TW200422590A - Opto-electronic inclinometer - Google Patents

Opto-electronic inclinometer Download PDF

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Publication number
TW200422590A
TW200422590A TW92109352A TW92109352A TW200422590A TW 200422590 A TW200422590 A TW 200422590A TW 92109352 A TW92109352 A TW 92109352A TW 92109352 A TW92109352 A TW 92109352A TW 200422590 A TW200422590 A TW 200422590A
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Taiwan
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light
container
linear
light beam
projection
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TW92109352A
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Chinese (zh)
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TWI225922B (en
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Min-Huei Tseng
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Min-Huei Tseng
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Abstract

A transparent fluid interface in a container, could be tilted due to the container inclination towards the gravity direction. Project uniform light source to one side of this container, and focus it by the lens-like combination of the container shape and the liquid inside, then we can get a refractive light beam on the other side when the container is tilted. This device can be used to measure the tilt angle of many kind of mechanical structures.

Description

200422590 五、發明說明(1) 【發明所屬之技術領域 本發明係有關一種氺 容器内透明流體介面隨i = i =平儀,尤指一種利用參考 器外型所形成聚光效應而傾斜原· ’及流體與容 流體介面聚光至另一二勾光源投射於其-側,並經 光源折射訊號,其與光檢測裝置上,以檢測得 用於量測及調校各種斜角度成比例。本|置可應 【先前技術】種、、。構物件之平面傾斜角度值。 妒Α Ϊ : t木,機械的結構物件巾,傾斜角度的量測虚檢 杈為其主要的形成因素之一, 叼ΐ而與檢 也越來越重要。 對於此,其1測的精準度 習用之氣泡式水平揚,太念 體,並藉著液體盘容iL:!閉容器内充填大部份液 容器内壁上緣曲面的橢圓球體::作:二形成一顆貼附在 W A仏 惯圓衣體軋泡,當容器傾斜時,氣泊 :士:用而漂移至最高點’使用者依據容器表 县相對應位置以讀取此—參考容器之傾斜角度乂 S . 測方式,易受周圍光線變化、使用者目視觀察差 異性等因素影響而造成極大的量測誤差。 规祭差 【内容】 ' 本發明之主要目的,乃在利用流體介面124隨重力傾 二’、理,完成一高解析度之光電式水平儀。本裝置之特點 t於傾斜角檢測並非觀察氣泡漂移方式,而是利用光源投 射於傾斜之流體介面124時,會經折射而改變其聚光位 置再利用光檢測裝置1 5 0以檢測其位置變化方式。本裝200422590 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to a transparent fluid interface in a tritium container with i = i = flat instrument, especially a kind of tilting principle using a focusing effect formed by the appearance of a reference device. 'And the fluid and fluid-capacity interface focuses the light to another two-hook light source and projects it on its side, and refracts the signal through the light source, which is proportional to the light detection device for detection and adjustment of various oblique angles.本 | 置 可 应 [Previous Technology] Kinds ,,. The value of the plane tilt angle of the structure. Envy Α Ϊ: t-wood, mechanical structure, towel, tilt angle measurement false detection fork is one of the main forming factors, and inspection is more and more important. For this, its accuracy of 1 measurement is used in the bubble-type horizontal lift, too much body, and by the liquid disk volume iL :! closed container filled most of the upper surface of the inner surface of the liquid container oval ellipsoid :: made: two Form a bubble attached to the WA 仏 custom round body, when the container is tilted, the air park: Shi: Drift to the highest point using the user's reading according to the corresponding position of the container table county—refer to the tilt of the container Angle 乂 S. The measurement method is susceptible to factors such as changes in ambient light and differences in visual observation of the user, resulting in great measurement errors. Regulations [Content] The main purpose of the present invention is to complete a high-resolution photoelectric level using the fluid interface 124 to tilt with gravity. The characteristic of this device is that the oblique angle detection is not the way to observe the drift of the bubble, but when the light source is projected on the inclined fluid interface 124, it will be refracted to change its condensing position and then use the light detection device 150 to detect its position change. the way. This equipment

200422590 五、發明說明(2) ' ---------- ΐ Ϊ :可提高量測解析度外,用光檢測裝置15Q測得之傾 ,角度變化,若輸入訊號處理電路系統中,同時亦可$ 自動化傾斜角度量測與調校之目的。 %我 依本發明較佳實施之光電式水平儀’請參考第丄圖, =發明光電式水平儀侧視系統圖,係包含一光源投射裝 110,一傾斜介面裝置120,一辅助透鏡裝置13〇,一 測裝置1 5 0。 饿 其中之傾斜介面裝置120,包含一透明透鏡狀結構之 曲面容器121,容器内至少充填兩種以上介質,如第丄圖 $之介質一為透明氣體122,介質二為透明液體123,此二 流體之流體介面1 2 4,可因液體相對於容器内壁,產生之 附著力或表面張力,造成流體介面124部份凸或凹之透鏡 曲面特性,以輔助光束聚光。 兄 另外其中之光檢測裝置1 5 0,可為任意型式感光單元 之一象限、三象限、四象限乃至一維、二維(平面)陣列之 光感測單元211組合,其亦可為具傾斜角刻度標示的光點 呈像罩幕。 使用時’光源投射裝置110投射均勻光束至容器之一 侧(在第1圖中為容器底部),經過透鏡狀結構容器丨2 1之 曲面與内置液體123形成之透鏡效應聚光後,穿過容器内 部流體介面124,再經容器之另一側(在第1圖中為容器頂 部)的辅助透鏡裝置130,調整聚光光束140孔徑大小,並 將聚光光束1 4 0投射於光檢測裝置1 5 0上,以利檢測光束孔 徑與聚光位置訊號。200422590 V. Description of the invention (2) '---------- ΐ Ϊ: In addition to improving the measurement resolution, the inclination and angle measured by the light detection device 15Q are changed. If input to the signal processing circuit system At the same time, it can also be used for the purpose of automatic tilt angle measurement and adjustment. The photoelectric level of the preferred implementation of the invention according to the present invention 'please refer to the second figure, = side view system diagram of the invention's optical level, which includes a light source projection device 110, an inclined interface device 120, and an auxiliary lens device 13. One test device 1 50. The sloping interface device 120 includes a curved lens-shaped container 121, and the container is filled with at least two or more media, such as the first medium of the first figure is a transparent gas 122, and the second medium is a transparent liquid 123. The fluid interface 1 2 4 of the fluid can cause convex or concave lens surface characteristics of the fluid interface 124 due to the adhesion or surface tension of the liquid relative to the inner wall of the container to assist the beam focusing. In addition, the light detection device 150 can be a combination of any type of photosensitive unit in one quadrant, three quadrant, four quadrant, or one-dimensional, two-dimensional (planar) array of light sensing units 211, which can also be tilted. The light points marked by the angular scale are like a curtain. In use, the light source projection device 110 projects a uniform light beam to one side of the container (the bottom of the container in the first figure), and passes through the lens effect of the lenticular structure container 21 and the lens effect formed by the built-in liquid 123 and passes through. The internal fluid interface 124 of the container passes through the auxiliary lens device 130 on the other side of the container (the top of the container in FIG. 1) to adjust the aperture size of the focused light beam 140 and project the focused light beam 140 onto the light detection device. 15 0, in order to detect the beam aperture and spotlight position signal.

200422590 五、發明說明(3) —谷器1 21相對於番士 士人 1 9yl _ ^ ^ 、重力方向並無傾斜時,則流體介面 之正、φΎ ,所以聚光光束140應投射於光檢測裝置150 =位置’故光檢測裝置150測得之傾斜角度為〇 ; 反之,當容器121相對於曹六古^ “力丨 也〇 士 駚八品ίο, + π ,丨丁於重力方向傾斜一角度Θ時,則流 體'面,124亦傾斜一相對角度θ,依據光學司淫爾定律 jne s law) ’ *束穿過傾斜之流體介面124時將產生折 :測ίΪ二角為―㊀的函數,此時聚光光束140投射於光 二置50之位置偏差量’在忽略小角度誤差時可依 下式換算得角度值:200422590 V. Explanation of the invention (3) — When the valley device 1 21 is relative to the Fanshi 1 9yl ^ ^ and the direction of gravity is not inclined, then the fluid interface is positive, φΎ, so the focused light beam 140 should be projected on the light detection Device 150 = position 'so the inclination angle measured by the light detection device 150 is 0; otherwise, when the container 121 is relative to Cao Liugu ^ "力 丨 也 〇 士 駚 八 品 ίο, + π, Ding is tilted in the direction of gravity When the angle Θ, the fluid 'plane, 124 is also inclined at a relative angle θ, according to the optical law jne s law)' * When the beam passes through the inclined fluid interface 124, a fold will occur: Function, at this time, the position deviation of the concentrated light beam 140 projected on the light set 50 can be converted to the angle value according to the following formula when the small angle error is ignored:

Zd 与c X tan Θ 其中zld為位置偏差量,c為比例常數,㊀為傾斜角 度,因此若測得此一位置偏差量即可測得傾斜角度值。 【實施方式】 本發明之第一實施例請參考第2圖,平面陣列檢光裝 置檢光方式示意圖,其系統圖仍為第丄圖,主要不同點為 其光檢測裝置150為一平面陣列檢光裝置21〇,為便於說 明,系統圖其它部份不再標明並畫出,而圖中則同時標明 使用時聚光光束140及平面陣列檢光裝置21〇相對位置之側 視(圖左)及正視(局部放大於圖右)情行。 本發明中所稱之平面陣列檢光裝置2 1〇,係指内含平 面陣列型光感測單元2 11的一種光檢測裝置丨5 〇,例如平面 陣列電荷耦合裝置(focal plane array charge CQupied device)即是其中一類,其内含感測單元211數目,可視感 測精度及解析度而擴增。 < 200422590 五、發明說明(4) 於第2圖例中,每一感測單元211均以一小方格表 示’若容器121未傾斜,則聚光光束140聚光中心點應位於 標示為0之中心感測單元2 1 2上,但本圖例中,由於假設 容器1 21有部份傾斜,所以聚光光束丨4 〇聚光中心點位於標 示為1之感測單元213上,因此,於使用本裝置時,首先 利用電子訊號處理方式,取得聚光光束140聚光中心位置( 1之感測單元213),再計算出〇之中心感測單元212與1之 感測單元21 3之相對位置差,亦即其位置偏差量,即可換 算出容器傾斜角度之數值與方位。 本發明之第二實施例請參考第3圖,四象限檢光裝置 檢光方式示意圖,其系統圖仍為第1圖,而其光檢測裝置 150為一四象限檢光裝置31〇,類似上述實施例一,圖中同 時標明使用時聚光光束140及四象限檢光裝置310相對位置 之側視(圖左)及正視(放大於圖右)情行。 於第二實施例中,所稱四象限檢光裝置31 〇係指含四 象限感測單元311之光檢測裝置150,各象限感測單元311 上可設置對稱於中心點之a線性遮罩3 1 2、b線性遮罩 31 3、c線性遮罩314、d線性遮罩31 5。各線性遮罩内均 含有光均勻擴散物質,其可使投射於線性遮罩内之聚光光 束140被各象限感測單元311均勻感測,投射於線性遮罩外 之聚光光束14 0被阻隔。此一線性遮罩,作用在使各象限 感測單元311感光強度,正比於入射光單位面積強度,及 入射光投射入線性遮罩之線性方向上長度。 於本實施例中,由於四象限檢光裝置31 0檢測位置偏Zd and c X tan Θ where zld is the position deviation amount, c is the proportionality constant, and ㊀ is the inclination angle. Therefore, if this position deviation amount is measured, the inclination angle value can be measured. [Embodiment] Please refer to FIG. 2 for the first embodiment of the present invention. The schematic diagram of the light detection method of the planar array light detection device is shown in the first diagram. The main difference is that the light detection device 150 is a planar array light detection device. The light device 21〇, for the convenience of explanation, the other parts of the system diagram are no longer marked and drawn, while the figure also shows the side view of the relative position of the condensing beam 140 and the planar array light detection device 21〇 (left) And face up (partially enlarged to the right of the picture). The planar array photodetection device 2 10 referred to in the present invention refers to a light detection device including a planar array light sensing unit 2 11, such as a planar array charge coupled device (Focal plane array charge CQupied device). ) Is one of them, which contains the number of sensing units 211, which can be amplified according to the sensing accuracy and resolution. < 200422590 V. Description of the invention (4) In the second illustration, each sensing unit 211 is represented by a small square. 'If the container 121 is not tilted, the center point of the focusing beam 140 should be located at 0. The center sensing unit 2 1 2 is used, but in this example, since the container 1 21 is assumed to be partially inclined, the focused light beam 丨 4 〇 The focused center point is located on the sensing unit 213 labeled 1. Therefore, in When using this device, first use the electronic signal processing method to obtain the focused position of the focused light beam 140 (the sensing unit 213 of 1), and then calculate the relative position of the central sensing unit 212 of 0 and the sensing unit 21 of 1 The position difference, that is, the amount of position deviation, can be used to convert the value and orientation of the tilt angle of the container. Please refer to FIG. 3 for the second embodiment of the present invention. The schematic diagram of the light detection method of the four-quadrant photodetection device is shown in FIG. 1, and the light detection device 150 is a four-quadrant photodetection device 31. Similar to the above. In the first embodiment, a side view (left) and a front view (enlarged right) of the focused light beam 140 and the four-quadrant photodetection device 310 at the same time are indicated in the figure. In the second embodiment, the so-called four-quadrant photodetection device 31 〇 refers to a light-detection device 150 including a four-quadrant sensing unit 311. Each quadrant sensing unit 311 can be provided with a linear mask 3 symmetrical to the center point 3. 1 2. b linear mask 31 3, c linear mask 314, d linear mask 31 5. Each of the linear masks contains a uniformly diffusing substance of light, which can cause the focused light beam 140 projected into the linear mask to be uniformly sensed by each quadrant sensing unit 311, and the focused light beam projected outside the linear mask 140. Block. This linear mask acts to make the quadrant sensing unit 311's photosensitive intensity proportional to the intensity per unit area of incident light and the length of the linear direction of the incident light projected into the linear mask. In this embodiment, due to the four-quadrant light detecting device 3130 detecting position deviation

200422590 五、發明說明(5) 差量方式與入射聚光光束140光強度均勻性有關,在此假 設入射聚光光束140為一均勻聚光光束,其入射聚光光束 140單位面積光強度一致,不隨入射位置而改變。 當聚光光束1 4 0投射於各象限感測單元311時,均需經 過線性遮罩,若容器121未傾斜,則聚光光束140聚光中心 點應位於四象限檢光裝置3 1 〇中心點上,但本實施例中,200422590 V. Description of the invention (5) The difference method is related to the uniformity of the light intensity of the incident spotlight beam 140. It is assumed here that the incident spotlight beam 140 is a uniform spotlight beam, and the incident spotlight beam 140 has a uniform light intensity per unit area. Does not change with the incident position. When the focused light beam 140 is projected onto each quadrant sensing unit 311, all need to pass a linear mask. If the container 121 is not tilted, the focused center of the focused light beam 140 should be located at the center of the four-quadrant light detection device 3 1 〇 Point, but in this embodiment,

假設容器121有部份傾斜(沿著a線性遮罩312及c線性遮 罩314線性方向),使聚光光束丨4〇聚光中心點偏向c線性 遮罩314,因此,若求得c線性遮罩314内感測單元31ι感 測得光強度(設為Ic),及a線性遮罩312内感測單元311感 測得光強度(設為I a ),其光強度差(I c -1 a)正比於位置偏 差量’而其位置偏差量正比於tan Θ,因此若測得此一光 強度差,即可測得此一方向之傾斜角度值。 同理’若另一方向(沿著b線性遮罩31 3及d線性遮罩 315線性方向)亦有部份傾斜時,只要求得d線性遮罩315 内感測單元311感測得光強度(設為I d ),及b線性遮罩31 3 内感測單元311感測得光強度(設為I b ),測得其光強度差 (Id-lb),即可測得此一方向之傾斜角度值。此二方向之 傾斜角度值經由電子訊號處理單元作數學運算,即可求得 容器121實際之傾斜方向及實際之傾斜角度值。 以上已將本發明做一詳細說明,惟以上所述者,僅為 本發明之較佳實施例而已,當不能限定本發明之實施範… 圍。即凡依本發明申請範圍所做之均等變化與修飾等,皆 應仍屬本發明之專利涵蓋範圍内。Assume that the container 121 is partially inclined (along the linear direction of a linear mask 312 and c linear mask 314), so that the focused light beam center 40 is biased toward c linear mask 314. Therefore, if c linear is obtained The light intensity (set to Ic) sensed by the sensing unit 31m in the mask 314, and the light intensity (set to Ia) sensed by the sensing unit 311 in the a linear mask 312, the light intensity difference (I c- 1 a) It is proportional to the position deviation amount and its position deviation amount is proportional to tan Θ. Therefore, if the light intensity difference is measured, the tilt angle value in this direction can be measured. Similarly, if the other direction (along the linear direction of b linear mask 31 3 and the linear direction of d linear mask 315) is also partially tilted, only the d linear mask 315 is required to detect the light intensity detected by the inner sensing unit 311. (Set to I d), and b linear mask 31 3 inner sensing unit 311 senses the light intensity (set to I b), and measures the light intensity difference (Id-lb) to measure this direction The tilt angle value. The inclination angle values of the two directions are mathematically calculated by the electronic signal processing unit, and the actual inclination direction and the actual inclination angle value of the container 121 can be obtained. The present invention has been described in detail above, but the above are only preferred embodiments of the present invention, and the scope of the present invention cannot be limited. That is, all equivalent changes and modifications made in accordance with the scope of the application of the present invention shall still fall within the scope of the patent of the present invention.

200422590 圖式簡單說明 在圖式中: 第1圖為本發明光電式水平儀侧視系統圖。 第2圖為平面陣列檢光裝置檢光方式示意圖。 第3圖為四象限檢光裝置檢光方式示意圖。 元件符號說明 11 0光源投射裝置 1 2 0傾斜介面裝置 1 21透明透鏡狀結構之曲面容器 122透明氣體 1 2 3透明液體 124流體介面 130輔助透鏡裝置 140聚光光束 150光檢測裝置 21 0平面陣列檢光裝置 2 11光感測單元 2 1 2 0之中心感測單元 2 1 3 1之感測單元 31 0四象限檢光裝置 3 11象限感測單元 31 2 a線性遮罩 31 3 b線性遮罩 31 4 c線性遮罩 3 1 5 d線性遮罩200422590 Brief description of the drawings In the drawings: Figure 1 is a side view system diagram of the photoelectric level of the present invention. FIG. 2 is a schematic diagram of a light detection method of a planar array light detection device. Figure 3 is a schematic diagram of the light detection method of the four-quadrant light detection device. Description of component symbols 11 0 Light source projection device 1 2 0 Inclined interface device 1 21 Transparent lens-shaped curved surface container 122 Transparent gas 1 2 3 Transparent liquid 124 Fluid interface 130 Auxiliary lens device 140 Condensing beam 150 Light detection device 21 0 Plane array Light detection device 2 11 light sensing unit 2 1 2 0 center sensing unit 2 1 3 1 sensing unit 31 0 four-quadrant light sensing device 3 11 quadrant sensing unit 31 2 a linear mask 31 3 b linear mask Cover 31 4 c linear mask 3 1 5 d linear mask

Claims (1)

200422590 六、申請專利範圍 光電式 投射裝 介面裝 光光束 透鏡裝 於光檢 測裝置 對之傾 睛專利 面裝置 體介質 重力方 請專利 裝置, 於線性 強度, 而投射 測裝置上; ’檢測得入射聚光光束位置偏差量 斜角度值。 範圍第1項所 述之一 包含一透明透鏡狀 聚光效 出聚光 形成入射光束 向傾斜,使射 範圍第1項所述之一 内含各象限感測單元 遮罩内之聚光光束, 正比於入射光投射入 於線性遮罩外之聚光 將使射出聚 一輔助 光光束投射 一光檢 以換算出相 2. 如申 其中傾斜介 其與内置液 體介面則隨 3. 如申 其中光檢測 罩,使投射 測,其感光 向上長度, 水平儀,包含 置,投射均勻 置,其參考容 產生折射,並 置’調整聚光 光源於傾斜介 器隨重力方向 造成聚光位置 光束孔徑大小 種光電 結構之 應,而 光束產 種光電 上,可 被感測 線性遮 光束則 面裝置; 而傾斜時 偏差量; ’並將聚 式水平儀, 曲面容器, 容器内之流 生折射。 式水平儀, 設置線性遮 單元均勻感 罩之線性方 被阻隔。200422590 VI. Patent application scope Photoelectric projection mounting interface with light beam lens mounted on the light detection device. The patented surface device body medium gravity requires the patented device on the linear strength and projection measurement device; The value of the skew angle of the light beam position deviation. One of the items in range 1 includes a transparent lens-like light-concentrating effect to condense the incident light beam to incline, so that the one in the range of item 1 includes the condensed light beams in the masks of the quadrant sensing units, Proportional light that is incident into the linear mask will cause the emitted light to be focused, and an auxiliary light beam to be projected to a photodetector to convert the phase. 2. If you apply tilt to the built-in liquid interface, follow 3. If you apply to the light The detection cover makes the projection measurement, its photosensitive upward length, the level meter, including the set, the projection is evenly set, its reference volume is refracted, and the juxtaposition of the focusing light source to the tilting medium caused by the direction of gravity causes the focusing position. In response to this, the light beam can be sensed on the photoelectric device, and the linear light-shielding beam can be sensed by the surface device; and the deviation amount when tilted; and it will refract the flow of the poly level, curved container, and container. Type level, set the linear masking unit, the linearity of the uniform mask is blocked.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108871278A (en) * 2018-08-19 2018-11-23 天津大学 A kind of reflective twin shaft optical-electrical level-meter of liquid surface and method
TWI721890B (en) * 2020-05-21 2021-03-11 捷騰光電股份有限公司 Water quality sensor

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* Cited by examiner, † Cited by third party
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CN103673987B (en) * 2013-12-31 2016-05-11 昆山丘钛微电子科技有限公司 Camera module testing equipment gradient evaluation system and evaluation method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108871278A (en) * 2018-08-19 2018-11-23 天津大学 A kind of reflective twin shaft optical-electrical level-meter of liquid surface and method
CN108871278B (en) * 2018-08-19 2023-07-25 天津大学 Liquid surface reflection type double-shaft photoelectric level meter and method
TWI721890B (en) * 2020-05-21 2021-03-11 捷騰光電股份有限公司 Water quality sensor

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