpiece that is being cut by a snow table will not be formed. Shikou is also shown in the figure. If the compression strength of the electrode for processing is 1 MPa, On the artifact The solid yoke is stacked on the surface. If the compressive strength is i 80 MPa, it will be removed from the surface. In particular, when forming a film with a thickness of 0.2 mm on the workpiece, the compressive strength of the electrode needs to be Below 100 MPa. In addition, 'If the current peak or the discharge time increases, only the amount of electrode powder supplied from the electrode is increased, and the power of the electrode to strip the electrode powder will not increase. # 'τ μ ,, the same results as in Fig. 11 under the conditions of Bata processing. Compressing the powder to form the electrode and producing ^ α i The discharge compressive strength of the electrode for surface treatment can be determined per unit. The number of particles and particles combined in the physical volume, volume, and volume is determined. If the average particle size is increased by 3 蚪, the number of particles combined per unit volume will decrease by one, so the compression The strength will decrease. That is, it means that as long as the average particle size is the same, ^ Mw a — 乂 If the crushing strength is made below a certain value that can form a thick film, then any material can be used to form a thick film. For example, About this The electrode hardness applicator Wan Shico% Nikko 'found that the use of alloy powder with an average particle size of about 1 "m in the powder electrode dip + spoon discharge surface treatment, as an indicator of the appropriate 315550 42 200427868 film formation electrode evaluation It is necessary to manage the compressive strength of 100 MPa or less. However, the compressive strength of this pointer, which is one of the electrode evaluations that can form a thick film, will not change even if the material is changed as long as the average particle size is the same. However, the change In the case of materials, it is necessary to change the molding conditions such as heating temperature or pressurization pressure on the electrode manufacturing. As explained in 5 above, it is confirmed that one of the main factors that can determine whether a thick film can be formed by discharge surface treatment is the electrode. hardness. That is, when using a powder having an average particle size of ❸i " m, the pressure or heating temperature during compression molding is changed, and the discharge surface treatment electrode manufactured in such a manner that the compressive strength can be 100 MPa or less is used for discharging. Surface treatment can form a thick film on the workpiece. The force due to the discharge will act as a sliding door electrode powder, and the range of this force is from the heart to 0 mm. That is, f must be able to measure the strength of the electrode m with this level of size. For this reason, the compression of the overall hardness of the electrode can be grasped. If the particle size of the electrode powder is small, even the force is heated. Manufacture of electrodes at temperature, although the number of units per unit increases, although the number of units per unit is reduced; the surface bound by the particles of Gantian a, the nucleus ..., the particles and the surrounding particles will not change, but the total binding electrode contained in the unit volume Will harden. As a matter of fact, in recent years, due to the advancement of powder molding technology, metal particles or ceramic powders with an average particle size of 10 nm to 兖 have been used. At 0, experiments were carried out using a powder with an average particle size of 50 mm to produce a compressive strength disc # where the discharge meter diode was used. In addition, if 315550 43 200427868 is used to produce electrodes with powders with an average particle size in the nanometer level, since the electrodes with sufficient strength can be produced only by pressing, the heating step of step S7 in FIG. 2 can be omitted. In this example, the heating step is omitted. In addition, the pulse conditions of the discharge using the surface treatment of the discharge under the manufactured electrode were performed under the same conditions as those shown in Fig. 10 above. As a result of the experiment, it was confirmed that if the compressive strength is lower than 160 MPa, although the target is stacked and processed on the surface of the workpiece, when the compressive strength is higher than this, it will become the processing of removing the surface of the workpiece. Here, if the electrode strength of Ni powder with an average particle diameter of 50 nm is examined, it has been found that, in the discharge surface treatment of a pressed powder electrode using Ni powder, moss is required as one of the indicators for proper electrode evaluation for film formation. The physical strength of the pressure-preserving device is such that it can be less than 160 MPa.

如上所述,將粉末壓縮成型所製造的電極之壓縮強 j,係由每單位體積中所含粒子與粒子之結合之數目所決 疋。如平均粒徑變小時,由於單位體積中所含粒子與粒子 之結合之數目會增加之故,壓縮強度會增高。又,如上述, 發現在使用平均粒徑50nmiNi粉末之壓粉體電極的放電 表面處理上,作為適當的被膜形成用的電極評價之一指 針’需要管理壓縮強度為16GMPa以下之方式。此種發^, 如與平均粒徑為1.2/zm之情形之結果合併考察時,係表 -隨著平均粒徑之不同,而能形成厚被膜的電極之麼縮強 f亦不同之意。又,作為適當的被膜形成用之電極評價之 :指針的壓縮強度之值,祇要是平均粒徑相同,係不會因 電極材料之材質而有所不同。因此,如判斷由平均粒徑小 315550 44 200427868 的粉末所成放電表虛 心^ 處理用電極’能否堆積厚被膜時,則As described above, the compressive strength j of an electrode produced by powder compression molding is determined by the number of particles and particle combinations per unit volume. If the average particle size becomes smaller, the number of particles and particle combinations per unit volume will increase, and the compressive strength will increase. As described above, it has been found that, in the discharge surface treatment of a compacted powder electrode using an average particle diameter of 50 nmi, it is necessary to manage the compressive strength of 16 GMPa or less as one of the indicators for appropriate electrode evaluation for film formation. This kind of development, if combined with the results of the case where the average particle size is 1.2 / zm, is a table-as the average particle size is different, the shrinkage f of the electrode that can form a thick film is also different. In addition, as a suitable electrode for film formation evaluation, the value of the compressive strength of the pointer does not differ depending on the material of the electrode material as long as the average particle diameter is the same. Therefore, if it is judged whether the discharge meter is made of powder with a small average particle size of 315550 44 200427868 ^ whether the electrode for processing can accumulate a thick film, then

可將其壓縮強度增大。 T JIts compressive strength can be increased. T J

Co中再太者1作為其他電極材料,而使用平均粒徑3㈣之 之結果,㈣認料積㈣ ί = Μ縮強度,為5崎&程度。在此情形下,亦經確 :,:…藉由放電表面處理而形成厚的被膜的主要因 ”之纟於電極之硬度。亦即,經確認如使用平均粒徑 之粉末,改變壓縮成型時之壓力或加熱溫度以製造壓 =成為50MPa以下的電極’並使用其電極以實施放電 表面處理時’則能在工件表面形成厚的被膜。 在此情形下,由於將粉末I缩成型所製造的電極之壓 縮強f ’係由每單位體積中所含粒子與粒子之結合之數目 所決定之故’作為適當的被膜形成用之電極評價之一指針 的壓㈣度之值’祇要是平均粒徑相同’係不會因電㈣ 料之材質而有所不同。因此,如判斷由平均粒徑大的粉末 所成放電表面處理用電極’能否堆積厚被膜時,則有需要 將其壓縮強度作成偏低些。 而 第11圖,係表示平均粒徑與能堆積厚被膜的電極之壓 縮強度的關係圖。在第丨丨圖中,橫軸係以對數刻度表示構 成放電表面處理用電極的粉末之平均粒徑(//111),而2二表 示能在工件表面形成被膜的電極之壓縮強度之堆積界限壓 縮強度(MPa)。如此圖所示,平均粒徑愈小,愈增加堆積^ 界限壓縮強度。 S ^ 如採用本實施形態4,而將平均粒徑為1 v m之粉末作 315550 45 200427868 為原料,使用壓縮強度能成為i 〇〇MPa以下之方式所製造 的放電表面處理用電極以實施放電表面處理,即能在二^ 上形成在高溫環境下具有潤滑性的緻密的厚膜。又,平均 粒徑為50nm之粉末時,按壓縮強度能成為i6〇Mpa以下 之方式…平均粒徑為3"爪之粉末時,按I縮強度能 成為50MPa以下之方式制;生妨φ主工士 m 广心乃八衣w放電表面處理用電極,並使用As for other electrode materials in Co, 1 is used as the other electrode material. As a result of using an average particle size of 3 ㈣, it is found that ㈣ = Μ shrinkage strength, which is about 5 Saki & In this case, it was also confirmed that: ... the main reason for forming a thick film by the surface treatment of the discharge is "the hardness of the electrode". That is, it is confirmed that if a powder having an average particle diameter is used, the compression molding is changed. Pressure or heating temperature to produce an electrode with a pressure of 50 MPa or less, and when the electrode is used to perform a discharge surface treatment, a thick film can be formed on the surface of the workpiece. In this case, the powder I was produced by shrink molding The compressive strength f of the electrode is determined by the number of particles and particle combinations per unit volume. 'The value of the pressure as a pointer of a suitable electrode evaluation for film formation', as long as it is the average particle diameter The same 'system does not differ according to the material of the electric material. Therefore, if it is judged whether the electrode for discharge surface treatment made of a powder with a large average particle size can deposit a thick film, it is necessary to make its compressive strength. On the other hand, Figure 11 is a graph showing the relationship between the average particle size and the compressive strength of an electrode capable of depositing a thick film. In the figure, the horizontal axis represents the discharge on a logarithmic scale. The average particle diameter of the powder for surface treatment electrode (// 111), and 22 represents the compressive strength of the electrode that can form a coating on the surface of the workpiece. The compressive strength increases with increasing stacking. S ^ If this embodiment 4 is adopted, a powder having an average particle size of 1 vm is used as a raw material 315550 45 200427868, and the compressive strength can be manufactured below i MPa. The discharge surface treatment electrode is subjected to discharge surface treatment, which can form a dense thick film having lubricity under high temperature environment on the surface. When the powder has an average particle diameter of 50 nm, the compression strength can be i60 MPa. The following method ... When the average particle size is 3 " claw powder, it is made in such a way that the shrinkage strength can be less than 50MPa; students may use φ master engineer m Guangxin Naiba w discharge surface treatment electrode, and use

其放電表面處理用電極以實施放電表面處理,即能在工件 上形成高溫環境下具有潤滑性的緻密的厚膜。 再者,如採用本實施形態4’而將所製造的放電表面 處理用電㈣於放電表面處理時,可使用其壓縮強度以呼 價能否在工件上堆積厚被膜。藉此,亦能適用於放電表面 處理用電極在同樣條件下—次大量製造時之電極之呼严 上。具體而言,係將從同-條件下—次大量製造的電^ 中所抽出m複數個電極之㈣強度之測定結果 :同時所製造的電極之評價者。由此,在電極之大 時,亦能管理所有電之品質。 个員他% 的放電表面處理上,不致降低二獨體電極使用 个致b低表面粗糙度下能進行 放電:二能堆二厚被膜的放電表面 二施形悲、1至3所說明者,如藉由放電表面處理而 二、面上形成厚膜時,需要將不會形成碳化物的材料 或難以形成碳化物的碳化物的材料 : 上等的材料上的條件+僅添加不會形成碳^ 315550 46 200427868 或難以形成;δ反化物的材料於電極中時,有工件上表面所开/ 成中厚膜中將殘留空穴,以致難以形成緻密的被膜的問 題。於是,在本實施形態5中,即就為能形成厚膜且緻密 的被膜上所需要的技術,加以說明。 ^ 在此,舉含有 Cr 30%、Ni 3%、Mo 2%、W 5%、Fe 3〇/0 等以Co為基材之合金(以下,簡稱c〇合金)為例,加以說 明。此種Co合金粉末,係使用市售品。另外,c〇合金= 言,含有Cr 25。/。、Ni 10%、W 7%等以Co為基材之合金、 或含有Cr25%、Ni10%、W7%等以c〇為基材的合全^ 含有〇2〇%、川10%、^5%等的以。為基材之合金等三· 祇要是含有以Co為基材者即可。 、, ^见仍个7 呢上述$ 圖之步驟以製造放電表面處理用電極。此時之步驟%中 的加壓步驟中之加麼麼力最好在93至28〇Mpa程度 此麼力為高時,則電極之硬度上會產生偏差,或在加㈣ 電極上會發生氣裂(air crack)。 如使用依上❹式所製造之Cg合金粉末所成放電表 面處理用電極以實施放雷矣走 耳她放電表面處理時,將在工件表面形成 C 〇 a金之被膜。但,從♦明望 总一 攸毛明人寻的實驗,發現被膜之性能 中所佔電極材料之粉末之比例之影響很大。由於 電極係將粉末材料加以i缩成型所製作之故,成為存有* 間多的狀態。如此種*門、β+ 、有工 此種工間過多時,則電極強度會降 不能藉由放電之脈衝而正f -大 會發生因放電之衝擊而電極材料之供給。例如, Γ#而電極即在廣泛範圍崩壞等現象。另 315550 47 200427868 方面’如空間過少時’電極太過堅固地密接,而發生藉 由放電脈衝的電極材料之供給減少的現象,以致不能形成曰 厚膜。 乂 在此所使用的粒徑3 # m程度之粉末,係將粒徑數十 ^之粒徑之粉末粉碎所製造,而粒徑之粒度分佈為具有 3 // m為峰值的分佈的粉末。如將此種相當程度均勾的 t徑之粉末I缩成型以製造電極時,根據本發明人等之實 ===在能形成良好被膜的電極之電極體積中所佔 =積比例(其餘為空間),係在25%至5〇%之範圍。但, 下,簡稱電極材料之比例)在 25/。%,作為電極而言,為相當 ^ r; . , Ί人且有強度不足夠的咸 覺。相反地,如電極材料之比 頂饮 达上止 U /〇 4,作為電極而t, ‘”、目虽堅硬且部分有產生氣裂的情形。將 σ 極材料體積之比例所引起情形之因電 於表1中。作,…": 之概略情況,列示 此種比例,會因粉末粒 會變化,例如,使用4 ;^八 二之刀佈4而多少 空間率(,〇雷:的粉末時,則有電極之 電極材料體積之比例)% 反地,如使用粒徑分佈較狹窄的粉末日士,牛低的傾向。相 率會增大的傾向。 守,則有電極之空間 315550 48 200427868 表1 電極材料體積之比例 被膜之狀態 15% 電極崩潰而不能使用 20% 雖能形成被膜,惟鬆懈不堪之狀態 25% 雖屬多孔性,惟尚能形成厚膜 30% 能形成緻密的厚膜 40% 能形成緻密的厚膜 50% 雖能形成緻密的厚膜,惟膜之形成緩慢。 55% 進行工件之去除加工,以致不能形成厚膜。 另一方面,如將粒徑不同的粉末混合時,例如,於上 述例中所使用的粒徑3 // m程度中混合粒徑6 // m程度之粉 末時,電極材料體積在能形成良好被膜的電極之電極體積 所佔之比例係在40至65%之範圍。但,電極材料體積之 比例在40%時,作為電極而言,為相當柔軟且有強度不足 夠的感覺。相反地,如電極材料體積之比例在65%時,作 為電極而言,為相當堅硬者。將此種情形之因電極材料體 積之比例所引起的被膜之狀態之概略情況,例示於表2 中 〇 表2 電極材料體積之比例 被膜之狀態 30% 電極崩潰而不能使用 35% 雖能形成被膜,惟鬆懈不堪之狀態 40% 雖屬多孔性,惟尚能形成厚膜 50% 能形成緻密的厚膜 60% 能形成敏密的厚膜 65% 雖能形成緻密的厚膜,惟膜之形成緩慢。 70% 進行工件之去除加工,以致不能形成厚膜。 如採用本實施形態5,由於作成使用經考慮電極材料 在電極體積所佔之體積比例之放電表面處理用電極以貫施 49 315550 200427868 放電表面處理之方式之故’即使以金屬粉末作為原料所製 造的放電表面處理用電極,亦能在工件上形成無空穴的緻 密的被膜。 另外’在上述專利文獻2中,在能以極高的壓力形成 的陶瓷電極方面,有使用經壓縮成型為理論密度之5〇%至 9 0%之方式的電極的記錄,惟並非係如本實施形態$之形 成緻密的金屬之厚膜者,故其技術範圍、用途 '效果亦不 相同。 實施形熊6 本實施形態6中,在採用將金屬粉末壓縮成型所製造 的放電表面處理用電極方面,就能堆積厚的被膜的放電表 面處理,加以說明。The discharge surface treatment electrode is subjected to discharge surface treatment, that is, a dense thick film having lubricity under high temperature environment can be formed on the workpiece. In addition, when using the fourth embodiment of the present invention to manufacture a discharge surface treatment electrode for discharge surface treatment, the compressive strength can be used to determine whether a thick film can be deposited on the workpiece. This can also be applied to the discharge of the surface treatment of the electrode under the same conditions-the same time the mass production of the electrode. Specifically, it is the measurement result of the pseudo-strength of a plurality of electrodes extracted from the same amount of electricity produced at the same time: the evaluator of the electrodes produced at the same time. Therefore, even when the electrode is large, the quality of all electricity can be managed. The discharge surface treatment of each individual does not reduce the discharge of the two-single electrode with a low surface roughness. The discharge surface of the two-thick film with two thick coatings can be discharged, as described in 1 to 3. For example, when a thick film is formed on the second and second surfaces by discharge surface treatment, a material that does not form carbides or a material that is difficult to form carbides is required: Conditions on top-grade materials + addition of carbon only ^ 315550 46 200427868 or difficult to form; when the material of δ reactant is in the electrode, there will be residual holes in the upper surface of the workpiece / formed into a medium-thick film, making it difficult to form a dense film. Therefore, in the fifth embodiment, a technique required to form a thick film and a dense film will be described. ^ Here, Co-based alloys (hereinafter referred to as "co alloys") containing 30% of Cr, 3% of Ni, 2% of Mo, 2% of W, and 5% of Fe 3/0 will be described as examples. Such Co alloy powder is a commercially available product. In addition, the alloy C0 contains Cr 25. /. , Ni 10%, W 7%, such as Co-based alloys, or alloys containing Cr25%, Ni10%, W7%, etc., based on C0 ^ Contains 0% 20%, Sichuan 10%, ^ 5 % And so on. Alloys and the like which are base materials Three. As long as it contains Co as a base material, it is sufficient. See the steps in Figure 7 above to fabricate electrodes for discharge surface treatment. At this time, it is best to add the force in the pressurizing step in the step% to 93 to 280 MPa. When the force is high, the hardness of the electrode will be biased, or gas will be generated on the electrode Crack (air crack). If the discharge surface treatment electrode made of Cg alloy powder manufactured according to the above formula is used to perform lightning discharge, the surface of the workpiece will be formed with a coating of gold. However, from the experiments conducted by Mao Ming and others, it was found that the proportion of the powder of the electrode material in the performance of the coating has a great influence. Since the electrode system is made of powder material by i-shrink molding, it has a state of having a lot of space. If there are too many gates, β +, and work, the strength of the electrode will be reduced. The positive pulse f-will not be supplied by the discharge pulse, and the supply of electrode material will occur due to the impact of the discharge. For example, Γ # and the electrode collapse in a wide range. On the other hand, 315550 47 200427868 In the case of “too little space,” the electrodes are too tightly connected, and the supply of electrode materials by the discharge pulse is reduced, so that a thick film cannot be formed.粉末 The powder with a particle size of 3 # m used here is made by crushing a powder with a particle size of several tens of millimeters, and the particle size distribution is a powder with a distribution of 3 // m as a peak. For example, when this type of powder I with a substantially uniform diameter of t diameter is shrink-formed to manufacture an electrode, according to the inventors' practice, etc. === the proportion of the electrode volume of the electrode that can form a good coating = the product ratio (the rest is Space), in the range of 25% to 50%. However, hereinafter, the ratio of electrode materials is 25 /. %, As an electrode, it is quite ^ r;., Sultry and has a salty feeling of insufficient strength. On the contrary, if the ratio of the electrode material reaches the upper limit U / 〇4, as the electrode, t, "", although the mesh is hard and part of the gas crack may occur. The cause of the situation caused by the proportion of the volume of the σ electrode material Electricity is shown in Table 1. The general situation of "..." shows the ratio of this ratio, which will vary due to powder particles, for example, using 4; ^ eighty-two knife cloth 4 and how much space ratio (, 0 Ray: In the case of powder, there is a ratio of the volume of the electrode material of the electrode)% Conversely, if a powder with a narrow particle size distribution is used, it tends to be low. The phase rate tends to increase. Shou, there is room for the electrode 315550 48 200427868 Table 1 Proportion of volume of electrode material 15% of the state of the coating The electrode collapses and cannot be used 20% Although it can form a coating, it is in a relaxed state 25% Although it is porous, it can still form a thick film 30% Can form a dense 40% of the thick film can form a dense thick film 50% Although it can form a dense thick film, the film formation is slow. 55% The removal process of the workpiece prevents the formation of a thick film. On the other hand, if the particle size is different When powder is mixed, For example, when powders with a particle size of about 6 // m are used in the particle size of 3 // m used in the above example, the ratio of the volume of the electrode material to the electrode volume of the electrode that can form a good film is 40 to 65% range. However, when the electrode material volume ratio is 40%, the electrode is relatively soft and has insufficient strength. On the contrary, if the electrode material volume ratio is 65%, the electrode material is used as an electrode. In other words, it is a very hard person. The outline of the state of the coating caused by the proportion of the volume of the electrode material in this case is shown in Table 2. Table 2 The proportion of the volume of the electrode material is 30% of the state of the coating. The electrode cannot be collapsed. Although the use of 35% can form a film, the relaxed state of 40% is porous, but still can form a thick film 50% can form a dense thick film 60% can form a dense thick film 65%, although it can form a dense Thick film, but the formation of the film is slow. 70% of the workpiece is removed so that a thick film cannot be formed. If this embodiment 5 is adopted, the volume ratio of the electrode volume to the electrode volume due to the use of the electrode material is considered. The discharge surface treatment electrode is applied in accordance with 49 315550 200427868 discharge surface treatment. 'Even if the discharge surface treatment electrode is manufactured using metal powder as a raw material, it can form a dense, non-cavity coating on the workpiece.' In the above-mentioned Patent Document 2, there is a record that an electrode that can be formed by compression molding to 50% to 90% of the theoretical density is used for a ceramic electrode that can be formed at an extremely high pressure, but it is not the same as this embodiment Those who form a thick film of dense metal also have different technical scopes and uses. The effect is different. Embodiment 6 In this embodiment 6, the electrode for discharge surface treatment manufactured by compression molding of metal powder is used. The discharge surface treatment capable of depositing a thick film will be described.

在由第2圖所示過程所製造的放電表面處理用電極方 面’如粉末與粉末之結合強時,粉末間之熱之傳遞順利進 行,亦即熱傳導率增大,相反地,如其結合弱日寺,則粉末 間之熱之傳遞不會順利進行’以熱傳導率降低。如提高加 熱溫度,則粉末與粉末之金屬結合進展,而電極之熱傳率 增大。相反地,如降低加熱溫度,則粉末與粉末之士 合不甚進展,而電極之熱傳導率降低。 、〇 …之熱傳導率(對每單位長度、單位溫度之能量) 較低時’由於局部性地成為高溫之故,可藉用放電之熱量 ==材料一瞬間即氣化。藉由此爆發力而剝取電極之 "方:或㈣部’⑼電極所脫離者即堆積在卫件表面。另 -方面〜極之熱傳率較高時,由於熱容易擴散之故難 315550 50 200427868 以產生熱斑點(heat spot),以致電極材料殆不會氣化。因 此’不會發生爆發力,以致不能供給電極材料。由此可知, 件表面形成厚被膜時,f要在王件上堆積較構成工 :的材料之去除量為多的量之電極材料,目此,放電表面 處理用電極之熱傳導率需要較低者。 、以下,就降低放電表面處理用電極之熱傳導率之作法 加以說明。依照第2圖之過程,僅使用平均粒徑"心 之合金粉末,以製造5〇mmx u_x 5 5_之形狀之放電 表面理用電極。此時所用的合金粉末,係Cr25wt%、NiIn the electrode for discharge surface treatment manufactured by the process shown in FIG. 2, if the combination of the powder and the powder is strong, the heat transfer between the powders proceeds smoothly, that is, the thermal conductivity increases. On the contrary, if the combination is weak, Temple, the heat transfer between the powders will not proceed smoothly 'with a decrease in thermal conductivity. If the heating temperature is increased, the combination of powder and powder metal progresses, and the heat transfer rate of the electrode increases. Conversely, if the heating temperature is lowered, the powder-to-powder combination will not progress, and the electrode's thermal conductivity will decrease. When the thermal conductivity (energy per unit length and unit temperature) is low, ’is due to the localized high temperature, so the heat of discharge can be borrowed == the material vaporizes in an instant. With this explosive force, the "square" or "electrode" of the electrode is accumulated on the surface of the guard. On the other hand, when the heat transfer rate of the electrode is high, it is difficult to diffuse the heat due to heat 315550 50 200427868 to generate heat spots, so that the electrode material does not vaporize. Therefore, no explosive force occurs, so that the electrode material cannot be supplied. It can be seen that when a thick film is formed on the surface of the piece, f should deposit more electrode material on the king piece than the material that constitutes the material: For this reason, the thermal conductivity of the electrode for discharge surface treatment needs to be lower . In the following, a method for reducing the thermal conductivity of the electrode for discharge surface treatment will be described. In accordance with the process of Fig. 2, only the alloy powder with an average particle size " heart " was used to produce a discharge surface treatment electrode having a shape of 50 mmxu_x5 5_. The alloy powder used at this time is Cr25wt%, Ni

Si 3wt/。,其餘為c〇之比例之合金或& μ% Wt%、Ni5wt%、Wl9wt%其餘為c〇之比例之合金。再者, 在第:圖之步驟S6之加壓步驟中,以67购之壓力將粉 末成型,X,為製得具有不同硬度的電極起見,在步 驟S7之加熱步驟中,在73(TC及750t之各溫度下,在真 空爐:加熱壓粉體1小時…放電表面處理,係以與實 施形態4同樣之放電脈衝條件實施者。 “首先,就改變加熱溫度所製造之各電極之熱傳導率依 雷射閃燦(Laser flash)法加以調查。其結果,在下所 加熱的電極之熱傳導率為1〇w/mK,而在75〇它下所加熱 的電極之熱傳導率為12W/mK。 i〇wt%、W7wt%、C05wt%’其餘為c〇之比例的合金。 除此種組成之合金粉末之外’尚可使用M。28%、Cr 第12圖,係表示使用熱傳導率不相同的放電表面處理 用電極實施放電表面處理5分鐘時,於工件表面所形成的 315550 51 200427868 被膜厚度與放電表面處理用雷 用冤極之熱傳導率之關係圖。在 第12圖中,橫輛矣干於 釉表不放電表面處理用電極之熱傳導率 (W/mK),^轴表示使用呈 丁便用具有检軸所示之熱傳導率的放電表 面?理用電極實施放電表面處理時在工件表面所形成的被 厚度(mm)。在此,如縱軸之被膜厚度值為負時,則表示 去除加工之意。,1*卜同沉·- 回斤不,加工時間相同時,熱傳導率Si 3wt /. The rest are alloys with a proportion of c0 or & μ% Wt%, Ni5wt%, W19% by weight. The rest are alloys with a proportion of c0. Moreover, in the pressing step of step S6 in the figure: the powder is molded at a pressure of 67, X, in order to obtain electrodes with different hardness, in the heating step of step S7, at 73 (TC And the temperature of 750t, in a vacuum furnace: heating and pressing the powder for 1 hour ... discharge surface treatment is performed under the same discharge pulse conditions as in Embodiment 4. "First, the heat conduction of each electrode manufactured by changing the heating temperature The rate was investigated according to the Laser flash method. As a result, the thermal conductivity of the electrode heated below was 10 w / mK, and the thermal conductivity of the electrode heated at 75 ° was 12 W / mK. i〇wt%, W7wt%, C05wt% 'all other alloys in the proportion of c0. In addition to alloy powder of this composition' M can also be used. 28%, Cr Figure 12 shows the use of different thermal conductivity 315550 51 200427868 film thickness on the surface of the workpiece and the thermal conductivity of the lightning electrode used for the discharge surface treatment when the discharge surface treatment electrode is subjected to discharge surface treatment for 5 minutes. Dry glaze table not discharge meter The thermal conductivity (W / mK) of the processing electrode. The ^ axis indicates the thickness of the coating surface (mm) formed on the surface of the workpiece when the discharge electrode is subjected to a discharge surface treatment using a discharge surface with a thermal conductivity indicated by the inspection axis. ). Here, if the value of the film thickness on the vertical axis is negative, it means to remove the processing., 1 * Bu Tongshen ·-Return to weight, when the processing time is the same, the thermal conductivity

愈低被膜厚度會愈厚。又,電極之熱傳導率約n.8W/mK 以上時’ Μ會成為去除工件表面之去除加玉。由此,從實 毛現如奴形成厚被膜時,電極之熱傳導率需要在 iUW/mK以下。特別是,如欲形成〇·2_以上之厚被膜 時’則需要電極之熱傳導率為1QW/mK以下。 "在放電表面處理後,如觀察熱傳導率為12w/mK之放 電表面處理用電極之經發生放電的面日寺,可確認電極之粉 末溶融、並、、、二再破固的結果之金屬光澤。亦即,經發生放 電之面並非係粉末互相稍微結合的壓粉體,而係成為金屬 籾末融後互相黏接所形成的再凝固體。另一方面,熱傳 V率為1 0 W/mK之放電表面處理用t極之經發生放電的面 之狀態,係未能觀察到光澤。 一如此,熱傳導率為丨〇 w/mK以上時,則由於電極上不 曰形成熱斑點,並電極與電弧(arc)柱相接的部分殆不氣化 之故,爆發力變小以致不能完全去除電極上所形成的熔融 域,而殘留在電極表面。並且,由於放電之反覆進行而其 蛤嘁域畜積,電極表面上形成經熔融、再凝固的金屬層。 如形成有此種金屬層,則不再有從電極移行到工件的電極 52 315550 200427868 粉’而成為去除工件表面的去除加工。 八私f夕卜在本霄施形態6中,係就具有如上述組成的合 孟秦末之情形加以說明杳 士 ^ 兄月者,惟在Co合金粉末、Ni合金粉 禾或F e合金粉末之彳主The lower the film thickness, the thicker it will be. In addition, when the thermal conductivity of the electrode is about n.8W / mK or more, ′ M will be a removal additive for removing the surface of the workpiece. Therefore, when a thick film is formed from solid hair, the thermal conductivity of the electrode needs to be iUW / mK or less. In particular, when a film having a thickness of 0.2 mm or more is to be used, 'the thermal conductivity of the electrode is required to be 1 QW / mK or less. " After the surface treatment of the discharge, if you observe the surface of the discharge surface treated electrode with a thermal conductivity of 12w / mK, you can confirm that the powder of the electrode is melted, and the metal is broken. luster. In other words, the surface on which the discharge occurs is not a compacted body in which the powders are slightly combined with each other, but a re-solidified body formed by the adhesion of the metal powder to each other. On the other hand, in the state of the discharge-treated surface of the t-pole for discharge surface treatment with a heat transfer V rate of 10 W / mK, gloss was not observed. In this way, when the thermal conductivity is above 〇0w / mK, because the hot spots are not formed on the electrode, and the part where the electrode is in contact with the arc column is not gasified, the explosive force becomes small and cannot be completely removed. The molten domains formed on the electrode remain on the electrode surface. In addition, due to the repeated discharge of the discharge and the accumulation in the toad field, a molten and re-solidified metal layer was formed on the electrode surface. If such a metal layer is formed, there is no longer an electrode that migrates from the electrode to the workpiece 52 315550 200427868 powder 'and becomes a removal process to remove the surface of the workpiece. Eight private individuals in the sixth form of this book, the situation of the composition of the above-mentioned Meng and Qin Dynasty will be explained ^ Brothers, but Co alloy powder, Ni alloy powder or Fe alloy powder The Lord

、 月$ ’如同樣製造熱傳導率10W/mK 以下的電極,並使用該電每 形成厚被膜。 “施放電表面處理,則亦能 =係將粉末屋縮成型的I粉體,而決⑽響)電極 之熱傳導率者,並非雷} ‘末之材質,而係粉末與粉末之 —、目此’對所有材料,如按熱傳導率(1請〜κ) 以下之方式製造電極,則能在工件上形成厚被膜。例如, 即使使用熱傳導率良好的Cu(約300w/mK)或 A1(2〇〇W/mK)’祇要是從其粉末所製造的電極之熱傳導率 能符合上述之熱傳導率(刪mK)者,則能在工件表面上米 成厚被膜,惟如其熱傳導率為上述之熱傳導率以上時,則 不能在工件上形成被膜。 、 從本實施形態6,由實驗可證明如使用埶傳導率在 1〇·Κ以下之電極,則可形成厚被膜,亦經證明將其值 用為形成厚被膜上之電極所需要的指標時之有用性。如 此,如作為電極之指標而使用熱傳導率,則有可簡單^估 月b形成尽被膜的電極之好處(merit)。 另外,關於放電加工用之電極之熱傳導率方面, 專利特開昭54-124806號公報中記載有將電極之熱傳^ ^ 作成〇.5KCal/cm.sec,C以下的作法。但,該日本專利特 開昭54-124806號所記載之發明,係以避免電極之消耗, 315550 53 200427868 電加工 電表面處 並將電極形狀抄錄加H上為目的之有關放 者’而非如本發明之有關在工件上形成被膜的放 理用電極者。 …日本專利特開昭5心丨248〇6號公報中,雖然並無 熱傳導率之下限值之記載,惟很明顯可瞭解,#降低電極 之熱傳導率(例如,1QW/mK)時,則不能達成電極上形成熱 斑點、消耗電#、並抄錄加工形狀等的放電加工之目的。 亦即,與如本實施形態6般之積極消耗電極而在工件上形 成被膜的放電表面處理之方式…的與手法截然有戶“ 同者。再者,該 〇.5Kcal/cm · sec · t (=2〇93〇3w〜k)之值 〇大車乂先箾"心為熱傳導率最高之純銅之值398〇W/mK言 出甚多。 如依照本實施形態6,由於使用熱傳導率在 -以下之放電表面處理用電極以實施放電表面處理之方式, _故即使以金屬粉末作為原料所製造的放電表面處理用電 極’仍然能在工件上形成原被膜。 _如上所說明,如依照本發明,由於按照粉末之粒徑, 將放電表面處理用電極之硬度、其壓縮強纟、電極材料體 積在其體積所佔之比例、以及其熱傳導率等能符合既定之 範圍内之方式製造,並使用其電極以實施放電表面處理之 方式之故,能於工件上形成緻密的厚被膜。 f施形熊7 在本實施形態7中,作為電極之評價方法,就依既定 條件實際使放電連續發生,從電極之消耗量、處理時間、 315550 54 200427868 所升乂成=被膜厚度評價電極之優劣之方法,加以說明。 將實施形態4所示合金粉末(經粉碎為平均粒徑l2# 者)[纟侣成型’以製造5〇_χ n_x 5 形狀之放電 表面處理用電極。本電極製造之過程,係與實施形態4者 相同如此所製造的電極係在管理粉末粒徑、製造條件之 下所製造者,惟有時會因製造時之氣溫或濕度之不同、粉 末之粉碎狀態、臘與粉末之混合狀態等而產生偏差。在上 j中’係就藉由電極硬度等以管理此等偏差的方法,加以 兄月准除此種方法之外’亦可使用電極直接實施被膜之 形成以調查。 "第13Α圖至第13C圖,係為說明藉由成膜試驗以判定 電:之優劣的方法之概要用的圖。在此等圖中,對與實施 形態1之第1圖所使用者之同樣之構成要件則附以同樣符 Π;ϋ在此此等圖係為說明有關判定方法之概略用的圖之 故,電源或驅動軸等之構成要件則加以省略而未圖示。 、本實施形態、7之電極之評價方法中,係使用如上述方 式所製造的電極並藉由既定量之放電表面處理以實施被膜 之形成。在上述電極之情形,從處理之簡便性來看,最好 按llmmx 5.5mm之面能成為放電面之方式設置,惟亦可 設置為其他面能成為放電面之方式。首先,如第i3A圖所 示,實施電池12與工件U間之定位工作。接著,如第ΐ3β 圖所不’開始放電’以進行被膜形成。㈣,如第nc圖 所不,工件11上將形成被膜丨4。於第13B圖及第13C圖 中,符號17表示放電之電弧柱。在此,將電極12往圖之 315550 55 200427868 z軸之朝下方向驅動的距離保持在既定之值,卩測定成膳 形成吟間及所形成的被膜厚度。在此,z軸方向之推送量 係作成2mm。由於將電極朝z軸方向推送。匪之故,被 '成後之電極/肖乾量(長度)為2咖+(所形成的被膜厚 度)+ (放電間隙(gap))。放電間隙為數1〇至程度。 又,士放電表面處理條件,係作成峰值電流值ie=10A、放電 :績時間(放電脈衝時間)一…。將實際實施成膜試驗的 結果’表示表3中。 表3In the same manner, an electrode having a thermal conductivity of 10 W / mK or less is manufactured in the same manner, and a thick film is formed using this electrode. "The surface treatment of the discharge can also be the I powder that is formed by the powder house shrinking, and it will not work.) The thermal conductivity of the electrode is not the material of the ray}, but the powder and powder- 'For all materials, if the electrode is manufactured with the following thermal conductivity (1 please ~ κ), a thick film can be formed on the workpiece. For example, even if Cu (approximately 300w / mK) or A1 (2〇) with good thermal conductivity is used. 〇W / mK) 'As long as the thermal conductivity of the electrode made from its powder can meet the above-mentioned thermal conductivity (delete mK), it can form a thick film on the surface of the workpiece, but if its thermal conductivity is the above-mentioned thermal conductivity In the above case, it is not possible to form a coating on the workpiece. From this sixth embodiment, it has been experimentally proven that if an electrode having a 埶 conductivity below 10 · K is used, a thick coating can be formed, and its value has been proven to be used as Usefulness for forming indicators required for electrodes on thick coatings. In this way, if the thermal conductivity is used as an indicator for the electrodes, it is easy to estimate the benefits of forming electrodes with full coating (month). In addition, regarding discharge Electrode for processing Regarding conductivity, Japanese Patent Application Laid-Open No. Sho 54-124806 describes the method of making the heat transfer of the electrode ^ ^ 0.5 KCal / cm.sec, C or less. However, Japanese Patent Laid-Open No. Sho 54-124806 The described invention is to avoid the consumption of the electrode. 315550 53 200427868 Electro-processing of the electrical surface and adding the electrode shape to H for the purpose of “Releaser”, not for the purpose of the present invention to form a film on the workpiece. Electrode…… In Japanese Patent Laid-Open No. Sho 5heart 248248, although there is no record of the lower limit of thermal conductivity, it is clear that # reduce the thermal conductivity of the electrode (for example, 1QW / mK) In this case, it is impossible to achieve the purpose of electric discharge machining such as forming hot spots on the electrode, consuming electricity #, and copying the processed shape. That is, the discharge surface treatment for forming a film on the workpiece with active electrode consumption as in the sixth embodiment. The way ... is completely the same as the method of "the same person." In addition, the value of this 0.5 Kcal / cm · sec · t (= 2 093〇3w ~ k) is very large. The value of pure copper with the highest thermal conductivity is 3980 W / mK. many. According to the sixth embodiment, since a discharge surface treatment electrode with a thermal conductivity of-is used to perform the discharge surface treatment, _, even if the electrode for discharge surface treatment is manufactured using metal powder as a raw material, it can still be on the workpiece. Form the original coating. _ As explained above, according to the present invention, according to the particle size of the powder, the hardness of the electrode for discharge surface treatment, its compressive strength, the ratio of the volume of the electrode material to its volume, and its thermal conductivity can be in accordance with the established It can be manufactured in a manner within the range, and its electrode can be used to perform the discharge surface treatment, so that it can form a dense thick film on the workpiece. fShixing Bear 7 In the seventh embodiment, as the electrode evaluation method, the discharge is actually continuously generated according to the predetermined conditions, from the electrode consumption, processing time, and 315550 54 200427868. The advantages and disadvantages are explained. The alloy powder shown in Embodiment 4 (those pulverized to an average particle size of 12 #) was [molded] to produce a discharge surface treatment electrode having a shape of 50_xn_x5. The manufacturing process of this electrode is the same as that of the fourth embodiment. The electrode thus manufactured is manufactured under the control of the particle size of the powder and the manufacturing conditions. However, the powder may be pulverized due to the difference in temperature and humidity during manufacture. , The mixed state of wax and powder, and so on. In the above j ', it is a method of managing such deviations by using electrode hardness, etc. In addition to this method, it is also possible to directly use an electrode to form a film for investigation. " Figures 13A to 13C are diagrams for explaining the outline of a method for judging whether electricity is good or bad by a film formation test. In these figures, the same constituent elements as those used in the first figure of Embodiment 1 are attached with the same symbols; ϋ Here, these figures are diagrams for explaining the outline of the determination method, Components such as a power source and a drive shaft are omitted and not shown. In this embodiment, the electrode evaluation method of 7 uses an electrode manufactured as described above to form a coating by a predetermined amount of discharge surface treatment. In the case of the above electrodes, from the viewpoint of the simplicity of processing, it is best to set it in such a way that the surface of llmmx 5.5mm can become the discharge surface, but it can also be set in such a way that other surfaces can become the discharge surface. First, as shown in FIG. I3A, the positioning work between the battery 12 and the work U is performed. Next, as shown in Fig. 3β, "the discharge is started" to form a film. Alas, as shown in Fig. Nc, a film 4 will be formed on the workpiece 11. In Figs. 13B and 13C, reference numeral 17 denotes an arcing column for discharge. Here, the distance driven by the electrode 12 in the downward direction of the 315550 55 200427868 z-axis in the figure was maintained at a predetermined value, and the thickness of the film and the film formed were measured. Here, the pushing amount in the z-axis direction is 2 mm. Because the electrode is pushed in the z-axis direction. For the sake of the bandit, the amount of electrode / shaft dryness (length) after the formation is 2 coffee + (thickness of the formed film) + (gap). The discharge gap is several tens to several degrees. In addition, the conditions of the surface treatment of the discharge are such that the peak current value ie = 10A, the discharge time (discharge pulse time), ... are made. Table 3 shows the results of the actual film formation test. table 3

表3中,電極號石 2=膜形成時間表示放電表面處理時間,被膜厚度表示 : = 時間内所形成的被膜之厚度,而抗張強度表示 讀翁試驗片黏接於工件u上所形成的被膜上 —--——J__yj.jy_ 2〇 張強度試驗機將黏接於卫件與被膜上的試驗 只%抗張4驗而被膜破裂的壓力。 電極號No.1之電極係被膜形成時間為16分鐘,洛時 ::皮膜厚度為。·35_’而電極號碼Ν〇·3、4亦略為二。 時門… ㈣極號碼如·1比較時,被膜形成 守間為車父長之2 0分鐘,惟姑胺戶痒^ — ㈣料度“。f極號碼Νο·5 ρ,相反地,被膜形成時間為較短之13分鐘,而被膜 315550 56 200427868 ^度則成為。.30-。從此等電極所形 處理時間較通常(16分鐘)為長或短, 、強度’不拘 知處理時間或能形成的被膜厚 :=向’可 最適值’會因電極材質、電極形狀、::=!此種 可攸依既定條件下所實施的被膜形 "淮 被料度,判斷電極之優劣 ’次 如,將平均處理時間之正負1成者=之基4可設定為例 該範圍者作成劣等之方式 者作為優判斷,而將脫離 :’被膜之厚度方面亦可作成同樣方式。例如 述試驗中係將電極之推送量作成在 ^ , I值而貫施試驗者, 惟亦可作成將處理時間作成既定時 作為判斷基準並將平均值之正負=二之被膜厚度 m μ ^ + 成者作為優判斷,而將 脫離该軏圍者作為劣之方式設定。 如採用本實施形態7’則可使用藉由電極而在工件上 2定之條件形成被膜時之被膜形成時間或被膜厚度以 判定電極之優劣。 (產業上之利用可能性) 如上所述’本發明適合於能使工件表面上形成厚被膜 的處理自動化的放電表面處理裝置。 [圖式簡單說明] 第1圖係表示在放電表面處理裝置中的放電表面處理 之概略的圖, 第2圖係'表示放電表面處理用電極之製造過程的流 圖, 315550 57 200427868 第3圖係依模式性表示將粉末成型時之成型器之狀態 的剖面圖, 第4A圖係表示放電時施加於放電表面處理用電極與 工件間之電壓波形的圖, 第4B圖係表示放電時對放電表面處理裝置流動的電 流之電流波形, ,第5圖係表不改變對Cr2、C2粉末混合的c〇粉末量所 製造的放電表面處理用電極上因Co量之變化所引起的被 膜厚度的關係的圖, 第6圖係表示放電表面處理用電極中未含有不會形成 反化物的材料或難以形成碳化物的材料時對處理時間的被 膜形成之情況圖, 第7圖·使用C〇含量為7〇體積%之電極以實施放電 表面處理時所形成的被膜之照片, 第8圖係表示改變C% 30%至Co 70%之體積比之放 電表面處理用電極之硬度時之厚膜形成之狀態的圖, 第9圖係表示測定電極之壓縮測定的實驗裝置之概要 的照片, 第10圖係表示電極之壓縮強度與被膜厚度的關係 圖, 第11圖係表不平均粒徑與能實施被膜之堆積的電極 之壓縮強度之間的關係圖, 第1 2圖係表不使用熱傳導率不同的放電表面處理用 包極以貝&放電處理時於工件表面所形成的被膜厚度與放 58 315550 200427868 電表面處理用電極之熱傳導率之間的關係圖, 第1 3 A圖係表示依成膜試驗以判定電極優劣的方法之 概要圖, 第1 3B圖係表示依成膜試驗以判定電極優劣的方法之 概要圖, 第1 3 C圖係表示依成膜試驗以判定電極優劣的方法之 概要圖 〇 (元件符號之說明) 11 工件 12 放電表面處理用電極 13 放電表面處理用電源 14 被膜 15 加工液 16 加工槽 21 電極粒子 22 氣體中之成分 24 與氣體中之成分反應者 101 粉末 103 上衝床 104 下衝床 105 金屬模具(鍈) 59 315550In Table 3, electrode number 2 = film formation time indicates the discharge surface treatment time, film thickness indicates: = thickness of the film formed in time, and tensile strength indicates that the reading test piece was formed by adhering to the workpiece u. On the film ------- J__yj.jy_ 20-sheet strength testing machine will adhere to the guard and the film on the test only 4% tensile and the pressure of the film rupture. The formation time of the electrode system coating of electrode No. 1 is 16 minutes, and the thickness of the Roche :: Coating is. · 35_ 'and the electrode numbers NO · 3 and 4 are slightly two. Time gate ... When comparing the pole number such as · 1, the formation of the membrane is 20 minutes longer than the length of the car, but it is itchy ^ — 户 料度 “. F pole number No ο 5 ρ, on the contrary, the membrane is formed The time is 13 minutes shorter, and the coating 315550 56 200427868 ^ degrees becomes .. 30-. From then on, the processing time of these electrodes is longer or shorter than normal (16 minutes). The intensity is not dependent on the processing time or can form The thickness of the coating: = to 'can be optimal' will depend on the electrode material, electrode shape, :::! This type of coating can be implemented according to the established conditions " Huai coating material degree, to judge the quality of the electrode. The positive and negative 1% of the average processing time = the base 4 can be set as an example. Those who are in the inferior way in this range can be set as the good judgment, and can be separated from: 'The thickness of the coating can also be made in the same way. For example, the system described in the test The tester can be applied with the electrode pushing amount as ^, I value, but it can also be made with the processing time as the predetermined time and the positive and negative values of the average film thickness = 2 μ m ^ + as the good judgment. As a disadvantage The method is set. If the embodiment 7 ′ is adopted, the film formation time or film thickness when the film is formed on the workpiece with the conditions set by the electrode 2 can be used to determine the quality of the electrode. (Industrial use possibility) As above The present invention is suitable for a discharge surface treatment apparatus capable of automating the process of forming a thick film on the surface of a workpiece. [Brief description of the drawings] FIG. 1 is a diagram showing the outline of the discharge surface treatment in the discharge surface treatment apparatus. Figure 2 is a flow chart showing the manufacturing process of the electrode for surface treatment of discharge, 315550 57 200427868 Figure 3 is a cross-sectional view schematically showing the state of the molder when the powder is molded, and Figure 4A is a diagram showing the state applied to the electrode during discharge. Figure 4B shows the waveform of the voltage between the electrode and the workpiece for discharge surface treatment. Figure 4B shows the current waveform of the current flowing to the discharge surface treatment device during discharge. Figure 5 shows the change of c for mixing Cr2 and C2 powders. A graph showing the relationship between the thickness of the film due to the change in the amount of Co on the electrode for surface treatment of discharge produced by the amount of powder, and Fig. 6 shows the discharge surface. The physical electrode does not contain a material that does not form a counter compound or a material that is difficult to form a carbide. Figure 7 shows the formation of a coating on the processing time. Figure 7: Use of an electrode with a C0 content of 70% by volume for the discharge surface Photograph of the film formed during processing. Figure 8 shows the state of thick film formation when the hardness of the electrode for discharge surface treatment is changed by the volume ratio of C% 30% to Co 70%. Figure 9 shows the measurement Photograph of the outline of the experimental device for the compression measurement of the electrode. Figure 10 shows the relationship between the compressive strength of the electrode and the thickness of the coating. Figure 11 shows the difference between the average particle size and the compressive strength of the electrode that can be deposited on the coating. Fig. 12 shows the thickness of the film formed on the surface of the workpiece during discharge treatment with the electrode with a different thermal conductivity. The thermal conductivity of the electrode used for electrical surface treatment is not shown. 315550 200427868 Figure 1A is a schematic diagram showing the method of judging the quality of the electrode according to the film formation test. Figure 1B is a diagram showing the method of judging the quality of the electrode by the film formation test. The schematic diagram of the method, Figure 1 3C is a schematic diagram showing the method of judging the quality of the electrode according to the film formation test. (Description of the element symbol) 11 Workpiece 12 Electrode for discharge surface treatment 13 Power source for discharge surface treatment 14 Coating 15 Processing Liquid 16 Processing tank 21 Electrode particles 22 Components in gas 24 Respondents in gas 101 Powder 103 Upper punch 104 Lower punch 105 Metal mold (105) 59 315550

Claims (1)

200427868 拾、申請專利範圍: 1· 一種放電表面處理用電極,係以金屬、金屬化合物或陶 瓷粉末壓縮成型的壓粉體作為電極,在加工液中或氣㉗ 中’使W述電極與加工物之間發生放電,藉苴 旦义 /、從冤能 Ϊ,而於前述加工物表面形成由電極材料或電極材料因 放電能量而反應的物質所成被膜之用為放電表面處理 的放電表面處理用電極,其特徵為: 前述粉末,具有5至10 # m之平均粒徑之同時, 含有用於加工物上形成被膜的成分、與40體積%以上 之不會形成碳化物或難以形成碳化物的成分的混合 物,並經成型為依塗膜用鉛筆刮痕試驗的硬度能成為B 至8B之範圍之硬度之方式。 2· —種放電表面處理用t極,係以金屬、金屬化合物或陶 瓷粉末壓縮成型的壓粉體作為電極,在加工液中或氣體 中,使前述電極與加工物之間發生放電,藉由其放電能 里L而於刖述加工物表面形成由電極材料或電極材料因 放電能量而反應的物質所成被膜之用為放電表面處理 的放電表面處理用電極,其特徵為: 月;』述粉末,具有1至5 # m之平均粒徑之同時,含 有用方、加工物上形成被膜的成分、與40體積%以上之 不S开成喊化物或難以形成碳化物的成分的混合物,並 經成型為使用1/4吋鋼球按15kgf之壓力按壓時之壓痕 距離作為hUm)時所求得的硬度H=1〇〇_1〇〇〇xh中能成 為20至50之範圍之硬度。 60 315550 200427868 3. —種放電表面處理用電極,係以金屬、金屬化合物或陶 瓷粉末壓縮成型的壓粉體作為電極,在加工液中或氣體 中’使前述電極與加工物之間發生放電,藉由其放電能 畺而方、别述加工物表面形成由電極材料或電極材料因 放電能量而反應的物質所成被膜之用為放電表面處理 的放電表面處理用電極,其特徵為·· 月!1述粉末,具有〗# m以下之平均粒徑之同時,含 有用於加工物上形成被膜的成分、與40體積%以上之 不會形成碳化物或難以形成碳化物的成分的混合物,並 經成型為使用1/4吋鋼球按15kgf之壓力按壓時之壓痕 隹作為h( // m)at所求得的硬度H=1〇〇_1〇〇〇xh中能成 為25至60之範圍之硬度。 4.200427868 The scope of patent application: 1. An electrode for discharge surface treatment, which uses metal, metal compound or ceramic powder compacted powder as the electrode, to make the electrode and the processed object in the processing fluid or in the air. Discharge occurs between them, and the surface of the processed object is formed with a film made of an electrode material or a substance that reacts with the discharge energy due to the discharge energy. The discharge surface treatment is used for the discharge surface treatment. The electrode is characterized in that the powder has an average particle diameter of 5 to 10 # m, and contains a component for forming a film on a processed object, and 40% by volume or more of which does not form carbides or is difficult to form carbides. The hardness of the mixture of ingredients can be adjusted to a hardness in the range of B to 8B by a pencil scratch test with a coating film. 2. A type of t-electrode for discharge surface treatment, which uses a metal powder, a metal compound or a ceramic powder compacted body as an electrode, to cause a discharge between the foregoing electrode and the processed object in a processing fluid or a gas, by The discharge energy is L, and the surface of the processed object is formed with a film made of an electrode material or a substance that reacts with the discharge energy due to the discharge energy. The discharge surface treatment electrode used for the discharge surface treatment is characterized by: month; Powder, which has an average particle diameter of 1 to 5 # m, and contains a mixture of ingredients that form a film on the user side and the processed object, and a mixture of 40% by volume or more of a component that does not form a carbide or is difficult to form a carbide, and The hardness obtained when the indentation distance when the 1 / 4-inch steel ball is pressed under a pressure of 15 kgf is hUm) is obtained. The hardness can be a hardness in the range of 20 to 50 in the range of H = 100 to 100. . 60 315550 200427868 3. An electrode for discharge surface treatment, which uses a compacted body of metal, metal compound or ceramic powder as the electrode, to 'discharge between the aforementioned electrode and the processed object in the working fluid or gas, The discharge surface treatment electrode is formed by the discharge energy, and the surface of the processed object forms a film made of an electrode material or a substance that reacts with the discharge energy due to the discharge energy. The discharge surface treatment electrode is used as a discharge surface treatment. The above-mentioned powder has a mean particle diameter of # m or less, and contains a mixture of a component for forming a film on a processed product and a component of 40% by volume or more that does not form carbides or is difficult to form carbides, and It is formed into an indentation when pressed with a 1 / 4-inch steel ball under a pressure of 15 kgf. The hardness obtained as h (// m) at can be 25 to 60. Range of hardness. 4. 一可双電表面處理用電極,係以金屬、金屬化合物之 末^缩成型的壓粉體作為電極,在加工液中或氣體中 使刖j電極與加工物之間發生放電,藉由其放電能量 =!述加工物表面形成由電極材料或電極材料因放 :::而反應的物質所成被膜之用為放電表面處理的 放電^面處理用電極,其特徵為: ^述電極之壓縮強度,A 1 6GMPa以下者。 處理用電極,係以本身為金屬或金屬化 ’乃、電極材料壓縮成型的壓粉體作為電極,在 2 =體中’使前述電極與加工物之間發生放電^ 材科或前述電極材料因放電能量而反應: 315550 61 200427868 膜之用為放電表面處理的放電表面處理用電極,其特徵 為· 所述電極材料對前述電極之體積所佔的體積比 例,為25%至65%。 6. 8. 種放电表面處理用電極,係以金屬或金屬化合物之粉 末[、倍成型的壓粉體作為電極,在加工液中或氣體中, 使前述電極與加工物之間發生放電,藉由其放電能量, 而於别述加工物表面形成由電極材料或電極材料因放 電能量而反應的物質所成被膜之用為放電表面處理的 放電表面處理用電極,其特徵為: 熱傳導率為1 〇W/mK以下。 一種放電表面處理用電極之製造方法,其特徵為··包含 將金屬、金屬化合物或陶瓷之粉末粉碎的第1步 驟、及 , 將經粉碎的前述粉末凝聚所成塊分解為極間距離 以下之大小而過篩的第2步驟、以及 將前述過篩之粉末作成既定之形狀,並以93至 278MPa之壓力壓縮成型的第3步驟。 -種放電表面處理方法,係以金屬、金屬化合物或陶竟 粉末壓縮成㈣壓粉體作為電極,在加工液巾或氣體 中,使前述電極與加工物之間發生放電,藉由其放電能 量,而二前述加工物表面形成由電極材料或電極材:: 放電能量而反應的物質所成被膜的放電表面處理方 法,其特徵為: 315550 62 200427868 入則述粉末,具有5至1 〇 # m之平均粒徑之同時, 含有用為於加工物上形成被膜的成分、與4G體積%以 上之不會形成石炭化物或難以形成碳化物的成分的混合 並/吏用依塗膜用鉛筆刮痕試驗的硬度能成為B至 之圍之方式所成型的電性,以形成前述被膜。 9·:種放電表面處理方法,係以金屬、金屬化合物或陶莞 籾末壓^成型的壓粉體作為電極,在加工液中或氣體 :使則:電極與加工物之間發生放電,藉由其放電能 :而於則述加工物表面形成由電極材料或電極材料因 放電能量而反應的物質所成被膜的放電表面處理方 法’其特徵為·· ㈣粉末,具有ljL5#m之平均粒徑之同時^ 用於加工物上形成被膜的成分、與40體積%以上之 :會形成碳化物或難以形成碳化物的成分的混合物,』 二型為使用1/4吋鋼球按15kgf之壓力按壓時之 =::離作為時所求得的硬度Η=ι〇〇_ι〇〇〇χ” :。' 20至50之範圍之硬度的電極,以形成前述被 :末::成型的遷粉體作為電極,在加工液中或氣, 〜而:極與加工物之間發生放電,藉由其放電 :電二』述加工物表面形成由電極材料或電極材料 本,ΓΓΓ反應的物質所成被膜的放電表面處理方 /友’具4寸徵為·· 3] 5550 63 月il述粉末,具有1 # m以下之平均粒徑之同時,含 有用於加工物上形成被膜之成分、與體積%以上之 不會形成碳化物或難以形成碳化物的成分的混合物,並 使用、、、二成型為使用i /4吋鋼球按i 5之壓力按壓時之 i痕距離作為h( # m)時所求得的硬度⑼中 月b成為25至60之範圍之硬度的電極,以形成前述被 膜0 11. β種放電I面處理方法,係以金屬或金屬化合物之粉末 j縮成型的壓粉體作為電極,在加工液中或氣體中,使 前f電極與加工物之間發生放電,藉由其放電能量,而 於2述加工物表面形成由電極材料或電極材料因放電 能量而反應的物質所成被膜的放電表面處理方法,其特 徵為: 使用具# 160MPa以下之壓縮強度的電極,以形月 前述被膜。 12. -種放電表面處理方法,係以本身為金屬或金屬化合來 之粉末的電極材料壓縮成型的漫粉體作為電極,在加: 液中或氣體中,使前述電極與加工物之間發生放電,着 由其^電能量,而於前述加工物表面形成由前述電極和 料或知述電極材料因放雷台t曰 十U敦電此置而反應的物質所成被膜 的放電表面處理方法,其特徵為: 使用電極材料對前述電極之體積所佔之體積比例 為25%至65%的電極,以形成前述被膜。 13· 一種放電表面處理方法,係以金屬或金屬化合物之粉, 315550 64 200427868 廢細成型的摩粉體作為 二、+.作為電極,在加工液中或氣體中,使 刖述電極與加工你 災 处旦 物之間發生脈衝狀之放電,藉由其放電 月匕ϊ,而於前述加工物表 .因放雷炉旦品c'成由電極材枓或電極材料 丰甘匕里應的物質所成被膜的放電表面處理方 法’其特徵為·· 述㈣吏用熱傳導率為I0W/mK以下之電極,以形成前 14· 種放電表面處理梦署,总—a _ 、 糸在加工液中或氣體中配置有 ,屬、金屬化合物或陶i之粉末歷縮成型的歷粉體所 士電極、及形成被膜的加工物,而藉由與前述電極及前 述加工物按電氣性連接的電源裝置,而使前述電極與前 述加:物之間發生脈衝狀之放電,並藉由其放電能量, 而於别述加工物表面形成由電極材料或電極材料因放 電能量而反應的物質所成被膜的放電表面處理 特徵為·· 〃 前述電極,係將含有用於加工物上形成被膜的成 分、與40體積%以上之不會形成碳化物或難以形成碳 化物的成分的混合物的平均5至1〇 # m之粉末,成型 為按依塗膜用鉛筆刮痕試驗的硬度能成為B至8B之範 圍之硬度之方式。 & K-種放電表面處理裝置’係在加工液中或氣體中配置有 以金屬、金屬化合物或陶瓷之粉末壓縮成型的壓粉體所 成電極、及形成被膜的加工物,而藉由與前述電極及前 述加工物按電氣性連接的電源裝置,而使前述電極與前 315550 65 述加工物之間發生脈衝狀之放電,並藉由其放電能量, 而於:述加工物表面形成由電極材料或電極材料因放 電能量而反應的物質所成被膜的放電表面處理裝置,其 特徵為: 月’J述電才虽,係將含有用於加工物上形成被膜的成 分、與40體積。/。以上之不會形成碳化物或難以形成碳 化物的成分的混合物的平均粒徑丨至m之粉末,成 型為使用i/4吋鋼球按15kgf之壓力按壓時之壓痕距離 作為hU m)時所求得的硬度H=1〇〇_i〇〇〇xh中能成為2〇 至50之範圍之硬度之方式。 y種放電表面處理裝置,係在加工〉夜中或氣體中配置有 以金屬、金屬化合物或陶瓷之粉末壓縮成型的壓粉體所 成電極、及形成被膜的加工物,而藉由與前述電極及前 述加工物按電氣性連接的電源裝£,而使前述電極與前 述加工物之間發生脈衝狀之放電,並藉由其放電能量, 而於岫述加工物表面形成由電極材料或電極材料因放 電能量而反應的物質所成被膜的放電表面處理裝置,立 特徵為: 刚述電極’係將含有用於加工物上形成被膜的成 刀’、40細·積/°以上之不會形成碳化物或難以形成碳 化物的成分的混合物的平均粒徑^饥以下之粉末,成 型為使用1/4忖鋼球按15kgf之壓力按壓時之壓痕距離 作為h("m)時所得的硬度h=hhm静h中能成為25 至60之範圍之硬度之方式。 315550 66 200427868 17. —種放電表面處理裝置,係在加工液中或氣體中配置有 以金屬或金屬化合物之粉末壓縮成型的壓粉體所成電 極、及形成被膜的加工物,而藉由與前述電極及前述加 工物按電氣性連接的電源裝置,而使前述電極與前述加 工物之間發生脈衝狀之放電,並藉由其放電能量,而於 刚述加工物表面形成由電極材料或電極材料因放電能 量而反應的物質所成被膜的放電表面處理裝置,其特徵 為: 韵述電極’具有1 6〇MPa以下之壓縮強度。 18·—種放電表面處理裝置,係在加工液中或氣體中配置有 由將金屬或金屬化合物之粉末壓縮成型的壓粉體所成 電極及形成被膜的加工物,而藉由與前述電極及前述 加工物按電氣性連接的電源裝置,而使前述電極與前述 加工物之間發生脈衝狀之放電,並藉由其放電能量,而 於前述加工物表面形成由電極材料或電極材料因放電 月色ΐ而反應的物質所成被膜的放電表面處理裝置,其特 徵為: ^、 前述電極,係作成前述電極材料對該電極之體積所 佔之體積比例,為2 5至6 5 %。 19· 一種放電表面處理裝置,係在加工液中或氣體中配置有 以金屬或金屬化合物之粉末壓縮成型的壓粉體所成電 極、及形成被膜的加工物,而藉由與前述電極及前述加 工物按電氣性連接的電源裝置,而使前述電極與前述加 工物之間發生脈衝狀之放電,並藉由其放電能量,而於 315550 67 200427868 前述加工物表面形成由電極材料或電極材料因放電能 量而反應的物質所成被膜的放電表面處理裝置,其特徵 為· 前述電極,具有10W/mK以下之熱傳導率。 Φ 20.-種放電表面處理用電極之評價方法係以金屬或金屬 化合物之粉末壓縮成型的壓粉體作為電#,在加工液中 或氣體中,使前述電極與加工物之間發生放電,藉由盆 放電能量’而於前述加王物表面形成由電極材料或電極 材料因放電能量而反應的物質所成被膜之用為放電表 面處理用電極之評價方法,其特徵為: 對前述電極徐徐加壓既以荷,根據前述電極表面 即將產生龜裂的壓縮強度,以評價電極能否將既定之被 膜形成於前述加工物表面。 。.-種放電表面處理用電極之評價方法係以金屬或金屬 化合物之粉末壓縮成型的壓粉體作為電極,在加工液中 或氣體中,使前述電極與加工物之間發生放電,藉由其 放電能量,而於前述知τ %主I〜, 、 疋力工物表面形成由電極材料或電極 材料因放電能量而反應的物質所成被膜之用為放電表 面處理用電極之評價方法,其特徵為: 從藉由刖述電極’而於前述加工物上依既定條件妒 成被膜時之被膜形成時間或被膜厚度,以判定前極 之優劣。 315550 68An electrode for double electric surface treatment, which uses a powder compacted by metal or metal compound as an electrode, and discharges between the 刖 j electrode and the workpiece in the processing liquid or gas, and discharges the electrode. Energy =! The surface of the processed object is formed by the electrode material or the electrode material reacts with the ::: and the film formed by the reacting material is used for the discharge surface treatment of the discharge surface treatment electrode, which is characterized by: ^ the compressive strength of the electrode , A 1 6GMPa or less. The processing electrode is a metal powder or a metallized material, which is an electrode material that is compression-molded as an electrode. In the 2 body, a discharge occurs between the foregoing electrode and the processed object. Respond to discharge energy: 315550 61 200427868 The electrode used for the discharge surface treatment of the film is a discharge surface treatment electrode, characterized in that the volume ratio of the electrode material to the volume of the foregoing electrode is 25% to 65%. 6. 8. An electrode for discharge surface treatment is a powder of metal or a metal compound [, a compacted compact powder as an electrode, and a discharge occurs between the foregoing electrode and the processed object in a processing fluid or a gas, and The discharge surface treatment electrode formed by the discharge energy and forming a film made of an electrode material or a substance that reacts with the discharge energy due to the discharge energy on the surface of another processed object is a discharge surface treatment electrode characterized by a thermal conductivity of 1 〇W / mK or less. A method for manufacturing an electrode for discharge surface treatment, comprising: a first step of pulverizing a powder of a metal, a metal compound, or a ceramic; and decomposing the pulverized powder into aggregates to a distance below an inter-electrode distance. The second step of sieving by size, and the third step of forming the sieved powder into a predetermined shape and compression molding at a pressure of 93 to 278 MPa. A discharge surface treatment method that uses metal, metal compound or ceramic powder to be compressed into a compacted powder as an electrode, and discharges between the foregoing electrode and the processed object in a processing liquid towel or gas, and uses the discharge energy And the surface of the aforementioned processed object is formed with an electrode material or an electrode material: a discharge surface treatment method of a film formed by a substance that reacts with discharge energy, which is characterized by: 315550 62 200427868 Introduce powder, with 5 to 1 〇 # m The mean particle size is also mixed with a component for forming a film on a processed object and a component of 4G% by volume or more that does not form a carbonized material or is difficult to form a carbide, and is scratched with a pencil using a coating film The hardness of the test can be formed into electrical properties in a manner of B to around to form the aforementioned film. 9 ·: A kind of discharge surface treatment method, which uses metal, metal compound or pressed powder formed by ceramic powder as the electrode, in the processing fluid or gas: so that: a discharge occurs between the electrode and the processed object, by which Discharge energy: And on the surface of the processed object, a discharge surface treatment method of forming a film made of an electrode material or a substance that is reacted by the discharge energy due to the discharge energy, is characterized in that the powder has an average particle size of ljL5 # m. At the same time ^ a component used to form a film on a processed product, and a mixture of 40% by volume or more: a component that will form carbides or components that are difficult to form carbides, "type 2 is when a 1/4 inch steel ball is pressed at a pressure of 15kgf ==: from the hardness obtained at the time Η = ι〇〇_ι〇〇〇χ ":. '20 to 50 range of hardness of the electrode to form the aforementioned quilt: end :: molding powder As an electrode, a discharge occurs in the processing fluid or gas, and the discharge occurs between the electrode and the processed object, and the discharge is caused by the discharge: Electricity II. The surface of the processed object forms a film made of the electrode material or the electrode material itself and ΓΓΓ reacting substance. Discharge surface treatment / 友 '有 4 寸 征 ... 3] 5550 63 month powder, which has an average particle size of 1 # m or less, contains ingredients for forming a film on a processed object, and does not form above vol% The hardness obtained when carbide or a mixture of components that are difficult to form carbide is formed by using i, 4, and i to press i / 4 inch steel ball under the pressure of i 5 as h (# m) ⑼Zhongyue b becomes an electrode with a hardness in the range of 25 to 60 to form the aforementioned coating 0 11. Beta discharge I surface treatment methods, which use a compacted powder of metal or metal compound powder as the electrode, are being processed In liquid or gas, a discharge occurs between the front f electrode and the processed object, and the discharge energy is used to form a discharge on the surface of the second processed object, which is a film formed by the electrode material or a substance that the electrode material reacts with due to the discharge energy. The surface treatment method is characterized by: using an electrode with a compressive strength of # 160MPa or less to form the aforementioned coating. 12. A discharge surface treatment method is to compress the electrode material with a powder made of metal or a metal compound. As an electrode, a type of diffused powder is used to add a discharge between the electrode and the processed object in liquid or gas, and its electric energy is formed on the surface of the processed object. The surface treatment method for the discharge surface of the electrode material caused by the material reacted by the thunder discharge station at 10 U, and is characterized in that: the volume ratio of the electrode material to the foregoing electrode volume is 25% to 65% 13 · A discharge surface treatment method, using metal or metal compound powder, 315550 64 200427868 waste finely formed powder as the second, +. As the electrode, in the processing fluid or gas , So that a pulse-like discharge occurs between the described electrode and the processed object in your disaster area, and by its discharge moon dagger, on the table of the foregoing processed object. Due to the lightning furnace c ', the electrode material or electrode The discharge surface treatment method of the film formed by the material contained in the material Fenggan dagger is characterized by the following characteristics: · The officials use electrodes with a thermal conductivity below I0W / mK to form the top 14 discharge surface treatments. a _ and 糸 are arranged in the processing liquid or the gas, and the metal powder or the metal compound or the powder of the ceramic powder is formed by a historical powder electrode, and a processed product that forms a film. The power supply device is electrically connected to the object, so that a pulse-shaped discharge occurs between the foregoing electrode and the object: and the discharge energy is used to form an electrode material or electrode material due to the discharge energy on the surface of other processed objects. The characteristics of the discharge surface treatment of the film formed by the reacted substance are as follows: 电极 The electrode contains a component for forming a film on a processed object and a component that does not form carbides or is difficult to form carbides at 40% by volume or more. The average powder of the mixture of 5 to 10 # m is molded in such a manner that the hardness can be in the range of B to 8B according to the pencil scratch test of the coating film. & K-type electric discharge surface treatment device is an electrode formed by compacting a metal, a metal compound or a ceramic powder in a processing fluid or a gas, and a processed object forming a film, and The electrode and the processed object are electrically connected to the power supply device, so that a pulse-shaped discharge occurs between the electrode and the processed object of 315550 65, and the discharge energy is used to form an electrode on the surface of the processed object. The discharge surface treatment device of a film formed by a material or an electrode material that reacts due to discharge energy is characterized in that: "The above mentioned electric power" will contain a component for forming a film on a processed object and 40 volumes. /. When the average particle diameter of a mixture of the above components that do not form carbides or difficult to form carbides, 丨 to m, is molded into an indentation distance when i / 4 inch steel balls are pressed at a pressure of 15kgf as hU m) The obtained hardness H = 100_i × 00 × h can be a hardness ranging from 20 to 50. y types of discharge surface treatment devices are arranged in the process> in the night or in the gas, an electrode formed by compacting a metal, a metal compound, or a ceramic powder and a processed product forming a coating. The processing object is installed according to an electrically connected power source, so that a pulsed discharge occurs between the electrode and the processing object, and the discharge energy is used to form an electrode material or electrode material on the surface of the processing object. The discharge surface treatment device of a film formed by a substance that reacts with discharge energy is characterized in that the electrode just described "will contain a knife for forming a film on a processed product", and will not form carbonization at a thickness of more than 40 fins / °. The hardness of the powder obtained when the average particle diameter of a material or a mixture of components that are difficult to form carbides is less than or equal to ^, and is molded into a h (" m) when the indentation distance when a 1/4 忖 steel ball is pressed at a pressure of 15kgf is h h = hhm Static h can be a hardness in the range of 25 to 60. 315550 66 200427868 17. A discharge surface treatment device, which is arranged in the processing fluid or gas with an electrode made of a powder compacted by metal or a metal compound powder and a processed product forming a coating. The electrode and the processed object are electrically connected to a power supply device, so that a pulse-shaped discharge occurs between the electrode and the processed object, and an electrode material or electrode is formed on the surface of the processed object by the discharge energy. The discharge surface treatment device of a film formed by a material that reacts with discharge energy is characterized in that the rhyme electrode 'has a compressive strength of 160 MPa or less. 18 · —A discharge surface treatment device is provided in the processing liquid or gas with an electrode made of a powder compacted by compressing a metal or a metal compound powder and a processed object forming a film, and the electrode and the foregoing electrode and The processing object is electrically connected to the power supply device, so that a pulse-shaped discharge occurs between the electrode and the processing object, and the discharge energy is used to form an electrode material or an electrode material on the surface of the processing object due to the discharge month. The discharge surface treatment device of a film formed by a reactive substance is characterized in that the aforementioned electrode is a volume ratio of the aforementioned electrode material to the volume of the electrode, which is 25 to 65%. 19. · A discharge surface treatment device comprising an electrode made of a powder compacted by metal or metal compound powder compression in a processing fluid or a gas, and a processed object forming a film. The processed object is electrically connected to the power source device, so that a pulse-shaped discharge occurs between the electrode and the processed object, and by the discharge energy, 315550 67 200427868 is formed on the surface of the processed object by the electrode material or electrode material. The discharge surface treatment device of a film formed by a substance that reacts with discharge energy is characterized in that the electrode has a thermal conductivity of 10 W / mK or less. Φ 20. An evaluation method for an electrode for discharge surface treatment is to use a pressed powder compacted by powder of a metal or a metal compound as an electric # to discharge between the foregoing electrode and the processed object in a processing fluid or a gas, An evaluation method for forming an electrode for discharge surface treatment by forming a film made of an electrode material or a substance that reacts with the discharge energy due to the discharge energy on the surface of the aforesaid king by the discharge energy of the pot is characterized by: The pressure is applied under pressure to evaluate whether the electrode can form a predetermined film on the surface of the processed object based on the compressive strength at which the surface of the electrode is about to crack. . .- An evaluation method for an electrode for discharge surface treatment is to use a powder compact of metal or metal compound powder as an electrode to discharge between the foregoing electrode and the processed object in a processing fluid or a gas, and use the Discharge energy. On the surface of the previously known τ% main I ~, the surface of the workforce is formed with an electrode material or a substance that reacts with the discharge energy due to the discharge energy. The evaluation method for the electrode for discharge surface treatment is characterized by its characteristics. The reason is: the film formation time or film thickness when the film is jealously formed on the aforementioned processed object under the predetermined conditions by using the described electrode to determine the superiority of the former. 315 550 68
TW093104220A 2002-10-18 2004-02-20 Electric discharge surface treating electrode, manufacture and evaluation methods thereof, electric discharge surface treating device, and electric discharge treating method TWI284682B (en)

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JP2002304730A JP3847697B2 (en) 2002-10-18 2002-10-18 Electrode for discharge surface treatment
JP2003160505 2003-06-05
JP2003166017 2003-06-11
JP2003166010 2003-06-11
PCT/JP2004/000848 WO2004108990A1 (en) 2003-06-05 2004-01-29 Discharge surface treating electrode, production method and evaluation method for discharge surface treating electrode, discharge surface treating device and discharge surface treating method

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