TW200416405A - Electric test by anisotropic conductive film - Google Patents

Electric test by anisotropic conductive film Download PDF

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Publication number
TW200416405A
TW200416405A TW92103741A TW92103741A TW200416405A TW 200416405 A TW200416405 A TW 200416405A TW 92103741 A TW92103741 A TW 92103741A TW 92103741 A TW92103741 A TW 92103741A TW 200416405 A TW200416405 A TW 200416405A
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Taiwan
Prior art keywords
conductive film
board
conductive
test
contact
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TW92103741A
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Chinese (zh)
Inventor
Neng-Shing Lu
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Lu Neng Hsing
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Priority to TW92103741A priority Critical patent/TW200416405A/en
Publication of TW200416405A publication Critical patent/TW200416405A/en

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Abstract

Anisotropic conductive electric test technology can be used to large electric circuit board. Under testing condition, all the points, which will be test, are being contacted under pressure. So it is used in mass production. This method can be used to test many different type boards. Most of the electric circuit board has an insulation protective layer, which makes it hard to reach the small test pad. The surface of the conductive film has small touch fingers can effectively make the electric contact. Since the contact is made by two surfaces through an elastomer sheet, therefore, no needle mark is left on the tested pads. The high capability for testing density circuit can easily be used for four points testing technical to obtain accurate resistance measurements of the circuit lines.

Description

五、發明說明(1) 【發明所屬之技術領域】 電膠片於電路線路板上 量產測試裝置及測試方 本發明係關於使用高密度單向導 線路電阻及線路間之絕緣電阻之 法0 【先前技術】 電路線路板為電子業中之其太彡 發展自單面板,雙面板,多工板以印:二電,板為例其 板之使用目地為將密集接點區之:電路 接點引導出來,而有了雙::;= = =區之各 線路做的越來越細導通孔做的越來越小,加上,將 的技術而成增層板。目前吾吝 z、埋孑匕 將探針經過用塑膠板固定在‘位^:疋二十床法,即是 試時針床下壓,各探針扎在::: =接=針J’在測 針能確定與電路板接觸,每一探針都為了使探 點越來越密,探針也越做越細,但是的遥由於接 度有一定限制,而致其粗声 、屬材質強 筒的構造,增加了粗度戶 ’並因為它的彈簧套 用在肩距低於3〇〇um之電路板。8床電測技術己無法 越來越細,故越來越容電易路扎板= ==在後續使用上無法與元件牢 试%由於是針與面之點的接产 ...... J u雞,在測 200416405 五、發明說明(2) 〜 單向導電膠片是在高分子的樹脂中混入金屬粒子,這也, 混入的金屬粒子在膠片中成一串串的排列,此金屬串與膠 片的主面成垂直方向的排列。美國1989年的US4820376 專利中揭露、經由加壓而呈現上下面導通的單向導電膠片 是以彈性的矽橡膠做為絕緣體,鍍金或銀的全屬粒子做為 導電體。”此種單向導電膠可用在電子的表面粘著技術, 可當接頭或電性導通測試上使用”,為了增進導通能力, 用電漿钱去膠片上下面的金屬串表面的膠體。在測試其電 阻時在垂直膠体之表面施以一均勻壓力,使膠片厚度變 薄’以致在膠体中的粒子互相擠壓電路因而導通。美國專 利T955008之覆晶技術(flip chip Technology)為在需導 通的接點處長以凸塊,使在需導電處易於被接著導電,此 種技術同樣可使用於單向導電膠之測試技術,即在需導電 處長以凸塊,使得在加壓時,在測試點的位置有更大的壓 擠,有效地接通導電。 在中華民國八+二年及八十五年,專利61666及819〇5中揭 示在均勻平行的磁場中,置入有鐵磁性的金屬區塊,可使 此金屬區塊附近磁場增強、而使膠體中的感磁性金屬粒子 形成區域性的集結,膠體經硬化後,使電子元件固著在基 板上,並與接點形成電性導通。 土 從例舉之先前技術中知道單向導電膠技術可供高密度連 接之用而電路線路板之技術可將密集接點區分散開來,凸 塊技術增強了特定 位置之導電,鐵磁性物質可使特定區磁場變強而可聚集感V. Description of the invention (1) [Technical field to which the invention belongs] Mass-production test device and test method for electric film on a circuit board This invention relates to a method for using high-density unidirectional line resistance and insulation resistance between lines 0 [Previous Technology] Circuit boards are developed in the electronics industry. They are developed from single-panel, double-panel, and multiplex boards. Printed on two boards: for example, the board is used as an example. The purpose of the board is to direct the dense contact area: circuit contacts. Come out, and have a double :: = = = The lines in the area are getting more and more fine and the vias are getting smaller and smaller, plus, the technology is used to form a build-up board. At present, the probes are fixed to the 'position ^: 疋 twenty-bed method by a plastic plate, that is, the needle bed is pressed down during the test, and each probe is tied to :: = 接 = 针 J' The needle can be in contact with the circuit board. Each probe is designed to make the probe point denser and denser, but the probe is made thinner and finer. However, due to the limited connection, it is rough and belongs to a strong tube. The structure increases the thickness of the user's and because its spring sleeve is used on the circuit board with a shoulder distance below 300um. The 8-bed electrical measurement technology can no longer be more and more detailed, so it is more and more suitable for electric easy to tie the board = == in the subsequent use can not be tested with the components.% Because it is the point-to-face point of production ..... Ju chicken, under test 200416405 V. Description of the invention (2) ~ One-way conductive film is a mixture of metal particles in a polymer resin. This also means that the mixed metal particles are arranged in a series in the film. This metal string Arranged perpendicular to the main surface of the film. The US4820376 patent in the United States of America in 1989 disclosed that the unidirectional conductive film that shows conduction between the upper and lower sides under pressure is made of elastic silicone rubber as the insulator, and all particles of gold or silver are used as the conductor. "This kind of unidirectional conductive adhesive can be used in electronic surface adhesion technology, and can be used as a connector or electrical continuity test." In order to improve the continuity, plasma glue is used to remove the gel on the surface of the metal string on the film. When testing its resistance, a uniform pressure is applied to the surface of the vertical colloid to make the film thinner 'so that the particles in the colloid squeeze the circuits against each other and thus conduct. The flip chip technology of U.S. patent T955008 is to use bumps at the contacts that need to be conductive, so that it is easy to be conductive after being conductive. This kind of technology can also be used for testing technology of unidirectional conductive adhesive. That is, a bump is formed at the place where the conductivity is required, so that when the pressure is applied, there is a greater squeeze at the position of the test point, and the conduction is effectively turned on. In the eighth and two years of the Republic of China and eighty-five years, patents 61666 and 81905 revealed that placing a ferromagnetic metal block in a uniform and parallel magnetic field can enhance the magnetic field near this metal block, and make the The magnetically susceptible metal particles in the colloid form a regional agglomeration. After the colloid is hardened, the electronic component is fixed on the substrate and forms electrical conduction with the contact. From the prior art exemplified, the soil knows that the one-way conductive adhesive technology can be used for high-density connections, while the circuit board technology can disperse dense contact areas. The bump technology enhances the conductivity of specific locations. Ferromagnetic materials can Makes the magnetic field in a specific area stronger and can gather sense

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板電測 及如何 磁性金屬粒子,但未具趙 問題’也未述明如何解決 形成高可靠性的電測方法 解決目前高密度線路電路 測試時產生扎痕之問題, 【内容】 路線路板上密集接點之電路導 通 發明目地:解決高密度電 電阻與絕緣電阻。 所欲解決之問題·· 1 ·尚密度接點導通之構造與方法 2 ·無扎痕之測試方法。 3 ·穩定的測試構造與方法。 發明之特性: 甲、裝置: 使用彈性高密度單向導_雷 ^ . a . 點形成的單向導電膠上的接 ·> + 成—亊串之導電通路,此通路群之t 取1角貫通上下二主面,形成單方a^ 電,經轉換板,轉換板: 万向導 用以測試電路板,X稱為治具板。轉換板為雙面 板,其上外層與下外層兩面有相同接點數,轉換板與:層 板接面側的接點凸出板面,&凸出板面接點具有一今測 高度與被測試的電路板上的一面上的接點群形⑴對^出 置對應’此面稱為高密度接·點面,轉換板另-面的赴位 格位(grid)分佈,轉換板之高密度接點面,為測試點群=Electrical measurement of the board and how to magnetic metal particles, but there is no problem of Zhao 'nor how to solve the problem of forming a high-reliability electrical measurement method to solve the problem of scoring when testing current high-density circuit circuits, [Content] Circuit board The purpose of the circuit continuity of dense contacts is to solve high-density electrical resistance and insulation resistance. Problems to be solved ... 1. Structure and method of conducting high density contact 2. Test method without streaks. 3 Stable test structure and method. Features of the invention: A. Device: Uses a flexible high-density unidirectional guide _ Thunder ^ a. Connection on a one-way conductive adhesive formed by dots > +-a string of conductive paths, t of this path group takes 1 angle Pass through the two main surfaces of the upper and lower sides to form a unilateral a ^ electricity, through the conversion board, the conversion board: Universal guide is used to test the circuit board, X is called the fixture board. The conversion board is a double-sided board. The upper outer layer and the lower outer layer have the same number of contacts on both sides. The conversion board and the contact on the side of the layer board protrude from the board surface. The & The group of contacts on one side of the tested circuit board is opposite to each other. This surface is called a high-density contact-point surface. The grid layout of the other side of the conversion board is high. Density contact surface, for the test point group =

200416405 五、發明說明(4) 被測試基板之一面之高密度被測試點群的接點,形成1對j 的以面與面的經單向導電膠片在受壓下相互接通,因為轉 f板上凸塊上的表面為一平面,基板上的被測試點的面也 是平面’兩平面經具彈性的單向導電膠片接通,是面與面 的接通故測試穩定性高、且因夾有彈性導電膠片故被測板 的測試點(pad)無測試留下的扎痕,轉換板之另一面之接 =依格位排列,經格位導電膠片,格位(grid)導電膠片: 膠片上的導電粒子形成的導電通路群垂直其上下兩主面, =導電通路群凸出其絕緣体之面,依一定的格位排列,其 犬出之導電部位有間隔板固定此突出者之位置,經格位導 電膠片與通至測試機之格位板相聯,格位板:又稱為柵極 板,其上之導通接點依格位(gr i d )而排成距陣狀,此格位 距陣與格位導電膠片上的格位一致,且互相對齊,格位板 上有孔可放入探針,探針與電測機以低電阻導線接通。被 測 試板之另一面與另一組轉換板、單向導電膠片、格位導電 膠片、、格位板也以對應方式排列而接至電測機之電路上。 單向導電膠電測裝置··由格位板、格位導電膠片、間 板、轉換板、單向導電膠片、被測試之電路板、單 膠片、轉換板、間隔板、格位導電膠片、格位板依序 成,對位後形成板與板間各接點上下對齊。 乙、測試 對位後的裝置在測試時上格位板下移,或下格位板 並施加一定壓力使彈性單向導電膠片經轉換板之一面具高200416405 V. Description of the invention (4) The contacts of a high-density group of tested points on one side of the substrate under test form a pair of j-plane-to-plane unidirectional conductive films that are connected to each other under pressure because The surface of the bump on the board is a plane, and the surface of the tested point on the substrate is also a plane. The two planes are connected by a flexible unidirectional conductive film. It is a surface-to-surface connection. There is no tie mark left on the test pad of the board under test due to the sandwich of the elastic conductive film. The connection on the other side of the conversion board = arranged according to the grid, the grid conductive film, the grid conductive film: The conductive path group formed by the conductive particles on the film is perpendicular to the upper and lower main surfaces of the film. The conductive path group protrudes from the surface of its insulator and is arranged in a certain grid. The conductive part of the dog has a spacer to fix the protruding one. Position, the grid conductive film is connected to the grid plate that leads to the tester. The grid plate: also known as the grid plate, the conductive contacts on it are arranged in a matrix form according to the grid (gr id). The lattice distance matrix is consistent with the lattice position on the lattice conductive film, and is opposite to each other. There, the holes may be placed Sites plate probe, the probe with low electrical resistance wire measuring machine is turned on. The other side of the test board and another set of conversion board, one-way conductive film, grid conductive film, and grid board are also arranged in a corresponding manner and connected to the circuit of the electric tester. Electrical measuring device for unidirectional conductive adhesive ·· It consists of grid plate, grid conductive film, spacer plate, conversion plate, unidirectional conductive film, circuit board to be tested, single film, conversion plate, spacer plate, grid conductive film, The grid plates are sequentially formed, and after alignment, the board and the contacts between the boards are aligned vertically. B. Testing After the device is aligned, the upper grid plate is moved down during the test, or the lower grid plate is lowered and a certain pressure is applied to make the elastic unidirectional conductive film pass through one of the conversion plates.

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I 200416405 五、發明說明(5) 密度凸出板面之凸塊接點群的壓擠與被測試之電路板接點 群電路接觸,由於凸塊的關係,使單向導電膠片在突塊處 受到較大的壓力強度,而形成良好的導通,而轉換板之另 一面之接點群,因上下之壓力經格位導電膠片與格位板上 的接點群導通,格位板以排線與電測機組件相接,以測出 各線路之電阻值,以及絕緣值。 (3j、發明的詳細說明:圖式、意義,元件意義 單向導電膝電測裝置的排列如第1圖所示為上格位板 60 :上格位導電膠片50、上間隔板40、上轉換板3〇、I 200416405 V. Description of the invention (5) The density of the bump contact group protruding from the surface of the board is in contact with the circuit board contact group circuit under test. Due to the relationship of the bump, the unidirectional conductive film is at the bump. Subjected to a large pressure strength, a good conduction is formed, and the contact group on the other side of the conversion board is conductively connected to the contact group on the grid plate by the upper and lower pressures, and the grid plate is lined up. It is connected with electrical tester components to measure the resistance value and insulation value of each line. (3j. Detailed description of the invention: diagram, meaning, component meaning The arrangement of the unidirectional conductive knee electrical measuring device is shown in Figure 1 as upper grid plate 60: upper grid conductive film 50, upper spacer plate 40, upper Conversion board 30,

上單向導電膠片20、被測試之電路線路板1〇、下單向導 電膠片21、下轉換板31、下間隔板41、下格位導電膠 片51、下格位板61、依序疊成,經對 : 板與板間各接點上下對齊,在測試時上下加壓使彈性Upper unidirectional conductive film 20, circuit board to be tested 10, lower unidirectional conductive film 21, lower conversion plate 31, lower spacer plate 41, lower grid conductive film 51, lower grid plate 61, and sequentially stacked Alignment: The joints between the board and the board are aligned up and down, and pressed up and down to make it elastic during the test

早向導電膠片經轉換板之一面的凸塊32(笫二圖)壓擠而與 電路板1 〇對應之接點1 4形成導通。第2圖所示為第} /圖 之AA,部份之放大,電路板是由絕緣體12及接點14 =及相關線路(13a,13b,13c l3d)所構成,此電路線路板 可=為單層(若下外層無接點則無需21,31,41,51,61之相 =^置),亦可為雙層或多層板,故其線路可在表面(13a) =二=,亦可在基板内部(1 3b〜13d),為保護外層線路, 殂!紹有一層絕緣保護膜8 ’單向導電膠片20, 21是由矽 洛,鑪線膠體24及上下排列成串之導電金屬粒子26組 換板3〇, 31是由絕緣體38、金屬凸塊32經金屬 、' 36連接至接點34,間隔板4〇, 41是由絕緣體44及The early conductive film is squeezed by the bump 32 (second picture) on one side of the conversion board, and the contact 14 corresponding to the circuit board 10 is turned on. Figure 2 shows the AA of Figure} / Figure. The part is enlarged. The circuit board is composed of insulator 12 and contact 14 = and related lines (13a, 13b, 13c l3d). This circuit board can be = Single layer (if the lower outer layer has no contacts, the phase of 21, 31, 41, 51, 61 is not required), and it can also be a double-layer or multi-layer board, so its circuit can be on the surface (13a) = two =, also It can be inside the substrate (1 3b ~ 13d). In order to protect the outer layer circuit, there is a layer of insulating protective film 8 'one-way conductive film 20, 21 is made of silo, furnace wire gel 24 and conductive metal arranged in a string. Particle 26 sets of plates 30, 31 are connected to insulator 34 by insulator 38, metal bump 32 through metal, '36, and spacers 40, 41 are made of insulator 44 and

第10頁 200416405 五、發明說明(6) 者此二為=位導電勝…1之 之使用壽命,格位導電勝片5較0好的對位性’及較久 體54及接觸沪& Γ 是由矽彈性膠之絕緣 ?54及接觸扣内之成串金屬56所構成 由絕緣體64及桩赴敗t)U,bl疋 口 ftft所播占接 與電測機排線經探針插入通 線速接Ξΐ。格位板6°,61亦可使線路在板子内通至排 機相連依疼I纟多層板組纟,經連結器以排線與電測 序疊成後格位板60之導電電極接點62與格位 一嬙μ丨50上之金屬串56以及轉換板30上的接點34成 線排列,此種排列配置為硬質板與彈性 單向導電膠体互相間隔是在確保加壓後能使壓力均勻分 佈’以接通各個接點,使其電性接通。 第3圖所示為導電膠片中金屬粒子串26在膠片2〇中排列 之情形’ 24為絕緣性之彈性膠體’ 3Α為膠片之平面圖,3β 為載面圖,在載面圖可見到金屬粒子成串的排列26,從膠 片之一面之表面排至膠片之另一面之表面。而平面圖則顯 示各串導電粒子分佈之狀況,每一串粒子群與其鄰近之粒 子串成正三角形之分佈,此種分佈圖形確保高密度之連接 能力,因為在邊長相同時,正三角形比一般正方形之接點 多。導電性金屬粒子2 6是由含有磁感應之金屬及化性低導 電性良好之金屬組成,磁感性金屬為鐵、铦,錄、猛、 鉻、鉬、飢、鈦等,以鐵磁性金屬為佳,導電性好及化性 低之金屬如金、銀、銅、錫、錯等。通常為導磁性好之金 屬粒的外層鍍上導電性好及化性低之金屬,如鎳粒子外層Page 10 200416405 V. Explanation of the invention (6) The two are = the lifetime of the conductive conductive ... 1, the conductive conductive piece 5 is better than 0's alignment and the longer body 54 and contact with Shanghai & Γ is made of silicon elastic rubber insulation 54 and a string of metal 56 inside the contact buckle. It is made of insulator 64 and pile t) U, bl 疋 mouth ftft and electrical tester cable are inserted through the probe Line speed is connected. The grid plate 6 °, 61 can also make the circuit pass through the board to the row machine and connect to it. I multi-layer board group 纟, and the conductive electrode contact 62 of the grid plate 60 is stacked by the connector with the cable and electrical sequencing. Lined up with the metal string 56 on the grid 1 μ50 and the contact 34 on the conversion board 30. This arrangement is configured so that the hard board and the elastic unidirectional conductive gel are spaced from each other. Evenly distributed 'to connect each contact and make it electrically connected. Figure 3 shows the arrangement of metal particle strings 26 in the film 20 in a conductive film. '24 is an insulating elastic colloid '. 3A is a plan view of the film, and 3β is a surface view. Metal particles can be seen in the surface view. The arrays 26 are arranged from the surface of one side of the film to the surface of the other side of the film. The plan view shows the distribution of each string of conductive particles. Each cluster of particles and its adjacent particles form a regular triangle distribution. This distribution pattern ensures high-density connection ability, because when the sides are the same length, the regular triangle is larger than the general square. There are many contacts. The conductive metal particles 26 are composed of a metal containing magnetic induction and a metal with low chemical conductivity and good conductivity. The magnetically sensitive metal is iron, hafnium, magnetic, chromium, molybdenum, hunger, titanium, etc., preferably ferromagnetic metal. , Metals with good conductivity and low chemical properties, such as gold, silver, copper, tin, etc. Usually the outer layer of metal with good magnetic permeability is plated with a metal with good conductivity and low chemical properties, such as the outer layer of nickel particles

I 200416405I 200416405

五、發明說明(7) 鑛以金或銀。或是導電性好之金屬鍵以導磁性好之金屬如 銅、金或銀粒子鍍以鎳、銘等金屬。粒子之粒徑為 2-lOOum,以10-60um為最適合。絕緣性彈性膠体24,是由 高分子組成,如聚合烷矽氧化合物 (polymethylsiloxane),此產品有道康寧(D〇w Corning) 之 Silastic E RTV (room temperature vulcanizing RTV)橡膠,奇異(GE)之GE 6 1 5/63 0,或聚酯系橡夥l、聚 尿烧(poly- urethane),聚 丁二烯(polybutadiene),聚2 甲基丁二烯(polyisoprene),或共聚物V. Description of the invention (7) The mine is gold or silver. Or a metal bond with good conductivity and a metal with good magnetic conductivity such as copper, gold or silver particles are plated with nickel, Ming and other metals. The particle size is 2-100um, and 10-60um is the most suitable. Insulating elastic colloid 24 is composed of high polymer, such as polymethylsiloxane. This product includes Dow Corning's Silastic E RTV (room temperature vulcanizing RTV) rubber, GE's GE 6 1 5/63 0, or polyester rubber, poly-urethane, polybutadiene, polyisoprene, or copolymer

Luriie outadiene)與苯 如丙烯睛 丁二稀(aery loni _______^ ^ ^ 二烯(styrene butadiene)之共聚物,乙、丙稀具聚物 (poly ethyrene propylene)等。 第4圖為平行磁場1-1中放入基板5,其表面塗了 24絕緣 性膠体及導電性、導磁性好的金屬粒子2 6之混合物,平行 磁場為由上電磁鐵金屬極1及下電磁鐵金屬極丨所形成空間 所構成’磁場的大小是由線圈2中之電流強弱而定。此平 行磁場亦可由永久磁鐵供給。金屬粒子26與可聚合形成膠 體之液態化合物混合塗佈在基板5上之蝕刻後的平面,5可 為非鐵磁性基板,例如含浸環氧樹脂的玻璃布與銅箔壓合 的基板,由於金屬面經蝕刻後表面有排列整齊(如圖3a): :2二2深度小於二分之一之膠片(2〇)之厚度,金屬粒 ^到磁场引力,落在洞中,當5放在均勻且平行的磁場 心+ + 士由^於磁場垂直於平面5,故附近粒子逐漸向洞聚集 ^排列’經加熱使化合物24聚合而形成固形膠、Copolymer of Luriie outadiene and aery loni _______ ^ ^ ^ styrene butadiene, ethylene, poly ethyrene propylene, etc. Figure 4 shows the parallel magnetic field 1- The substrate 5 is placed in 1 and the surface is coated with a mixture of 24 insulating colloids and metal particles 26 with good conductivity and magnetic permeability. The parallel magnetic field is a space formed by the upper electromagnet metal pole 1 and the lower electromagnet metal pole 丨The size of the magnetic field is determined by the strength of the current in the coil 2. This parallel magnetic field can also be supplied by a permanent magnet. The metal particles 26 and the liquid compound that can be polymerized to form a colloid are mixed and coated on the etched surface of the substrate 5, 5 can be a non-ferromagnetic substrate, such as a substrate impregnated with glass cloth impregnated with epoxy resin and copper foil, because the surface of the metal surface is neatly arranged after etching (see Figure 3a):: 2 22 depth is less than half The thickness of the film (20), the metal particles are attracted to the magnetic field and fall into the hole. When 5 is placed on a uniform and parallel magnetic field center + + ^ is perpendicular to the plane 5 due to the magnetic field, so nearby particles gradually gather toward the hole. ^ Arranged 'by heating Compound 24 polymerized to form a solid gel,

I 200416405 体,因金屬粒子之排列而成可垂直導電的單向導電膠片 20 ’此製成的導電膠片一面為平面,另一面為有凸出之 手(指)形狀,在使用時有觸手狀的一面對箸待測板丨〇,平 面的一面對著轉換板30,此觸手形狀使導電片在垂直方& 受壓後較易於變形,故易於導電,且一般的電路板上的^ 路常覆以有機保獲膜(solder mask)8,在印刷電路板上'約 20-30 um,故通常導通接點(pad)的表面比有機保獲膜表面 低20-3Oum,對小接點而言此種觸手形狀使導電膠易於與 接點接通,增加了測試可靠性,另一方面由於導電粒子串 有I 200416405 body, a unidirectional conductive film that can be vertically conductive due to the arrangement of metal particles 20 'The conductive film made here is flat on one side and has a protruding hand (finger) shape on the other side, and has a tentacle shape when used One side faces the board under test 丨 0, and the flat side faces the conversion board 30. This tentacle shape makes the conductive sheet easier to deform after being compressed in the vertical direction, so it is easy to conduct electricity. ^ The road is often covered with an organic protective film (solder mask) 8, which is about 20-30 um on the printed circuit board, so the surface of the conductive contact (pad) is usually 20-3Oum lower than the surface of the organic protective film. As for the contacts, this tentacle shape makes the conductive adhesive easy to contact with the contacts, which increases the test reliability.

秩序的分佈,增加了可排列的密度而不會造成導電粒子串 與導電粒子串在受壓後之接觸,減少了短路之可能性,更 有利的是此突出之成因為在基材金屬被餘刻而成,故在基 板上塗佈較薄的光阻劑,可得到細小密集的凹穴分佈,而 增強了測試高密度電路線路板性能。 第5圖是第2圖的另一種組成,是用另一片單向導電 膠片20取代格位單向導電膠片50及間格板40,此種裝置在 測試時僅需將格位板60,轉換板,電路線路板對位即可, 組裝較為簡單而經濟。The orderly distribution increases the density that can be arranged without causing the conductive particle string to contact with the conductive particle string under pressure, reducing the possibility of short circuit, which is more advantageous because the metal It is carved, so coating a thinner photoresist on the substrate can obtain a small and dense distribution of pits, which enhances the performance of testing high-density circuit boards. Fig. 5 is another composition of Fig. 2. It replaces the grid unidirectional conductive film 50 and the grid plate 40 with another unidirectional conductive film 20. This device only needs to change the grid plate 60 during the test. The board and circuit board can be aligned, and the assembly is relatively simple and economical.

第六圖是第2圖的又一種組成,為用於量測低電阻之四點 量測,即是如第2圖轉換板3 0的凸塊接點3 2,在第六圖中 為由接點32a及32b代替每一個第2圖中之32接點,接點32a 及32b是二互不導通的二接點,32a與34a導通,32b與34b 導通,34a、34b此二接點之一供應電流,另一接點用來感The sixth diagram is another composition of the second diagram. It is a four-point measurement for measuring low resistance, that is, the bump contact 3 2 of the conversion board 30 in FIG. 2. Contacts 32a and 32b replace each of the 32 contacts in the second figure. Contacts 32a and 32b are two non-conducting two contacts, 32a and 34a are conducting, 32b and 34b are conducting, and 34a and 34b are the two contacts. One supply current, the other contact is used to sense

第13頁 200416405 五、發明說明(9) 測電壓,同理電路線路板1 0上與此點相通之另一點(可以 與同一片轉換板相接,亦可為與電路線路板上之他面側轉 換板相接)亦有二接點32a及32b在轉換板上,其中為一供 應電流(I )之用,另一接點用來感測電壓(V )而形成四點, 以電流值及感應到的電壓可知線路的電阻(即R = V/I)。 以上所述謹例舉本專利之部份特性,本專利之基 本功能與運用,並不限於例舉的有限例子中,譬如金屬之 蝕刻可用正型光阻劑,以製 成高精密度之圖案,矽橡膠液可加入白金催化劑以 加速反應’控制金屬粒之聚集可使用間歇性或波動磁場等 等。 【實施方式】 實施例 例1 :單向導電膠片製作 =一 254隨X 375ram具72um(2〇z)銅厚基板,經蝕刻 具有45践深之孔以正三角形排列分佈在 離為90um。以15%鍍銀之 札心距 鎳粒子八直徑為25-4〇Um,以15%粒子體積含 之SiUstic RTV矽膠混合後塗佈在蝕刻 板上寺 後為2〇〇um厚’將塗佈後之基板放厚’經固化 磁%中加熱至140Page 13 200416405 V. Description of the invention (9) Voltage measurement, the same as the other point on the circuit board 10 which can be connected to this point (can be connected to the same conversion board, or it can be connected to other sides of the circuit board) The side conversion board is connected) and there are two contacts 32a and 32b on the conversion board. One of them is used to supply current (I), and the other is used to sense voltage (V) to form four points. And the induced voltage can know the resistance of the line (ie R = V / I). The above-mentioned examples illustrate some of the characteristics of this patent. The basic functions and applications of this patent are not limited to the exemplified limited examples. For example, positive photoresist can be used for metal etching to make high-precision patterns. , Silicone rubber fluid can be added with platinum catalyst to accelerate the reaction. 'Controlling the aggregation of metal particles can use intermittent or fluctuating magnetic fields, etc. [Embodiment] Examples Example 1: Production of a unidirectional conductive film = 254 X 375ram with a 72um (20z) copper thick substrate, etched with 45 holes deep in a regular triangle arrangement at a distance of 90um. The diameter of the nickel particles with a diameter of 15% silver plating is 25 to 40 Um, and the SiUstic RTV silicon gel containing 15% of the particle volume is mixed and coated on the etching board to be 200um thick. After the substrate is thickened, the cured magnetic% is heated to 140

200416405 五、發明說明(ίο) 度C ’經二小時固化完成。取出膠片。 將導電膠片平放在銅面上,用Keithley 196 System DMM做四點探針量測,其中二點接在銅面上、一為電流另 一為電壓’另兩點以電流電壓區分,壓在單向導電膠片上 侧面其下壓力為3g,得到80mohm之電阻值。 例2 :電路板電阻之測試 A、高密度測試 單面電路線路板上有直徑為4,5,6mil之接點, 板面有25um厚保護膜以及雙平行線線長10mm,兩線其相隔 為3,4,5mil,以例1所述之2〇〇uin厚之單向導電膠片,及 有85〜l〇〇un厚凸塊接點的轉換板,依第5圖之裝置,以 2.5kg/cm2 之壓力用 Keithley 196 System DMM 量測其電阻 值。然後將壓力增為4· 5kg/cni2,所得的電阻值列於表— 表一、導電電阻與絕緣電阻 接點或線路2· 5kg/cm24. 5kg/cm2 阻值Ω壓痕阻值Ω壓痕 接點 4mi 10· 650 無0· 635 無 接點 5mi 10· 504 無0. 495 無 接點 6mi 10· 480 無0· 480 無200416405 V. Description of the invention (ίο) Degree C ′ is cured in two hours. Remove the film. Place the conductive film flat on the copper surface, and use Keithley 196 System DMM to make a four-point probe measurement. Two points are connected to the copper surface, one is the current and the other is the voltage. The other two points are distinguished by current and voltage. The down force of the upper side of the unidirectional conductive film was 3g, and a resistance value of 80mohm was obtained. Example 2: Test of circuit board resistance A, high-density test Single-sided circuit board has contacts with diameters of 4, 5, 6mil, 25um thick protective film on the board surface, and double parallel lines with a length of 10mm. The two wires are separated by It is 3, 4, 5 mil, with 200uin thick unidirectional conductive film as described in Example 1, and a conversion board with 85 ~ 100un thick bump contacts. According to the device in Fig. 5, 2.5 The pressure of kg / cm2 was measured with Keithley 196 System DMM. The pressure was then increased to 4.5 kg / cni2, and the resulting resistance values are listed in Table — Table 1. Contacts or lines of conductive resistance and insulation resistance 2. 5 kg / cm24. 5 kg / cm2 Resistance value Ω Indentation Resistance value Ω Indentation Contact 4mi 10 · 650 No 0 · 635 No contact 5mi 10 · 504 No 0. 495 No contact 6mi 10 · 480 No 0 · 480 No

200416405 五、發明說明(π) 線間距3 mi1>10 7無>10 7無 線間距4 mi1>10 7無>10 7無 線間距5 mil>10 7無>10 7無 從表一知被測試點無扎痕,從習知之印刷電路板技術知 80um高之凸塊在4mil直徑是不易製成者,欲測4mil接點, 凸塊之直徑應小於3 · 5ro i 1,但用此單向導電膠片可測得其 電阻值,是因此單向導電膠片有45um之觸指。 B、低電阻測試 單面電路線路板上有直徑為6,8mil之接點,依第 六圖之裝置以例1所述之200um厚之單向導電膠片,及有 85〜100 un厚凸塊接點的轉換板,依第6圖之裝置,以 2.5kg/cm2 之壓力用 Keithley 196 System DMM 量測其電阻 值。 項目四點量測二點量測 接點 6mill80mQ500mQ 接點 8πιΠ150ιηΩ400ιηΩ 從上表可知四點探針技術很容易的使用在此高密度的技術 上且可得到精確的阻值。 發明整體效果: 依上述之單向導電膠電測技術是用於量測大面之電 路線路板,在量測時被量測之線路板上各接點與量測板上200416405 V. Description of the invention (π) Line spacing 3 mi1> 10 7 None> 10 7 Wireless pitch 4 mi1> 10 7 None> 10 7 Wireless pitch 5 mil> 10 7 None> 10 7 None tested from Table 1 There are no marks on the points. From the known printed circuit board technology, it is not easy to make 80um high bumps at a diameter of 4mil. To measure 4mil contacts, the diameter of the bump should be less than 3 · 5ro i 1, but use this one-way The conductive film can measure its resistance value, so the unidirectional conductive film has 45um contact fingers. B. The low-resistance test single-sided circuit board has a contact with a diameter of 6,8mil. According to the device in the sixth figure, a 200um thick unidirectional conductive film described in Example 1 is used, and there are 85 ~ 100 un thick bumps. The contact conversion board measures the resistance value with a Keithley 196 System DMM at a pressure of 2.5 kg / cm2 according to the device in Figure 6. The project has four-point measurement and two-point measurement. Contact point 6mill80mQ500mQ contact point 8πιΠ150ιηΩ400ιηΩ As can be seen from the table above, the four-point probe technology can be easily used in this high-density technology and accurate resistance values can be obtained. The overall effect of the invention: According to the above-mentioned one-way conductive adhesive electrical measurement technology, it is used to measure the circuit board of a large area, and the contacts on the circuit board to be measured during the measurement and the measurement board

第16頁 200416405 五、發明說明(12) " " " '~*- 的各接點經加壓而同時接著,故為一量產式電測技術。本 技術可測試各種構造之電路線路板,由於電路線路板表面Page 16 200416405 V. Description of the invention (12) " " " Each contact of '~ *-' is pressurized and then connected at the same time, so it is a mass-production electrical measurement technology. This technology can test circuit boards of various configurations.

會有一層有機保獲膜,若接點較小用一般之導電膠片不 形 J 成電性之接通,v 丄 構造,可以有效旦由於此技術用的單向導電膠片有觸指之 為軟換板上凸塊的與小接點接著。此種技術用之接觸方法 點表面做面鱼面$表面經由單向導電膠片與轉換板上的接 度之單向導^勝接觸’故無札痕且測試安定性高。高密 小至Imil)與高 j因導電粒徑為10-100 um,故其間距可 者)可以用^測1 ί度之轉換板(是用以將高密度接點分散 以精確的測得電^密度的電路板,使用四點探針技術可There will be a layer of organic retaining film. If the contact is small, the general conductive film is not used to form an electrical connection. The V 丄 structure can be effective because the unidirectional conductive film used in this technology is soft to the touch. The bumps on the change board are connected with the small contacts. The contact method used in this technique is to make the surface of the fish and the surface of the surface through the unidirectional conductive film and the contact with the conversion board in one-way contact, so there is no streak and the test stability is high. High density as small as Imil) and high j. Because the conductive particle size is 10-100 um, so the distance between them can be). Measure the conversion board of 1 ί degree (which is used to disperse the high-density contacts to accurately measure electricity. ^ Density circuit board, using four-point probe technology can

电路的低電阻。 JLow resistance of the circuit. J

第17頁 200416405 圖式簡單說明 第一圖、單向導電膠測試裝置圖;格位板60、格位導電膠. 片50、間隔板40、轉換板30、單向導電膠片20、被測試之 電路板10、單向導電膠片21、轉換板31、間隔板41、格位 導電膠片51、格位板61依序疊成 。 第二圖、部份上半部單向導電膠測試裝置各組件電路導通 示意詳圖, 第三圖、單向導電膠測片構成圖,3A為平面圖,3B為切面 圖,3A中的每一點,在3B中為一串排列之金屬粒子。Page 17 200416405 The diagram briefly illustrates the first diagram, the unidirectional conductive adhesive test device diagram; grid plate 60, grid conductive glue. Sheet 50, spacer plate 40, conversion plate 30, unidirectional conductive film 20, the tested one The circuit board 10, the unidirectional conductive film 21, the conversion plate 31, the spacer plate 41, the grid conductive film 51, and the grid plate 61 are sequentially stacked. The second picture, part of the upper half of the unidirectional conductive adhesive test device circuit schematic diagram of each component, the third diagram, the unidirectional conductive adhesive test piece composition diagram, 3A is a plan view, 3B is a cutaway view, each point in 3A In 3B, it is a series of arranged metal particles.

第四圖、單向導電膠測片製成裝置圖,由於基板的構造使 導磁性粒子聚在定位,電磁鐵的磁場作用使粒子垂直棑 列。 第五圖、上半部部份單向導電膠測試裝置另圖,以單向導 電膠測片代替格位導電膠片。 第六圖、上半部部份單向導電膠之四點測試構置圖,以使 較精確的量出待測板上線路之電阻。In the fourth figure, a unidirectional conductive adhesive test piece is made into a device diagram. Due to the structure of the substrate, magnetically conductive particles are gathered in position, and the magnetic field of the electromagnet causes the particles to line up vertically. In the fifth figure, another part of the unidirectional conductive adhesive test device in the upper part is replaced with a unidirectional conductive adhesive test piece instead of a grid conductive film. Figure 6. The four-point test layout of the unidirectional conductive adhesive in the upper part, so that the resistance of the circuit on the board under test can be accurately measured.

Claims (1)

200416405 六、申請專利範圍 '一^— 1· 一種用焉密度單向導電膠導通的量產型電測技術,在裝, 置上的疊層方式為彈性導電膠片與硬性線路板交互層疊。 2·如1所述,此種高密度單向導電膠片為垂直主面上下導 通者,是由於導電金屬串垂直於主面而有規律排在導電 片上。 3·如2所述此單向導電膠導金屬串的排列方法是使均勻、 平行的磁場經由基板構造上規律的排列而使區域性的磁場 發生有強弱的分佈,強的區域性磁場吸引感磁性的金屬 粒,使金屬串變成有規律的排列。 4 ·其金屬串間的排列圖形為正三角形。 5·製成的單向導電膠片一面為有觸手式的突出,其突出高 度為被測板面測點凹度〇· 5至3倍。 6·格位單向導電膝片之觸手式突出依間隔構造而定。 7·高密度線路板上接點群由轉換板接點連接,及轉換板的 線路而分散至各個格位點,連接高密度線路板上的接點是 由轉換板上相對應的導電凸塊經加壓,使單向導電膠片在 接點處電阻低而導電。 8·高密度單向導電膠片導電串排列的密度高,可使轉換板 上的每一電極接點產生不相導通的二凸塊接點經高密度單 向導電膠片同時與被測板上的同一電極導通,此兩凸塊按 點一個通電流另一個感應線路電壓則成為四點探針量測, 可用於低電阻量測。 9 ·可以用針床來代替轉換板以測試電性,針床的探針斑 單向導電膠接 ^200416405 VI. Application patent scope '一 ^ — 1 · A mass production type electrical measurement technology that uses 焉 density unidirectional conductive adhesive to conduct electricity. The lamination method of the device and the device is that the elastic conductive film and the rigid circuit board are alternately laminated. 2. As described in 1, the high-density unidirectional conductive film is vertically conductive on the main surface, and the conductive metal strings are regularly arranged on the conductive film because the conductive metal strings are perpendicular to the main surface. 3. The method of arranging the unidirectional conductive glue-conducting metal strings as described in 2 is to make a uniform, parallel magnetic field through the regular arrangement on the substrate structure, so that the regional magnetic field has a strong and weak distribution, and a strong regional magnetic field attracts the sense. The magnetic metal particles make the metal strings into a regular arrangement. 4 · The arrangement pattern of metal strings is regular triangle. 5. One side of the manufactured unidirectional conductive film is tentacle-like protrusions, and the protrusion height is 0.5 to 3 times the concavity of the measuring point on the surface of the board under test. 6. The tentacle-type protrusion of the one-way conductive knee pads depends on the spacing structure. 7. The contact group on the high-density circuit board is connected by the contact points of the conversion board, and the circuit of the conversion board is dispersed to various grid points. The contact points connected to the high-density circuit board are the corresponding conductive bumps on the conversion board. After pressing, the unidirectional conductive film has low resistance at the contact point and conducts electricity. 8. High-density unidirectional conductive film The high density of the conductive string arrangement can make each electrode contact on the conversion board produce non-conducting two bump contacts. At the same time, the high-density unidirectional conductive film is connected to the test board at the same time. The same electrode is turned on, and the two bumps conduct current at one point and the other induced line voltage becomes a four-point probe measurement, which can be used for low resistance measurement. 9 · A needle bed can be used instead of the conversion board to test the electrical properties. The probe spot on the needle bed is unidirectional conductive adhesive ^ 200416405 #、申請專利範圍 觸之面其探針針端應為平面或圓面,伸出的長度僅為膠片 厚度之15%至85%。200416405 # 、 Scope of patent application The probe end of the touch surface should be flat or round, and the length of the probe is only 15% to 85% of the thickness of the film. 第20頁Page 20
TW92103741A 2003-02-21 2003-02-21 Electric test by anisotropic conductive film TW200416405A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382188B (en) * 2008-12-16 2013-01-11 China Steel Corp Method for the detection of aluminum for solar cells
CN116960017A (en) * 2023-09-20 2023-10-27 阿尔伯达(苏州)科技有限公司 Conductive adhesive test pin card and manufacturing method applied to conductive adhesive test pin card

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI382188B (en) * 2008-12-16 2013-01-11 China Steel Corp Method for the detection of aluminum for solar cells
CN116960017A (en) * 2023-09-20 2023-10-27 阿尔伯达(苏州)科技有限公司 Conductive adhesive test pin card and manufacturing method applied to conductive adhesive test pin card

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