TWI284682B - Electric discharge surface treating electrode, manufacture and evaluation methods thereof, electric discharge surface treating device, and electric discharge treating method - Google Patents

Abstract

An electric discharge surface treating electrode (12) for electric discharge surface treating is formed by using a pressed power of pressed form of the powders from metal, metal compound or ceramic as electrode (12), and electric discharge is generated between the electrode (12) and a work (11), and then based on the discharged energy to deposit electrode material or reactant material from the electrode material by discharge energy on work surface to form a coating film (14), wherein, such electric discharge surface treating electrode (12) is characterized as the followings: powders with an average particle radium of 5 to 10 mum; containing the mixture of ingredients for forming coating (14) film on work (11) and 40 volume% ingredients hard to or not to form carbon compound; forming to have the hardness of B to 8B by pencil scratch test for coating film.

Description

1284682 发明Invention Description [Technical Field] The present invention relates to a pulse-like discharge between an electrode for discharge surface treatment formed by compression molding of a powder of a metal, a metal compound or a ceramic, and a processed object. The discharge surface treatment electrode used in the discharge surface treatment of the film formed by the electrode material or the electrode material due to the discharge energy is formed on the surface of the workpiece by the discharge energy, a method for producing the same, and an evaluation method. Further, a discharge surface treatment apparatus and a discharge surface treatment method using the discharge surface treatment electrode are also known. [Prior Art] For the surface treatment of a turbine blade or the like of a gas turbine engine for an aircraft, since it is necessary to apply or thicken a material having a strength and a slip property in a high temperature environment, Conventionally, methods such as welding or flame spray coating have been used. A film containing a material such as Cr (chromium) or Mo (molybdenum) which is known to be oxidized in a high-temperature environment to become an oxide and exhibits lubricity as a substrate is thickened by a method such as welding or flame spraying. On the workpiece (hereinafter referred to as the workpiece). Here, the welding means that the material of the welding strip is fused to the workpiece by the discharge between the workpiece and the welding strip, and the flame spraying refers to the state in which the metal material is fused. It is sprayed onto the workpiece in a spray form to form a film. However, since any of such welding or flame spraying methods requires manual work and requires skill, there is a problem in the process of operation, and there is a problem of high cost. Moreover, in particular, welding is a method of pouring into the workpiece due to the concentration of heat 315550 6 1284682, when processing a thinner opening or processing such as a single crystal alloy or a unidirectional solidified alloy (10) When s〇lid=icating all〇y) or the like controls the easily breakable material such as an alloy, the valley is prone to weld cracking, and there is a problem of poor yield. As a technique for solving such a problem, there has been proposed a method of coating a surface of a metal material which is itself a workpiece by liquid discharge. For example, in the first prior art, first, it is difficult to use another electrode such as a copper electrode or graphite as a secondary processing system by using an electrode material containing a film component formed on a workpiece as a secondary process. The electrode to be consumed is subjected to re-dissolving and discharging the deposited electrode (4) on the workpiece (for example, refer to the patent document). According to this document, a coating layer having a good hardness and adhesion can be obtained for a steel material which is itself a workpiece. Then, it is difficult to form a coating layer having a strong adhesion to a surface of a sintered material such as a super-hard alloy. Further, in this method, it is necessary to form a coating process and re-melt discharge the film. The two-stage step of making the second processing in close contact with the workpiece has a problem that becomes complicated in processing. In the second prior art, it is disclosed that in the processing of forming the film according to the two-stage processing, A technique of forming a hard ceramic film on a metal surface by changing only the electrical conditions of the discharge under the change of the electrode (for example, refer to Patent Document 2). In the technique, the ceramic powder constituting the electrode is compression-molded at a very high pressure of 10 〇t/cm 2 and used as an electrode by a calcination at a theoretical density of 5 to 9 %. In the third prior art, a material of hard carbonized 315550 7 1284682 of Ti (titanium) or the like is formed as an electrode, so that the metal material which is a guard member is sent again = after the first and second types The process of::: is required in the art to form a strong hard film on the surface of the metal (for example, Patent Document 3). This is the use of the component (c) of the electrode material consumed by the discharge. Carbon) reacts to form Tic (titanium carbide). Further, ΤΐΗ2 (titanium hydride) or the like, such as a metal powder of a metal hydride, causes discharge to occur between a metal material that is itself a workpiece, It is possible to form a hard film which is fast and has good adhesion when using a metal material such as Ti. Further, if a metal powder such as Tm2 or the like is mixed with other metals or a ceramic powder electrode of Tao Jing, it is a Discharge between the metal materials of the piece, It is also possible to rapidly form a hard film having various properties such as high hardness and abrasion resistance. Further, in the fourth prior art, the ceramic powder is compression-molded and prepared by preliminary sintering to produce a high-pressure powder electrode. A film of a hard material such as Tic or the like is formed by the discharge surface treatment using the electrode (for example, refer to Patent Document 4). As an example of the fourth prior art, a mixed WC (tungsten carbide) powder is produced. The case where the powder of co (cobalt) powder is used as an electrode for discharge surface treatment (hereinafter referred to as an electrode) is described. The WC powder and the Co powder are compression-molded into a pressed powder, and only WC powder and Co powder can be mixed. And it is more suitable for compressing the molder, but it is better to improve the formability of the green compact if it is subjected to compression molding after being blended with wax. However, when a large amount of the wax-based insulating material remains in the electrode, the electrical resistance of the electrode is increased, so that the discharge property is deteriorated. Therefore, it needs to be removed. Such a belly can be removed by placing the pressed powder in a vacuum furnace and heating it at 8 315 550 1284682. At this time, if the heating temperature is too low, the wax cannot be removed, and when the temperature is too high, the wax becomes carbon dust and deteriorates the purity of the electrode. It is necessary to keep the heating temperature above the temperature at which the wax can be melted and to decompose the wax to become carbon. The temperature of the chips is below. Next, the green compact in the vacuum furnace is heated using a high frequency coil and fired to a degree that is resistant to mechanical processing and does not excessively harden, such as the hardness of chalk. Such baking is called preliminary sintering. At this time, the contact portions between the sulphides will be combined with each other, but the combination is weak because the sintering temperature is low and does not reach the temperature of the sintering. When the discharge surface treatment is performed using an electrode having high strength which is fired by such preliminary sintering, a dense and homogeneous film can be formed on the surface of the workpiece. (Patent Document 1) Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei 9-192937 (Patent Document 3). International Publication No. 99/58744, as shown in the third and fourth prior art, can form a dense hard film by treating the discharge surface of the electrode obtained by pressing the powder. However, when such a discharge surface is treated to form a thick film, even if the electrode is fabricated in the manner disclosed in the fourth prior art, there is a problem that the characteristics of the electrode are largely different. It is also difficult to form a dense film. One of the reasons for this difference may be caused by the difference in the particle size distribution of the material constituting the electrode 9 315550 1284682. If the difference in the distribution of the particle diameters on the powder is produced, even if the pressure is pressed by the same press pressure to form the electrode, the electrode strength will eventually be due to the junction hardening relationship of each electrode. There is a difference. Second, special: One of the other causes of the difference caused by the change may be the change in the material (component) of the electrode to be implemented due to the change in the material of the film formed on the workpiece. For example, when the electrode material is changed, the difference between the physical properties and the electrode strength is different from the electrode strength before the change. " Also, when a thick surface film is formed by discharge surface treatment, it is generally considered that the supply of the material from the electrode side, the melting of the material supplied thereto, and the bonding with the workpiece material have the most performance on the film. influences. An indicator that has an effect on the supply of such an electrode material is the hardness of the electrode. For example, in the fourth prior art, the hardness of the electrode for discharge surface treatment is made to be a hardness (for example, a hardness of chalk) which is resistant to mechanical strength and which is not excessively hardened. By the electrode of such hardness, the supply of the electrode material due to the discharge can be suppressed, and the supplied material s is melted by the knife, so that the hard ceramic film can be formed on the surface of the workpiece. Further, the hardness of the chalk degree as the hardness index of the electrode for discharge surface treatment is very ambiguous. Further, there are also problems such as the hardness of the electrodes and the like, and there is a problem that a thick film formed on the surface of the workpiece is different. For example, if the material or size of the powder is changed, the molding conditions of the electrode will be different. Therefore, it is necessary to change the molding conditions of the electrode a plurality of times according to the material of the various electrodes to carry out the film formation test, thereby determining the molding conditions for the discharge surface treatment electrode suitable for the material 315550 10 1284682. The problem with the process. In other words, the type of the material constituting the electrode is required. It is necessary to determine the shape of the electrode for forming a good film, and it takes a lot of trouble. Bean he's even using the same material of the grid too # F1 Technology & 〃 You Yang Yang and according to the manufacturing method to make the electrode 'because of the season (temperature or thirsty and 4 breadth) the volume of the powder will change The reason is that, as with the above-mentioned material change, it is necessary to separately process the actual film to form a film, and evaluate the electrode so that it is laborious. Moreover, these prior discharge surface treatments are mainly focused on the formation of a hard film which is hard-made by the media, especially when it is close to normal temperature. It is a film containing Φ into a hard shell carbide as a main component. In this method, only a film of the order of 1 G/zm can be formed, and the thickness of the film is not more than several. Conventionally, a ratio of a material which is likely to form a carbide is contained. For example, if a material such as Ti is contained in the electrode, a chemical reaction occurs due to discharge in the oil, and the film becomes a hard carbonaceous material such as TiC (titanium carbide). As the surface treatment progresses, the material of the surface of the workpiece changes from the steel material (when the steel material is treated) to the Tic which is itself ceramic, which changes with the characteristics of heat conduction or melting point. According to experiments by the inventors of the present invention, if a material which does not form carbides or is difficult to form carbides is added to the components of the electrode material, the phenomenon of the film can be increased. This is because the addition of a material that does not become carbonized or difficult or reversible to the electrode increases the amount of material that does not become a carbide and maintains the metal state. It has also been found that the selection of such an electrode material is important for the thickness of the film. At the same time, the formed film has hardness, compactness and uniformity. However, the conventional discharge surface treatment, as described in 315550 11 1284682, mainly focuses on the formation of a film that can exert a hard property close to normal temperature, such as Tie or WC (tungsten carbide), and relates to a gas turbine engine such as an aviation aircraft. The use of a turbine blade or the like, such as a dense and thick film (a thick film of 100 // m layer or more) having lubricity in a high-temperature environment, does not emphasize "there is a problem that a film having such a thickness cannot be formed" . On the other hand, in the prior art of the second aspect, the ceramic powder which will be the material constituting the electrode is compression-molded at a very high pressure such as 10 t/cm 2 in such a manner as to be 50% to 90% of the theoretical density. Forged sintered electrode. This is because (1) the purpose of forming a thin hard film, the harder the electrode is, the stronger the film can be formed, and (2) the ceramics constituting the electrode can be improved because the main component of the material is ceramic. The pressure during powder compression molding, and other reasons. However, if a thick film of a dense metal is to be formed by a discharge surface treatment, the electrode fabricated by the method of the prior art of the second embodiment cannot be used. This is because if the metal powder is pressurized at a high pressure of 1 〇t/cm 2 as shown in the second prior art, the electrode is hard so that the film cannot be formed by the discharge surface treatment, such as using such an electrode. When the discharge surface treatment is performed, it is an eagle discharge machining process for cutting the surface of the workpiece. That is, since the ceramic powder is used in the prior art of the second aspect, there is no problem in pressurizing the electrode for discharge surface treatment under the high pressure as described above, but the condition cannot be directly applied to the metal. The method for producing an electrode for discharge surface treatment for a thick film having a discharge surface treated with a discharge surface to form a discharge surface treatment electrode has not been developed. The present invention has been made in view of the above circumstances, and has been made in order to produce a discharge 315550 12 1284682 surface treatment electrode which can easily form a dense thick film on a workpiece by a discharge surface treatment method. Further, an electrode for discharge surface treatment capable of forming a thick film having lubricity in a high-temperature environment at the time of discharge surface treatment is obtained. Further, it is intended to obtain an evaluation method for accurately evaluating whether or not the electrode for discharge surface treatment can be used as a film for discharge surface treatment formed of a film. Further, in the case of producing a discharge surface treatment using a metal powder as a powder electrode, it is intended to reduce the surface roughness and to perform a stable discharge to deposit a discharge surface treatment electrode of a thick film. Furthermore, it is also an object of the present invention to obtain a discharge surface treatment apparatus and a method thereof for using the electrode of the surface treatment of the Ronggu φ main m and the bamboo stalk. SUMMARY OF THE INVENTION In order to achieve the above (4) 'electrode for discharge surface treatment according to the present invention, a metal powder, a metal compound or a powder compacted body of a ceramic powder is used as an electrode, and the electrode and the gas are made in a working fluid or a gas. The processed material is a discharge surface treatment electrode which is formed by discharging the energy from the surface of the workpiece or the electrode material is reacted by the discharge energy, and the discharge surface treatment electrode is a discharge surface treatment. 5 i 10 / zm of the average particle size, the composition of the film formed on the workpiece, and 4 vol% or more of the mixture: : or a mixture of components that are difficult to form carbide, and through the 'for ^ The hardness of the erroneous pen-to-mark test can be Μ 8β in the range of the metal 'in the processing, the electrode for discharge surface treatment of the present invention, or the powder compacted powder of the metal compound as the electrode 315550 13 1284682 liquid or In the gas, a discharge occurs between the electrode and the processed object, and by discharging energy, an electrode material or an electrode material is formed on the surface of the processed object. Substance discharge energy into the film and reaction with the discharge of the surface discharge surface treatment is treated with an electrode, wherein: the compression strength of the electrode, those of 160MPa or less. Next, the electrode for discharge surface treatment according to the present invention is an electrode formed by compressing an electrode material of a powder of a metal or a metal compound as an electrode, and between the electrode and the workpiece in a working fluid or a gas. A discharge surface treatment electrode for forming a discharge surface by forming a film formed by the discharge of the electrode material or the electrode material by the discharge energy on the surface of the workpiece by the discharge energy. The ratio of the volume of the electrode material to the volume of the electrode is 25°/. Up to 65%. Next, the electrode for discharge surface treatment according to the present invention is a powder compacted by a powder of a metal or a metal compound as an electrode, and discharge is generated between the electrode and the workpiece in a working fluid or a gas. The discharge surface energy is formed on the surface of the garnish, and the electrode surface material is formed by the electrode material or the electrode material, and the surface of the electrode material is treated by the discharge energy. the following. Further, in order to achieve the above object, the method for producing an electrode for electrical discharge surface treatment according to the present invention is characterized in that it comprises a crucible pulverized with a powder of a metal, a metal compound or a ceramic. + _ η & % 1 v 、 、 、 、 、 、 、 、 、 、 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 315 The powder of the sieve is formed into a predetermined shape and is subjected to a third step of compression molding at a pressure of 93 to 278 MPa. Further, in order to achieve the above object, a method for producing an electrode for electrical discharge surface treatment according to the present invention is a metal powder, a metal compound or a powder compacted powder of a ceramic powder, which is used as an electrode in a working fluid or a gas. a discharge surface treatment method in which a discharge occurs between the electrode and the workpiece, and a discharge surface is formed on the surface of the workpiece to form a film formed by the electrode material or the electrode material due to the discharge energy: the reaction material. It is: a powder having a mean particle diameter of 0/zm and containing a component which forms a film on the processed product, and a mixture of 4 g% by volume or more of a component which does not form a carbide or which is difficult to form a carbide. Further, an electrode formed by a method in which the hardness of the smear-scratch test was 8 8 m was used to form the film. Next, the discharge surface treatment method according to the present invention is a powder compacted by a powder of a metal or a metal compound as an electrode, and a discharge occurs between the electrode and the workpiece in the working fluid or in the pore body. A method of treating a surface of a film formed of a material of an electrode material or an electrode material by discharge energy by forming a discharge energy on the surface of the workpiece, wherein an electrode having a compressive strength of 160 MPa or less is used to form The aforementioned film. Next, the discharge surface treatment method according to the present invention is a powder compacted by using an electrode material of a powder of a metal or a metal compound as an electrode, and between the electrode and the processing liquid in a working fluid or a gas. a discharge surface treatment method in which a discharge film is formed on a surface of the workpiece by a reaction material of 315550 15 1284682 or an electrode material which is reacted by discharge energy, and is characterized by: (4) electrode material An electrode having a volume ratio of 25 to 65% by volume of the aforementioned electrode is formed to form the aforementioned film. Next, in the discharge surface treatment method of the present invention, a powder compacted by a powder of a metal or a metal compound is used as an electrode, and a pulse-like discharge occurs between the electrode and the workpiece in a working fluid or a gas. a discharge surface treatment method in which a material which is reacted by an electrode material or an electrode material due to discharge energy is formed on the surface of the workpiece by the discharge energy thereof, and is characterized in that an electrode having a thermal conductivity of i is used or less To form the aforementioned film. Further, in order to achieve the above object, the discharge surface treatment apparatus according to the present invention is characterized in that an electrode formed by compression molding of a metal, a metal compound or a ceramic powder is placed in a working fluid or a gas, and an electrode is formed. The processed object of the film is subjected to a pulse-like discharge between the electrode and the processed object by a power supply device electrically connected to the electrode and the processed object, and the discharge energy is used for the processing. A discharge surface treatment apparatus for forming a film formed by a material which reacts with an electrode material or an electrode material due to discharge energy, wherein the electrode contains a component for forming a film on a workpiece, and 4% by volume The powder having an average particle diameter of 5 to 1 Å which is a mixture of the above-mentioned components which do not form carbides or which are difficult to form carbides, is formed into a method in which the hardness of the coating film by the pencil scratch test can be a hardness in the range of B to 8B. Next, the discharge surface treatment apparatus according to the present invention is characterized in that an electrode formed by a powder compacted by a powder of a metal or a metal compound and a processed product which will form a film are disposed in the working fluid 315550 16 1284682 or in a gas. a pulse-like discharge is generated between the electrode and the processed workpiece by a power supply device electrically connected to the electrode and the processed object, and an electrode material is formed on the surface of the processed object by discharging energy thereof. Or a discharge surface treatment apparatus in which an electrode material is reacted by a discharge energy to form a film, and the electrode has a compressive strength of 16 OMPa or less. Next, the discharge surface treatment apparatus according to the present invention is characterized in that an electrode formed by a powder compression molding of a powder of a metal 4 chelate or a processed material which forms a film is placed in a working fluid or a gas. And (b) a source device is connected to the electrode and the workpiece according to the helium gas, and a pulse-like discharge occurs between the electric device and the device, and the discharge energy is formed by the electrode material on the surface of the workpiece. Or a discharge surface treatment apparatus in which an electrode material is reacted by a discharge energy to form a film, wherein the electrode ' is formed to have a volume ratio of the electrode material to the electrode material of 25 to 65%. The surface treatment device is a processed product in which a powder of a working fluid compound is compression-molded, and the electrode is discharged by the power supply device described above, and the discharge electrode material or the electrode material is discharged by the discharge surface treatment device. It has the following thermal conductivity.

Next, in the discharge meter according to the present invention, an electrode formed of a metal or a metal powder is disposed in the gas, and an amount of a pulse between the formed electrode and the processed material and the workpiece is electrically connected to the processed product. On the other hand, the electrode formed by the electric energy on the surface of the workpiece is formed into a film, and the electrode has 1 〇W/mK 315550 17 1284682. In order to achieve the above object, the discharge surface treatment of the present invention is concerned. In the evaluation method of the electrode, a powder compacted by a powder of a metal or a metal compound is used as an electrode, and a discharge occurs between the electrode and the workpiece in a working fluid or a gas, and the discharge energy thereof is used. The surface of the processed object is formed by a negative reaction of the electrode material or the electrode material due to the discharge energy, and is used as a coating surface for the discharge surface treatment electrode for the discharge surface treatment. The method is characterized in that the electrode is gradually pressurized with a predetermined load. According to the compressive strength when the surface of the electrode is about to be cracked, it is evaluated whether a predetermined film can be formed in the aforementioned processed The electrode on the surface of the object. [Embodiment] Hereinafter, an appropriate embodiment of a method for producing a discharge surface treatment, a method for producing a discharge surface treatment electrode, a discharge surface treatment device, and a discharge surface treatment according to the present invention will be described with reference to the accompanying drawings. Detailed description. Embodiment 1 First, the outline of the discharge surface treatment and the apparatus used in the present invention will be described. The first lgI is a schematic view showing the discharge surface treatment in the discharge surface treatment apparatus. The discharge surface treatment apparatus includes: a discharge surface treatment electrode 12 for forming a film 14 on the surface of the workpiece 11 to form a workpiece of m 14 (abbreviated as a workpiece), and an electrical property It is connected to the guard u and the discharge surface treatment electrode η, and is configured to generate an electric fox between the two, which is a discharge surface treatment power source that supplies a voltage to the discharge surface of the power supply 13 %# ^ ^ _ π u. When the discharge surface treatment is performed in the liquid, the machining chamber 16 can be further provided so that the portion of the workpiece 11 and the discharge surface treatment electrode 12 facing the workpiece 11 at 315550 18 1284682 can be filled with the machining liquid 15 such as oil. When the discharge surface treatment is performed in a gas, the workpiece u and the discharge surface treatment electrode 12 are placed in a processing atmosphere. Here, in the drawings and the following, "discharge surface treatment in the working fluid will be exemplified. In the following, the electrode for discharge surface treatment is abbreviated as an electrode. In addition, the distance between the surface of the electrode for discharge surface treatment and the surface of the workpiece 11 is hereinafter referred to as the inter-electrode. distance The discharge table method 'in the discharge surface treatment apparatus i having such a configuration' will be described. For example, the metal U or the ceramic material which is the supply source of the coating film 14 is formed by using the guard U to form the coating film 14 as the anode '. The discharge surface treatment electrode 12 having a particle diameter of 〇 nm to several is used as a cathode, and the electrodes are controlled by a control mechanism (not shown) so that the processing liquid Η 2 is not in contact with each other to control the interelectrode distance. The discharge occurs between the discharge surface treatment electrode 12 and the workpiece u.: Due to the heat of the discharge, the workpiece u and a portion of the electrode 12, that is, the lead (1) between the particles of the electrode 12 When the bonding force is weak, the portion of the electrode 12 that is melted by the discharge, the storm or the electrostatic force, = electrons 21, is alienated from the electrode 12, and moves toward the surface of the workpiece η. Then, the electrode particles 21 reach the workpiece η. The surface is solidified again and becomes the film 14. Further, one part of the alienated electrode particles ^, c, ^ 1 is processed in the 'disorderly body, 7 knives 22 as a reaction 23, and will also be in the workpiece η film / 4. In this way, that is, at work 11 The surface forms a film but if the bonding force between the powders of the electrode 12 is strong, the electrode u τ 11 ^ can not be stripped by the explosion or electrostatic force of the discharge 315550 19 1284682; Workpiece 11. That is, 'can be processed according to the discharge surface, ... material =,:: material supply from the electrode 12 side and the material supplied thereto:: the smelting of the piece and the combination with the material of the workpiece 11 H will be The influence on the supply of the electrode material is the electrode degree, that is, the hardness. The m hard path is used here as the discharge of the discharge surface treatment: the manufacturing method - an example, which is explained. Indicates the discharge:: 2 ^ Flow chart of the manufacturing process of the electrode. First, a powder having a metal or a ceramic or the like which is intended to form a component of the film 14 on the workpiece 1 is applied to step S1). When it is made up of a plurality of components, the powders of the various components are mixed and read and crushed in such a manner as to be a case of a knife. For example, a granulator such as a ball mill device is used to circulate the average particles on the market. And tens of heart metal or (four) spherical powder is pulverized to an average grain furnace of 3 p or less. The pulverization can be carried out in a liquid, but in this case, the liquid is evaporated to dry the powder (step S2p is a powder after drying, and the powder and the powder are agglomerated to each other to form a large mass, and the large mass is simultaneously broken. When the wax used in the next process is sufficiently mixed with the powder, it is sieved (step S3). For example, when a ceramic ball or a metal ball is placed on a sieve on which the coagulated powder remains, and vibrated, Then, the agglomerated piece is disintegrated by the energy of the vibration or the impact of the ball, and passes through the mesh screen. The powder passing through the mesh can be used in the following steps. Here, it is pulverized by the step 3. The operation of powder sieving is explained. In the surface treatment of discharge, the voltage applied between the electrode 12 and the workpiece U is applied to the discharge surface for discharge to occur, usually between 8 〇v and 4 〇〇v. If the range is such that a voltage of this range is applied between the electrode 12 and the workpiece 11, the distance between the electrode 12 and the workpiece U in the discharge surface treatment will be about 0.3 mm. As described above, in the surface treatment, May be caused by the two poles The arc discharge, and the agglomerated blocks constituting the electrode 12 are also separated from the original size by the electric power; ^ 12 (five). Here, if the size of the block is less than the distance between the poles (0.3 mm or less), even if When there is a block between the poles, the next discharge can still occur. Moreover, since the discharge system is in a close proximity, there is a discharge in the block, so that the thermal energy or explosive force may be caused by the discharge. However, if the size of the block constituting the electrode 12 is greater than or equal to the distance between the electrodes (0.3 mm or more), the block is separated from the electrode η by the discharge due to the discharge, so that it is deposited in the block. The workpiece u is floated between the electrodes 12 and the workpieces 15 between the electrodes 12 and the workpieces. When the bulk is stacked as in the former, the discharge is caused by the closest distance to the electrode workpiece u. This part is concentrated in discharge and does not discharge in other places, so that the film U cannot be stacked on the surface of the workpiece n. Moreover, due to the large size, the heat of discharge cannot be ordered or corrected. The moon b 兀 熔融 melting. Therefore, the The formed film μ is very fragile and can be exploited by the fingers. Moreover, in the latter way, when the bulk floats between the poles, a short circuit between the electrode 12 and the workpiece is caused, so that discharge cannot occur. In other words, if desired When a discharge is formed in which the film 14 is formed and stabilized, the powder constituting the electrode is not likely to have a large agglomerate formed by the agglomeration of the powder, and the agglomeration of the powder is likely to occur in the metal powder or the conductive material. In the case of sex ceramics - bright, but not conductive 315550 21 1284682, the smaller the average particle size of the powder, the more easily the aggregation of the powder occurs. Therefore, in order to prevent the aggregation of the powder For the disadvantages of the discharge surface treatment caused by the agglomeration, a step of sieving the powder agglomerated in the step S3 is required. From the above conclusions, it is known that when sieving is carried out, it is necessary to use a mesh having a smaller distance between the electrodes. Thereafter, if it is desired to improve the pressure transfer to the inside of the powder during pressurization in the subsequent step, if necessary, the powder is blended with paraffin or the like by a reset ratio of 1% to 10% (steps) S4). When the powder is mixed with the wax, although the moldability can be improved, since the powder is coated with a liquid again, it is agglomerated by the action of its intermolecular force or electrostatic force, so that a large mass is formed. Yu Yu once again screened for the dissolution of the agglomerated pieces (step S5). The method of sieving here is the same as the method of the above steps. Next, the obtained powder is subjected to compression press molding (step S6). Fig. 3 is a cross-sectional view schematically showing the state of the former when the powder is molded. The lower punch 104 is inserted from the hole formed in the die 1 〇 5, and the lower punch 1 〇 4 and the metal mold (the two compartments formed by the 〇 〇 5 are filled in the above steps The powder sieved by S5 (when a plurality of components are formed, it is a mixture of powders). Then, the upper punch i 〇 3 is inserted from the upper portion of the hole formed in the metal mold (town) 1 〇 5. Then Pressure is applied from both sides of the punch 103 and the lower punch 104 on the former filled with the powder 101 using a pressurizer or the like, and the powder 1〇1 is compression-molded. Hereinafter, the compression-molded powder 101 is referred to as a press. At this time, if the pressure is increased, the electrode 102 becomes hard. If the pressure is lowered, the electrode 1 〇 2 315550 22 1284682 becomes soft. The particle size of the final 1 〇 1 becomes hard, such as the powder 1 〇 1 赦 赖 士 # 贝 1 隹 隹 之 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 12 Heating (step S7). When heating, such as the secondary wind, the heating of the room is increased, and the degree of the dish is 1 2 Hardening, such as lowering the heating temperature 彳, j 奄 12 softening. Also, by W 'voyage, can also reduce the resistance of the electrode 12. Therefore, even if =: wax and shrink molding, heating 4 is not φ ΛΛ ^ ^ ^ Negative Eight Hearts Thus, the combination of the tertiary and the final ends in the pressed powder can be obtained, and the conductive electrode 12 can be obtained. Slightly the above steps Μ the pulverization step, that is, directly using the average teaching; | + S3 through the cattle: ... powder situation, or omitting step bj through the division steps and mixing the ancient ^. · mm or more In the case of a block, it is still a month of discharge. The surface of the discharge is similar to that of the NVC: and the electrode 12' still has a problem of uneven hardness such as a lower hardness and a lower hardness at the center. C05t Ni (nickel), such alloys and ceramics under the average particle size of 3...the powder is mostly in the market. If the powder is used, the pulverization step of the above step si and the drying step of step S2 may be omitted. And _=' electrode for discharge surface treatment manufactured by the above method == state: To be explained, in the first embodiment, the electrode is formed. When the particle is at 5 to 10"m, no carbide or a bungee a, which is difficult to form a barrier, is formed; The relationship between the hardness of the electrode and the thickness formed by the complex is explained. - In the present embodiment 1, the material which does not form carbide is changed or the material which is difficult to form carbide is 315550 23 1284682 The results of the change in the electrode hardness of the component and the thickness of the film formed on the workpiece by the discharge surface treatment method are shown below. The material of the substrate used for the electrode for discharge surface treatment to be tested was CrsC2 (chromium carbide) powder, and thus C0 powder was added as a material which does not form carbides or is difficult to form carbides. The added Co is in the range of 〇 to 8〇0/. The hardness of the electrode for discharge surface treatment to be tested was changed to a predetermined hardness as described later. Here, the electrode is produced from a CrsC2 powder having a particle diameter of 5//111 and a Co powder having a particle diameter of 5 #m and manufactured according to the flow chart of Fig. 2, except in the pulverization step of the powder in the step S1. The pulverization is carried out under the condition that the powder having the particle diameter of (5) is obtained, and in the mixing step with the wax in the step 84, 2 to 3 wt% of the wax is mixed, and in the pressurizing step of the step S6, the addition is performed at about 100 MPa. The pressure is compressed to form the powder, and in the heating step of step s7, the heating temperature is changed by 40 (TC to 80 (the range of rc. Here, the heating temperature is Che, the higher the proportion of the powder, the higher the temperature is. The higher the ratio of c〇 powder, the lower the temperature is. This is because the electrode made by the ratio of Cr3C2 powder is easy to become brittle, and if it is heated at a lower temperature, it immediately collapses. In contrast, such as Co powder When the ratio is large, even if the heating temperature is low, the strength of the electrode is still easily increased. Here, the volume ratio (volume 0/〇) used in the present specification means that the materials to be mixed are respectively in the density of the material thereof. The meaning of the ratio of the value to be divided. Specifically, if the material is complex In the case of a plurality of types of mixing, the ratio of the respective volumes is itself, and in the case of a material-based alloy, the ratio of the values of the respective materials (metal elements) contained in the alloy divided by the respective densities (specific gravity) is taken as the volume %. In other words, the volume ratio of 315550 24 1284682 (% by volume) is defined by dividing the value ❶/g as the target component by the density of the component's by the weight % of each component used for the electrode for discharge surface treatment. The value obtained by dividing the density of the components is a total of values. For example, the volume ratio (% by volume) of the Co powder in the mixture of the Cr3C2 powder and the Co powder of the present example can be expressed by the following formula.

Co% by weight

Co% of volume _TCo density_

Weight % of Cr3C2 + % by weight of Co, ι * 3 〇: density of 2 + 7. Density) From this formula, it is understood that the material having the same density as the material to be alloyed is of course slightly the same as the weight %. Here, the "discharge pulse condition" at the time of discharge surface treatment in the first embodiment will be described. 4A and 4B are views showing an example of discharge pulse conditions at the time of discharge surface treatment, and FIG. 4a shows a voltage waveform applied between the discharge surface treatment electrode and the workpiece during discharge, and FIG. 4b shows discharge. A current waveform of a current flowing to the discharge surface treatment device. As shown in Fig. 4A, the no-load voltage ui ’ is applied between the two electrodes at time t 惟, but at the time after the discharge lag time td elapses, a current flows between the two electrodes, and discharge starts. The voltage at this time is the discharge voltage ue ', and the current flowing at this time is the peak current value ie. Then, if the supply of the voltage between the two poles is stopped at time q, the current does not flow. That is, the discharge is stopped. Here, it is called a pulse width te. The voltage waveform at this time tG to q is repeatedly applied between the two electrodes with a rest time %. That is, as shown in Fig. 4A, a pulse-like voltage is applied between the discharge surface treatment electrode η 25 315550 1284682 and the workpiece 11. In this example, the discharge pulse conditions used in the discharge surface treatment were set to a peak current value of ^=10 Α, a discharge duration (discharge pulse width) te = 64//s, and a rest time t〇 128 // s. Further, at the time of the test, the workpiece 11 was subjected to discharge surface treatment for 15 minutes using an electrode of an area of 15 mm x 15 mm. Fig. 5 is a graph showing the relationship between the thickness of the film due to the change in the amount of C〇 in the electrode for a discharge surface produced by changing the amount of the c〇 powder which is difficult to form a carbide in the Cr3C2 powder which is itself a carbide. In Fig. 5, the horizontal axis represents the volume % contained in the electrode for discharge surface treatment, and the vertical axis represents the thickness (# m) of the film formed on the workpiece in a logarithmic scale. "When the film is formed according to the discharge pulse conditions described above, the thickness of the film formed on the workpiece due to the volume % of c〇 contained in the electrode to be produced is different. In Fig. 5, the content of Co is 10 When the film thickness is less than or equal to 5% by volume, the thickness is gradually increased from the C content of 30% by volume, and the Co content is increased by more than 4 () volume _ close to 1 〇 _ # m. In this regard, we will discuss it in detail. For example, according to the feeding, such as C in the electrode, when the content is 0% by volume, that is, when the end of 3 is 1% by volume, the thickness of the film can be formed as /, the limit 'The thickness can't be increased. The carbonization system shows a case where the electrode for discharge surface treatment does not contain a material which does not form a film formation or a material which is difficult to form a carbide, and the processing time is shown. In Fig. 6, The horizontal axis represents the processing time (minutes/cm 2 ) of the discharge surface treatment per unit area of 315550 26 1284682, and the vertical axis represents the film thickness when the position of the workpiece surface before the discharge surface processing is performed as a reference (table of the workpiece) Position) (em). As shown in Fig. 6, in the initial stage of discharge surface treatment, the film will grow thicker with time, but it will be saturated somewhere (about 5 minutes/cm2). If it does not grow for a while, if the discharge process continues at a certain time (about 20 minutes/cm2;), the thickness of the film begins to decrease, and finally the film thickness becomes negative I, and the depth of the hole is removed, that is, even if it becomes In the state where the processing is removed, there is actually a bedding on the workpiece, and the thickness is about 10/m. That is, the thickness of the film is almost equal to the appropriate time (the processing time is 5 to 4 liters/cm). The processing state is the same. From this result, the processing time between $ and 20 minutes is more appropriate. Looking back at Figure 5, it can be seen that the amount of C in the electrode is increased with the increase of carbides. Thickening the film, and if the Co content in the electrode exceeds 3% by volume, the thickness of the formed film begins to increase, and if it exceeds 40: (4), it can be stabilized and a thick film is easily formed. In Fig. 6, although it is described as c〇 3 set to open from 30% by volume The thickness of the film is increased smoothly, but the average value of the test is performed. In fact, when the content is at a level of %, there is a case where the film is not thickened, or the film strength is still weak, that is, it is easy to be With the situation of "/, it is impossible to settle. Tian special strong friction and removed above. On the other hand, the Co content is 40 volume 〇 / 〇 in this way, as a metal residue containing all the non-carbides, it is possible to form a film which is a knives, and it is easy to form stably. 315550 27 1284682 Thick film. Figure 7 shows the use of the Co content in π ± ^ 隹 / υ volume. The electrode of the crucible is subjected to a photo of the film formed during the discharge surface treatment. In the case where the formation of a thick film is exemplified as a thick film, a thick film of about 2 mm is formed. The film is formed by a processing time of a minute, but if the treatment time is increased, a thicker film can be formed. In such a manner, if a material containing a carbide which is difficult to form a carbide such as c 或 or an electrode which does not form a carbide is used, it is possible to form a thick film on the workpiece by discharge surface treatment. . The above examples are described using c〇 as a material that is difficult to form carbides, but using Ni, Fe (iron), AI (aluminum), and Cu (copper).

The same result was obtained also when Zn (zinc) or the like. In addition, the term "thick film" as used herein refers to a dense film which can have a metallic luster inside a tissue (a film formed by a discharge of a pulsed shape, a surface roughness of the outermost surface is not good, and the appearance does not appear to be glossy). The meaning. For example, in the case where the content of a material which is difficult to form a carbide such as C 较少 is small, such as attenuating the electrode strength (hardness), the deposit on the workpiece may be thickened. However, such an adherent is not a dense film, and if it is rubbed with a metal sheet or the like, it is easily removed. Such a film is not a thick film as referred to in the present invention. In the same manner, the deposited layer described in the above-mentioned Patent Document 1 or the like is not a dense film, and it is easy to remove the friction by a metal piece or the like, and such a film is not a thick film as referred to in the present invention. Further, in the above description, it is described that after compression molding of Cr3C2 powder, 28 315 550 1284682 is added, but it is sometimes directly compressed. However, in order to form a dense thick film, it is not preferable to require a proper hardness, and a powder compacted body is used as an electrode in the case of manufacturing an electrode. The hardness of the electrode is too hard or too soft, and heat treatment is required. The heating of the ‘ 士士 & 、 basket of the powder compact is directly beneficial to the maintenance or solidification of the forming. The hardness of the electrode is related to the bonding strength of the powder of the electrode material, and is related to the supply amount of the electrode material to the workpiece side due to the discharge. When the hardness of the electrode is high, since the bonding of the electrode material is strong, even if the discharge occurs, only a small amount of the electrode material can be released, so that sufficient film formation cannot be performed. Conversely, if the electrode strength is low, due to the weak combination of the electrode materials, a large amount of material is supplied when the discharge occurs, and when the amount is too large: these materials cannot be sufficiently melted by the energy of the discharge pulse, so that denseness cannot be formed. The film. When a powder having the same particle diameter and the same particle diameter is used, a parameter which affects the electrode hardness, that is, the bonding state of the electrode material, is a pressing pressure and a heating temperature. In this embodiment! As an example of the pressurizing pressure, about 100 MPa is used, but if the pressurizing pressure is increased, the same hardness can be obtained even if the heating temperature is lowered. Conversely, if the pressure is lowered, it is necessary to set the heating temperature to be higher. Further, in the first embodiment, the test result under the conditions of i is shown as an example of the discharge pulse condition at the time of discharge surface treatment, but the thickness of the film may vary, and under other conditions, of course The same result can be obtained. As described above, it is known that the material condition is very high in the formation of a thick film. 315550 29 1284682 Important It is also known that other conditions are also extremely important in the treatment of discharge surfaces, particularly thick film formation. Usually, the electrode for electric surface treatment is subjected to compression and molding and heating of the powder material in accordance with the flow chart of Fig. 2 described above to produce an electrode. At this time, the state of the electrode is determined by the pressurization pressure at the time of compression molding and the heating temperature at the time of heat treatment. That is, the management of the prior electrode 4 uses an electrode formed by a pressure and a heating temperature, etc., to form a film, and judges according to the state. However, this method requires the formation of a film for the management of electrical subtraction, and it takes a lot of work. Then, the inventors of the present invention reviewed the resistance of (1) the resistance of the electrode, (2) the bending test of the electrode, and (7) the hardness test method of the electrode as the state of the management electrode. ~100 first, (1) The resistance is a method of cutting the surface of the discharge surface treatment into a shape to measure the resistance. The electric resistance has a tendency to become smaller as the electrode for discharge surface treatment becomes stronger and stronger. Therefore, although it is a good indicator of the strength of the discharge surface treatment, it is easily affected by the measurement, and is affected by the physical property value of the material. Different materials have different values, and it is necessary to grasp the value of the optimum state for each different material, and there are many problems. Next, the bending test of (2) is a method in which the electrode for discharge surface treatment is cut in a shape of a crucible and a three-point bending test is performed to measure the resistance to bending. This method has a tendency to be biased in measurement, and the measurement is expensive and has a problem. In the final (3) hardness test, there is a method of measuring the hardness according to the shape of the indenter by pressing the electrode for the discharge surface treatment, or using a measuring instrument such as a wrong pen. The electrode is determined by the method of judging whether there is a scratch 30 315550 !284682. These three methods are strongly related to each other, and it is found that the method of determining the state of the electrode for discharge surface treatment by the hardness test of the pencil of (3) is the most suitable for the reason of the simplicity of measurement and the like. Thus, the relationship between the hardness of the electrode and the properties of the film formed by the electrode will be described below. Here, as an index used as a reference for the hardness of the electrode, if the particle diameter of the powder constituting the electrode is large and the electrode is soft, the scratch test of the paint pen in the jis K5 600-5.4 is used, for example, When the particle size of the powder constituting the electrode is small and the electrode is hard, Röckweili hardness is used. The above-mentioned JIS K56〇〇_5_4 specification is originally applied to the evaluation of the coated film, but the evaluation of the material having a low hardness is suitable. Of course, the results of other hardness evaluation methods and the scratch test of the coating film are the same: the results can be mutually converted. Of course, other hardness evaluation methods can be used as indicators. As described above, the conditions for forming the thick film ruthenium material are very important, and depending on the case of the experiment, other conditions, particularly hardness, are extremely important as in the case of thick film formation. The relationship between the hardness of the electrode for discharge surface treatment by the surface of the thick film treated by the discharge surface, and the case where the volume ratio of r3 2 3 0% to Cg7G% is made as an example, for example. Fig. 8 is a view showing a state in which a film of a discharge surface treatment electrode having a volume ratio of 3 〇 70% is changed. In Fig. 8, the discharge film used for the transverse coating is measured by the hardness of the pencil: the price is more... = 315550 31 1284682 : Evaluation state of the thickness of the film formed by the electrode. The pulse condition of the discharge used in the discharge surface treatment when performing such a test, the discharge duration (discharge pulse time) (4) 4 A S, rest time t; = 1) r 〇 28# s. Further, in the evaluation test, an electrode of an area of 15 mm X 15 mm was used to form a film. As shown in Fig. 8, in the case where the hardness of the electrode for discharge surface treatment is 4B to φ, the state of the film is very good, and the film is formed and formed. Further, the hardness of the electrode for discharge surface treatment can form a good thick film at the B-formation. Under this range, as the junction is hard, the formation speed of the film tends to be slow, and the formation of a thick film at a hardness of B degree It will be quite difficult. If B is harder than B, it is impossible to form a thick film, so that the hardness of the electrode for discharge surface treatment is hard, that is, the work is performed while removing the work. On the other hand, even if the hardness of the electrode for discharge surface treatment is at a hardness of (10) 2, a good thick film can be formed, but the analysis of the structure reveals a tendency to gradually increase μ in the film. In addition, if the hardness of the electrode for the discharge meter is softer than 9 Β, the phenomenon that the electrode component cannot be melted and melted and directly adheres to the workpiece on the workpiece is a phenomenon that the membrane is broken. Density of the hole (P_US). Here, the relationship between the hard f of the electrode for discharge surface treatment and the state of the film 'is dependent on the discharge pulse condition to be used: it is less likely to change', and when an appropriate discharge pulse condition is used, it can be expanded. The extent of the film is somewhat good. The present inventors', the above-described tendency, constitute a material of an electrode, and are provided by an electrode made of a powder having an average size of 5:' β m. 315550 32 !284682 When the powder having a particle diameter of 5 to 10 Å/m is used in the present embodiment i, c 〇, Ni, Fe, Cu, Zn, etc. are not added to the material constituting the electrode for discharge surface treatment. The carbide-forming material or the carbide which is difficult to form carbides is 40% by volume or more, and the hardness of the coating film may be between B and 8B, and preferably between 4B and 7B. By manufacturing the electrode for discharge surface treatment in a manner of hardness, and using the electrode for discharge surface treatment to perform discharge surface treatment, it is possible to form a thick film on the workpiece stably. If such an electrode for discharge surface treatment is used, it can replace the welding or flame spraying method, and the work previously performed by welding or flame T coating is also processed. In the discharge surface treatment, whether the electrode material can be released from the electrode due to discharge =' end is the bonding strength of the powder constituting the electrode. That is, if the bonding strength is difficult, it is difficult to be released by the energy of the discharge, but if the bonding strength is weak, the 'binding strength is due to the large powder of the electrode constituting the electrode i: different f columns such as 'constituting the electrode When the particle size of the powder is large, since the number of points at which the ends are bonded to each other is reduced, the particle diameter of the electrode which is formed into the electrode is small, and the electrode strength is increased due to the number of points in the electrode: Will be enhanced. Because the second can release the electrode material from the electrode, because the powder is smashed to the thickness of the powder, the film is used in the hardness of the Β to 8 依 according to the hardness of the erroneous pen to the mark test. When the diameter is 1 JL 5"...: The electrode hardness and the film thickness in the case of the present embodiment are 315550 33 1284682. Here, an alloy powder containing Co, Cr, Ni, etc. in a predetermined ratio is exemplified, for example It is pulverized and mixed by an atomize method or a grindstone (^(1) or the like (in a manner that the particle size can be about 3 // m), and the discharge surface treatment is performed according to the flowchart of Fig. 2 of the first embodiment. In the case of the electrode, however, in the mixing step with the wax in step S4, 2 to 3 wt% of the wax is mixed, and in the pressurizing step of step S6, the electrode is prepared at a pressure of about i〇〇Mpai. Powder compression molding, in the heating step of step S7, the heating temperature is varied within a range of 60 (TC to 8 〇〇t. In addition, in the manufacture of the electrode, the heating step of step S7 may be omitted, and The mixed powder was compression-molded and the obtained compact was used as an electrode. The composition of the alloy powder described above is 20% by weight of Cr, 1% by weight of Ni, and 15% by weight of w (tungsten). / 〇, Co is 55 % by weight, and at this time, c vol% is 4% by weight or more. The discharge pulse condition when the manufactured electrode is subjected to the discharge surface treatment is in the 4A and 4B drawings, and the peak current value ie=i〇A, the discharge duration (discharge pulse width) te = 64 # s, the rest time 8. The electrode is formed by using an electrode having an area of 15 mm. As a result, although the electrode material is composed of powder, the material can be formed without any deviation due to the use of the alloy powder. The film, and of course, can be produced by mixing the powder of each material (here, Cr powder, Ni powder, w powder, c powder) in a manner that is a predetermined composition. The electrode, 纟, may have some performance degradation due to problems such as mixing variation of the powder. 315550 34 1284682 In the above description, the weight of Cr is 20% by weight, the weight of i is 。, W 15% by weight, the rest For c The composition of the powdered material is not limited thereto, and may be, for example, an alloy of <25 weight: %, Ni 10 weight%, W7 weight%, and the balance of c〇. Amount or M〇28% by weight, Cr 17% by weight, Si (Shi Xi) 3% by weight, the balance of the remaining, C 比例 ratio, or C ri 5 wt%, F e 8 wt% / the balance of ' Alloy, or Cr 21% by weight, M〇9 by weight m (4)*% by weight, the balance of the alloy of Ni, or CM9 wt%, 妒Μ weight ❶/pM 〇 3 wt%, (Cd(镐)+ Ta) 5 wt. %, Ti 8% by weight, A 10.6% by weight, and the balance of Fe and other alloys, such as C 〇, Ni, Bu, Ba Bu Cu, ~ 40% or more of the elements which are difficult to form carbides by volume% Just fine. n The kernel, because the alloy ratio is not the same, the hardness of the material and the like will be different, so the moldability of the electrode or the state of the film will be different. For example, when the hardness of the electrode material is hard, it may be difficult to form a powder using pressurized powder. When X' is heated to increase the strength of the electrode, it is necessary to try to increase the heating temperature. For example, Cr 25 wt/〇, Ni 10 wt%, w 7 wt%, and the balance c. The proportion of the alloy is softer, and M. 28% by weight, Cr 17% by weight, & 3% by weight, the balance of the alloy is a harder material, but in the heat treatment of the electrode required for the electrode, the temperature of the latter needs to be The temperature is set in an average manner about 100 ° C or higher. Further, the ease of formation of the thick film is as shown in the embodiment, and it is easier to increase the amount. Alloy powder of electrode composition 35 315550 1284682 For the last 3 materials, it is Co, Ni, which is a material that is difficult to form carbides.

Fe, A1, Cu, 7 乂

The more Zn, the easier it is to form a dense thick film. As a result of performing tests using various alloy powders, it has been found that, in the case of a material such as an electrode which is difficult to form a carbide in an electrode or a material which does not form a carbide, the probability of a t ^ leaf is more than 4 vol%, It is easy to form a drought, and it has been found that if the content of Co in the electrode exceeds 50% by volume, it is preferable since the month b forms a thick film having a sufficient thickness. Further, even if Co, Ni, Fe, A1, and X, which are difficult to form a carbide material, are mixed as a component of the alloy, a carbide is formed, and it is relatively difficult to form a carbide in the material contained therein. The = when the film will contain c〇, Ni, Fe, A, Cu, Zn, other components, and Co, Ni, Fe, A1, P ύ Μ. Μ A1, Cu, Zn ratio, at least A dense thick film is formed in the lunar calendar. When the alloy of Cl* and C is alloyed, it is found that if the content of Co exceeds 20% by volume, the thickness ratio begins to form: C: carbonization is formed. The material of the material is only a material that is more difficult to form carbides when it is used with a material such as an active material. That is to say, in the case of &, although it is a material that is easy to carbonize, it is a material that is not decarburized, but if it is compared with a material such as Ding, the degree of carbonization is not as low as that of the grain, and the electrode contains Cr. At the time, a part of it will become a carbide, and a part will be given as a gift. The file will maintain the state of the metal Cr. mm lt j < In order to form a dense film, it is necessary to leave the film as a metal. The ratio of the materials stored in the bucket is as high as 30% or more. The results of the relationship between the electrode hardness and the thickness of the film when the film was formed using 315550 36 !284682 from the electrode made of the particle size 丨 to 5 β were examined as follows. Here, when a powder having a particle size of about 6 #m is used to produce an electrode, the erroneous pen-to-mark test of the coating film specified in the above-mentioned JIS K5600_5_4 can be used, but a powder having a smaller particle diameter is used. For electrodes, this test is not applicable. Therefore, in this example, the hardness of the hardness Η=1〇〇_ι〇0〇χ1ι is obtained from the indentation distance h (//m) when the steel ball of i 吋 is pressed at a pressure of 15 kgf. . As a result, the state of the film at the hardness of the electrode hardness of 25 to 35 is optimum, and a dense thickness can be formed. However, even if it deviates somewhat from its range, there is still a range in which a thick film can be formed. A hard film can form a thick film until the hardness is 5 〇, and a soft direction can be formed to a thickness of 2 硬度. membrane. However, as the hardness increases, the rate at which the film is formed tends to slow down, but at a hardness of 50 degrees, the formation of a thick film is quite difficult. If the hardness is increased again, a thick film cannot be formed, and as the hardness increases, the removal of the workpiece side is started. Further, in the soft direction, to a hardness of about 2 ,, a thick film can be formed, but the unmelted material tends to increase. If the electrode is softer than 20, the electrode can be found to be not yet melted. The phenomenon of directly attaching to the side of the workpiece. Here, the relationship between the hardness of the electrode and the state of the film varies somewhat depending on the discharge pulse conditions to be used. When an appropriate discharge pulse condition is used, the range in which a good film can be formed can be expanded to some extent. In addition, as the powder particle size of the second embodiment is about 3 Am (i<m to 5/zm), the hardness of an appropriate electrode on the discharge surface treatment is also increased, and the JIS K56 shown in the first embodiment is used. 〇_5_4 coating film with 315550 37 1284682 New pen to the trace test (four) difficult m Therefore, here, the Luo type hardness test. The Rockwell hardness test is a method in which the ball is pressed against a predetermined load and the hardness is obtained from the shape of the indentation. If the load is too heavy, it will cause damage to the electrode and it is necessary to make an appropriate strength. Hardness test, other Vickers hardness test (Vieker, shardnesstest), etc. 'Of course can be used as the electrode hardness, but in this case, the end of the financial indentation will collapse to the problem of observation', so the shape of the indenter is still A spherical shape is preferred. According to the second embodiment, the average melon which is composed of a material which does not form a carbide or a material which is difficult to form a carbide 4 (% by volume) and which constitutes electricity is i to 5 " m In the powder, an electrode for discharge surface treatment is produced in such a manner that the hardness can be 20 to 5 G, and the electrode can be subjected to discharge surface treatment to form a dense and thick film on the surface of the workpiece. The bear 3 was formed by averaging the powder of the same material as in the second embodiment to produce an electrode. Although the same material is used, since the particle size of the powder is made smaller, the electrode hardness suitable for the discharge surface treatment can be further increased. In this case, if a material which does not form a carbide or a material which is difficult to form a carbide is contained in an amount of 40% by volume or more, a thick film can be easily formed. In this case, when the hardness of the electrode is from 3 Torr to 5 Torr, the film is in the best shape, and a dense thick film can be formed. ❻, even if it deviates from its target circumference, there is still a range in which a thick film can be formed, and the hardness of the hard direction can still form a thick cavity; the soft direction of the enamel and the film is as high as 25 degrees. Can form a thick film. Since the hardness increases, there is a tendency that the formation speed of the film 315550 38 1284682 will slow down, but the hardness of 6G will make the formation of a thick film quite difficult. If the hardness is increased again, a thick film cannot be formed, and as the hardness increases, the removal process on the side of the workpiece is removed. Further, in the soft direction, a thick film can be formed at a hardness of 25 degrees, but the unmelted material tends to increase. If the electrode is softer than 25, the electrode component is not yet melted. The phenomenon of directly attaching to the side of the workpiece. Here, the relationship between the hardness of the electrode and the state of the film varies depending on the discharge pulse condition to be used. If an appropriate discharge pulse condition is used, the range in which a good film can be formed can be expanded to some extent. Further, the same results were obtained for an electrode produced from a powder having an average particle diameter of 1 // m or less. According to the third embodiment, the powder having a carbide-free material or a material which is difficult to form a carbide is contained in an amount of 40% by volume or more, and the powder having the average particle diameter of the electrode is 丨# m or less. The electrode for discharge surface treatment can be manufactured in a manner of 25 to 60, and the electrode can be subjected to discharge surface treatment to form a dense and thick film on the surface of the workpiece. (Fourth Embodiment) In the fourth embodiment, an electrode for discharge surface treatment in which a film formed on a workpiece can be thickened by a discharge surface treatment method will be described. First, the change in hardness caused by the particle size of the electrode for discharge surface treatment will be described. In the pressurizing step of step S6 of the flowchart of Fig. 2, when the powder is press-formed, the pressure is transferred from the powder which is in contact with the pressing surface or the surface of the metal mold to the inside of the electrode, and the powder is slightly 39. 315550 1284682 : Shift:: At this time, if the average particle size of the powder is tens of degrees, the size of the powder or the space formed between the powder and the powder will increase, and with the pressing surface or metal core The surface of the powder (of the surface of the electrode), that is, the density of the particles present on the surface of the electrode will increase as the space can be filled, and the friction of the blade will increase. That is, ', 彳 此 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极 电极This is the reason why the distribution of hardness is formed in the electrode. For example, when such an electrode for discharge surface treatment having a hardness distribution is used for the treatment, it may be in any of the following categories. In the first type, the outer peripheral portion of the electrode is the most suitable hardness, and the inside is too soft. In this case, the film can be deposited on the workpiece at the outer periphery of the electrode, but the inside of the electrode cannot form a film on the workpiece or form a loose film. In the second type, the outer peripheral portion of the electrode is too hard, and (iv) is soft. In this case, in the outer peripheral portion, since the electrode is not consumed in the discharge surface treatment, the removal process is performed, but the inside of the workpiece is formed into a slack film on the workpiece. X, when the outer peripheral portion of the electrode is too hard to be removed from the surface of the workpiece, the inside of the electrode is consumed (4), but the outer peripheral portion is not consumed, and the surface on the discharge side of the electrode becomes a shape in which the outer peripheral portion protrudes. Most of the discharge will occur in the outer peripheral portion. If this happens, it is easy to cause the discharge to concentrate and the discharge will become unstable. These conditions are not suitable for discharge surface treatment. Then, the hardness of the electrode for discharge surface treatment produced by using the powder having a small particle size and the formation of the film were tested. Here, only the alloy powder having an average particle diameter of 1.2 #m was used, and an electrode for discharge surface treatment having a shape of 315550 40 1284682 χ 1 lmm x 5.5 mm was produced in accordance with the procedure shown in Fig. 2 . The alloy powder used at this time is an alloy of Cr 25 wt%, Ni l〇 wt%, W 7 wt%, C 〇 5 wt%, and the balance of c〇. Further, in addition to the alloy powder of such composition, it is also possible to use an alloy of Mo 28 wt%, Cr 17 wt%, Si 3 wt%, and the balance of Co, or Cr 28 wt%, Ni 5 wt%, W 19 wt%, and the rest. An alloy such as c比例. Here, in the pressurizing step of step S6 of FIG. 2, the powder is compression-molded at a pressure of 67 MPa, and 'for the purpose of producing electrodes having different hardnesses, in the heating step of step S7, 73 ( TC and 75 (the temperature of TC, the powder compact was heated for one hour using a vacuum furnace. First, the hardness of various electrodes produced by changing the heating temperature was investigated. Here, in the fourth embodiment, the compression of the electrodes was employed. The intensity is taken as the hardness of the electrode. Fig. 9 is a photograph showing an outline of an experimental apparatus for measuring the compressive strength of the electrode. In the experimental apparatus of Fig. 9, the force applied to the electrode is increased by a ratio of m per second, and The load cell on the upper part of the electrode is used to measure the force applied to the counter electrode. If a certain force is reached, the force will be released due to cracking on the electrode surface. Therefore, the compressive strength of the electrode is calculated from the force at the time of cracking. The result is that the compressive strength of the electrode heated in the third generation is the surface Pa, and the strength of the electrode heated at 75 为 is 180 MPa. Next, the relationship between the compressive strength of the electrode made of the alloy powder and the thickness of the film will be described. The discharge surface treatment condition at this time is to make the peak current value 1 〇 A' and the discharge duration (discharge pulse width). 315550 41 1284682 into 4 # S 0 Fig. 11 is a view showing the relationship between the collapsing strength of the electrode and the thickness of the film when the discharge surface treatment is performed under the above conditions. In Fig. 5, the horizontal axis indicates the surface treatment for discharge. The compressive strength (Mpa) of the electrode, and the longitudinal sleeve indicates the thickness of the film formed on the surface of the member by the surface of the discharge surface treated by the discharge surface treatment using the compressive strength indicated by the horizontal axis ( Mm). Further, the thickness 〇 of the film on the vertical axis is a small value, which means that the film is removed and the surface of the workpiece is removed to form a cloud. As shown in the figure, an electrode for discharge surface treatment is also shown. The compressive strength is 1嶋Pa_, and the stacking process can be performed on the surface of the workpiece. However, if the compressive strength is 18 Pa_, it will become the wire processing of the workpiece surface. In particular, the thickness is formed on the workpiece. When the thickness of the film is 2_ or more, the compressive strength of the electrode needs to be below the Pa. In addition, if the peak value of the current or the time of the thunder is increased, the amount of the electrode powder supplied from the electrode is increased, and the electrode is increased from the electrode. The strength of stripping the electrode powder is not the same as that of Figure ii under other processing conditions. The compressive strength of the electrode for discharge surface treatment produced by compression molding of powder can be contained in each unit volume. The number of particles combined with the particle is determined. If the average particle size is increased, the compressive strength will decrease as the number of particles and particles contained in the unit volume will decrease. That is, as long as it is average The same particle size 'if the compressive strength is formed to a value below the thickness of the thick film', the thickness of the film can be formed regardless of any material. For example, when examining the hardness of such an electrode, it has been found that in the discharge surface treatment of a powdered powder electrode having an average particle diameter of about 1 # m, as an electrode of the appropriate 315550 42 1284682 film formation, It is necessary to manage a method in which the compressive strength is 100 MPa or less, but the compressive strength of one of the electrodes for forming a thick film is not changed as long as the average particle diameter is the same. However, when changing the material, it is necessary to change the molding conditions such as the heating temperature or the pressing pressure on the electrode manufacturing. As described above, it is confirmed that one of the main factors that can determine whether or not a thick film can be formed by the discharge surface treatment is the hardness of the electrode. In other words, when a powder having an average particle diameter of about m# m is used, the pressure at the time of compression molding or the heating temperature is changed, and discharge is performed using an electrode for discharge surface treatment in which the compressive strength can be 1 〇〇Mpa or less. Surface treatment can form a thick film on the workpiece. The force generated by the discharge will act in the manner of pulling off the electrode powder, and the range of this force is 0 + " m to 0 mm. That is, it is necessary to be able to measure the strength of the electrode by the size of such a layer. For this reason, it is most suitable to grasp the compressive strength of the hardness of the entire electrode. Furthermore, if the particle size of the powder of the electrode is small, even if the electrode is produced at the same heating temperature under the same pressing pressure, the number of faces of one particle combined with the surrounding particles is increased due to the increase in the number of particles per unit volume. Will not change 'only the total number of joints contained in the unit volume will increase, the electrode will become hard. In recent years, due to advances in powder molding technology, it has been possible to manufacture metals with an average particle size of up to 1 〇〇nm. A powder or a ceramic powder is used. Thus, the relationship between the compressive strength of the electrode for discharge surface treatment and the thickness of the bedding is measured using a powder having an average particle diameter of 5 〇 nm. Further, an average particle diameter of 43 315 550 1284682 is used. When the powder of the nano layer is used to produce an electrode, since the electrode having sufficient strength can be obtained only by pressurization, the heating step of step S7 of Fig. 2 can be omitted, and the heating step is omitted in this example. The pulse condition of the discharge treated by the discharge surface under the electrode produced is carried out under the same conditions as those shown in the above first figure. The result of the experiment, If the compressive strength is lower than i 6〇MPa, the stacking process is performed on the surface of the workpiece, but when it is more than the compressive strength, it will become the removal process of the workpiece surface. When the electrode strength of the Ni powder having a particle diameter of 50 nm was examined, it was found that the surface of the electrode for the formation of an appropriate film for the discharge surface treatment using the powder of Ni powder requires one of the evaluations of the electrode for the formation of the film. 1 A method of 60 MPa or less. As described above, the compressive strength of an electrode produced by compression molding of a powder is determined by the number of combinations of particles and particles contained per unit volume. The number of combinations of particles and particles contained in the particles is increased, and the compressive strength is increased. Further, as described above, it is found that the discharge surface treatment of the powdered powder electrode using the powder having an average particle diameter of 5 〇 nm is appropriate. One of the evaluations of the electrode for film formation requires management of a compressive strength of 16 MPa or less. Such a finding, as with an average particle size of 1·2// When the results of the case of m are combined, it is indicated that the compressive strength of the electrode capable of forming a thick film differs depending on the average particle diameter. Further, as an appropriate electrode for film formation, the compression of the pointer The value of the strength is not the same as the material of the electrode material as long as the average particle diameter is the same. For example, if the electrode for discharge surface treatment is formed from a powder having an average particle diameter of 315,550, 44,128,468, When a thick film is deposited, the compressive strength can be increased. Further, as another electrode material, a Co powder having an average particle diameter of 3 # m is used, and the result of the same experiment is observed. The compressive strength is about 50 MPa. In this case, one of the main factors determining whether or not a thick film can be formed by the discharge surface treatment is the hardness of the electrode. In other words, it has been confirmed that when a powder having an average particle diameter of 3 // m is used, the pressure at the time of compression molding or the heating temperature is changed to produce an electrode having a compressive strength of 50 MPa or less, and the electrode is used to perform discharge surface treatment, A thick film is formed on the surface of the workpiece. In this case, since the compressive strength of the electrode produced by compression molding of the powder is determined by the number of combinations of particles and particles contained per unit volume, it is one of the electrode evaluation indexes for forming an appropriate film. The value of the compressive strength is not the same as the material of the electrode material as long as the average particle diameter is the same. Therefore, if it is judged whether or not the electrode for discharge surface treatment is formed of a powder having a large average particle diameter, whether or not a thick film can be deposited, it is necessary to lower the compressive strength. Fig. 11 is a graph showing the relationship between the average particle diameter and the compressive strength of an electrode capable of depositing a thick film. In Fig. 11, the horizontal axis represents the average particle diameter Um of the powder constituting the electrode for discharge surface treatment on a logarithmic scale, and the vertical axis represents the cumulative limit compressive strength of the compressive strength of the electrode capable of forming a film on the surface of the workpiece (MPa). ). As shown in the figure, the smaller the average particle size, the more the packing limit compressive strength is increased. According to the fourth embodiment, the discharge surface treatment electrode which is produced by using the electrode having the average particle diameter of 丨 "paw powder" as 315550 45 1284682 and having a compressive strength of 100 MPa or less is subjected to discharge surface treatment. A dense thick film having lubricity in a high-temperature environment is formed on the workpiece. Further, when the powder having an average particle diameter of 50 nm, the compressive strength can be ΐ6〇Μρ& or less, and the average particle diameter is 3#m. In the case of powder, the electrode for discharge surface treatment is produced so that the compressive strength can be 50 MPa or less, and the electrode for discharge surface treatment is used to perform discharge surface treatment, that is, a dense thick film having lubricity in a high temperature environment can be formed on the workpiece. Further, according to the fourth embodiment, when the electrode for discharge surface treatment is used for the discharge surface treatment, the compressive strength can be used to evaluate whether or not the thick film is deposited on the workpiece. It can be applied to the evaluation of the electrode when the electrode for discharge surface treatment is mass-produced under the same conditions. Specifically, t will be the next large amount from the same material. The measurement results of the compressive strength of one or a plurality of electrodes extracted from the produced electrodes are used as evaluators of the simultaneously fabricated electrodes, whereby the quality of all the electrodes can be managed even when the electrodes are mass-produced. In the fifth embodiment, the discharge surface treatment for the metal powder is used as the powder surface electrode, and the electrode for discharge surface treatment in which the discharge can be stabilized without reducing the surface roughness and the thick film can be deposited can be described. As described in the first to third embodiments, when a thick mold is formed on the surface of the workpiece by the discharge surface treatment, it is necessary to add a material which does not form a carbide or a material which is difficult to form carbides to the electrode material. The condition of the material with the highest composition. From the 'addition only to the material that does not form carbides 315550 46 1284682 or the material that is difficult to form carbides in the electrode. The middle T tooth has the upper surface of the workpiece, and the medium thick film will remain in the middle. Therefore, it is difficult to form a dense film. Therefore, in the fifth embodiment, the disk At γ > The technique required for the dense film is described here. Here, an alloy containing Cr 3〇%, Ni 3%, M〇2%, w 5%, and 3% Co as a base material is used (hereinafter, referred to as C〇 alloy) is described as an example. A commercially available product is used for such a Co alloy powder. In addition, in the case of a c〇 alloy, "the alloy is contained in the alloy, and the alloy is contained in the alloy. %, %%, etc., or alloys based on ruthenium. 20%, 10%, 15%, etc. . It is an alloy of a base material, etc., as long as it is a base containing Co. From the average particle size 3 " m degree c. The alloy powder was subjected to the steps of the above Fig. 2 to manufacture an electrode for discharge surface treatment. At this time, the pressurization pressure of the step S" is preferably from 93 to the degree of milk. If the force is high, the electrode will have a deviation in hardness, or an air crack will occur on the electrode during pressurization. When the eight-purpose electrode at the discharge surface is formed by using the co alloy powder produced in the above manner to perform the discharge surface treatment, a film of gold is formed on the surface of the workpiece. However, from the experiments of the inventors and the like, it was found that the performance of the film = the ratio of the powder of the primary electrode material in the electrode has a large influence. Because the = system is made by forming the material at the end of the f-forming material, it becomes a emptiness. If there is too much space, the electrode strength will decrease so that: the hunting is performed by the pulse of the discharge. The supply of materials, for example, the phenomenon that the electrode is collapsed in a wide range due to the impact of the discharge. Another 315550 47 1284682 On the one hand, if the space is too small, the electrode is too tightly bonded, and the discharge pulse occurs. The supply of the electrode material is reduced, so that a thick film cannot be formed. The powder having a particle size of about 3 // m is used to pulverize a powder having a particle diameter of several tens/m, and the particle diameter is The particle size distribution is a powder having a distribution with a peak of 3//m. When such a relatively uniform particle size powder is compression-molded to produce an electrode, the electrode material can be formed well according to experiments by the present inventors. The proportion of the volume occupied by the electrode volume of the electrode of the film (the rest is space) is in the range of 25% to 5%. However, for example, the ratio of the volume of the electrode material (hereinafter, referred to as the ratio of the electrode material) At 25 〇/〇, the electrode is soft and has insufficient feeling of strength. Conversely, if the ratio of the electrode material is 5〇%, it is quite hard and partially produced as an electrode. In the case of air cracking, the outline of the state of the film caused by the ratio of the volume of the electrode material is shown in Table 1. However, such a ratio, t is somewhat due to the distribution of the particle size of the powder, etc. For example, when a powder having a broad particle size distribution is used, there is a tendency that the space ratio of the electrode (= (100% of the electrode material volume)) is lowered. Conversely, if a powder having a narrow particle size distribution is used, When there is a tendency for the space of the electrode to increase. I曰315550 48 1284682 Table 1 The ratio of the volume of the electrode material is 15% of the state of the film. The electrode collapses and cannot be used 20%. Although the film can be formed, the state is 25%. Although it is porous, it can form a thick film 30% to form a dense thick film 40% to form a dense thick film 50%. Although a dense thick film can be formed, the formation of the film is slow. 55% removal of the workpiece So that can't On the other hand, when a powder having a different particle diameter is mixed, for example, when a powder having a particle diameter of 6 /zm is mixed in a particle size of 3 // m used in the above examples, the volume of the electrode material is The ratio of the electrode volume of the electrode capable of forming a good film is in the range of 40 to 65%. However, when the ratio of the volume of the electrode material is 40%, the electrode is relatively soft and has insufficient feeling of strength. On the other hand, if the ratio of the volume of the electrode material is 65 %, it is quite hard as an electrode. The outline of the state of the film caused by the ratio of the volume of the electrode material in this case is shown in Table 2. Table 2 The ratio of the volume of the electrode material is 30% of the state of the film. The electrode collapses and cannot be used. 35% can form a film, but the state of laxity is 40%. Although it is porous, it can form a thick film 50% to form a dense Thick film 60% can form a dense thick film of 65%. Although it can form a dense thick film, the formation of the film is slow. 70% of the workpiece is removed so that a thick film cannot be formed. According to the fifth embodiment, the discharge surface treatment electrode having a volume ratio of the electrode material in consideration of the volume of the electrode is used to carry out the discharge surface treatment of 49 315 550 1284682, even if the metal powder is used as a raw material. The electrode for discharge surface treatment can also form a dense film having no voids on the workpiece. Further, in the above Patent Document 2, in the case of a ceramic electrode which can be formed at an extremely high pressure, there is a recording using an electrode which is compression-molded to a theoretical density of 5 to 90%, but it is not the present embodiment. Form 5 forms a thick film of dense metal, so its technical range, use, and effect are also different. (Embodiment 6) In the sixth embodiment, a discharge surface treatment for depositing a thick film can be carried out by using a discharge surface treatment electrode produced by compression molding of a metal powder. In the electrode for discharge surface treatment manufactured by the process shown in Fig. 2, if the combination of the powder and the powder is strong, the heat transfer between the powder proceeds smoothly, that is, the thermal conductivity increases, and conversely, if the combination is weak The heat transfer between the powders does not proceed smoothly, and the thermal conductivity is lowered. If the heating temperature is increased, the combination of the powder and the metal of the powder progresses, and the heat transfer rate of the electrode increases. Conversely, if the heating temperature is lowered, the powder does not progress to the metal of the powder, and the thermal conductivity of the electrode is lowered. For example, the thermal conductivity of the electrode (for each unit length and unit temperature is low, due to the local high temperature, the electrode material can be vaporized instantaneously by the discharge of the discharge. Taking the molten portion or the solid portion of the electrode, which is separated from the electrode, is deposited on the surface of the workpiece. On the one hand, if the heat transfer rate of the electrode is high, it is difficult to diffuse due to heat, and 315550 50 1284682 is generated to generate a heat spot. Therefore, the electrode material is not vaporized. Therefore, the explosive force does not occur, so that the electrode material cannot be supplied. Therefore, when a thick film is to be formed on the surface of the workpiece, it is necessary to deposit a material on the workpiece which is larger than the constituent material. Since the amount of the electrode material is large, the thermal conductivity of the electrode for discharge surface treatment needs to be lower. Hereinafter, the method of reducing the thermal conductivity of the electrode for discharge surface treatment will be described. According to the process of Fig. 2, only the average particle is used. Diameter 1 · 2 # alloy alloy powder to make a 50mm x 11 mm x 5.5mm shape discharge surface treatment electrode. The alloy powder used at this time is Cr 25wt %, Ni 10wt%, W 7wt%, C 0.5wt%, and the balance is the ratio of Co. In addition to the alloy powder of this composition, M〇283⁄4, Cr 17wt%, Si 3wt% can be used, and the rest is The alloy of the proportion of Co, or the alloy of Cr 28% wt%, Ni 5 wt%, W 19 wt%, and the balance of Co. Further, in the pressurization step of step S6 of Fig. 2, 67] V [pa The pressure compresses the powder, and, in order to obtain an electrode having a different hardness, in the heating step of step S7, the powder compact is heated in a vacuum furnace at each temperature of 73 Torr and 750 ° for 1 hour. Further, the discharge surface treatment was carried out under the same discharge pulse conditions as in the fourth embodiment. First, the thermal conductivity of each electrode produced by changing the heating temperature was investigated by a laser flash method. The thermal conductivity of the electrode heated at 73 ° C is 10 〇 W / mK, and the thermal conductivity of the electrode heated at 750 ° C is Kw / mK. Figure 12 ' shows the use of thermal conductivity is not the same When the discharge surface treatment electrode is subjected to discharge surface treatment for 5 minutes, the surface formed on the surface of the workpiece is 51 315550 1 284682

A graph showing the relationship between the film thickness and the thermal conductivity of the electrode for discharge surface treatment. In Fig. 12, the horizontal axis represents the thermal conductivity (W/mK) of the electrode for discharge surface treatment, and the vertical axis represents the surface of the workpiece when the discharge surface treatment is performed using the electrode for discharge surface treatment having the thermal conductivity indicated by the horizontal axis. The film thickness (mm) formed. Here, if the film thickness value of the vertical axis is negative, it means that the processing is removed. As shown in the figure, the lower the thermal conductivity, the thicker the film thickness will be when the processing time is the same. Further, when the thermal conductivity of the electrode is about u.8 w/mK 11 or more, the removal of the surface of the workpiece is removed. Therefore, it has been found from experiments that if a thick film is to be formed, the thermal conductivity of the electrode needs to be formed to a thickness of 0.2 mm or more and 8 W/mK or less. In particular, the thermal conductivity of the electrode is required to be 1 〇 w/mK or less. ^ After the discharge surface treatment, if the surface of the discharge surface treatment electrode having a thermal conductivity of 12 w/mK is observed, the powder of the electrode can be confirmed. The metallic luster that melts and resolidifies. That is, the surface on which the discharge occurs is not a compact which is micro-bonded to each other, but is a re-solidified body formed by the mutual toxic occupation of the metal powder after melting. On the other hand, the 敎 conductivity is a state in which the surface of the discharge surface treatment electrode of the surface mK is discharged, and no gloss is observed. Therefore, when the thermal conductivity is 10 w/mK or more, since hot spots are not formed on the electrodes, and the portion where the electrodes are in contact with the arc (four) column is not vaporized, the explosive force is so small that the electrode cannot be completely removed. The solution melts and remains on the surface of the electrode. Further, since the discharge is repeated, the fused domain is accumulated, and a molten, resolidified metal layer is formed on the surface of the electrode. If such a metal layer is formed, there is no longer a roll of electrode 315550 52 1284682 that travels from the electrode to the workpiece to remove the workpiece surface. In addition, in the present embodiment, the expression "6" has the composition of the above-mentioned composition, and the final It I is described as "only". Alloy powder, alloy powder

Or in the case of a gold crucible, if an electrode having a thermal conductivity 丨〇 W/mK 同样 is also produced, and the electrode is used to perform discharge surface treatment, a thick film can also be formed. The electrode is a powder compacted into a powder, and the heat transfer rate of the electrode is determined (influenced), not the material of the electrode powder, but the powder and the powder, 'η & heart shape, therefore, for all materials, such as When the electrode is fabricated in a thermal conductivity (1 〇W/mK) or less, a thick film can be formed on the guard. For example, even if Cu (about 300 W/mK) or Al (200 W/mK) having good thermal conductivity is used, as long as the thermal conductivity of the electrode made from the powder can satisfy the above thermal conductivity (1 〇 w/mK), A thick film can be formed on the surface of the workpiece. However, if the thermal conductivity is equal to or higher than the above thermal conductivity, the film cannot be formed on the workpiece. From the sixth embodiment, it has been experimentally confirmed that if an electrode having a thermal conductivity of 10 W/mK or less is used, a thick film can be formed, and the value is also proved to be useful as an index required for forming an electrode on a thick film. . Thus, if the thermal conductivity is used as an index of the electrode, there is a merit that the electrode capable of forming a thick film can be easily evaluated. In the case of the thermal conductivity of the electrode for electric discharge machining, the thermal conductivity of the electrode is set to 0.5 Kcal/cm · sec · ° C or less, as described in Japanese Laid-Open Patent Publication No. SHO 54-124806. However, the invention described in Japanese Laid-Open Patent Publication No. SHO 54-124806 is to avoid the consumption of electrodes, 315550 53 1284682 and to rip the electrode shape instead of the electrode of the present invention. In the case of the discharge related to the workpiece, the discharge table is formed on the workpiece, and in the Japanese Patent Laid-Open Publication No. 54-124806, although there is no record of the lower limit of the conductivity, it is obvious. It can be understood that, for example, when the thermal conductivity of the electrode is lowered (for example, qing/mK), the purpose of forming an electric spot on the electrode, consuming the electrode, and copying the processed shape or the like cannot be achieved. Also, the method of actively consuming the electrode and forming the film on the workpiece at the discharge surface of the film as shown in Fig. 6 is the same as the method of the electric clothing®, and the purpose and method are completely different. 5Kcal/cm· _ · 〇c(=2〇93〇3w/mK) is too large. The value of pure copper, which is the highest thermal conductivity, is 398〇w/mK. According to the sixth embodiment, the electrode for discharge surface treatment having a thermal conductivity of 1 OW/mK or less is used for the discharge surface treatment, so that the electrode for discharge surface treatment made of metal powder as a raw material can still The original film is formed on the workpiece. As described above, according to the present invention, the hardness of the electrode for discharge surface treatment, the compressive strength thereof, the proportion of the volume of the electrode material in its volume, and the thermal conductivity thereof can conform to the predetermined range in accordance with the particle diameter of the powder. A dense thick film can be formed on the workpiece by manufacturing it in the manner of using the electrode to perform the discharge surface treatment. (Embodiment 7) In the seventh embodiment, as a method for evaluating an electrode, a method in which the discharge is continuously generated according to a predetermined condition, and the electrode is used to evaluate the thickness of the electrode from the consumption amount of the electrode, the processing time, and the thickness of the film formed by 54 315 550 1284682, Explain. An alloy powder of the shellfish type 4 (which was pulverized to have an average particle diameter of 1 · 2 # m) was compression-molded to produce a 5 〇 mm x Umm x 5 shaped electrode for discharge surface treatment. The process for producing the electrode is the same as that of the fourth embodiment. The electrode produced in this manner is manufactured under the management of the powder particle size and the production conditions, but may vary depending on the temperature or humidity at the time of production, the state of pulverization of the powder, the state of mixing of the wax and the powder, and the like. In the above description, the method of managing the deviation by the electrode hardness or the like is described. However, in addition to this method, the formation of the film may be directly performed using an electrode to investigate. The figure used for the outline of the method of determining the merits of the electrodes in the first to the first, ~, π % %. In the figures, the same components as those of the user of the first embodiment of the first embodiment are given the same symbols. Here, the drawings are diagrams for explaining the outline of the determination method. The components of the power source, the drive shaft, and the like are omitted and are not shown. In the method for evaluating an electrode according to the seventh embodiment, the electrode manufactured by the above method is used, and the film is formed by quantitatively searching for < In the case of the above-mentioned electrode, from the viewpoint of the simplicity of the treatment, it is preferable that the surface of 5.5 mm can be set as the discharge surface, but it can be set as the other surface to become the discharge-^ type 1 first, such as the 13A. Figure No, implement the battery 12 盥 workpiece n „ + a , n

, and the positioning of the 11 pieces of work. Next, as shown in Fig. 13B, discharge is started to form a film. Then, as shown in Fig. 13C, the film 14 will be formed on the workpiece 11. In the middle, the symbol p denotes the arc of the discharge & / Fig. and the arc of the figure of Fig. 130. Here, the distance at which the electrode 12 is driven in the downward direction of the 315550 55 1284682 z-axis of the figure is maintained at a predetermined value to determine the film formation time and the film thickness formed. Here, the pushing amount in the z-axis direction is made 2 mm. Since the electrode was pushed 2 mm in the z-axis direction, the electrode consumption (length) after the formation of the film was 2 mm + (the thickness of the formed film) + (discharge gap). The discharge gap is from 1 〇 to 1 〇〇 #m. Further, the discharge surface treatment conditions were made into a peak current value ie = i 〇 A, and a discharge duration (between discharge pulsations) te = .... The results of actual implementation of the film formation test are shown in Table 3. Table 3 Electrode number ~N^T No.2 No.3' "N^T4 No.5 (minutes) 16 20 Film thickness (mm) ^35""οΤϊΤ Tensile strength (MPa) 35 25 # ^ , ^-----20 " , the electrode number is the number attached to the electrode to be tested = the film formation time indicates the discharge surface treatment time, and the film thickness indicates: the thickness of the film formed during the film formation time, and Tensile strength means that the test piece is adhered to the film formed on the workpiece u by an adhesive, and the test piece adhered to the workpiece and the film is subjected to a tensile test by a tensile strength tester to break the film. pressure. The electrode formation time of the electrode No. was "16 minutes, and the film thickness at that time was 〇.35 mm, and the electrode numbers such as .3 and 4 were slightly the same. The electrode wave code Νο.2 electrode is like the electrode number Ν. The time is longer than the 20-eight twisted smashed film formed by the thunder, the knife, but the film thickness is thin. The electrode of the electrode No. 5, on the contrary, the film formation time was 13 minutes shorter, and the thickness of the film 315550 56 1284682 was G.3 〇 mm. The strength of the film formed from these electrodes is not limited to the length of the film, and usually (16 minutes) is long or short, and there is a tendency to decrease, and there is an optimum value in the treatment time or the thickness of the film which can be formed. Such an optimum value varies depending on the electrode material, the electrode shape, the processing conditions, and the like, and the merits of the electrode can be judged from the film formation time or the film thickness at the time of formation of the film under the predetermined conditions. The basis for such judgment can be set as, for example, a positive or negative average of the average processing time as an excellent judgment, and a person who is out of the range is made inferior. Further, the thickness of the film can also be made in the same manner. For example, in the above test, the test is carried out by setting the amount of push of the electrode to a predetermined value, but it is also possible to make the treatment time a predetermined time and use the film at that time as a criterion for judgment and to calculate the positive and negative values of the average value. Judging, and ^ is out of the range as a bad way to set. According to the seventh embodiment, the film formation time or the film thickness when the film is formed on the workpiece under predetermined conditions by the electrode can be used to determine the merit of the electrode. (Industrial Applicability) As described above, the present invention is suitable for a discharge surface treatment apparatus which can automate the process of forming a thick film on the surface of a workpiece. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a discharge surface treatment in a discharge surface treatment device, and Fig. 2 is a flow chart showing a process for preparing a discharge surface treatment electrode, 315550 57 1284682 3 The figure is a cross-sectional view showing the state of the former when the powder is molded, and FIG. 4A is a view showing a voltage waveform applied between the electrode for discharge surface treatment and the workpiece during discharge, and FIG. 4B is a view showing a state of discharge during discharge. The current waveform of the current flowing through the discharge surface treatment device, and Fig. 5 is a graph showing the film endurance due to the change in the amount of C〇 on the electrode for discharge surface treatment produced by changing the amount of c〇 powder mixed with the Cr2 and C2 powders. Fig. 6 is a view showing a state of formation of a film at a processing time when a material for a discharge surface treatment does not contain a material which does not form a carbide or a material which is difficult to form a carbide, and Fig. 7 shows a content of c〇 A photo of a film formed by performing a discharge surface treatment on a 70% by volume electrode, "Fig. 8 shows a change in the volume ratio of Cr/2 30% to Co 70. FIG. 9 is a view showing a state in which a thick film is formed in the hardness of the electrode for processing, and FIG. 9 is a photograph showing an experimental apparatus for measuring the compression of the electrode, and the first drawing shows the relationship between the compressive strength of the electrode and the thickness of the mold. Fig. 11 is a graph showing the relationship between the average particle diameter and the compressive strength of the electrode capable of performing deposition of the film, and Fig. 4 is a view showing the use of the electrode for discharge surface treatment having different thermal conductivity to perform the discharge treatment. The relationship between the thickness of the film formed on the surface and the thermal conductivity of the electrode surface treated with 315550 58 1284682, and Fig. 13A shows the outline of the method for determining the quality of the electrode according to the film formation test, and Fig. 13B shows the A schematic diagram of a method for determining the merits of an electrode by a film formation test, and a schematic diagram of a method for determining the merits of an electrode according to a film formation test. (Description of component symbols) 11 Workpiece 12 Discharge of electrode 13 for discharge surface treatment Surface treatment power supply 14 Film 15 Processing fluid 16 Processing tank 21 Electrode particles 22 Component in gas 24 Reactant with gas components 101 Powder 103 Upper punch 104 Lower punch 105 Metal mold (town) 315550 59

Claims (1)

1284682 Pickup, patent application scope: 1 · An electrode for discharge surface treatment, made of gold powder, made of metal, metal compound or pottery The substance which can be reacted by the discharge is used as an electrode for discharge surface treatment which is treated by the discharge surface, and is characterized in that: the amount, the powder of the human being, has an average particle diameter of 5 to 10 #m, 3 a mixture of a component for forming a film on a workpiece, a component having a volume of not more than 5% by volume, or a carbide which is difficult to form a carbide, and a hardness of the sample to be coated with a pencil to a mark can be B to The way of hardness in the range of 8B. 2. An electrode for discharge surface treatment, which is a powder compacted by a metal, a metal compound or a ceramic powder as an electrode, and discharges between the electrode and the workpiece in a working fluid or a gas. The discharge energy is formed on the surface of the workpiece by a material which is reacted by the electrode material or the electrode material due to the discharge energy, and is a discharge surface treatment electrode for the discharge surface treatment, characterized in that: the powder "has 1" At the same time as the average particle diameter of 5 / m, a mixture of a component for forming a film on a workpiece, and a component which does not form a carbide or is difficult to form a carbide, and is formed into a use. The hardness of the /4 吋 steel ball when pressed by the pressure of I5kgf as the h ( // m) is H=100-1000xh and can be in the range of 20 to 50. 60 315550 1284682 3 - an electrode for discharge surface treatment, which is a powder compacted by a metal, a metal compound or a ceramic powder as an electrode, and discharges between the electrode and the workpiece in a working fluid or a gas. a discharge surface treatment electrode for forming a film formed by an electrode material or an electrode material which is reacted by discharge energy on the surface of the workpiece by the discharge energy, and characterized in that: the powder has丨# m below the average particle size, and contains a component for forming a film on the workpiece, and a mixture of 4% by volume or more of a component which does not form a carbide or is difficult to form a carbide, and is molded to use 1/ The hardness obtained when the indentation distance of the 4 吋 steel ball is pressed by the pressure of 15 kgf is h (= m), h=i 〇〇-1 〇〇〇xh can be a hardness in the range of 25 to 60. 4. An electrode for discharge surface treatment, which is a powder compacted by a powder of a metal or a metal compound as an electrode, and discharges between the electrode and the workpiece in a working fluid or a gas, by which discharge energy is generated And the surface of the processed material is formed by a material which is reacted by the electrode material or the electrode material due to the discharge energy, and is a discharge surface treatment electrode for the discharge surface treatment, wherein the compressive strength of the electrode is 16 〇 MPa or less. 5. An electrode for discharge surface treatment, which is a powder compacted by an electrode material of a powder of a metal or a metal compound as an electrode, and discharges between the electrode and the workpiece in a working fluid or a gas. And a discharge surface treatment electrode formed by the discharge of the electrode material or the electrode material by the discharge energy on the surface of the workpiece by the 315550 61 1284682 film as a discharge surface treatment. The characteristics are: The ratio of the volume of the electrode material to the volume of the electrode is 25% to 65%. 6. An electrode for discharge surface treatment, which is a powder compacted by a powder of a metal or a metal compound as an electrode, and discharges between the electrode and the workpiece in a machining liquid or a gas 7 to discharge it. An electrode for discharge surface treatment treated with a discharge surface of a material formed by an electrode material or an electrode material due to discharge energy, which is formed on the surface of the workpiece, and characterized in that the thermal conductivity is 10 W/mK or less. . A method for producing an electrode for discharge surface treatment, comprising: a first step of pulverizing a powder of a metal, a metal compound or a ceramic, and a step of decomposing the pulverized powder into a distance between the electrodes The second step of sieving the following size, and the third step of compressing the formed powder into a predetermined shape and compressing it at a pressure of from % to 278 MPa. 8. The discharge surface treatment method is a powder compacted by a metal, a metal compound or a ceramic powder as an electrode, and discharges between the electrode and the workpiece in the processing liquid or in a gas, thereby discharging Energy, and wide: a discharge surface treatment method in which a surface of a workpiece is formed by a material which is reacted by an electrode material or an electrode material, and is characterized by: 315550 62 1284682 A rhyme, having 5 to 1 〇 At the same time as the average particle diameter of #m, each of them is a mixture of a component which forms a film on a workpiece, and a component which does not form a carbide or a carbide which is hard to form a carbide, and is used as a coating film. The hardness of the pencil scratch test can be formed into a dryness of 8B to form the film. 9. A discharge surface treatment method in which a powder compacted by a metal, a metal compound or a ceramic powder is used as an electrode, and a discharge is generated between the electrode and the workpiece in the processing liquid or gas = by the discharge energy thereof. A method for treating a discharge surface formed on a surface of the workpiece by a material which is reacted by an electrode material or an electrode material by b discharge, and is characterized in that: the powder has an average particle diameter of 1 to 5 # m. At the same time, a mixture containing a component for forming a film on a workpiece, and a component of 40% by volume or more of a slain-forming or hard-to-form carbide is used, and is formed by using a 1/4-inch steel ball. ^The hardness of h (//m) when the red mark is pressed as h (//m), h=i〇〇_i〇(8), which can be a hardness of 20 to 50, to form the aforementioned film. . 10. The discharge surface treatment method is a metal powder, a metal compound or a powder compacted by a pottery powder I, and is used as an electrode to process a liquid towel or a gas 2 to cause discharge between the electrode and the workpiece. A discharge surface treatment method in which a discharge material can form a film formed by a material of an electrode material or an electrode material due to discharge energy, and is characterized by the following: 315550 63 1284682 Two powders having 1 // At the same time as the average particle diameter of m or less, a mixture of a component for forming a film on a workpiece and 40 parts by volume or more of a component which does not form a carbide or is difficult to form a carbide, and is used for molding 1/4. The hardness of the hardness of H=l〇〇-l〇〇〇xh which can be obtained in the range of 25 to 60 when the indentation distance of the ball is pressed at a pressure of 15 kgf as h ( // m), In order to form the above-mentioned 11th discharge surface treatment method, a powder compacted by a powder of a metal or a metal compound is used as an electrode, and between the electrode and the workpiece is generated in the machining liquid or in the gas. Electrically, with its discharge energy, the surface 2f of said processing material is formed of an electrode material or the electrode material by the discharge energy reactor discharge surface treatment method of the coating into which is characterized in: The aforementioned film. 12·—A method of surface treatment of discharge, which is itself a metal or a metal compound Discharge surface treatment method, 'characterized by ··· The volume ratio is a discharge surface treatment method to form the aforementioned film. 'A powder of metal or metal compound 315550 64 1284682 is used as an electrode, and a pulse-like discharge is generated between the electrode and the workpiece in the processing liquid or in the gas, and the discharge is caused by the discharge. A discharge surface treatment method in which an electrode material or an electrode material is formed on a surface of a workpiece by a material which reacts with discharge energy, and is characterized in that an electrode having a thermal conductivity of 10 W/mK or less is used to form the film. . A discharge surface treatment apparatus in which an electrode formed by compacting a powder of a metal, a metal compound or a ceramic powder and a processed product forming a film are disposed in a working fluid or a gas, and the electrode is formed by the electrode And the power supply device electrically connected to the processed object, wherein a pulse-like discharge occurs between the electrode and the processed object, and by discharging energy, a discharge is formed on the surface of the processed object by an electrode material or an electrode material. A discharge surface treatment apparatus in which a substance reacted with energy forms a film, characterized in that: ^, the electrode of the above-mentioned electrode contains a component for forming a film on a workpiece, and 40% by volume or more does not form a carbide or An average of 5 to 1 Å/m of the mixture of the components which are difficult to form a carbide is formed into a hardness in the range of B to 8b in accordance with the hardness of the pencil-scratch test according to the coating film. 15. The discharge surface treatment apparatus is characterized in that an electrode formed by a powder compacted by a powder of a metal, a metal compound or a ceramic powder, and a processed product forming a film are disposed in a working fluid or a gas. a power supply device electrically connected to the electrode and the processed object, wherein a pulsed discharge is generated between the electrode and the workpiece of the first 315550 65 1284682, and the discharge energy is formed on the surface of the processed object. A discharge surface treatment apparatus in which an electrode material or an electrode material reacts with a discharge energy to form a film, wherein the electrode contains a component for forming a film on a workpiece, and 40% by volume or more does not form. A powder having an average particle diameter of 1 to 5 V m of a mixture of carbide or a component which is difficult to form a carbide, which is formed by using an indentation distance when a 1/4 inch steel ball is pressed at a pressure of 1 5 kgf as h ( // m) The obtained hardness H = l 〇〇 - i 〇 0 〇 xh can be a hardness in the range of 2 〇 to 50. The discharge surface treatment apparatus of the present invention is characterized in that an electrode formed by compacting a metal, a metal compound or a ceramic powder, and a processed product forming a film are disposed in a working fluid or a gas, and The electrode and the processed object are electrically connected to the power supply device, and a pulsed discharge is generated between the electrode and the processed object, and the discharge material is used to form an electrode material or an electrode material on the surface of the processed object. A discharge surface treatment apparatus in which a substance that reacts with energy is formed into a film is characterized in that the electrode ' contains a component for forming a film on a workpiece, and 40% by volume or more does not form carbide or is difficult to form. A powder having an average particle diameter of 1 # m or less of a mixture of carbide-forming components is formed into a hardness H= when the indentation distance when a 1/4-inch steel ball is pressed at a pressure of 15 kgf as h (//m) The way loo-1〇〇〇xh can be a hardness in the range of 25 to 60. 66 315550 1284682 1 7 · Discharge surface treatment apparatus' is an electrode formed by a powder compacted by a powder of a metal or a metal compound in a working fluid or a gas, and a processed product forming a film, and The electrode and the processed object are electrically connected to each other, and a pulsed discharge is generated between the electrode and the processed object, and an electrode material or an electrode material is formed on a surface of the processed object by discharging energy thereof. A discharge surface treatment apparatus in which a substance which reacts due to discharge energy forms a film is characterized in that the electrode has a compressive strength of 160 MPa or less. In a discharge liquid surface treatment apparatus, an electrode formed by compacting a powder of a metal or a metal compound and a processed material forming a film are disposed in a working fluid or a gas, and the electrode is formed by the electrode And the power supply device electrically connected to the processed object, wherein a pulsed discharge occurs between the electrode and the processed object, and by discharging energy, a discharge is formed on the surface of the processed object by an electrode material or an electrode material. A discharge surface treatment apparatus in which a substance reacted with energy forms a film, characterized in that the uranium electrode is made up of a volume ratio of the electrode material to the volume of the electrode, and is 25 to 65%. A discharge surface treatment apparatus in which an electrode formed by a powder compacted by a powder of a metal or a metal compound and a processed product forming a film are disposed in a working fluid or a gas, and the electrode and the foregoing The processed object is electrically connected to the power device, and a pulsed discharge is generated between the electrode and the processed object, and the discharge material is used to form an electrode material or an electrode material on the surface of the workpiece at 315550 67 1284682. A discharge surface treatment apparatus in which a substance that reacts with energy is formed into a film is characterized in that the electrode has a thermal conductivity of 1 〇W/mK or less. (2) A method for evaluating an electrode for discharge surface treatment, wherein a powder compacted by a powder of a metal or a metal compound is used as an electrode, and a discharge occurs between the electrode and the workpiece in a working fluid or a gas. A method for forming a film for discharge surface treatment by forming a material which is reacted by an electrode material or an electrode material due to discharge energy on the surface of the workpiece by the discharge energy, and is characterized in that: The predetermined load is applied, and the compression strength of the surface of the electrode immediately after the crack is generated to evaluate whether the electrode can be formed, and a predetermined film is formed on the surface of the workpiece. 21. The method for evaluating an electrode for discharge surface treatment is to use a powder compacted by a powder of a metal or a metal compound as an electrode, and discharge between the electrode and the workpiece in a working fluid or a gas. The method for evaluating a discharge surface treatment electrode by forming a film formed by an electrode material or an electrode material due to discharge energy on the surface of the workpiece by the discharge energy thereof is characterized by: The electrode, and the film formation time or the film thickness at the time of forming the film according to the predetermined conditions on the workpiece to determine the merit of the electrode. 315550 68