TH118924A - - Google Patents
Info
- Publication number
- TH118924A TH118924A TH1001001040A TH1001001040A TH118924A TH 118924 A TH118924 A TH 118924A TH 1001001040 A TH1001001040 A TH 1001001040A TH 1001001040 A TH1001001040 A TH 1001001040A TH 118924 A TH118924 A TH 118924A
- Authority
- TH
- Thailand
- Prior art keywords
- percent
- mass
- glass
- cleaning
- polishing process
- Prior art date
Links
- 239000011521 glass Substances 0.000 claims abstract 47
- 238000004140 cleaning Methods 0.000 claims abstract 34
- OFJATJUUUCAKMK-UHFFFAOYSA-N Cerium(IV) oxide Chemical compound [O-2]=[Ce+4]=[O-2] OFJATJUUUCAKMK-UHFFFAOYSA-N 0.000 claims abstract 24
- 229910000420 cerium oxide Inorganic materials 0.000 claims abstract 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract 24
- 238000007517 polishing process Methods 0.000 claims abstract 23
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract 16
- MHAJPDPJQMAIIY-UHFFFAOYSA-N hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract 16
- 238000005296 abrasive Methods 0.000 claims abstract 14
- 239000007788 liquid Substances 0.000 claims abstract 14
- 238000005498 polishing Methods 0.000 claims abstract 14
- 239000002002 slurry Substances 0.000 claims abstract 14
- 238000000034 method Methods 0.000 claims abstract 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N AI2O3 Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract 10
- 239000005358 alkali aluminosilicate glass Substances 0.000 claims abstract 8
- 229910052681 coesite Inorganic materials 0.000 claims abstract 8
- 239000008119 colloidal silica Substances 0.000 claims abstract 8
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract 8
- 238000007518 final polishing process Methods 0.000 claims abstract 8
- 238000004519 manufacturing process Methods 0.000 claims abstract 8
- 229910052904 quartz Inorganic materials 0.000 claims abstract 8
- 239000000377 silicon dioxide Substances 0.000 claims abstract 8
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract 8
- 229910052682 stishovite Inorganic materials 0.000 claims abstract 8
- 239000000758 substrate Substances 0.000 claims abstract 8
- 229910052905 tridymite Inorganic materials 0.000 claims abstract 8
- 239000003513 alkali Substances 0.000 claims abstract 6
- 229910000323 aluminium silicate Inorganic materials 0.000 claims abstract 4
- 229910052593 corundum Inorganic materials 0.000 claims abstract 4
- 239000012530 fluid Substances 0.000 claims abstract 4
- 229910001845 yogo sapphire Inorganic materials 0.000 claims abstract 4
- 239000003082 abrasive agent Substances 0.000 claims abstract 2
- 229910001491 alkali aluminosilicate Inorganic materials 0.000 claims abstract 2
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 claims abstract 2
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TH118924A true TH118924A (zh) | 2012-12-28 |
| TH118924B TH118924B (th) | 2012-12-28 |
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