TW200403526A - Polycarboxylic acid resin and photosensitive resin composition containing the same - Google Patents

Polycarboxylic acid resin and photosensitive resin composition containing the same Download PDF

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TW200403526A
TW200403526A TW092118151A TW92118151A TW200403526A TW 200403526 A TW200403526 A TW 200403526A TW 092118151 A TW092118151 A TW 092118151A TW 92118151 A TW92118151 A TW 92118151A TW 200403526 A TW200403526 A TW 200403526A
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acid
pigment
compound
red
resin composition
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TW092118151A
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Chinese (zh)
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TWI286268B (en
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Hideyuki Nakai
Masato Inoue
Seiji Muro
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Sumitomo Chemical Co
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/033Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials For Photolithography (AREA)
  • Epoxy Resins (AREA)
  • Macromonomer-Based Addition Polymer (AREA)

Abstract

A sensitive resin composition and a cured product containing the same are provided. The sensitive resin composition includes a polycarboxylic acid resin, [A] at least one of the above resin composition and [B] an addition polymerization compound having one and more ethylene unsaturated bonds, [C] a photopolymerization initiator, and [D] a solvent, wherein the polycarboxylic acid resin is obtained by reacting (a) a reactant obtained by reacting a compound (a1) with a compound (a2) under the condition of formula (P), with (b) a monocarboxylic acid containing unsaturated groups to obtain (c) the reactant, and further reacting (c) the reactant with (d) an acid anhydride. (a1) an epoxy compound having at least two or more epoxy groups in the molecule. (a2) a multi-valence carboxylic acid. Formula (P): (the epoxy equivalent of the epoxy compound) > (the carboxylic acid equivalent of the multi-valence carboxylic acid).

Description

200403526 玖、發明說明 【發明所屬之技術領域】 ,本發明係有關含有聚叛酸樹脂、作為黏合聚合物之聚 羧酸樹脂之感光性樹脂組成物及其硬化物。 八^丹疋有關適 合使用於濾色料色感光性樹脂組成物、$色_護膜、 濾色用調距器、濾色用層間絶緣膜等之感光性樹脂組成 物。 【先前技術】200403526 发明 Description of the invention [Technical field to which the invention belongs] The present invention relates to a photosensitive resin composition containing a polyacrylic acid resin, a polycarboxylic acid resin as an adhesive polymer, and a cured product thereof. ^ Danxuan is a photosensitive resin composition suitable for use in a color filter material photosensitive resin composition, a color filter film, a color filter distance adjuster, and a color filter interlayer insulating film. [Prior art]

含有鹼性可溶性樹脂、顏料及光聚合引發劑之著色感 光性樹脂組成物廣泛使用於製造構成彩色液晶顯示裝置、 办色固體攝影裝置等元件之濾色板。使用該等著色感光性 樹脂組成物製造濾色板之方法已知有例如在基板 面形成由著色感光性樹脂組成物組成之層(1)(第丨圖(^) ^ 在上t之層(1)藉由光罩(3)將光線(4)照射,曝光後(第1圖 (b))顯像之方法。著色感光性樹脂組成物層(1)中於曝光, 光線(4)未照射之光線未照射領域〇1)經由顯像去除,經光 線知射之光線照射領域(1 2)由於未去除而殘留,形成黑色 基材或晝素⑺(第丨圖⑷)。為了提昇所形成黑色基材:晝 素之機械性強度,顯像後通常進行加熱處理。經由—邊更 換著色感光性樹脂組成物所含之顏料顏色,一邊反覆進行 上述之操作,可依次形成黑色基材(5BM)、與三原色對Z 之彩色晝素(5R、5G、5B),可獲得目的之瀘色板( 圖)。 於該等製造方法,為了形成更微細之黑色基材或形成 314839 200403526 更微細之高透過率之色彩晝素,著色感光性樹脂組成物所 含之顏料以使用粒徑較小者較佳。又,為了形成厚度更薄 之黑色基材或彩色晝素,必須提高著色感光性樹脂組成物 所含顏料之濃度。 【發明内容】 本發明之目的為提供可獲得高解像性之感光性樹脂組 成物,尤其是使用高濃度之粒經小之顏料時亦可獲得高解 φ像性之著色感光性樹脂組成物。 本發明人等為滿足該等要求,經過深入研究之結果發 現經由使用特定之聚羧酸樹脂,則可解決上述之課題,因 而完成本發明。 ' 亦即,本發明係提供由含有(a)將(al)化合物與(a2)化 合物在式(P)條件下進行反應所獲得之反應物與(b)含有不 飽和基之單羧酸進行反應,獲得(c)反應物,將(c)反應物與 (d)酸酐進行反應所獲得之聚羧酸樹脂、[A]上述之樹脂組 馨成物、[B]至少具有1個乙烯性不飽和鍵之可聚合加成之化 合物、[C]光聚合引發劑及[D]由含溶劑組成之感光性樹脂 組成物及上述感光性樹脂組成物之硬化物。 (al)化合物:分子中至少具有2個環氧基之環氧化合物 (a2)化合物··多價羧酸 - 式(P): '(環氧化合物之環氧當量數)>(多價羧酸之羧酸當量數) [實施方式】 本發明之聚叛酸樹脂(以下亦有稱為本聚缓酸樹脂)由 334839 200403526 將 ⑷將(al)化合物與(a2)化合物在式⑻條件 得之反應物(以下稱為成分(a))與 、 (b)含有不飽和基之單叛酸(以下稱為成分⑻) 進行反應,獲得⑷反應物(以下稱為成分⑷), 將成分⑷與⑷酸物下亦稱為成分(物行反應 ⑷)化合物:分子中至少具有2個環氧基之環氧化合物 (a2)化合物·多價魏酸Color-sensitive resin compositions containing alkaline soluble resins, pigments, and photopolymerization initiators are widely used in the manufacture of color filter plates that make up components such as color liquid crystal display devices and color solid-state imaging devices. As a method for manufacturing a color filter using these colored photosensitive resin compositions, it is known to form, for example, a layer (1) (FIG. 丨) (^) above the t ( 1) A method of irradiating light (4) with a photomask (3) and developing it after exposure (Fig. 1 (b)). The coloring photosensitive resin composition layer (1) is exposed during light exposure, and the light (4) is not exposed. The unirradiated area of the irradiated light is removed by imaging, and the irradiated area (12) that is known to be irradiated with light remains because it is not removed, forming a black substrate or daylight (Figure ⑷). In order to improve the mechanical strength of the formed black substrate: daylight, heat treatment is usually performed after development. By changing the color of the pigment contained in the colored photosensitive resin composition and repeating the above operations, the black base material (5BM) and the three primary colors of Z (5R, 5G, 5B) can be sequentially formed. Obtain the target swatch (picture). In these manufacturing methods, in order to form finer black substrates or to form finer high-transmittance color pigments, it is preferable to use a pigment having a smaller particle size to pigment pigments contained in the photosensitive resin composition. In addition, in order to form a thinner black substrate or colored pigment, it is necessary to increase the concentration of the pigment contained in the colored photosensitive resin composition. [Summary of the Invention] An object of the present invention is to provide a photosensitive resin composition capable of obtaining high resolution, and in particular, a colored photosensitive resin composition capable of obtaining high resolution φ when a pigment having a small particle size is used at a high concentration. . In order to meet these requirements, the present inventors have conducted intensive research and found that by using a specific polycarboxylic acid resin, the above-mentioned problems can be solved, and the present invention has been completed. 'That is, the present invention provides a reactant obtained by reacting (a) a compound (al) with a compound (a2) under the formula (P) and (b) an unsaturated monocarboxylic acid Reaction to obtain (c) reactant, polycarboxylic resin obtained by reacting (c) reactant with (d) acid anhydride, [A] the above resin composition, and [B] having at least one ethylenic property A polymerizable addition compound of an unsaturated bond, [C] a photopolymerization initiator, and [D] a photosensitive resin composition composed of a solvent and a cured product of the above-mentioned photosensitive resin composition. (al) Compound: Epoxy compound (a2) compound having at least two epoxy groups in the molecule. Polyvalent carboxylic acid-Formula (P): '(epoxy equivalent number of epoxy compound) > (polyvalent Number of carboxylic acid equivalents of carboxylic acids] [Embodiment] The polyacrylic acid resin of the present invention (hereinafter also referred to as the polyacid resin) is 334839 200403526. The compound (al) and the compound (a2) under the conditions of formula (I) The obtained reactant (hereinafter referred to as component (a)) is reacted with (b) an unsaturated acid containing an unsaturated group (hereinafter referred to as component ⑻) to obtain a fluorene reactant (hereinafter referred to as component ⑷). ⑷ and acetic acid are also called components (physical reaction ⑷) compounds: epoxy compounds (a2) compounds with at least 2 epoxy groups in the molecule, polyvalent weilic acid

式(p) ·· 價羧酸之羧酸當量數) 為下述式⑴所示之環氧化 (環氧化合物之環氧當量數)>(多 (a I)化合物中之理想化合物 合物(以下稱為環氧化合物(I))。 Η κ H2C—Formula (p) ··· Number of carboxylic acid equivalents of valent carboxylic acid) is an epoxidation (epoxy equivalent number of epoxy compound) shown in the following formula ⑴ > (ideal compound compound among poly (a I) compounds (Hereinafter referred to as the epoxy compound (I)). Η κ H2C—

佧 3〇士» 2C^CH2 0) [式中,R】及R2各自獨立為氫原子 X為單鍵或下述式G-1)至式(1-8)任 基, 、燒基或ii素原子 ~ —式所示之2 價殘佧 30 % »2C ^ CH2 0) [wherein R] and R2 are each independently a hydrogen atom, X is a single bond or the following formula G-1) to any of the formula (1-8), alkynyl or ii Prime atom ~ — 2 valence residue shown in the formula

R3為伸烷基, R4為氫原子、烷基或縮水甘油基。 m為〇至5之整數’ 不同之 η為〇至1 〇之整數。但是,η為2至1 〇之赶數日十 反覆單位中之R]至R4可相同,亦可不同] 314839 7 200403526R3 is an alkylene group, and R4 is a hydrogen atom, an alkyl group, or a glycidyl group. m is an integer of 0 to 5 ', and η is an integer of 0 to 10. However, if η is 2 to 10, the number of repeating units R to R4 may be the same or different] 314839 7 200403526

又,環氧化合物(1)可經由公知之方法獲得,例如可經 由將對應之二醇成分與適當量之環氧氣丙烷進行反應獲 得。 〜又 ΊΟ 口 w V 1 j Τ V J T 一 /入κ ι%签〜举例如甲基 乙基、正丙基、異丙基、正丁基、第三丁基等碳原子數 至5之烧基。鹵素原子可列舉版原子、氯原子、漠原子等 R3之伸烷基可列舉例如曱撐基、乙撐基、三甲撐美 四甲撐基等碳原子數約}至 土 1 U之彳申纟兀暴。伸烷基亦可具: 取代基。取代基可列舉例如 ^ 牛巧如羥基,鹵素原子;可具 之碳原子數1至1 〇之栌Α •山κ 工< 兀土,石反原子數1至1 〇之燒氧美 碳原子數6至15之芳美·妒店之/兀虱基 .0 土,屄原子數7至15之芳烷基;石 原子數2至10之鏈烯基; 人原千數2至10之醯氧基等 此處,鹵素原子可列與 列舉例如氯原子、溴原子等。 子數1至10之烷基可列與 ., J舉例如甲基、乙基、丙基等。 基取代時之烷基可列舉例 ' 碳原子數!至]^基#° 10之院氧基可列 基、丙氧基、丁氧基等。 Η甲乳基 碳原子數6至]5夕# # 方土可列舉例如苯基、萘基等 314S29 8 200403526 原子數7至1 5之 等 碳原子數2至10之鏈稀基可列二二:基二基 氧基:原子數2至10之醯氧基可列舉例如乙酸氧基、τ醯 ::::環氧化合物衍生之二醇成分為通式m &酉分化合物 )所示之 (III) η» R2 R2 [^^1^各自與上述者同意義] 5 Λζ ^ 马單鍵之雙酚化合物,具體 一 如4二為雙驗、3,3,1紛#。 舌,可列舉例 等 可列:^(19?所示2價殘基之雙齡化合物,具體而言, 笨基)努、9 9,储雙(4省基笨基)苗、9,、雙(4、經基冬甲基 笨基)努、9,9二(4'經基_3-氯苯基)努、9,9-雙⑷經基·3_漠 氧基笨基以Μ4~經基I說苯基)努、9,9_雙(4_經基-3-曱 羥基、3丄二%9,(心羥基-3,5'二曱基笨基)苟、9义雙(4· 乳求基)苗、9,9-雙(4-羥基、n、;臭苯基)努 Χ為式(1〇)郎一 可列舉例如〜示2價殘基之雙龄化合物,具體而言, 納、雙(4二4'經基苯基),、雙(4_羥基·3,5·二甲基苯基 γ1 ^、3,5、二氯苯基)酮等。 為式(I — 3U& _ )所示之雙酚化合物,具體而t,可列料 3]4839 9 200403526 如雙(4-羥基苯基)亞楓、雙(4-羥基-3,5-二曱基苯基)亞碉、 雙(4-羥基-3,5-二氯苯基)亞楓等。 X為式(1-4)所示2價殘基之雙酚化合物,具體而言, ' 可列舉例如雙(4-羥基苯基)六氟丙烷、雙(4-羥基3,5-二甲 •基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷等。 X為式(1-5)所示2價殘基之雙酚化合物,具體而言, 可列舉例如雙(4-羥基苯基)二曱基矽烷、雙(4-羥基-3,5-二 φ 曱基苯基)二曱基矽烷、雙(4-羥基-3,5-二氯笨基)二曱基矽 烷等。 X為式(1-6)所示2價殘基之雙酚化合物,具體而言, 可列舉例如雙(4-羥基苯基)曱烷、雙(4-羥基3,5-二氯苯基) 曱烷、雙(4-羥基-3,5-二溴苯基)曱烷、笨酚酚醛清漆、曱 酚酚醛清漆等。The epoxy compound (1) can be obtained by a known method. For example, the epoxy compound (1) can be obtained by reacting a corresponding diol component with an appropriate amount of epoxy propane. ~ Ί〇 口 w V 1 j Τ VJT 1 / κ %% sign ~ For example, methyl ethyl, n-propyl, isopropyl, n-butyl, third butyl and other carbon atoms to 5 alkyl groups . Examples of the halogen atom include an alkylene group of R3 such as a plate atom, a chlorine atom, and a molybdenum atom. Examples of the halogen atom include a carbon number such as a fluorenyl group, an ethylene group, and a tetramethylene group. Violent. The alkylene can also have: a substituent. Examples of the substituent include ^ Niu Qiao such as a hydroxyl group, a halogen atom; 栌 Α which may have a carbon number of 1 to 10; κκκ < adobe, an anti-atomic number of 1 to 10, and a carbon atom number of 6 Fangmei to 15 / Yandian. 0 earth, aralkyl with 7 to 15 atoms; alkenyl with 2 to 10 stone atoms; ethoxy with 2 to 10 human atoms Here, the halogen atom can be listed and exemplified by a chlorine atom, a bromine atom, and the like. Alkyl groups of 1 to 10 may be listed as J, for example, methyl, ethyl, propyl and the like. Examples of the alkyl group when the group is substituted include the number of carbon atoms! To ^ yl # ° 10 ethoxy groups may be listed as propyl, propoxy, butoxy and the like. Η 甲 乳 基 碳 数 6 至] 5 夕 # # Examples of terrestrial soil include phenyl, naphthyl, etc. 314S29 8 200403526 Atoms with 7 to 15 carbon chains 2 to 10 can be listed as two : Yldiyloxy: fluorenyloxy having 2 to 10 atoms can be exemplified by acetic acidoxy, τ 醯 :::: diol compounds derived from epoxy compounds are represented by the general formula m & (III) η »R2 R2 [^^ 1 ^ each has the same meaning as the above] 5 Λζ ^ A bisphenol compound with a single bond of a horse, as specifically as the second two is the double test, 3,3,1 ##. Tongues can be listed as examples: ^ (19? Double-valent compounds of bivalent residues, specifically, benzyl) nu, 9 9, storage double (4 province-based benzyl) seedlings, 9 ,, Bis (4, mesitylmethylbenzyl) nu, 9,9bis (4 'mesityl-3-chlorophenyl) nus, 9,9-bispyridinyl · 3-molyloxybenzyl to M4 ~ Cycloyl is said to be phenyl), 9,9_bis (4-Cydoxy-3-fluorenyl, 3,2%, 9%, (cardiohydroxy-3,5 'difluorenylbenzyl), 9% Bis (4 · lactone) seedlings, 9,9-bis (4-hydroxy, n ,; styrenyl) are represented by the formula (10). One example is a two-year-old compound showing a divalent residue. Specifically, sodium, bis (4-di-4′-methylphenyl), bis (4-hydroxy · 3,5 · dimethylphenylγ1 ^, 3,5, dichlorophenyl) ketone, and the like. It is a bisphenol compound represented by the formula (I — 3U & _). Specifically, t can be listed. 3] 4839 9 200403526 Such as bis (4-hydroxyphenyl) flavone, bis (4-hydroxy-3,5- Difluorenylphenyl) fluorene, bis (4-hydroxy-3,5-dichlorophenyl) sulfene, etc. X is a bisphenol compound having a divalent residue represented by formula (1-4), specifically, , 'Examples include bis (4-hydroxyphenyl) hexafluoropropane , Bis (4-hydroxy3,5-dimethyl • ylphenyl) hexafluoropropane, bis (4-hydroxy-3,5-dichlorophenyl) hexafluoropropane, etc. X is represented by formula (1-5) Specific examples of the bisphenol compound having a divalent residue include bis (4-hydroxyphenyl) difluorenylsilane, and bis (4-hydroxy-3,5-diφfluorenylphenyl) difluorenyl. Silane, bis (4-hydroxy-3,5-dichlorobenzyl) difluorenylsilane, etc. X is a bisphenol compound having a divalent residue represented by the formula (1-6), and specific examples include bis (4-hydroxyphenyl) pinane, bis (4-hydroxy3,5-dichlorophenyl) pinane, bis (4-hydroxy-3,5-dibromophenyl) pinane, phenol novolac,曱 phenol novolac and so on.

X為式(1-7)所示2價殘基之雙酚化合物,具體而言, 可列舉例如2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基3,5-二曱基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-曱基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷 等。 X為式(1-8)所示2價殘基之雙酚化合物,具體而言, 可列舉例如雙(4-羥基苯基)醚、雙(4-羥基3,5-二曱基苯基) 醚、雙(4-羥基-3,5-二氯苯基)醚等。 該等雙酚化合物可各自單獨使用,亦可2種以上組合 使用。 環氧化合物(1)中,以X為式(I-1)所示之2價殘基者較 10 314839 ZUU4UJDZ0 佳0 ^。:::氧化合物⑴中’亦以^…及…為氫原子、 位之式(1 於經R1、R2取代之苯環上之氧原子為第4 為氫原子—不2價殘基之化合物;Ri為甲基、…及R4 原子為第:〇:X於對於經R1、R2取代之苯環上之氧X is a bisphenol compound having a divalent residue represented by formula (1-7), and specific examples thereof include 2,2-bis (4-hydroxyphenyl) propane and 2,2-bis (4-hydroxy3) , 5-Difluorenylphenyl) propane, 2,2-bis (4-hydroxy-3,5-dichlorophenyl) propane, 2,2-bis (4-hydroxy-3-fluorenylphenyl) propane , 2,2-bis (4-hydroxy-3-chlorophenyl) propane, etc. X is a bisphenol compound having a divalent residue represented by formula (1-8), and specific examples include bis (4-hydroxyphenyl) ether and bis (4-hydroxy3,5-difluorenylphenyl) ) Ether, bis (4-hydroxy-3,5-dichlorophenyl) ether, etc. These bisphenol compounds may be used singly or in combination of two or more kinds. In the epoxy compound (1), the one having X as the divalent residue represented by the formula (I-1) is better than 10 314839 ZUU4UJDZ0. ::: The oxygen compound ⑴ also uses ^ ... and ... as hydrogen atoms, and the formula (1 The oxygen atom on the benzene ring substituted with R1 and R2 is the fourth hydrogen atom-a compound with no divalent residue ; Ri is methyl, ... and the R4 atom is: 0: X for oxygen on a benzene ring substituted with R1, R2

R4為氫原子、t )所示2價殘基之化合物;R1H 環 為乙撐基、X於對於經R]、R2取代之苯 Ν、Ι12;Γ原子為第4位之式(1_1)所* 2價殘基之化合物; χ於…氣原子、R為-C(CH3)H-CH2-所示之伸烷基、 所二…取代之笨環上之氧原子為第4位之式㈣ 二:^殘基之化合物-】為甲基,…為氯原子、 第4 ^基、X於對於經^尺2取代之苯環上之氧原子為 ^式(M)所示2價殘基之化合物較佳。 著4方、與(al)化合物進行反應之〇2)化合物之多價 羧酸加以說明。 / 1貝 又以I ’貝羧I為一分子中至少具有2個羧酸基之化合物, ^ 中一有不飽和鍵者較佳。多價羧酸可列舉例如草 舍丙一 &琥珀酸、戊二酸、己二酸、蘋果酸、馬來酸、 田馬酸、衣康酸、笨- 本一甲I、四氫苯二甲酸、六氫苯二甲 s义甲基甲橋四氫苯二^ + — 甲3义、氣橋酸、甲基四氫苯二曱酸、 偈本三酸、均苯四甲、_ # ^ . 一本甲酮二羧酸、二苯曱酮四羧 次、聯笨四叛酸、聯笼_ ^"本一羧酸、聯苯醚四羧酸等,較理想 者可列舉馬來酸、舍民缺 „ 田馬馱、衣康酸、四氫苯二曱酸、氯橋 夂。該等可各自單獨使用,亦可2種以上組合使用。 】] 314839 200403526 於(al)與(a2)之反應,作為稀釋劑以使用例如%乙氧 基丙酸甲酯、3-乙氧基丙酸乙酯、乙基溶纖劑乙酸酯、% 曱氧基丁基乙酸酯、乳酸乙酯、二乙二醇二曱_、乙酸丁 酯、3-曱氧基丙酸甲酯、2_庚酮、乙基甲基曱g同、環己酮、 乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇曱醚乙酸 酉曰寺溶劑較佳。 _ 尤其,於(al)化合物與(a2)化合物之反應,為了促進反 φ應以使用觸媒為宜。觸媒可列舉例如三乙胺、τ基二曱胺、 甲基三乙基氣化銨、苄基三曱基溴化銨、苄基三曱基填化 叙、二本基鱗化氫、二笨基銻化氫、辛酸鉻、辛酸夢等。 上述觸媒之使用量對於反應原料混合物較好為0 ·丨至10質 〇2)化合物具有不飽和雙鍵時,為了防止反應中之f 合,較好使用抗聚合劑。抗聚合劑可列舉例如對笨—酚 甲基對笨二酚、對苯二S分單曱醚、兒茶酚、焦梧齡等。其 使用量對於反應原料混合物較好為〇 〇 1至1皙旦 戶'里外。反應 溫度較好為60至150°C。又,反應時間較好為5至6〇小 時。 冬發明中(al)化兮奶兴Θ勾化合物之反應在[(環氧當 1數)>(羧酸當量數)]之條件下進行,通常當量數比為(琿 氧)··(致酸)=100: 1至1001 99。較好為1〇〇: 2〇至⑽& %,更好為1 00: 50至100: 90。上述當量比若為ι〇〇:工 至100 : 99,則於最終所獲得含有本聚護酸樹脂之感光性 樹脂組成物有容易取得感度、顯像性、解像性平衡之傾 314839 12 200403526 向,較佳。 接著,對於(b)含有不飽和基之單羧酸(成分加以說 明。本發明之成分(b)可列舉例如丙烯酸、丙烯酸之二聚 物、甲基丙烯酸、点-苯乙烯基丙烯酸、沒-糠基丙稀酸、 丁烯酸、α -氰基桂皮酸、桂皮酸;飽和或不飽和二鹼酸酐 與1分子中具有1個羥基之(曱基)丙烯酸酯衍生物之反應 物之半醋類;飽和或不飽和二鹼酸與含有不飽和基之單縮 水甘油化合物之反應物之半酯類等。半酯類可列舉例如將 琥珀酸酐、馬來酸酐、苯二甲酸酐、四氫苯二曱酸酐、六 氫苯二甲酸針、甲基六氫笨二甲酸針、甲基四氫苯二甲酸 酐、衣康酸酐、曱基甲橋四氯苯二甲酸肝等飽和及不飽和 二鹼酸酐與(曱基)丙烯酸羥乙醋、(甲基)丙烯酸羥基丙 酿、(曱基)丙烤酸經丁酿、(曱基)丙烯酸聚乙二醇單離、 (甲基)丙稀酸甘油二_、(甲基)丙烯酸三經曱基丙燒二 ι (曱基)丙烯酸季戊四醇三醋、(甲基)丙燁酸二季戍 四醇五酯、苯基縮水甘油醚之(曱基)丙烯酸酯等!分子中 -有1個羥基之(曱基)丙烯酸酯衍生物類以等莫耳進 …類或是將飽和或不飽和二驗酸:例如號拍 甲:來酸、己二酸、苯二甲酸、四氯苯…、六氣苯 化合物 馬®…與含有不飽和基之單縮水甘油 (例如(曱基)丙烯酸縮水甘油酯、 3J4839 13 200403526 οR4 is a hydrogen atom, a compound of divalent residue represented by t); R1H ring is an ethylene group, and X is for benzenes N and I12 substituted with R], R2; Γ atom is represented by formula (1_1) at the fourth position * A compound with a divalent residue; χ is in the gas atom, R is an alkylene group represented by -C (CH3) H-CH2-, and the oxygen atom on the substituted stupid ring is the formula in the fourth position. 2: Compound of the residue-] is a methyl group, ... is a chlorine atom, a 4th group, and X is a divalent residue represented by the formula (M) for an oxygen atom on a benzene ring substituted with a square foot 2 Compounds are preferred. The polyvalent carboxylic acid of the compound (2) which reacts with the (al) compound will be described below. / 1 mol and I ′ carboxyl I is a compound having at least two carboxylic acid groups in one molecule, and one having an unsaturated bond is preferred. Examples of the polyvalent carboxylic acid include grass house propylene glycol & succinic acid, glutaric acid, adipic acid, malic acid, maleic acid, tartaric acid, itaconic acid, benzylic acid, tetrahydrobenzenediene Formic acid, hexahydroxylylene, s-methylmethylbridgedtetrahydrobenzene ^ + — methyl-3, tetrabridged acid, methyltetrahydrobenzenedicarboxylic acid, oxalic acid, pyromellitic acid, _ # ^ . A monomethyl ketone dicarboxylic acid, benzophenone tetracarboxylic acid, bibenzyl tetracarboxylic acid, lian cage. ^ &Quot; This monocarboxylic acid, diphenyl ether tetracarboxylic acid, etc., ideally, maleic acid can be listed. , She Minque „Tianma 驮, Itaconic acid, Tetrahydrophthalic acid, Chlorhexidine. These can be used alone or in combination of two or more types.】] 314839 200403526 in (al) and (a2) ) Reaction, as the diluent to use, for example, methyl ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate,% ethyl butyl acetate, ethyl lactate Esters, diethylene glycol difluorene, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, ethyl methyl hydrazone, cyclohexanone, ethyl carbitol acetate, Butyl carbitol acetate, propylene glycol ether ether acetate Temple solvents are preferred. _ In particular, in the reaction between the (al) compound and the (a2) compound, it is advisable to use a catalyst in order to promote reaction. Examples of the catalyst include triethylamine, τ-diamine, and methyl. Triethylammonium gasification, benzyltrimethylammonium bromide, benzyltrimethylammonium group, dibenzyl hydrogen, dibenzyl hydrogen antimony, chromium octoate, octanoic acid dream, etc. The amount used is preferably from 0 to 1 to 10 masses for the reaction raw material mixture. (2) When the compound has an unsaturated double bond, in order to prevent f-combination in the reaction, an anti-polymerization agent is preferably used. Examples of the anti-polymerization agent include benzene— Phenol methyl p-catechol, terephthalic acid, monocatechol, catechol, pyrosol, etc. The amount used is preferably from 0.001 to 1 liter in and out of the reaction raw material mixture. The reaction temperature is better The reaction temperature is 60 to 150 ° C. The reaction time is preferably 5 to 60 hours. The reaction of the (al) chemical compound in the winter invention is [(epoxy equivalent)> ((carboxylic acid equivalent) Number)], usually the equivalent number ratio is (珲 oxygen) · (acidification) = 100: 1 to 1001 99. Preferably 100: 20 to 〇 & am p;%, more preferably from 100: 50 to 100: 90. If the above equivalent ratio is ι〇 :: 100 to 99:99, it is easy to obtain the photosensitive resin composition containing the polyacid resin in the end. It is preferable to obtain a balance of sensitivity, developability, and resolvability. 31839312 200403526, and preferably. Next, (b) an unsaturated monocarboxylic acid (component) will be described. Examples of the component (b) of the present invention include (b) Acrylic acid, acrylic acid dimer, methacrylic acid, dot-styrenic acrylic acid, m-furfuryl acrylic acid, butenoic acid, α-cyanocinnamic acid, cinnamic acid; saturated or unsaturated dibasic anhydride with 1 The semi-vinegars of the reactant of the (fluorenyl) acrylate derivative having one hydroxyl group in the molecule; the half-esters of the reactant of the saturated or unsaturated dibasic acid and the monoglycidyl compound containing an unsaturated group. Examples of the half esters include succinic anhydride, maleic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic acid needle, methylhexahydrobenzene dicarboxylic acid needle, and methyltetrahydrophthalic anhydride. Saturated and unsaturated dibasic acid anhydrides such as itaconic anhydride, fluorenyl methyl bridge tetrachlorophthalate, etc. Ding Bing, (fluorenyl) acrylic acid polyethylene glycol mono-ion, (meth) acrylic acid glycerol diglycerol, (meth) acrylic acid tris (methyl) acrylic acid trimethyl propylene propylene dimer (fluorenyl) pentaerythritol triacetate, Group) Diquatyltetraol pentaester of propionate, (fluorenyl) acrylate of phenyl glycidyl ether, etc.! In the molecule-(fluorenyl) acrylate derivatives with 1 hydroxyl group are added at equal levels ... or saturated or unsaturated diacids: for example, patella: maleic acid, adipic acid, phthalic acid , Tetrachlorobenzene ..., hexaphenylene compound, horse ® ... and monoglycidyl containing unsaturated groups (such as (fluorenyl) glycidyl acrylate, 3J4839 13 200403526 ο

春 ⑹ 等)以等莫耳比進行反應所獲得之半酯類等之含有不飽和 基之單羧酸等。 成分(b)可單獨使用,亦可2種以上組合使用。 有關成分(a)與成分(b)之配合比例,成分(a)中之殘留 %氧基與成分(b)之羧酸之當量比通常為1 : 0.5至1 : 2, 為1 〇·8至I25,更好為1: 1。成分(a)中之殘留 壞乳基與成分(b)之羧酸之當量比若為1 : 0.5至1 ·· 2,將 得^聚魏酸樹脂作為黏合樹脂使用,作成感光性 5曰、、且、物時,其感光度有變高之傾向而為佳。 於成分(a)與成分(13)之反應中’作 二 3-乙氧基丙酸曱酯、3_乙氧基丙酸乙酯、'宜使用例如 酯、3-甲氧基丁基乙酸酯、乳酸乙酯、二乙基溶纖劑乙醆 如 > 曱氧基丙酸曱r日、2-庚,同、 Μ、 k己酮、乙基卡必醇乙酸酯、丁基卡 i 土曱S同、 曱_乙酸酯等溶劑。 -子乙酸醋、斤二醇 3]4839 ]4 200403526 又,於成分(a)與成分(b)之反應中,為了促進反應,宜 使用觸媒。觸媒可列舉例如三乙胺、苄基二甲胺、甲基二 乙基氯化銨、T基三甲基溴化銨、苄基三甲基碘化銨、: 苯基磷化氫、二苯基銻化氫、辛酸鉻、辛酸錯等,較好可 列舉卞基二甲基溴化銨等。上述觸媒之使用量對於反應原 料混合物之合計量之質量份率通常為01至10質量%,較 佳為0.2至5質量%。 ' 巧J |;反應中之聚 合,宜使用抗聚合劑。抗聚合劑可列舉例如對笨二酚、甲< 基對苯二S分、對笨二驗單甲_、兒㈣、焦梧料。其使 用量對於反應原、化昆合物之合計量之質量份率較佳為㈣ 至1質量%。反應溫度較好為60至150 。 “ ,反應時間 幸父佳為5至60小時。 脂 經由將成分(c)與成分(d)進行反應 可後仔本聚緩酸樹 成分⑷可列舉具有2個以上叛基之緩酸針等。 個以上缓基之羧酸6f可列舉例如草酸、丙二酸、號站萨 =卜己rv蘋果酸、馬來酸、富馬酸、衣:酸:檸 :义、酒石酸、本二甲酸、四氫苯二曱酸、六氫笨二曱萨 _ 义虱槁酸、甲基四氫苯二曱酸、甲 土 /、虱本二曱酸、偏苯三酸、均笨四-酸、--审m %純 夂一本曱顯1二羧 、,—本甲鋼四竣酸、聯苯四魏酸、聯苯二绩酸 四竣酸等之羧酸酐,較好可列舉四氫笨二曱酸酐、二一’、 酮四竣酸一酐、聯笨四緩酸二酐。 曱 314839 15 200403526 成刀(C)與成分⑷之使 比為成分( (d)之酸酐單位之卷曰L j艾匕基與成分 08至卜〇 $比,通常為1:1至以·1,較好為1: 1 ^】‘2°成分⑷與成分⑷之使用量比於上述之基準 :向而為佳至°·1,則在顯像液之溶解性有變為適度之 行反…無溶劑或溶劑中將成分(c)與成分⑷進 心 法進行,而以在溶劑中進行者較佳。 • 溶劑可使用例如3_乙氧基丙酸"旨、 而匕、7 1U羊L &丙酸乙 "一^洛、.戴劑乙酸酯、3 -曱氧基丁基乙酸酯、乳酸乙s旨、 .一乙一醇二曱醚、乙酸丁酯、3-甲氧基丙酸甲酯'2-庚酮、 ,己酮'乙基卡必醇乙酸醋、丁基卡必醇乙酸醉、丙二醇 甲8^乙酸賴等。該等溶劑可各自單獨使用或2種以上組合 使用,其使用量對於成分(c)1質量份較好在〇 5質量份: 上20質量份以下。 曰—將成分(c)與成分(d)進行反應時,必要時只要在溶劑中 肇混合即可,反應溫度通常在20°C以上2001以下。 所獲得本聚羧酸樹脂從反應混合物中離析,可用於本 發明之著色感光性樹脂組成物,亦可於離析後再精製使 用亦可不將反應混合物進行離析,以原狀使用。 本聚羧酸樹脂其聚苯乙烯換算重量平均分子量通常在 1,〇〇〇以上5M00以下,較好在l55〇〇以上2〇,_以下。 上述之重量平均分子量若纟口⑼以上5〇,_以下,則作 為黏合樹脂使用,作成感光性樹脂組成物時有解像性、顯 像邊緣及場所污染之各性能變良好之傾向,較佳。又,酸 314839 16 200403526 價以在50以i 200以下較佳,更好在7()以上m以下。 酸價若在上述之範目,則作為黏合樹脂使用,作成感光性 樹脂組成物時有解像性、顯像邊緣及場所污染之各性能漸 佳之傾向而為宜。 本叙明之感光性樹脂組成物(以下亦稱為本感光性樹 脂組成物)由含有[A]本聚叛酸樹脂、[B]至少具有】個乙烯 性不飽和鍵之可聚合加成之化合物、[c]光聚合引發劑及[D] 溶劑組成。 本感光性樹脂鈕成物中之本聚缓酸樹脂之含量通常為 10至80重量%,較好為20至6〇重量%。 又,本感光性樹脂組成物中,作為黏合樹脂之與本聚 竣酸樹脂之同時,亦可含有通常之感光性樹脂组成物所使 用之其他黏合樹脂0古女莖CJH —r-. 3寺‘ 5橱脂可使用例如具有羧基之 鹼可溶性聚合物。該等具有缓基之驗可溶性共聚物之且體 例可列舉例如(甲基)丙稀酸/(甲基)丙稀酸甲酿共聚物:(甲 基)丙稀酸/(甲基)丙稀酸节酷共聚物、(甲基)丙稀酸《甲基) 丙稀酸2-經乙酿/(甲基)丙稀酸节酿共聚物、(甲基)丙稀酸 々甲基)丙烤酸甲酿/聚苯乙稀大單體共聚物、(甲基)丙稀酸 /(甲基)丙稀酸甲❸聚f基丙稀酸甲δ|大單體共聚物、(甲 基)丙稀酸/(曱基)丙稀酸Tg|/聚苯乙稀大單體共聚物 基)丙稀酸/(曱基)丙稀酸〒酷/聚曱基丙焊酸甲酿大單麵丘 f物、(甲基)丙稀酸/(甲基)丙稀酸乙…/(甲基)丙:酸 卞_苯乙稀大單體共聚物、(甲基)丙稀酸/(甲基)丙稀酸 2-搜乙Ss /(曱基)丙稀酸节酿/聚甲基丙烯酸曱能大單體共 314839 ]7 200403526 聚物、曱基丙烯酸/苯乙烯/(甲基)丙烯酸节酯…—苯基馬來 酸酐縮亞胺共聚物、(甲基)丙烯酸/琥珀酸單(2_丙烯醯氧基 乙酯)/苯乙烯/(甲基)丙烯酸苄酯/N_笨基馬來酸酐縮亞胺 共聚物、(甲基)丙烯酸/琥珀酸單(2_丙烯醯氧基乙酯)/苯乙 烯/(甲基)丙烯酸烯丙酯/N_苯基馬來酸酐縮亞胺共聚物、 (曱基)丙烯酸/(甲基)丙烯酸苄酯/N_苯基馬來酸酐縮亞、胺/ 苯乙燁/(甲基)丙烯酸丙三醇單酯共聚物等。 接著,對於[B]至少具有丨個乙蝉性不飽和鍵之可聚人 加成之化合物(以下稱為乙烯性不飽和化合物)加以說明。口 乙烯性不飽和化合物可列舉具有丨個以上,較好2 以上聚合性之碳原子-碳原子不飽和鍵之化合物,可列兴= 如不飽和魏酸與脂肪族多價醇之醋;不餘和敌酸與脂二 多價胺之醯胺等。該等化合物可各自為單體, 矢 體,亦即讓、3聚物及4聚物以上之低聚物。;預聚 可為混合物。 亦 此處,不飽和羧酸可列舉例如丙烯酸、曱基 衣康酸、丁烯酸、異丁烯酸、馬來酸等。 a、 不良#緩&與脂肪族多價醇之酯之單體之I體 綱可列舉例如二丙稀酸乙二醇酷、二丙稀酸:乙之丙 酿、二丙稀酸a丁二醇§旨、二丙稀酸四甲二醇略、:鮮 烯S欠丙一% S曰 '二丙烯酸新戊二醇酯、三丙烯酸三甲 烧錯、三甲醇丙垸三(丙_基丙基)醚、三丙;陵2 醇乙烷_、二丙稀酸己统二醇酿、二丙稀酸環己^ 醇酯、二丙烯酸四乙二醇醋 ' 二丙烯酸季戊四醇酯、:一 一丙 3]4839 18 200403526 稀酸季戊四醇酯、四丙烯酸季戊四醇酯、二丙烯酸二季戊 四醇酯、六丙烯酸二季戊四醇酯、三丙烯酸山梨糖醇酯、 四丙烯酸山梨糖醇酯、五丙烯酸山梨糖醇酯、六丙烯酸山 梨糖醇酯、三(丙烯醯氧基乙基)聚異氰酸酯、聚酯丙烯酸 酉旨低聚物等。 曱基丙烯酸酯可列舉例如四曱二醇二曱基丙烯酸酯、 二乙一醇二甲基丙稀酸酯、新戊二醇二曱基丙稀酸酯、三 曱醇丙烷三曱基丙烯酸酯、三甲醇乙烷三甲基丙烯酸酯、 乙二醇二曱基丙烯酸醋、-丁二醇二曱基丙稀酸酯、己 二醇二曱基丙稀酸酯、季戍四醇二曱基丙稀酸酯、季戍四 醇三曱基丙烯酸酯、季戊四醇四曱基丙嫦酸酯、二季戊四 醇二曱基丙烯酸酯、二季戊四醇六曱基丙烯酸酯、山梨糖 醇三曱基丙烯酸酯、山梨糖醇四曱基丙烯酸酯、雙[對-(3-甲基丙烯氧基-2-羥基丙氧基)笨基]二曱基曱烷、雙[對-(曱 基丙烯氧基乙氧基)苯基]二曱基曱烷等。 衣康酸酯可列舉例如乙二醇二衣康酸酯、丙二醇二衣 康酸酯、1,3 - 丁二醇二衣康酸酯、i ,4- 丁二醇二衣康酸酯、 四曱二醇二衣康酸酯、季戊四醇二衣康酸酯、山梨糠醇四 衣康酸酯等。 丁烯酸酯可列舉例如乙二醇二丁稀酸酯、四甲二醇一 丁烯酸酯、季戊四醇二丁烯酸酯、山梨糖醇四-二丁烯酸酯 等0 異丁烯酸酯可列舉例如乙二醇二異丁歸酸酯、季戊四 醇二異丁稀酸酯、山梨糖醇四異丁烯酸酯等。 19 314839 200403526 馬來酸酯可列舉例如乙二醇二馬來酸酯、三乙二醇二 馬來酸酿、季戍四醇二馬來酸_、山梨糖醇四馬來酸酿等: 亦可列舉該等酯單體之混合物。 脂肪族多價胺化合物與不飽和羧酸之醯胺單體之具體 例可列舉例如曱樓雙丙烤醯胺、甲禮雙_甲基丙稀酿胺月^ 1,6:六甲撐雙·丙烯醯胺、1>6•六甲撐雙_甲基丙烯醯胺、二 乙撑三胺三丙稀醯胺、苯:甲基雙丙稀 參曱基丙烯醯胺等。 本-甲基雙 …乙广性不飽和化合物亦可為在分子中具有^以上異 氰I酯基之聚異氰酸酯化合物中 "^ ^ ^ 訂通式(2)所示之乙烯單 _肢加成所得之乙烯尿烧化合物(特公昭48_4ms號公報) h2c=c—C 一0-CH2*^CH— R10 Ο \-/π · i” (2) (式中,R】0及R】】各自獨立為氫原子或曱基) 又’亦可為尿烧丙稀酸酷類'(特開昭土 51_37193號八Chunxiong, etc.) Unsaturated monocarboxylic acids, such as half-esters, etc., obtained by the reaction at equal molar ratios. Component (b) may be used alone or in combination of two or more. Regarding the compounding ratio of the component (a) and the component (b), the equivalent ratio of the remaining% oxygen in the component (a) to the carboxylic acid of the component (b) is usually 1: 0.5 to 1: 2, which is 10.8. Up to I25, more preferably 1: 1. If the equivalent ratio of the residual bad milk group in the component (a) to the carboxylic acid in the component (b) is 1: 0.5 to 1 ·· 2, the obtained polyweilic acid resin is used as a binder resin to make it photosensitive. In the case of an object, the sensitivity tends to be higher, which is preferable. In the reaction between component (a) and component (13), 'as di-3-ethoxypropionate ethyl ester, 3-ethoxypropionate ethyl ester,' preferably, for example, ester, 3-methoxybutyl ethyl Acid esters, ethyl lactate, diethyl cellosolve, e.g. > ethoxypropionate, 2-heptane, iso, M, khexanone, ethyl carbitol acetate, butyl Card i soil 同 S with, 曱 _acetate and other solvents. -Ethyl acetate, cationic glycol 3] 4839] 4 200403526 In the reaction between the component (a) and the component (b), a catalyst should be used in order to promote the reaction. Examples of the catalyst include triethylamine, benzyldimethylamine, methyldiethylammonium chloride, T-based trimethylammonium bromide, benzyltrimethylammonium iodide, phenylphosphine, and Phenyl antimony hydrogen, chromium octoate, and octanoate are preferably exemplified by fluorenyldimethylammonium bromide and the like. The mass fraction of the amount of the catalyst to be used for the total amount of the reaction raw material mixture is usually from 01 to 10% by mass, preferably from 0.2 to 5% by mass. 'Qiao J |; polymerization in the reaction, anti-polymerization agents should be used. Examples of the anti-polymerization agent include p-dihydroxybenzene, methyl < -p-phenylene disulfide, p-diphenyldiamine, carbamide, and coke. It is preferably such that the amount by mass of the reactants and chemical compounds is ㈣ to 1% by mass. The reaction temperature is preferably 60 to 150 ° C. ", The reaction time is 5 to 60 hours. By reacting the component (c) and the component (d), the lipid can be made into a polyacid tree component. For example, a slow acid needle with two or more rebel groups can be cited. Examples of the carboxylic acids 6f with more than one retarding group include oxalic acid, malonic acid, No. sac = buhrv malic acid, maleic acid, fumaric acid, clothing: acid: citrate: tartaric acid, tartaric acid, Tetrahydrobenzenedipic acid, hexahydrobenzidine diazadisulfide_selenic acid, methyltetrahydrobenzenedipic acid, formazan /, dibenzylic acid, trimellitic acid, mesitylene tetra-acid,- -Examination of pure carboxylic acid anhydrides, such as tetramethylene acid, biphenyltetraweilic acid, biphenyltetracarboxylic acid, etc.曱 Anhydride, dione ', ketotetracarboxylic acid monoanhydride, dibenzyltetracarboxylic dianhydride. 曱 314839 15 200403526 The ratio of the knife (C) to the component ⑷ is the component ((d) of the anhydride unit. Volume L The ratio of Ai Jiji to ingredients 08 to 〇0, usually 1: 1 to · 1, preferably 1: 1 ^] '2 ° The ratio of the amount of ingredient ⑷ to ingredient 于 is above the above standard: Better to ° · 1, then in the developer solution Solubility may change to a moderate level ... It is better to use the solvent (or solvent) or the ingredient (c) and the ingredients, but it is better to do it in a solvent. • For example, 3-ethoxypropionic acid can be used as the solvent. " Purpose, and dagger, 7 1U sheep L & ethyl propionate " Yiluo Luo, .Dai agent acetate, 3-methoxy butyl acetate, ethyl lactate,. Ethyl ether, butyl acetate, methyl 3-methoxypropionate '2-heptanone, hexanone' ethyl carbitol acetate, butyl carbitol acetate, propylene glycol methyl 8 ^ acetic acid, and the like. These solvents can be used alone or in combination of two or more kinds, and the amount of the solvent used is preferably 0.5 parts by mass to 1 part by mass of the component (c): 20 parts by mass or less. ) When performing the reaction, it may be mixed in a solvent if necessary, and the reaction temperature is usually 20 ° C or higher and 2001 or lower. The obtained polycarboxylic acid resin is isolated from the reaction mixture and can be used for the coloring photosensitive resin composition of the present invention. It can also be used after purification, or it can be used as it is without isolating the reaction mixture. The polystyrene-equivalent weight average molecular weight is generally 1,000 to 5M00, preferably 1550 to 20, _. If the weight average molecular weight mentioned above is not less than 50, _, then it is regarded as adhesion. The use of resins tends to improve the properties of resolution, imaging edges, and site pollution when making photosensitive resin compositions. It is better. The acid is 314839 16 200403526 and the price is preferably 50 to 200. More It is preferably at least 7 () and m. If the acid value is in the above range, it is used as an adhesive resin. When the photosensitive resin composition is made, the properties of resolution, development edge and site pollution tend to be better. should. The photosensitive resin composition (hereinafter also referred to as the photosensitive resin composition) described herein is a polymerizable addition compound containing [A] the polyacrylic acid resin, [B] having at least] ethylenic unsaturated bonds , [C] Photopolymerization initiator and [D] solvent composition. The content of the main polyacid resin in the photosensitive resin button product is usually 10 to 80% by weight, preferably 20 to 60% by weight. In addition, the photosensitive resin composition, as a binder resin, and the polyacrylic acid resin, may also contain other binder resins commonly used in the photosensitive resin composition. 0 female stem CJH —r-. 3 Temple For example, an alkali-soluble polymer having a carboxyl group can be used. Examples of such soluble copolymers having a retardation group include (meth) acrylic acid / (meth) acrylic acid methyl ester copolymers: (meth) acrylic acid / (meth) acrylic acid Acrylic acid copolymer, (meth) acrylic acid "methyl" Acrylic acid 2-Ethyl alcohol / (meth) acrylic acid alcohol-resistant copolymer, (methyl) acrylic acid methyl (meth) acrylic acid Roasted acid methyl alcohol / polystyrene macromonomer copolymer, (meth) acrylic acid / (meth) acrylic acid methyl formaldehyde poly f-based acrylic methyl δ | macromonomer copolymer, (methyl ) Acrylic acid / (fluorenyl) acrylic acid Tg | / Polystyrene macromonomer copolymer based) Acrylic acid / (fluorenyl) acrylic acid fluorene / polyfluorene acrylic acid Noodles, methacrylic acid / (meth) acrylic acid ... / (meth) acrylic acid: stilbene-styrene copolymer, (meth) acrylic acid / ( Methyl) acrylic acid 2-sodium Ss / (fluorenyl) acrylic acid / polymethacrylic acid macromonomers total 314839] 7 200403526 Polymer, methacrylic acid / styrene / (meth) Benzyl acrylate ...- phenylmaleic anhydride imine copolymer, (meth) acrylic acid / succinic acid mono (2-propenyloxy) (Ester) / styrene / benzyl (meth) acrylate / N-benzylmaleic anhydride imine copolymer, (meth) acrylic acid / succinic acid mono (2-propenyloxyethyl) / styrene / Allyl (meth) acrylate / N_phenylmaleic anhydride imine copolymer, (fluorenyl) acrylic acid / benzyl (meth) acrylate / N_phenylmaleic anhydride imide, amine / phenylethyl烨 / (meth) acrylate glycerol monoester copolymer and the like. Next, a polymerizable addition compound (hereinafter referred to as an ethylenically unsaturated compound) having [E] at least one ethylenic unsaturated bond will be described. Examples of ethylenically unsaturated compounds include compounds having a polymerizable carbon atom-carbon atom unsaturated bond of more than two, preferably two or more, and can be listed as Hing = unsaturated weilic acid and aliphatic polyvalent alcohol vinegar; not Yu and diacid and lipid divalent polyamines, such as amidine. Each of these compounds can be a monomer, a vector, that is, an oligomer of 3, 4 or more oligomers. ; Prepolymerization can be a mixture. Here, the unsaturated carboxylic acid includes, for example, acrylic acid, amidinoitaconic acid, butenoic acid, methacrylic acid, and maleic acid. a, Bad #Slow & Polyesters with aliphatic polyhydric alcohols Monomers of monomers I can be exemplified by ethylene glycol dipropylene glycol, diacrylic acid: ethyl alcohol, dibutyl alcohol Diol §, Tetramethylene glycol dipropionate, Acrylene S, propylene, propylene, pentyl succinate, neopentyl glycol diacrylate, trimethyl triacrylate, trimethylolpropanetris (trimethylpropane Base) ethers, tripropylenes; Ling 2 alcohol ethane_, dipropionic acid hexamethylene glycol, cyclohexanyl alcohol diacrylate, tetraethylene glycol diacrylate, pentaerythritol diacrylate, one by one C3] 4839 18 200403526 pentaerythritol dilute acid, pentaerythritol tetraacrylate, dipentaerythritol diacrylate, dipentaerythritol hexaacrylate, sorbitol triacrylate, sorbitol tetraacrylate, sorbitol pentaacrylate, six Sorbitol acrylate, tris (propyleneoxyethyl) polyisocyanate, polyester acrylic oligomer, etc. Examples of the fluorenyl acrylate include tetramethylene glycol difluorenyl acrylate, diethylene glycol dimethyl acrylate, neopentyl glycol difluorenyl acrylate, trimethylol propane trimethyl acrylate, Trimethanolethane trimethacrylate, ethylene glycol difluorenyl acrylate, -butanediol difluorenyl acrylate, hexanediol difluorenyl acrylate, quaternary tetramethylene difluorenyl propylene Dilute esters, pentaerythritol trimethyl acrylate, pentaerythritol tetramethyl propionate, dipentaerythritol dimethyl acrylate, dipentaerythritol hexamethyl acrylate, sorbitol trimethyl acrylate, sorbose Alcohol tetrafluorenyl acrylate, bis [p- (3-methacryloxy-2-hydroxypropoxy) benzyl] difluorenylmethane, bis [p-(fluorenylpropenyloxyethoxy) Phenyl] difluorenoxane and the like. Examples of itaconic acid esters include ethylene glycol diitaconate, propylene glycol diitaconate, 1,3-butanediol diitaconate, i, 4-butanediol diitaconate, and Glycoldiol diitaconate, pentaerythritol diitaconate, sorbitan tetraitaconate and the like. Examples of the methacrylic acid ester include 0 methacrylic acid esters such as ethylene glycol dibutyrate, tetramethyl glycol monobutyrate, pentaerythritol dibutyrate, and sorbitol tetra-dibutyrate. For example, ethylene glycol diisobutyrate, pentaerythritol diisobutyrate, sorbitol tetramethacrylate and the like. 19 314839 200403526 Maleic acid esters can be exemplified by ethylene glycol dimaleate, triethylene glycol dimaleic acid, quaternary tetrol dimaleic acid, sorbitol tetramaleic acid, etc .: Examples include mixtures of such ester monomers. Specific examples of the aliphatic polyvalent amine compound and the ammonium monomer of an unsaturated carboxylic acid may include, for example, stilbene stilbene, melamine bis-methylpropionamine ^ 1, 6: hexamethylene bis · Acrylamide, 1 > 6 · hexamethylene bis-methacrylamide, diethylenetriamine tripropylammonium amine, benzene: methyl bisacryl acrylamide, etc. The present-methylbis ... ethylenically unsaturated compound can also be a polyisocyanate compound having an isocyanate ester group of ^ or more in the molecule. &Quot; ^ ^ ^ The ethylene monomer shown by the general formula (2) The obtained ethyleneuria compound (Japanese Patent Publication No. 48_4ms) h2c = c—C—0-CH2 * ^ CH— R10 〇 \-/ π · i ”(2) (where R] 0 and R]] Each independently is a hydrogen atom or a fluorenyl group) and 'can also be a urinary acryl type' (Japanese Patent Laid-Open No. 51_37193

報)、聚酯丙烯酸酯類(;特開昭 U A 49 4λ10ΐ \ 3就公報、特公昭 49-4d9l號公報、特公昭u 細r s *釘一 Λ 唬公報)、光硬化性單 月旦[日本黏者協會雜誌、第2 〇 頁⑽4年)]等。 4弟7號第300頁至第308 該等乙烯性不飽和化合物 組成物之固體成分之質量百分率=對於本感光性樹脂 下,較好在10%以上40%以下。吊在5/以上5〇%以 用暑方κ 、市性不飽和化合物之使 用里在上述基準中,若在5%以上 < 便 得感度、顯像性、解像性平衡0以下’則有容易取 衡之傾向而佳。又,本感光性 314839 20 200403526 樹脂組成物之固體成分為去除溶劑成分的總八 接著,對於[c]光聚合引發劑加以說明。、μ 光聚合引發密ι] 可使用乙醯苯系光聚合引發劑、苯偶因车也1 ^ — 先聚合引發劑、 二苯曱酮系光聚合引發劑、D桊噸酮系光节八 β引發劑、三唪 系光聚合引發劑、噁二°坐糸光聚合引發1等 ,、 乙醯笨系光聚合引發劑可列舉例如一 7 —乙氧基乙醯苯、 2 -經基-2-曱基-1-笨基丙烧-1-嗣、卞其_ 土 —曱基_缩醇、2- 經基-2-曱基-卜[4-(2-羥基乙氧基)笨基]丙燒 “ @同、1 ·敍其 環已基苯基甲酮、2-曱基-2-嗎啉基匕吞 ^基碟苯基)丙烧 -1-酮、2_苄基二曱胺基-1-(心嗎啉美絮 , 土)丁燒-1_嗣、2- 經基-2-曱基曱基乙烯基)笨基] _ 义几」-a同之低聚物 寻0 苯偶因系光聚合引發劑可列舉例士楚 牛1夕』如本偶因、苯偶因甲 _、苯偶因乙醚、笨偶因異丙醚、笨偶 ^ q兵丁 等。 二苯曱酮系光聚合引發劑可列舉例如二笨曱酮、鄰 笨酿基苯甲酸甲酿、心苯基二笨甲酮、4_笨酿基u基二 笨硫、3,3,,4,4,-四(第三_ 丁基過氧幾基)二苯甲酮、2,4,6 二曱基二苯甲酮等。 如2-異丙基噻噸®同 2 5 4、二氯噻π頓g同、), Polyester acrylates (; JP Sho UA 49 4λ10ΐ \ 3 on the Gazette, JP Sho 49-4d9l, GS Sho u rs * nail Λ Bulletin), photohardenable single month [Japan Adhesive Association of Journalists, page 20 (4 years)]] and so on. The mass percentage of the solid content of the ethylenically unsaturated compound composition of No. 7 No. 7 pp. 300 to 308 = for the photosensitive resin, preferably 10% or more and 40% or less. Hanging from 5 / above 50% to use the summer formula κ, the use of market unsaturated compounds In the above standards, if it is above 5% < then the sensitivity, imaging, and resolution balance is below 0 'then It is better to have the tendency to easily balance. In addition, the solid content of this photosensitive 314839 20 200403526 resin composition is a total of eight components from which the solvent component is removed. Next, the [c] photopolymerization initiator will be described. , Μ photopolymerization initiation] Ethylbenzene photopolymerization initiator, benzoin 1 also can be used ^ — first polymerization initiator, benzophenone photopolymerization initiator, D xanthone ketone photon β initiators, stilbene-based photopolymerization initiators, phosphine-based photopolymerization initiation 1 and the like, and acetamidine-based photopolymerization initiators include, for example, 7-ethoxyacetamidobenzene, 2-meryl- 2-fluorenyl-1-benzylpropan-1-ene, hydrazone _ earth-fluorenyl_acetal, 2-meryl-2-fluorenyl-bu [4- (2-hydroxyethoxy) benzyl Propyl] propanyl "@ 同 , 1 · Sythelocyclohexylphenyl ketone, 2-fluorenyl-2-morpholinyl diphenyl phenyl) propan-1-one, 2-benzyldione Fluorenylamino-1- (cardiomorpholine melamine, soil) butan-1-1, 2-meryl-2-fluorenylfluorenylvinyl) benzyl] _ meaning of a few "-a same oligomer Seeking 0 Benzoin-based photopolymerization initiators can be exemplified by Shishi Niu 1st night ”such as Benzoin, Benzoin A, Benzoin Ether, Benzoin Isopropyl Ether, Benzo ^ q Bingding, and so on. Examples of the benzophenone-based photopolymerization initiator include dibenzone, o-benzyl benzoic acid methyl ester, chlorophenyl dibenzyl ketone, 4-benzyl u-yl dibenzyl sulfide, 3, 3, 4,4, -tetrakis (tertiary-butylperoxoyl) benzophenone, 2,4,6 difluorenylbenzophenone, etc. For example, 2-isopropylthioxanthol is the same as 2 5 4.

頓S同糸光聚合引發劑可列舉例 扣異丙基噻噸酮、2,仁二乙基噻噸酮 氣-4 -丙氧基噻4員g同等。 "求π尤眾合引發劑 (曱乳基本基)-1,3 · 5 -二唪、。4 -雔f -皮 兹 又(二虱甲基)-6-(4-甲 π 基)-1,j,5 -二嗪、? 4 -雙(二氣 ,又1一虱甲基)+胡椒基山3 314839 21 200403526 ^、^,三氯曱舒叫甲氧基苯乙稀基…^三哮、 雙(三氯τ基)_6_[2_(5_甲基呋喃_2_基)乙稀基三 嗦、2,4-雙(三氯曱基)-6-[2_(咲。南I基)乙稀基]_135_三 嗓、2,4-雙(三氯甲基)-6例4_二乙胺基_2_甲基苯基)’乙稀 基Κ3,5-三嗪、2,4_雙(三氯甲基叫印〆·二曱氧基苯幻 乙烯基;| -1,3,5 -三嗪等。Examples of the photopolymerization initiators for sulfonium isocyanate include isopropylthioxanthone, 2, rendiethylthioxanthone, and 4-membered oxythioxan. " Find πyouzhonghe initiator (basic milk base) -1,3 · 5 -2 ,. 4-雔 f -Pitts (dimethymethyl) -6- (4-methyl π) -1, j, 5-diazine,? 4-Bis (digas, 1 diloxymethyl) + piperyl mountain 3 314839 21 200403526 ^, ^, trichloroarsine is called methoxyphenethenyl ... ^ tris, bis (trichloroτyl) _6_ [2_ (5_methylfuran_2_yl) ethenyltrifluorene, 2,4-bis (trichlorofluorenyl) -6- [2_ (fluorene.South I-yl) ethenyl] _135_triple , 2,4-bis (trichloromethyl) -6 cases of 4-diethylamino-2-methylphenyl) 'ethenyl K3,5-triazine, 2,4_bis (trichloromethyl) It's called Indio · dioxophenoxyvinyl; | -1,3,5-triazine and so on.

噁二唑系光聚合引發劑可列舉例如5气對-曱氧基苯 基)2 —氯曱基噁二唑、5气對·丁氧基苯乙稀基卜2_三氯甲 基σ惡二tr坐等。 … 其他之光聚合引發劑亦可使用2,4,6_三曱基苯醯基二 苯膦氧化物、2,2,-雙(鄰-氯苯基)_4,4,,5,5、四笨基^、聯 —咪唑、10-丁基_2_氯吖啶酮、2_乙基蒽醌、聯苯醯、9,⑺· 菲醌、樟腦醌、苯醯曱酸甲酯' 雙戊二烯基鈦_二(五氟笨 基)等鈦烯化合物等。Examples of the oxadiazole-based photopolymerization initiator include 5-gas-p-methoxyphenyl) 2-chlorofluorenyloxadiazole and 5-gas-p-butoxyphenylethenyl 2-trichloromethylσ-oxazine Two tr sit and wait. … Other photopolymerization initiators can also use 2,4,6_trifluorenylphenylfluorenyl diphenylphosphine oxide, 2,2, -bis (o-chlorophenyl) _4,4,5,5, Tetrabenzyl ^, bi-imidazole, 10-butyl_2-chloroacridone, 2-ethylanthraquinone, biphenylfluorene, 9, phenanthrenequinone, camphorquinone, methyl benzoate Pentadienyl titanium bis (pentafluorobenzyl) and other titanium compounds.

/、中以二嗪系光聚合引發劑及噁二。坐系光聚合引發 •劑較佳。 X 該等光聚合引發劑可各自單獨使用’亦可2種以上組 合使用。 光聚合引發劑之使用量對於本聚羧酸樹脂及必要時 所添加之其他黏合聚合物合計〗〇〇質量份通常在3質量份 以上6〇質量份以下,較好在5質量份以上40質量份以下, 更好在1 〇貝里份以上30質量份以下。光聚合引發劑之使 用里右在J貝I份以上60質量份以下,則感度不會降低, 使本‘Λ光!±树脂組成物所形成之感光性樹脂組成物 314839 22 200403526 層之強度亦有不易降低之傾向,較佳。 本感光性樹脂組成物亦可含有光雙八 + σ Μ發助劑。光聚 合引發助劑係用於促進光聚合反應。 光聚合引發助劑可列舉例如三乙醇 ^ — 子知、曱基二乙醇 胺、三異丙醇胺、4-二甲胺基苯甲酸甲醋、* 曱酸乙酯、4-二甲胺基笨曱酸異戊酯、—土/, Diazine-based photopolymerization initiator and dioxin. Permanent photopolymerization initiators are preferred. These photopolymerization initiators may be used individually 'or in combination of two or more kinds. The amount of the photopolymerization initiator is a total of the present polycarboxylic acid resin and other adhesive polymers added when necessary. 〇OO mass parts are usually 3 mass parts or more and 60 mass parts or less, preferably 5 mass parts or more and 40 mass parts. It is more preferably 10 parts by mass or less and 30 parts by mass or less. The use of the photopolymerization initiator is more than 1 part to 60 parts by mass of J shell, the sensitivity will not be reduced, and this ‘Λ light! ± The photosensitive resin composition formed by the resin composition 314839 22 200403526 The strength of the layer also tends to be difficult to decrease, which is preferable. The photosensitive resin composition may also contain a bishuangba + σ Μ hair promoter. The photopolymerization initiation aid is used to promote the photopolymerization reaction. Examples of the photopolymerization initiation aid include triethanol ^ -Zizhi, fluorenyldiethanolamine, triisopropanolamine, 4-dimethylaminobenzoic acid methyl vinegar, * ethyl gallate, 4-dimethylaminobenzyl Isoamyl gallate

2-乙基己酯、苯甲酸2‘二曱胺基乙 基苯曱I 胺、4 4,-雔卜甲脸其、# Ν,Ν-二曱基對曱笨 女?又(一甲月女基)二苯曱酮(通稱A + &amp; 雙乙脸其h 〈、%為未希勒氏酮)、4,4、 又(一乙月女基)一本曱g同、9,ι〇_二 -帀¢1 i. T乳暴恩、2-乙基-9,10- 一曱乳基恩、9,10-二乙氧基茼、) 笙。兮笙丄1人 〜、/乙基-9,10_二乙氧基蔥 寺。该寺光聚合引發助劑可久 組合使用。使用該等来1: 獨使用’亦彳2種以上 ^ ^ ^引發助劑時,其使用量對於光 承。引發劑i莫耳通常在〇 技芏 旲耳以上1 0莫耳以下。2-ethylhexyl ester, benzoic acid 2 'diamidoethyl phenyl hydrazine I amine, 4 4,-雔 甲 甲 甲 其, # Ν, Ν- di 曱 phenyl peptone? And (a month (Feminine) benzophenone (commonly known as A + &amp; diacetone whose h <,% is non-Hilson's ketone), 4, 4, and (one ethyl ether female) a 曱 g with the same, 9, ι〇 _Di- 帀 ¢ 1 i. T-lactone, 2-ethyl-9,10-one-lactone, 9,10-diethoxy,) Sheng. Xi Sheng 丄 1 person ~, / ethyl-9,10_diethoxy onion temple. This photopolymerization initiation aid can be used in combination for a long time. Use these to 1: Use ’alone or more than two kinds of ^ ^ ^ When the initiator is used, the amount used is for light bearing. The initiator i Moore is usually above 0 moles and below 10 moles.

接者,對於[D]溶劑加以% 〇D #用之、、六卞丨 火明。本感效性樹脂組成物可 便用之各劑可列舉乙酸 曱_ Λ 1、乙酸正丁酯、乙酸異丁酯、 甲I戊S曰、乙酸異戊酯、 氐奸 丁 &amp; ^ ^異丁酯、丙酸丁酯、丁酸異 丙®曰、丁酸乙酯、丁酸 醋、經基乙酸甲雖n 酿類、乳酸&quot;旨、乳酸乙 λ 6 ^ ψ 工土乙酸乙酯、羥基乙酸丁酯、曱氧 基乙馱曱酯、曱氧基乙 乙酿甲_ 欠乙®曰、曱氧基乙酸丁酯、乙氧基 乙I曱S曰、乙氧基乙酸 ^ 7 Λ S曰、羥基丙酸甲酯、3-羥基丙 酉义乙1曰、3_甲氧基丙酸 其石狀® 曰 &gt; 曱氧基丙酸乙酯、3-乙氧 基丙酸曱酯、3-乙氧基丙 其石祕7 ^ ®夂乙s日、2-羥基丙酸甲酯、2-羥 基内酸乙酯、羥基丙 $其而於 ·夂丙S曰、h曱氧基丙酸曱酯、2-甲 乳基丙酸乙酯、2-甲氧 土丙S夂丙酯、2_乙氧基丙酸曱酯、 314839 23 200403526 2-乙氧基丙酸乙酯、2-羥基-2-曱基丙酸甲酯、2-羥基-2-曱 基丙酸乙酯、2-曱氧基-2-甲基丙酸甲酯、2-乙氧基-2·曱基Then, add% 〇D # to the [D] solvent, and then use it. Examples of the various agents that can be used in the sensitive resin composition include 曱 Λ Λ 1, n-butyl acetate, isobutyl acetate, methyl ethyl pentoxide, isoamyl acetate, glutamidine & ^ ^ iso Butyl ester, butyl propionate, isopropyl butyrate, ethyl butyrate, butyric acid, methyl acetate, n-lactic acid, lactic acid &quot; purpose, ethyl lactate λ 6 ^ ψ ethyl acetate, Butyl Glycolate, Ethoxy Acetyl Ethyl Acetate, Ethyl Ethyl Ethyl Ethyl Acetate_ Omega®, Ethyl Acetyl Acetate, Ethoxy Ethyl Acetate, Ethoxy Acetate ^ 7 Λ S Methyl Hydroxypropionate, 3-Hydroxypropanoic Acid Ethyl Acetate, 3-Methoxypropanoic Acid and Its Stone Shape ® Name> Ethyl Ethoxypropionate, Ethyl 3-Ethoxypropionate, 3-Ethoxypropoxylates 7 ^ acetone, methyl 2-hydroxypropionate, ethyl 2-hydroxypropionate, hydroxypropionate Ethyl Acetate, Ethyl 2-Methoxypropionate, 2-Methoxy Propionate, Ethyl 2-Ethoxypropionate, 314839 23 200403526 Ethyl 2-Ethoxypropionate, 2- Methyl hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, 2-methyloxy-2-methylpropionic acid Ester, 2-ethoxy -2-yl Yue

丙酸乙酯、丙酮酸曱酯、丙酮酸乙酯、丙酮酸丙酯、乙醯 乙酸甲酯、乙醯乙酸乙酯、2-羰基丁酸甲酯、2-羰基丁酸 乙酯、2-曱氧基丁基乙酸酯、3 -曱氧基丁基乙酸酯、4-甲 氧基丁基乙酸酯、2-甲基-3 -曱氧基丁基乙酸酯、3 -曱基- 3-甲氧基丁基乙酸酯、3 -乙基-3-曱氧基丁基乙酸酯、2-乙氧 基丁基乙酸酯、4-乙氧基丁基乙酸酯、4-丙氧基丁基乙酸 酯、2-曱氧基戊基乙酸酯、3 -曱氧基戊基乙酸酯、4-甲氧 基戊基乙酸酯、2-曱基-3-曱氧基戊基乙酸酯、3-曱基-3-曱氧基戊基乙酸酯、3-曱基-4-曱氧基戊基乙酸酯、4-甲基 -4-甲氧基戊基乙酸酯等酯類;二乙二醇二曱醚、四氫呋 喃、乙二醇單甲醚、乙二醇單乙醚、甲基溶纖素乙酸酯、 乙基溶纖素乙酸酯、二乙二醇單甲醚、二乙二醇單乙醚、 二乙二醇單丁醚、丙二醇曱醚乙酸酯、丙二醇乙醚乙酸 酯、丙二醇丙醚乙酸酯等醚類;曱基乙基甲酮、環己酮、 2-庚酮、3-庚酮等酮類;曱苯、二曱苯、三曱苯等芳族烴 類等。 較好可列舉3-乙氧基丙酸曱酯、3-乙氧基丙酸乙酯、 乙基溶纖素乙酸酯、3 -曱氧基丁基乙酸酯、乳酸乙酯、二 乙二醇二曱醚、乙酸丁酯、3 -曱氧基丙酸曱酯、2-庚酮、 環己酮、乙基卡必醇乙酸酯、丁基卡必醇乙-酸靡、丙二醇 曱醚乙酸酯等。 該等溶劑可各自單獨使用,亦可2種以混合使用。溶 24 314839 W之使用量對 度,於μ旦:本感光性樹脂組成物全體固體成分濃 %以上二百分率通常成為2%以上50%以下,較好在5 之使用量::下’更好在1〇%以上45%以下之量。溶劑 塗膜膜厚面内均二 在%以上50%以下’則有 ^ 句性變好之傾向而為佳。 用時,^才对月曰組成物作為*色感光性樹脂組成物使 本感光性樹脂組成物更可含有[Ε]顏料。顏料 顔枓,亦可為有機顏料。 無機顏料可兩丨# ν;ζϊ L a β 今戸 +例如孟屬氧化物、金屬配位化合物等 孟屬化合物。金屬可 Λ, 」Ν舉鐵、鈷、鋁、鎘、鉛、銅、鈦、 ’美、絡、鋒、綠楚 Μ 鄉寺。金屬氧化物、金屬配位化合物可為該 屬單獨氧化物、配位化合物,亦可為由2種以上該 寸金屬組成之複合氧化物、配位化合物。 有機顔抖可列舉根據顏色指標(Colour Index)[染料及 顏色協會f T1,θ c μ ·Ethyl propionate, ethyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl ethyl acetate, ethyl ethyl acetate, methyl 2-carbonylbutyrate, ethyl 2-carbonylbutyrate, 2- Ethoxybutyl acetate, 3-methoxybutyl acetate, 4-methoxybutyl acetate, 2-methyl-3-methoxybutyl acetate, 3 -fluorene 3-methoxybutyl acetate, 3-ethyl-3-methoxybutyl acetate, 2-ethoxybutyl acetate, 4-ethoxybutyl acetate , 4-propoxybutyl acetate, 2-methoxypentyl acetate, 3-methoxypentyl acetate, 4-methoxypentyl acetate, 2-fluorenyl- 3-Methoxypentylacetate, 3-Methoxy-3-Methoxypentylacetate, 3-Methoxy-4-Methoxypentylacetate, 4-Methyl-4- Esters such as methoxypentyl acetate; diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl lysin acetate, ethyl lysin Acid ester, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, propylene glycol ether ether acetate, propylene glycol ether acetate, propylene glycol propyl ether acetate, etc. Class; Yue-yl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone and other ketones; Yue benzene, diethyl benzene Yue, Yue three aromatic hydrocarbons such as benzene and the like. Preferable examples include ethyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl lysone acetate, 3-methoxybutyl acetate, ethyl lactate, and diethyl Glycol Dimethyl Ether, Butyl Acetate, 3-Methoxypropionate, 2-Heptanone, Cyclohexanone, Ethyl Carbitol Acetate, Butyl Carbitol Ethyl Acetate, Propylene Glycol Ether acetate and the like. These solvents may be used alone or in combination of two or more. The amount of solvent used is 24 314839 W, in μ denier: The solid content of the photosensitive resin composition as a whole is more than 2% and the percentage is usually 2% or more and 50% or less. The amount is 10% to 45%. The thickness of the solvent coating film is within the range of 2% or more and 50% or less', which is more likely to improve the sentence. When used, the composition is used as a color-sensitive photosensitive resin composition so that the photosensitive resin composition may further contain an [E] pigment. Pigment Yan Yan, can also be organic pigments. Inorganic pigments can be both # ν; ζ ϊ L a β 戸 戸 + For example, mongolian compounds such as monoxides and metal complexes. The metal can be Λ, ”N is iron, cobalt, aluminum, cadmium, lead, copper, titanium,‘ beauty, network, front, and green. The metal oxide and metal coordination compound may be a single oxide or coordination compound, or a composite oxide or coordination compound composed of two or more metals. Organic shakiness can be listed according to the Color Index [Dye and Color Association f T1, θ c μ ·

Clety 〇f Dyers and Colourists)出版]顏料 (Plgment)所分類之化合物。 、4等有機顏料可列舉例如C.I·顏料·黃色-1、C.I.顏 H汽色“3、C.1·顏料·黃色]2、C.I·顏料·黃色-13、C.I. 頭料、汽色-14、C.1·顏料·黃色-15、C.I.顏料·黃色-16、 = .Ι·顏料·黃色_17、C I•顏料·黃色_2〇、Cl顏料 黃色一 ^ CJ·顏料·黃色-31、C.I·顏料·黃色-55、C.I.顏料· 二色6〇、CJ·顏料·黃色、C.I·顏料·黃色-65、C.I.顏 ^ K色巧1、CJ.顏料.黃色-73、C.I·顏料.黃色-74、C.I. 』料汽色_8]、.C,1·顏料·黃色-83、C.I.顏料·黃色-93、 25 % 314S39 200403526Clety Of Dyers and Colourists) compounds classified as pigments. Examples of organic pigments such as CI and 4 include CI · Pigment · Yellow-1, CI Color · H vapor color "3, C.1 · Pigment · Yellow] 2, CI · Pigment · Yellow-13, CI Header, Steam Color-14 , C.1 · Pigment · Yellow-15, CI Pigment · Yellow-16, = .1 · Pigment · Yellow_17, CI · Pigment · Yellow_2, Cl Pigment Yellow ^ CJ · Pigment · Yellow-31, CI · Pigment · Yellow-55, CI Pigment · Two-colored 60, CJ · Pigment · Yellow, CI · Pigment · Yellow-65, CI Yan ^ K color Q1, CJ.Pigment. Yellow-73, CI · Pigment. Yellow-74, CI 『Material Steam Color_8], .C, 1 · Pigment · Yellow-83, CI Pigment · Yellow-93, 25% 314S39 200403526

〇.1.顏料,黃色-95、0:.1.顏料.黃色-97、(:.1.顏料.黃色-98、C.I.顏料·黃色-100、C.I.顏料·黃色-101、C.I·顏料· 黃色-104、C.I.顏料·黃色-106、C.I.顏料·黃色-108、C.I. 顏料·黃色-1 0 9、C. I.顏料·黃色-1 1 0、C. I ·顏料·黃色-1 1 3、 C. I ·顏料·黃色-1 1 4、C · I ·顏料·黃色-1 1 6、C · I ·顏料·黃 色-1 17、C.I.顏料·黃色-1 19、C.I·顏料·黃色-120、C.I. 顏料·黃色-126、C.I·顏料·黃色-127、C.I·顏料·黃色-128、 C.I.顏料·黃色-129、C.I·顏料·黃色-138、C.I·顏料·黃 色-139、C.I·顏料·黃色-150、C.I.顏料·黃色-151、C.I. 顏料·黃色-152、C.I·顏料·黃色-153、C.I.顏料.黃色-154、 C.L顏料·黃色-155、C.I·顏料·黃色-156、C.I.顏料·黃 色-166、C.I.顏料·黃色-168、C.I.顏料·黃色-175等黃色 有機顏料, C.I.顏料·橙色1、C.I.顏料·橙色5、C.I.顏料·橙色13、 C.I.顏料·橙色14、C.I·顏料·橙色16、C.I.顏料·橙色17、 C.I.顏料·橙色24、C.I.顏料·橙色34、C.I.顏料·橙色36、 C.I.顏料·橙色38、C.I.顏料·橙色40、C.I.顏料·橙色43、 C.I.顏料·橙色46、C.I.顏料·橙色49、C.I.顏料·橙色51、 C.I.顏料·橙色61、C.I.顏料·橙色63、C.I.顏料·橙色64、 C.I.顏料·橙色71、C.I.顏料·橙色73等橙色有機顏料, C.I·顏料·紫色1、C.I.顏料·紫色19、C.I.顏料.紫色23、 C.I.顏料·紫色29、C.I·顏料·紫色32、C.I·顏料·紫色36、 C.I.顏料·紫色38等紫色有機顏料, C.I.顏料·红色1、C.I.顏料·紅色2、C.I.顏料·紅色3、 26 314839 200403526 C.I.顏料.紅色4、C.I.顏料·紅色5、C.I.顏剩 C.I.顏料·紅色7、C.I.顏料·紅色8、C.I.顏料 C.I.顏料·紅色10、C.I.顏料·紅色1卜C.I.顏料 C.I.顏料·紅色14、C.I.顏料·紅色15、C.I·顏料 C.I.顏料·紅色17、C.I.顏料·紅色18、C.I.顏料 C.I.顏料·紅色21、C.I.顏料·紅色22、C.I.顏料 C.I.顏料·紅色30、C.I.顏料·紅色3卜C.I.顏料 C.I.顏料·紅色37、C.I.顏料·紅色38、C.I.顏料 C.I.顏料·紅色4卜C.I.顏料·紅色42、C.I.顏料 1、C.I.顏料·紅色48 : 2、C.I.顏料·紅色48 料·紅色48 : 4、C.I.顏料·紅色49 : 1、C.I· 49 : 2、C.I.顏料·紅色50 : 1、C.I.顏料·紅色 顏料·紅色53 ·· 1、C.I.顏料·紅色57、C丄顏料 1、C.I.顏料·紅色58 : 2、C.I·顏料·紅色58 料·红色60 : 1、C.I.顏料.紅色63:1、(:.1· 6 3 : 2、C. I ·顏料·紅色6 4 : 1、C · I ·顏料·紅色 顏料·紅色83、C.I.顏料·紅色88、C.I.顏料· h C.I.顏料·紅色97、C.I.顏料·紅色101、C.I. 102、C.I.顏料·紅色104、C.I.顏料·紅色105、 紅色106、C.I.顏料·紅色108、C.I.顏料·紅g 顏料·紅色113、C.I.顏料·紅色114、C.I.顏料· C.I.顏料·紅色123、C.I.顏料·紅色144、C.I. 1 4 6、C · I.顏料.紅色1 4 9、C. I.顏料·紅色1 5 0、 紅色1 5 1、C · I.顏料·紅色1 6 6、C. I ·顏料·红g •紅色 6、 -·紅色9、 •紅色1 2、 •紅色1 6、 •紅色1 9、 •紅色23、 •紅色32、 •紅色40、 •紅色48 ·· :3、C.I.顏 顏料·紅色 52 : 1、C.I. •紅色5 7 : :4、C.I.顏 顏料·紅色 81:1、C.I. 已色90 : 1、 顏料·紅色 C. I.顏料· ^ 1 12、C.I· 紅色122、 顏料·紅色 C.I.顏料· L ] 68、C.I. 27 314839 200403526 顏料·紅色170、C.I.顏料·紅色17:l、C.I.顏料·紅色172、 C.I.顏料·紅色174、C.I.顏料·紅色175、C.I.顏料·紅色 176、C.I.顏料·紅色177、C.I.顏料·紅色178、C.I.顏料· 紅色179、C.I.顏料·紅色180、C.I.顏料·紅色185、C.I. 顏料·紅色187、C.I.顏料·紅色188、C.I.顏料·紅色190、 C.I.顏料·紅色193、C.I·顏料·紅色194、C.I.顏料·紅色 202、C.I.顏料·紅色206、C.I·顏料·紅色207、C.I.顏料· φ 紅色208、C.I.顏料·紅色209、C.I.顏料·紅色215、C.I. 顏料·紅色216、C.I.顏料·紅色220、C.I.顏料·紅色224、 C.I.顏料·紅色226、C.I.顏料·紅色242、C.I.顏料·紅色 &quot; 243、C.I,顏料·紅色245、C丄顏料·紅色254、C.I.顏料· - 紅色255、C.I.顏料·紅色264、C.I.顏料·紅色265等紅 色有機顏料、 C丄顏料·藍色15、C.I.顏料·藍色15 : 3、C.I.顏料·藍 色15 : 4、C.I.顏料·藍色15 : 6、C.I.顏料·藍色60等藍 φ 色有機顏料、 C.I.顏料·綠色7、C.I.顏料·綠色36等綠色有機顏料、 C.I·顏料·棕色23、C.I·顏料·棕色25等棕色有機顏料、 C.I.顏料·黑色1、C.I·顏料·黑色7等黑色有機顏料。 該等有機顏料對應目的之晝素顏色可各自單獨使用, 亦可2種以上組合使用。 -該等有機顏料中理想之有機顏料,黃色有機顏料可列 舉例如C.I.顏料.黃色-117、C.I.顏料·黃色-128、C.I.顏 料·黃色-129、C.I.顏料·黃色- ]38、C.I.顏料·黃色-150、 28 3)4839 C ·1 ·顏料·黃色-1 5 5, 紅色有機顏料可列舉 1 7 8、C. I ·顏料·紅色 紅色254等、 CJ·顏料·黃色-185等、 C·1·顏料·紅色166、C.I·顏料·紅色 209、c.i·顏料·紅色242、C I•顏料· 黑色有機顏料可列舉c 箄,爭# # 丄顏枓·黑色1、C.I.顏料·黑色7 寺,更理想之有機顏〇.1. Pigment, Yellow-95, 0: .1. Pigment. Yellow-97, (: .1. Pigment. Yellow-98, CI Pigment · Yellow-100, CI Pigment · Yellow-101, CI · Pigment · Yellow-104, CI Pigment · Yellow-106, CI Pigment · Yellow-108, CI Pigment · Yellow-1 0 9, CI Pigment · Yellow-1 1 0, C.I · Pigment · Yellow-1 1 3, C. I · Pigment · Yellow-1 1 4, C · I · Pigment · Yellow-1 1 6, C · I · Pigment · Yellow-1 17, CI Pigment · Yellow-1 19, CI · Pigment · Yellow-120, CI Pigment · Yellow-126, CI · Pigment · Yellow-127, CI · Pigment · Yellow-128, CI Pigment · Yellow-129, CI · Pigment · Yellow-138, CI · Pigment · Yellow-139, CI · Pigment · Yellow -150, CI Pigment · Yellow 151, CI Pigment · Yellow-152, CI · Pigment · Yellow-153, CI Pigment. Yellow-154, CL Pigment · Yellow-155, CI · Pigment · Yellow-156, CI Pigment · Yellow-166, CI Pigment · Yellow-168, CI Pigment · Yellow-175 and other yellow organic pigments, CI Pigment · Orange 1, CI Pigment · Orange 5, CI Pigment · Orange 13, CI Pigment · Orange 14, CI · Pigment · Orange 16, CI pigment Orange 17, CI pigments Orange 24, CI pigments Orange 34, CI pigments Orange 36, CI pigments Orange 38, CI pigments Orange 40, CI pigments Orange 43, CI pigments Orange 46, CI pigments Orange 49. CI pigment · orange 51, CI pigment · orange 61, CI pigment · orange 63, CI pigment · orange 64, CI pigment · orange 71, CI pigment · orange 73 and other orange organic pigments, CI · pigment · purple 1, CI Pigment · Purple 19, CI Pigment. Purple 23, CI Pigment · Purple 29, CI · Pigment · Purple 32, CI · Pigment · Purple 36, CI Pigment · Purple 38 and other purple organic pigments, CI Pigment · Red 1, CI Pigment · Red 2, CI Pigment · Red 3, 26 314839 200403526 CI Pigment. Red 4, CI Pigment · Red 5, CI Pigment CI Pigment · Red 7, CI Pigment · Red 8, CI Pigment CI Pigment · Red 10, CI Pigment · Red 1 CI Pigment CI Pigment Red 14, CI Pigment Red 15, CI Pigment CI Pigment Red 17, CI Pigment Red 18, CI Pigment CI Pigment Red 21, CI Pigment Red 22, CI Pigment CI Pigment · Red 30, CI Materials: Red 3 CI Pigment CI Pigment Red 37, CI Pigment Red 38, CI Pigment CI Pigment Red 4 CI Pigment Red 42, CI Pigment 1, CI Pigment Red 48: 2, CI Pigment Red 48 Red 48: 4, CI Pigment Red 49: 1, CI 49: 2, CI Pigment Red 50: 1, CI Pigment Red Pigment Red 53 ... CI Pigment Red 57 C Pigment 1. CI Pigment · Red 58: 2, CI · Pigment · Red 58 Material · Red 60: 1, CI Pigment. Red 63: 1, (: .1 · 6 3: 2, C.I · Pigment · Red 6 4 : 1, C · I · Pigment · Red Pigment · Red 83, CI Pigment · Red 88, CI Pigment · h CI Pigment · Red 97, CI Pigment · Red 101, CI 102, CI Pigment · Red 104, CI Pigment · Red 105, Red 106, CI Pigment · Red 108, CI Pigment · Red G Pigment · Red 113, CI Pigment · Red 114, CI Pigment · CI Pigment · Red 123, CI Pigment · Red 144, CI 1 4 6, C · I .Pigment. Red 1 4 9, CI Pigment · Red 1 50, Red 1 5 1, C · I. Pigment · Red 1 6 6, C. I · Pigment · Red g · Red 6 -· Red 9, • Red 1 2, • Red 1 6, • Red 1 9, • Red 23, • Red 32, • Red 40, • Red 48 · ·: 3, CI pigments · Red 52: 1, CI • Red 5 7:: 4, CI pigments, red 81: 1, CI colored 90: 1, pigments, red CI pigments, ^ 1 12, CI, red 122, pigments, red CI pigments, L] 68, CI 27 314839 200403526 Pigment · Red 170, CI Pigment · Red 17: l, CI Pigment · Red 172, CI Pigment · Red 174, CI Pigment · Red 175, CI Pigment · Red 176, CI Pigment · Red 177, CI Pigment · Red 178, CI Pigment · Red 179, CI Pigment · Red 180, CI Pigment · Red 185, CI Pigment · Red 187, CI Pigment · Red 188, CI Pigment · Red 190, CI Pigment · Red 193, CI · Pigment · Red 194 , CI Pigment · Red 202, CI Pigment · Red 206, CI · Pigment · Red 207, CI Pigment · φ Red 208, CI Pigment · Red 209, CI Pigment · Red 215, CI Pigment · Red 216, CI Pigment · Red 220 , CI Pigment · Red 224, CI Pigment · Red 226, CI Pigment · Red 242, CI Pigment · Red &quot; 243, CI, Pigment · Red 245, C 丄 Pigment · Red 254, CI Pigment ·-Red 255, CI Pigment · Red 264, CI Pigment · Red 265 and other red organic pigments, C 丄 Pigment · Blue 15, CI Pigment · Blue 15: 3, CI Pigment · Blue 15: 4, CI Pigment · Blue 15: 6, CI Pigment · Blue 60 and other blue φ organic pigments, CI pigment Green organic pigments such as green 7, CI pigments, green 36, CI pigments, brown organic pigments such as brown 23, CI pigments, and brown 25, CI organic pigments, black organic pigments such as black 1, CI, pigments, and black 7. These organic pigments can be used individually or in combination of two or more kinds of daytime pigments corresponding to the purpose. -Ideal organic pigment among these organic pigments, and examples of the yellow organic pigment include CI pigment. Yellow-117, CI Pigment · Yellow-128, CI Pigment · Yellow-129, CI Pigment · Yellow-] 38, CI Pigment · Yellow -150, 28 3) 4839 C · 1 · Pigment · Yellow-1 5 5, Red organic pigments include 178, C.I · Pigment · Red-Red 254, etc., CJ · Pigment · Yellow-185, etc., C · 1 · Pigment · Red 166, CI · Pigment · Red 209, Ci · Pigment · Red 242, CI · Pigment · Black organic pigments can be listed c 箄 , 争 # # 丄 颜 枓 · Black 1, CI Pigment · Black 7 Temple, More ideal organic look

^ 列舉 C.I.顏料·黃色·150、C.L 顏枓·紅色254、c I結# .τ ,, , ·$、抖·黑色1、C.I·顏料·黑色7等。 所使用^造黑色基材所使用之著色感光性樹脂組成物中 用之…色顏料可列舉例如碳黑'石 ιι〇9 號公報、特開平6-116η % , fe ^ 〇 〇 5虎么報等)、偶氮系黑色色素(特 開干2-216102號公報等)耸, 寺)寻亦可使用上述C.I·顏料·黑 、C.I.顏料·堃奔7莖 ^ …、巳7寺之黑色有機顏料等。 5亥專黑色顏料亦可伸用 』使用以如4寸開平9-95625號公報、 夺寸開平9-124969號 ^ 報4寸開平20〇1-1 06938號所揭示之 3、曰匕覆之碳黑。亦可传用 使用如4寸開2〇〇卜1 15043號公報 i示之無機物包覆之黑色顏料。 所使用顏料之平均粒徑通常在〇爪以上〇 以下’較好在0.01//m以上〇.1/Zm / 4 e m以下。顏料之平均粒 工右在〇·〇1 # m以上〇」 β丨士人w 1上 k + 卜之靶圍,則於形成濾色 4有可獲得高透過率之傾向, ,^ 入在者色感光性樹脂組 成物中有顏料粒子變成容易分散之傾向而為佳。 々該等粒徑之顏料可經由例如捏和法、硫酸法、鹼還原 溶解法等通常之方法微粒化獲得。顏夕 t ^ m料之表面亦可經由樹 月曰等改性(特開平8-259876號公報等)。 314839 29 200403526 本感光性樹脂組成物為著色感光性樹脂組成物時,顏 使用里對於著色感光性樹脂組成物之固體成分(去除 ^ ^之成分合汁)之質量百分率,通常在20質量%以上60 貝里义以下,較好在25質量%以上Μ質量%以下,更好 在30質量%以上5〇質量%以下。顏料之使用量於上述之 基準若在20質量%以上6〇質量%以下,則可形成目的之 黑色基材或畫素而為佳。 於本發明,上述黏合樹脂/乙烯性不飽和化合物之質量 比以在1.5以上、5以下較佳。更好之質量比在2以上'4 以下。^ C.I.Pigment · Yellow · 150, C.L Yan 枓 · Red 254, c I knot # .τ,,, $, Shake · Black 1, C.I · Pigment · Black 7 and so on. The color pigments used in the coloring photosensitive resin composition used for the black substrate used include, for example, carbon black 'stone lite 09, Japanese Patent Application Laid-Open No. 6-116η%, and fe ^ 〇〇〇〇5 Etc.), azo-based black pigments (Japanese Laid-Open Patent Publication No. 2-216102, etc.), temples) can also use the above-mentioned CI · Pigment · Black, CI Pigment · 堃 Ben 7 stems ^ ..., Black 7 Temple Black Organic Pigments, etc. The black pigment can also be used. "Use such as the 4-inch Kaiping 9-95625, the inch-opening Kaiping 9-124969 ^ reported in the 4-inch Kaiping 20〇1-1 06938 3, Carbon black. It is also possible to use black pigments coated with inorganic materials as shown in 4 inch 2000b 1 15043i. The average particle diameter of the pigment used is usually not less than 0 claws and not more than 0.01 '// m and not more than 0.1 / Zm / 4 e m. The average particle size of the pigment is above 〇〇〇1 # m 〇 ″ β 丨 the target range of k + Bu on the scholar w 1, then the formation of the color filter 4 has a tendency to obtain high transmittance, It is preferable that the pigment particles in the color photosensitive resin composition tend to be easily dispersed. 々 Pigments of these particle sizes can be obtained by micronization by a common method such as a kneading method, a sulfuric acid method, and an alkali reduction dissolution method. The surface of the material of Yan Xi t ^ m can also be modified by Shu Yueyue and others (Japanese Unexamined Patent Publication No. 8-259876, etc.). 314839 29 200403526 When the photosensitive resin composition is a coloring photosensitive resin composition, the mass percentage of the solid content of the coloring photosensitive resin composition (the component juice excluding the ^ ^) in the pigment is usually 20% by mass or more. 60 Berry meaning or less, preferably 25 mass% or more and M mass% or less, and more preferably 30 mass% or more and 50 mass% or less. If the amount of pigment used is above the above-mentioned reference, it is preferable that the intended black substrate or pixel can be formed if the amount is 20% by mass or more and 60% by mass or less. In the present invention, the mass ratio of the above-mentioned adhesive resin / ethylenically unsaturated compound is preferably 1.5 or more and 5 or less. Better quality ratio is 2 or more and 4 or less.

另外,於製造或保存感光性樹脂組成物時,為了阻止 :::不飽和化合物不需要之熱聚合,可添加少量之抗熱 =〇刈。適當之抗熱聚合劑可列舉鹵代醌、對-甲氧基苯 酚、二-第三-丁基_對_曱酚、焦掊酚 '第三_丁基鄰苯二^、 =笨醒、4,4’-硫代雙(3·甲基冬第三_丁基苯齡)、2,2入甲撐 人(甲基6_第二-丁基苯酚)、Ν-亞硝羥胺亞鈽鹽等。熱聚 〇防止劑之添加量對於全組成物之質量以旦 %較佳。 芏 &gt; 貝篁 本感光性樹脂組成物必要時可配合各種 填:劑、…”卜之高分子化合物、界面活性劑、促:: 者J、抗乳化劑、紫外線吸收劑、抗凝聚劑等。 該等添 聚乙稀乙醇 酸酯等黏合 加物之具體例可列舉玻璃、氧化鋁等填充劑; 、聚丙烤酸、$乙二醇單垸_、聚氯燒基丙歸 ♦合物(A)以外之南分子化合物; 314839 30 200403526 非離子系、陽離子系、陰離子系等界面活性劑;乙烯基二 甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基三(2•甲氧基乙 氧基)矽烷、N-(2-胺基乙基)_3_胺基丙基甲基二曱矽 烷、N♦胺基乙基)冬胺基丙基三甲氧基錢、^胺基丙 基三乙氧基矽烷、3_環氧丙氧基丙基三曱氧基矽烷H 氧丙氧基丙基曱基二甲氧基石夕烧、2_(3,4-環氧基環己幻 乙基三甲氧基石夕院、3_氯丙基甲基二甲 :三甲氧基钱、3-甲基丙稀氧基丙基三甲氧基钱= -基广基二甲氧基矽烷等促進黏著劑;2,2_硫代雙(&quot;基 i第三-丁基笨酚)、2,6_二叔丁基苯酚等氧化防止劑。二 :又丁基-5-甲基-2-經基苯基氯苯并三。坐、院氧基二苯甲 -同寺紫外線吸收劑:聚丙烯酸鈉等抗凝聚劑。 本感光性树脂組成物介 攻物亦可含有羧酸,較好為分子量在 1000以下之低分子量發 .θ ^ 酸馱或分子中具有1個以上胺基之分 子夏在1000以下之有機胺化合物。 缓酸具體而言可列舉例如甲酸、乙酸 戊酸、三甲基乙酸、己 肪族單叛酸4酸、丙:二二:基乙酸、庚酸、辛酸等脂 庚二酸、辛二I壬二广琥站酸、戍二酸、己二酸、 丙二酸、乙基丙二酸、i癸一酸、十一烷二羧酸'甲基 基號料、檸康酸基丙二酸、f基㈣酸、四甲 樟腦三酸等脂肪族心^二幾酸;6三叛酸、烏頭酸、 曱基苯基酸、二曱:r;s:笨曱酸、曱苯酸、枯茗酸、二 笨二甲酸、對苯Ή芳族單㈣;苯二甲酸、異 &quot; 偏笨三曱酸、均苯三曱酸、偏苯 314839 31 200403526 四曱酸、均苯四甲酸等关 方無|羧酸;苯基乙酸、氫化阿托 酉欠、氫化肉桂酸、苦杏 ^ 1一 ^、笨基琥珀酸、阿托酸、肉桂 酸、肉桂酸曱酯、肉桂酸 _ ^ -夂下®曰、肉桂叉乙酸、香豆酸、二 规基肉桂酸等其他羧酸。 有機胺化合物可列皇 I μ — 例如正丙胺、異丙胺、正丁胺、 』月女、弟一 -丁胺、蜜二 胺丁胺、正戊胺、正己胺、正庚 止T月女、正壬脫、《Γ % 等單烷Ar^g 夭胺、正十一烷胺、正十二烷胺 ’早況基fe類;環p 4基環己胺、二:二甲基環己基環 胺等單環垸基胺類二乙胺、3_乙基環己胺、4_乙基環己 基正丙胺、二正丙胺、二乙胺、甲基正丙胺、乙 二第二丁胺、二第:_ —:心、二正丁胺、二異丁胺、 基胺類;曱基環己胺:乙::;二正戍胺、二正己胺等二烧 二環己胺等“胺寺早烷基單環烷基胺類; 乙胺、二曱美^ T基乙胺 '甲基二乙胺、三 基二正丙胺、三正丙胺、1 Η基-正丙胺、乙 三第二-丁胺、三从:二;、丙胺 '三正丁胺、三異丁胺、 基胺類;二曱美/ 丁月女、三正戊胺、三正己胺等三烷 脸4S 辰己月女、—乙基環己胺等二惊其董:Ά 月女類·,甲基二環己脍7 ^ 烷基早^烷基 類;三環己胺尊:》 ―每己胺等單燒基二環燒基胺 醇、r胺基-…、“二 醇、3_胺基]-丙 鞍基、1 P 心^基·^ 丁醇、胺基·1-戊醇, _ · 凡醇胺類;心胺基…卜環己醇箄輩严卜 1,二乙醇胺、-τ工^ 醉寺早%烷醇胺 -田丁 —正丙醇胺、二異丙醇胺、_ Π:丁 ^ 〜兴丁醇胺、二i, 一正丁酉手胺、 戍醇胺、二正己醇胺等二院醇胺類;二 314839 32 200403526 (4-環己醇)胺等二環垸醇胺類;三 — 三異丙醇胺、三正丁醇胺、/田 女二正丙醇胺、 ~兴丁醇胺、:、 &gt; 正己醇胺等三烷醇胺類;三 ^ ~戊醇胺、三 類;3-胺基十2_丙二醇、其衣己醇)胺等三環烷醇胺 丁二醇、4_胺基_!.3_ 丁 土十3-丙二酉享、4-胺基-U2- 二乙胺基一醇、二基Μ丙二醇、3_ 基-U·丙二醇等胺基鏈烧-醇二:3·丙二醇、2-二乙胺 醇、心胺…環己烧二醇等胺基環二基;… 環戊烧甲醇、4-胺基環戍烧甲醇等含有兀=類^胺基 類胺基環己烧甲醇、4·胺基環之環鏈烧甲醇 严rV Ρ田W 兀甲S子、4-二甲胺基 = '甲·、4_二乙胺基環戍燒甲醇、心二甲胺基… 甲H乙胺基環己烧甲醇等含有胺基之環鏈烧甲醇 類’ f丙胺酸、2-胺基丁酸、3_胺基丁酸、心胺基丁酸、 2-胺基異乙酸、3-胺基異乙酸、2_胺基戊酸、5,基戊酸、 6-胺基己酸、!-胺基環丙烷羧酸、r胺基環己烷羧酸、‘ 胺基環己烷羧酸等胺基羧酸類;苯胺、鄰-甲基苯胺、間-甲基笨胺、對1基苯胺、對_乙基苯胺、對-正丙基苯胺、 對-異丙基苯胺、對-正丁基笨胺、對-第三-丁基苯胺、^ 奈胺、2-萘胺、N,N-二甲基苯胺' N,N-二乙基苯胺、對-甲基-N,N-二甲基苯胺等芳族胺類;鄰-胺基节醇、間-胺基 〒醇、對-胺基T醇、對-二甲胺基〒醇、對-二乙胺基〒醇 荨fe基卞醇類,鄰-胺基苯g分、間-胺基苯g分、對-胺基苯g分、 對-二甲胺基笨酚、對-二乙胺基苯酚等胺基笨酚類;間-胺 基苯甲酸、對-胺基苯甲酸、對-二甲胺基苯甲酸、對-二乙 314839 200403526 胺基苯曱酸等胺基苯曱酸類等。 於本發明,羧酸、有機胺化合物可單獨使用,亦可$ 種以上混合使用。於本感光性樹脂組成物,羧酸、有機胺2 化合物之使用量各自通常對於組成物全體為〇 〇〇ι至u質 !%,較好為組成物全體之〇 〇1至1〇質量%。 、In addition, when manufacturing or preserving the photosensitive resin composition, in order to prevent the unnecessary thermal polymerization of ::: unsaturated compounds, a small amount of heat resistance = 〇 刈 can be added. Examples of suitable heat-resistant polymerization agents include haloquinone, p-methoxyphenol, di-third-butyl-p-phenol, pyrogenol 'third-butyl-phthalate ^, 4,4'-thiobis (3 · methyl winter tertiary-butylbenzene age), 2,2 into methylen (methyl 6-second-butylphenol), N-nitrosamine hydroxylamine Salt, etc. The addition amount of the thermal polymerization preventive agent is preferably 1% by weight based on the mass of the entire composition.芏 &gt; This photosensitive resin composition can be compounded with various fillers if necessary: ..., polymer compounds, surfactants, promoters, etc .: J, anti-emulsifier, ultraviolet absorber, anti-coagulant, etc. Specific examples of such adhesive additives such as polyethylene glycolate include fillers such as glass and alumina; polypropylene baking acid, $ ethylene glycol monofluorene, and polyvinyl chloride-based propionate compounds ( A) South molecular compounds other than; 314839 30 200403526 non-ionic, cationic, anionic surfactants; vinyldimethoxysilane, vinyltriethoxysilane, vinyltri (2 • methoxy Ethoxy) silane, N- (2-aminoethyl) _3-aminopropylmethyldihydrazine, Naminoamino) Dongaminopropyltrimethoxy, ^ aminopropyl Triethoxysilane, 3-glycidoxypropyltrimethoxysilane H-oxypropoxypropylfluorenyldimethoxylithium, 2- (3,4-epoxycyclohexylethyl Trimethoxy Shixuyuan, 3-chloropropylmethyldimethyl: trimethoxychan, 3-methylpropoxypropyltrimethoxychan = -yl-based dimethoxy Adhesion promoters such as alkane; 2,2_thiobis (&quot; yl i tertiary-butyl phenol), 2,6_di-tert-butylphenol and other oxidation inhibitors. Di: Butyl-5-methyl Benzyl-2-Cyclophenylchlorobenzotriazine. Sulfuric Acid Dibenzo-Tongsi Ultraviolet Absorber: Anti-agglomerating agent such as sodium polyacrylate. The intermediate of this photosensitive resin composition may also contain carboxylic acid It is preferably a low-molecular-weight hair having a molecular weight of less than 1,000. Θ ^ An acid or an organic amine compound having a molecular weight of at least one amine group in the molecule of less than 1,000. Specific examples of the slow acid include formic acid and valeric acid acetate. , Trimethylacetic acid, hexamellitic monomonocarboxylic acid 4 acid, propylene: bis: diacetic acid, heptanoic acid, caprylic acid and other pimelic acid, suberyl I azelaic acid, adipic acid, adipic acid , Malonic acid, ethylmalonic acid, i-decanedioic acid, undecanedicarboxylic acid 'methyl-based materials, citraconic acid malonic acid, f-based gallic acid, tetramethylcamphoric acid, etc. Cardiac dipicnic acid; 6 trimellitic acid, aconitic acid, fluorenyl phenyl acid, difluorene: r; s: benzoic acid, benzoic acid, cumic acid, dibenzyl dicarboxylic acid, p-phenylhydrazone aromatic mono ㈣; phthalic acid, iso & quo t; Metabolic acid, trimesic acid, trimesic acid 314839 31 200403526 Tetracarboxylic acid, pyromellitic acid and other related formula | carboxylic acids; phenylacetic acid, hydrogenated atropine, hydrogenated cinnamic acid, bitter Apricot ^ 1- ^, benzyl succinic acid, atropic acid, cinnamic acid, cinnamic acid cinnamate, cinnamic acid ^-His Majesty®, cinnamic acid, coumaric acid, diregular cinnamic acid and other carboxylic acids Organic amine compounds can be listed as I μ — for example, n-propylamine, isopropylamine, n-butylamine, 月 monthly female, di-butylamine, melamine, butylamine, n-pentylamine, n-hexylamine, and n-heptyl , N-nonyl, Γ% and other monoalkanes Ar ^ g ammonium amine, n-undecylamine, n-dodecylamine 'early base fe class; cyclop 4 group cyclohexylamine, di: dimethylcyclohexyl Monoethylamines such as cyclic amines, diethylamine, 3-ethylcyclohexylamine, 4-ethylcyclohexyl-n-propylamine, di-n-propylamine, diethylamine, methyl-n-propylamine, ethylenedibutylamine, Second: _ —: Heart, di-n-butylamine, diisobutylamine, amines; fluorenylcyclohexylamine: B ::; diamines such as di-n-fluorenamine, di-n-hexylamine, and other "amines" Temple early alkyl monocycloalkylamines; Amine, diamyl ^ T-ethylamine 'methyldiethylamine, triyldi-n-propylamine, tri-n-propylamine, 1 fluorenyl-n-propylamine, ethylene tri-n-butylamine, three from: di; propylamine' Tri-n-butylamine, tri-isobutylamine, base amines; diamidine / trinylamine, tri-n-pentylamine, tri-n-hexylamine and other triane faces : Ά 月 女 类 ·, methyl dicyclohexyl 7 ^ alkyl early ^ alkyl; tricyclohexylamine: "― monohexyl dicyclohexylamine alcohol, ramino group per ... , "Diol, 3-amino] -propanyl, 1 P oxo, ^ butanol, amine · 1-pentanol, _ · pentanol amines; cardioamine ... Yan Bu 1, diethanolamine, -τ 工 ^ drunk temple early alkanolamine-Tianding-n-propanolamine, diisopropanolamine, _ Π: butyl ^ ~ Xingbutanolamine, di-i, butane Diamines such as chiral amines, fluorenol amines, and di-n-hexanol amines; di314839 32 200403526 (4-cyclohexanol) amines, and other dicyclofluorenol amines; tris-triisopropanolamine, tri-n-butanol Amines, / n-di-n-propanolamine, ~ x-butanolamine,:, &gt; trialkanolamines such as n-hexanolamine; tri ^ ~ pentanol Amines, three types; 3-aminodeca-2-propanediol, its hexanol) amines such as tricycloalkanolamine butanediol, 4-amido _ !. 3_ butyl earth ten 3-propanediol, 4- Amine-U2-diethylamino monool, di-M-propylene glycol, 3-yl-U · propylene glycol, and other amine chain burners-alcohols: 3 · propylene glycol, 2-diethylamine alcohols, cardioamines, etc. Amino ring diyl groups such as alcohols; ... cyclopentane methanol, 4-amino cyclopentane methanol, etc. containing amines such as amines, amines, cyclohexane, and methanol.普 田 W 甲 甲子 子, 4-dimethylamino group = 'methyl ·, 4-diethylamino cyclopentane methanol, cardiodimethylamine ... methyl H ethylamino cyclohexane methanol, etc. Cyclic chain burning methanol'f alanine, 2-aminobutyric acid, 3-aminobutyric acid, cardiac aminobutyric acid, 2-aminoisoacetic acid, 3-aminoisoacetic acid, 2-aminovaleric acid , 5, valeric acid, 6-aminocaproic acid ,! -Aminocyclopropanecarboxylic acid, raminocyclohexanecarboxylic acid, 'aminocyclohexanecarboxylic acid' and other amine carboxylic acids; aniline, o-methylaniline, m-methylbenzylamine, p-1-aniline , P-ethylaniline, p-n-propylaniline, p-isopropylaniline, p-n-butylbenzylamine, p-tertiary-butylaniline, neilamine, 2-naphthylamine, N, N -Dimethylaniline 'N, N-diethylaniline, p-methyl-N, N-dimethylaniline and other aromatic amines; o-aminobenzyl alcohol, m-aminobenzyl alcohol, p- Amino T-alcohol, p-dimethylaminomethanol, p-diethylaminomethanol, uranyl alcohol, o-aminobenzene g, m-aminobenzene g, p-aminobenzene g points, amino-benzyl phenols such as p-dimethylaminobenzylphenol, p-diethylaminophenol; m-aminobenzoic acid, p-aminobenzoic acid, p-dimethylaminobenzoic acid, p -Diethyl 314839 200403526 Aminobenzoic acid and the like. In the present invention, the carboxylic acid and the organic amine compound may be used alone, or more than one kind may be used in combination. In the present photosensitive resin composition, the respective amounts of the carboxylic acid and the organic amine 2 compound are generally from 0.001 to 100% by mass, and preferably from 0.001 to 10% by mass of the entire composition. . ,

將本感光性樹脂組成物經由旋轉塗抹、流塑塗抹、滚 筒塗抹等塗抹方法塗抹於基板,㉟由乾燥形成源自感光性 :脂組成物之層,#由所定之遮罩模型曝光,用顯像液顯 形成拉型。本感光性樹脂組成物含有顏 感光性樹脂組成物,形成著色模型(遽色板?)。曝= 使用之放射線較好使用,線、h線、i線等紫外線:抹 厚度為乾燥後之膜厚通常為……m,較好為02至 m,更好為 0.2 至 3.0# m。 光性樹脂組成物為著色感光性樹脂組成物時,在 板:所使用之基板可列舉例如破璃、二氧化, 兮耸其# # # 、來胺、聚醯胺亞胺、聚醯亞胺等。 忒寺基板根據所期望,亦 藥品處理、等離子卢搜 縣經有機矽烷偶合劑等 蒸鍍等適當之前處理。 虱相反應法 顯像液只要可溶解本 光部之液體即可使用。且體d:..且成物1會溶解曝 合或驗性水溶液。有機可使用各種有機溶劑之組 成物B夸戶斤4用 龙岭刮可列舉於調製本感光性樹脂組 战物B寸所使用之上述溶劑。 可列舉例如將氣氣 ^ 辽虱化鈉、虱氧化鉀、碳酸鈉、矽酸鈉、 314839 200403526 T基矽酸鈉、氨水、乙胺、二 ^ 一曱基乙醇胺、羥化 四曱錢、羥化四乙胺、膽鹼、吡 比仑 虱吡啶、1,8-二錡 雜二環侧-…碳稀等驗性化合物溶解成濃;: 0.001至1〇質量%,較好為0··01至1 L , 貝里%之鹼性水溶液。 上述驗性水溶液亦可適量添加例如甲_、乙醇等水 機溶劑或界面活性劑等。 有 顯像條件可適用各種條件。例如 ”、、員像處理法可使用嘖 淋顯像法、噴霧顯像法、浸潰顯像法、攪煉顯像法等。顯 m般可設定在_至4(rc之範圍。顯像時間—般設 定在10秒至300秒。使用由該等鹼性 又 ^合/夜組成之顯像液 4,一般於顯像後用水洗淨。 以上雖然對本發明之實施形態加以說曰曰 一 疋以上所 如示之本發明實施形態僅為例示,本發明之範圍並不只限 於該等實施形態、。本發明之範圍包含根據申請專利範圍所 示,更包含與申請專利範圍所揭示均等意義及範圍内之所 有之變更。以下,根據實施例對本發明作更詳細之說明, 但是本發明並不只限於該等實施例。 實施例1 於容量300ml之四口燒杯中放入雙酚努二縮水甘油醚 46.3g、衣康酸8.7g、苄基三乙基氯化銨〇〇9g、四乙基漠 化兹〇.18g、甲氧醌0.02g及丙二醇單甲醚乙酸酯55g,於 加熱攪拌下在1 20°c進行反應4小時,獲得透明淡音色之 黏調液體。於所獲得之黏調液體中再加入4 8g之丙二醇單 甲醚乙酸酯及4· 8g之丙烯酸,於120。〇進行反應8小s士。 314839 35 200403526 作為化合物A。 _Γ!:’放入化合物A55g、四氮笨二甲酸酐叫丙 了子早甲^_1G.2g’在12代加熱攪拌下進行 小日守,獲得淡黃色透明之樹脂溶液A1。所獲得樹脂之重量 平均分子置(Mw)為8200,酸價為1〇〇。 貫施例2The photosensitive resin composition is applied to the substrate through application methods such as spin coating, flow coating, and roller coating, and then dried to form a layer derived from the photosensitive: lipid composition. # Is exposed by a predetermined mask model, The image liquid forms a pull type. This photosensitive resin composition contains a photosensitive resin composition, and forms a color model (color plate?). Exposure = The radiation used is better to use, such as line, h-line, i-line, etc .: The thickness of the film after drying is usually ...... m, preferably 02 to m, more preferably 0.2 to 3.0 # m. When the photosensitive resin composition is a colored photosensitive resin composition, on the board: the substrate to be used may be, for example, glass-breaking, oxidizing, and oxidizing its # # #, lymine, polyimide, polyimide Wait. Demonstrate substrates are also processed as appropriate, such as chemical treatment, plasma treatment, and organic vapor silane coupling agents. Lice phase reaction method The imaging solution can be used as long as it can dissolve the liquid in the light part. And body d: .. and product 1 will dissolve the exposed or experimental water solution. A composition of various organic solvents that can be used organically is B quarkine, which can be exemplified by the above-mentioned solvents used in the preparation of the photosensitive resin group B. For example, sodium qi, sodium lice, potassium oxide, sodium carbonate, sodium silicate, 314839 200403526 sodium T-silicate, ammonia, ethylamine, di-ammonium ethanolamine, hydroxylated tetrahydrofuran, hydroxyl Tetraethylamine, choline, pyridorum pyridine, 1,8-diazabicycloside -... carbon diluent and other test compounds are dissolved to a concentration; 0.001 to 10% by mass, preferably 0 ... 01 to 1 L, Bailey% alkaline aqueous solution. The qualitative aqueous solution may be added with an appropriate amount of an aqueous solvent such as formazan or ethanol or a surfactant. There are various imaging conditions. For example, the image processing method can be used for shower imaging method, spray imaging method, immersion imaging method, refining imaging method, etc. The imaging m can be set in the range of _ to 4 (rc. Imaging. The time is generally set to 10 seconds to 300 seconds. Using the developing solution 4 composed of these alkaline and mixed / night, generally washed with water after development. Although the above is a description of the embodiment of the present invention The embodiments of the present invention as shown above are merely examples, and the scope of the present invention is not limited to these embodiments. The scope of the present invention includes the meanings and scopes equivalent to those disclosed in the scope of patent applications, as well as those disclosed in the scope of patent applications. All changes in the following. The present invention will be described in more detail based on examples, but the present invention is not limited to these examples. Example 1 A bisphenol diglycidyl ether was placed in a four-neck beaker with a capacity of 300 ml. 46.3g, itaconic acid 8.7g, benzyltriethylammonium chloride 009g, tetraethyl desertification 0.18g, methoxyquinone 0.02g and propylene glycol monomethyl ether acetate 55g, under heating and stirring Reaction at 120 ° C for 4 hours, transparent Tone-viscous liquid. To the obtained viscous-adjusted liquid was added 4.8 g of propylene glycol monomethyl ether acetate and 4.8 g of acrylic acid, and the reaction was performed at 120 ° for 8 seconds. 314839 35 200403526 as compound A _Γ !: 'Put compound A55g, tetrazine dicarboxylic acid anhydride called propionolite ^ _1G.2g' under 12th-generation heating and stirring to carry out a small day guard to obtain a pale yellow transparent resin solution A1. The obtained resin The weight average molecular weight (Mw) was 8200 and the acid value was 100. 实施 例 2

[著色感光性樹脂組成物之製造] 將[E]平均粒徑為〇 〇3//m 質量份及分散劑1 2質量份 [A]合成例所獲得之樹脂溶 體成分換算)、 之黑色顏料(c.i·顏料黑色7)4〇 之混合物[顏料]52質量份、 液A1 [黏合聚合物]33質量份(固 [B] 二季戊四醇六丙烯酸酯[具有 加成之化合物]1 〇質量份、 [C] 2,心雙(三氯甲基)·卜糊椒基 劑]5.0質量份及 乙~性不餘和鍵之可聚合 • 1,'5-二嗪[光聚合引發 [D]丙二醇單甲醚乙酸酯[溶劑]3 74 感光性樹脂組成物(黑色)。 質量份混合,獲得著色 [著色感光性樹脂組成物層之形成] 、將上述所獲得之著色感光性樹脂組成物用旋轉塗抹法 塗抹於玻璃基板[「#7059」蔻尼格公司製造]之表面,於100 c加熱。分鐘使乾燥,於基板上形成源自著色感光性樹脂 組成物之層。該源自乾燥後之著色感光性樹脂組成物之層 厚度為1.2 β ηι。 [著色模型之形成(解像度之評定)] 314839 36 200403526 於形成源自上述著色感光性樹脂組成物之層之基板藉 由具有5 μ m之L/S(線及間Hne an(j Space)模型之光遮罩, 用超高壓汞燈照射紫外線(照射量2〇〇mJ/cm2)使曝光。將曝 光後之著色感光性樹脂組成物層浸潰於顯像液[含有質量 份率為0·01 %之氫氧化鉀、含有非離子系界面活性劑之水 溶液]至未曝光部溶出為止,顯像5 0秒。 顯像後水洗,於230°c加熱20分鐘,於基板(2)上形成 黑色之著色模型(黑色基材)。用光學顯微鏡觀察該黑色基 材日rr ’於5 // m之L/S模型形成良好之再現性,模型之線 性亦良好。 [顯像界限(margin)之評定] 除了顯像液之浸潰時間(顯像時間)為秒之外,與上 述同樣操作,形成黑色基材。用與上述相同之光學顯微鏡 觀察時,於5 // m之L/S模型形成良好之再現性 [感度之評定] 除了使用遮光層之光線透過率呈階段性變化之遮罩模 型作為遮罩模型,進行曝光之外,與上述同樣操作,尋求 為了形成模型所必需之最小光線照射量(感度)。 所獲得之感度為l〇〇mJ/cm2,為非常高之感度。 比較例1 除了以甲基丙稀酸卞酯與曱基丙稀酸之共聚物[曱基 丙烯酸t酯單位含量之莫耳分率為65%、曱基丙烯酸單位 含量之莫耳分率為35%、聚苯乙烯換算重量平均分子量為 13,〇〇〇]3〇質量份取代實施例2所使用之黏合聚合物及二 314839 37 200403526 季戊四醇六丙烯酸酯之使用量為1 3質量份以外,與實施例 2同樣钿作,獲得著色感光性樹脂組成物(黑色),形成源自 著色感光性樹脂組成物之層(厚度為#瓜)。 [評定] 除了以形成源自上述所獲得之著色感光性樹脂組成物 之層之基板取代形成源自實施例2所獲得著 =物之層之基板使用之外,與實施例2同樣操作進= 疋%,於50秒之顯像應溶出之未曝光部完全未溶出。又, ,像時間同樣為70秒時,耗應溶出之未曝光部溶出,但 是5 β m之著色模型完全消&amp;,完全不能形成。 與實施例2同樣操作所尋求之感度為3〇〇mJ/cm2。 本發明之聚幾酸樹脂可適合作為感光性樹脂組成物之 =合聚合物使用’尤其是若使用含有顏料之著色感光性樹 成物,則可以獲彳寸南感度之高解像性,顯像之界限亦 f且佳.立子徑小之顏料以高濃度使用時亦相同,可獲得 高感度、高解像性及廣大顯像界限,較為理想。 本七月之感光性樹脂組成物,特別適用於濾色板用著 色感光性樹脂组成物、濾色板用保護膜、濾色板用調距板、 濾色板用層間絕緣膜。 【圖式簡單說明】 第1圖U)至(C) 係為使著色感光性樹脂組成物在基板上形成畫素、黑 色基材之過程之模式圖。 第2圖 314839 38 200403526 係為〉慮色板例之部分模式圖。 源自著色感光性樹脂組成物之層 2 基板 3 罩型 4 光線 5 晝素、黑色基材 5R 、5G、5B :色晝素 5BM 黑色基材 6 濾色板 11 光線未照射領域 12 光線照射領域 3 1 玻璃板 32 遮光層 33 透光部 39 314839[Production of colored photosensitive resin composition] [E] The average particle diameter is 0.003 // m parts by mass and 12 parts by mass of the dispersant [A] conversion of the resin solution component obtained in the synthesis example), black Pigment (ci · Pigment Black 7): 40 parts by mass [pigment] 52 parts by mass, liquid A1 [adhesive polymer] 33 parts by mass (solid [B] dipentaerythritol hexaacrylate [compound with addition]] 10 parts by mass , [C] 2, Heart bis (trichloromethyl) · budipate base agent] 5.0 parts by mass and polymerizable with ethylenic excess and bond • 1, '5-diazine [Photopolymerization initiation [D] Propylene glycol monomethyl ether acetate [solvent] 3 74 Photosensitive resin composition (black). The mass parts are mixed to obtain coloring [formation of colored photosensitive resin composition layer], and the colored photosensitive resin composition obtained above is obtained. Apply to the surface of a glass substrate ["# 7059" by König Company] using a spin coating method, and heat at 100 c. Allow to dry for a minute to form a layer derived from the colored photosensitive resin composition on the substrate. This originates from drying The layer thickness of the subsequent colored photosensitive resin composition was 1.2 β η. [Formation of coloring model ( Evaluation of the image)] 314839 36 200403526 On the substrate on which the layer derived from the above-mentioned colored photosensitive resin composition was formed, a light mask having an L / S (line and interval Hne an (j Space) model) of 5 μm was used, Ultra-high pressure mercury lamp was irradiated with ultraviolet rays (irradiation amount of 200 mJ / cm2) for exposure. The coloring photosensitive resin composition layer after the exposure was immersed in a developing solution [containing 0.01% by mass of hydroxide Potassium, non-ionic surfactant-containing aqueous solution] was developed for 50 seconds until the unexposed portion was dissolved. After development, it was washed with water and heated at 230 ° C for 20 minutes to form a black coloring model on the substrate (2) ( Black substrate). Observe that the black substrate has a good reproducibility with an L / S model at 5 // m, and the linearity of the model is also good. [Evaluation of margin] The immersion time (development time) of the image liquid is other than seconds. The same operation as above is performed to form a black substrate. When observed with the same optical microscope as above, a good reproduction of the L / S model at 5 // m is formed. [Evaluation of sensitivity] In addition to the use of light-shielding layer, the light transmittance is in stages The changed mask model is used as a mask model. Except for exposure, the same operation as above is performed to find the minimum light exposure (sensitivity) necessary to form the model. The obtained sensitivity is 100 mJ / cm2, which is very high. Comparative Example 1 Except for the copolymer of methacrylic acid methyl ester and fluorenyl acrylic acid [mole fraction of t-acrylic acid t-ester unit content is 65%, mole fraction of fluorenyl acrylic acid unit content The ratio is 35%, and the weight-average molecular weight in terms of polystyrene is 13,000,000. 30 parts by mass replaces the adhesive polymer used in Example 2 and 314839 37 200403526. The amount of pentaerythritol hexaacrylate is 13 parts by mass. Other than that, it carried out similarly to Example 2, and obtained the colored photosensitive resin composition (black), and formed the layer (thickness #melon) derived from the colored photosensitive resin composition. [Evaluation] The same operation as in Example 2 was performed except that the substrate forming the layer derived from the colored photosensitive resin composition obtained above was used instead of forming the substrate derived from the layer obtained from Example 2.疋%, the unexposed part which should be dissolved out in the development of 50 seconds is completely undissolved. In addition, when the time like is 70 seconds, the unexposed portion that is required to dissolve dissolves, but the 5 β m coloring model completely disappears and cannot be formed at all. The sensitivity sought in the same manner as in Example 2 was 300 mJ / cm2. The polychitoic acid resin of the present invention can be suitably used as a polymer of a photosensitive resin composition. In particular, if a colored photosensitive tree product containing a pigment is used, high resolution and high sensitivity can be obtained. The boundary of the image is also f and good. It is also the same when a pigment with a small diameter is used at a high concentration, and it is ideal to obtain high sensitivity, high resolution, and a wide range of imaging limits. The photosensitive resin composition in July is particularly suitable for coloring photosensitive resin compositions for color filter plates, protective films for color filter plates, distance plates for color filter plates, and interlayer insulating films for color filter plates. [Brief description of the drawings] Figures 1) U) to (C) are schematic diagrams of the process of forming a colored photosensitive resin composition on a substrate into a pixel and a black substrate. Figure 2 314839 38 200403526 is a part of the pattern diagram of the color plate example. Layers derived from colored photosensitive resin composition 2 Substrate 3 Cover type 4 Light 5 Daylight, black substrate 5R, 5G, 5B: Color daylight 5BM Black substrate 6 Color filter 11 No light irradiation area 12 Light irradiation area 3 1 glass plate 32 light shielding layer 33 light transmitting portion 39 314839

Claims (1)

200403526 拾、申請專利範圍 1. 一種聚羧酸樹脂,其特徵為經由將 (a)將(al)化合物與⑻)化合物在式(ρ)條件下 反應所獲得之反應物與(b)含有不飽和订 反應,獲得⑷反應物, &amp;之早竣酸進行 Φ 將成分(C)與(d)酸酐進行反應而獲得, (al)化合物:分子中至少具有2個 合物 衣虱基之裱氧化 (a2)化合物··多價羧酸 式(P): =氧化合物之環氧當量數)&gt;(多價幾酸之致酸當量 2·=申請專利範圍第!項之聚紋酸樹脂,其中 化 3物係為下述式(I)所示之化合物者, / H^CCH2-fOR3)-C).200403526 Patent application scope 1. A polycarboxylic acid resin, characterized in that the reactant obtained by reacting (a) the compound (al) with the compound ii) under the condition of formula (ρ) contains Saturated order reaction to obtain the amidine reactant, &amp; early completion of the acid Φ obtained by reacting the component (C) with (d) anhydride, (al) compound: a molecule with at least two compounds in the molecule Oxidation (a2) compound ... Polyvalent carboxylic acid formula (P): = number of epoxy equivalents of oxygen compound) &gt; (acid equivalent of polyvalent polyacids 2) = polyline acid resin of the scope of patent application! Where the compound 3 is a compound represented by the following formula (I), / H ^ CCH2-fOR3) -C). 0R^j0R ^ j 〇^3〇-faCH2CH-CH2 Ο) [式中,R】及R2各自獨立為气月 X , 00 辽原?、烷基或*素原子,. Λ為早鍵或下述式(1])至式(κ8) 其, 任何一式所示之2價殘 土,R。為伸烷基,R4為氫原子、 Λ Α 烷基或縮水甘油基,m 馬〇至5之整數,n為〇至1〇之敕 1 π 正數 L疋,η為2至 0之整數時,不同之反覆單位中 矸τ υ之R至R4可相同,亦 」不同]。 314839 40 200403526〇 ^ 3〇-faCH2CH-CH2 〇) [wherein R] and R2 are each independently gas month X, 00 Liaoyuan? , Alkyl, or * prime atom,. Λ is an early bond or the following formula (1)) to formula (κ8), which is a divalent residue represented by any formula, R. Is an alkylene group, R4 is a hydrogen atom, Λ Α alkyl group or glycidyl group, m is an integer of 0 to 5, n is 0 to 10, 敕 1 π positive number L 疋, and η is an integer of 2 to 0, R to R4 of 矸 τ υ in different iterative units can be the same, and "different". 314839 40 200403526 ch2 (Ι·6) 3〇\ / (Ι·7) ,〇、 (1-8) 3.如申请專利範圍第1項或第2項之聚羧酸樹脂,其中, 該(a2)化合物係為具有不飽和雙鍵之多價羧酸者。 •士申咕專利範圍第丨項至第3項中任一項之聚鲮酸樹 脂’其中’該(a2)係至少1種為選自馬來酸、富馬酸 衣康目欠四氫對笨二曱酸及氯橋酸所成組群之化合物 者。 5·::申Π利範圍第1項至第4項中任-項之聚羧酸樹 曰,、中,该(b)含有不飽和基之單羧酸係至少 選自丙烯酸、甲其石κΏ 1種為 ,欠甲基丙烯酸及丁烯酸所成組群者。 6 ·如申5青專利範圍第 脂,其中,二 中任一項之聚绩酸樹 酸酐、二芏审如 種為运自四氫笨二甲 本甲綱四羧酸二酐及聯苯 者。 羧黾一酐所成組君 7· ^重感光性樹月旨組成物,其特徵為 專利範圍第!項至第6項中任 有㈧如申請 具有】個乙稀性不餘和鍵之可聚A之聚缓酸、[B]至少 光聚合引發劑及[D]溶劑所組成。σ σ成之化合物、 δ·如申請專利範圍第 感先性樹墙組成物,其中,該 314S39 4】 200403526 組成物復含有[E]顏料者。 7,其中,該 項至第9項 9·如申請專利範,項之感光性樹脂組… [E]顏料係由含有碳黑所成之黑色顏料者。 10·—種硬化物,其特徵為如申請專利範圍第Ί 中任—項之感光性樹脂組成物所形成者。ch2 (Ι · 6) 3〇 / (Ι · 7), 〇, (1-8) 3. The polycarboxylic acid resin according to item 1 or item 2 of the patent application scope, wherein the (a2) compound is It is a polyvalent carboxylic acid having an unsaturated double bond. • Polysuccinic acid resins of any of items 丨 to 3 of the Shishengu patent scope, where 'the' (a2) is at least one selected from the group consisting of maleic acid and fumaric itacone tetrahydrone Compounds composed of adipic acid and chlorobridged acid. 5 :: The polycarboxylic acid tree of any one of items 1 to 4 in the scope of claim ii, said, (b) the monocarboxylic acid containing an unsaturated group is at least selected from acrylic acid and metformite One type of κΏ is a group of under-methacrylic acid and butenoic acid. 6 · Rushen No. 5 Qing patent scope, among them, any one of the two polycarboxylic acid anhydrides, diamines such as those transported from tetrahydrobenzyl dimethylbenzyl tetracarboxylic dianhydride and biphenyl . A group consisting of carboxyl-monoanhydride 7 ^ heavy photosensitive tree moon purpose composition, which is characterized by the patent scope! Any of the items from item 6 to item 6. If applied, it consists of polymerizable A polyacid with [A] ethylenic excess and bonds, [B] at least a photopolymerization initiator, and [D] a solvent. σ σ compounds, δ · As in the scope of the patent application, the proactive tree wall composition, where the 314S39 4] 200403526 composition contains [E] pigment. 7. Among them, this item to item 9 9. If the patent is applied, the photosensitive resin group of item ... [E] Pigment is a black pigment made of carbon black. 10 · —A hardened product characterized by being formed by the photosensitive resin composition as described in any one of the scope of application for patent Ί. 3】4839 423] 4839 42
TW092118151A 2002-07-10 2003-07-03 Polycarboxylic acid resin and photosensitive resin composition containing the same TWI286268B (en)

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