SU667162A3 - Molecular vacuum pump - Google Patents
Molecular vacuum pumpInfo
- Publication number
- SU667162A3 SU667162A3 SU742008772A SU2008772A SU667162A3 SU 667162 A3 SU667162 A3 SU 667162A3 SU 742008772 A SU742008772 A SU 742008772A SU 2008772 A SU2008772 A SU 2008772A SU 667162 A3 SU667162 A3 SU 667162A3
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- vacuum pump
- stator
- molecular vacuum
- pump
- spiral
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
Description
I . ,I. ,
Изобретение относитс к вакуумной технике..; , , . .:. .The invention relates to vacuum technology ..; ,, .:. .
Известен молекул рный вакуумный насос, содержй1дий статор с расположенным в нем враадаювдамс барабаном, и спиральные паэы, переколчкой и выполненные по крайней Мере на одной из сопр женных повер.хностей статора, или ба абана 11 . . : . :,: В этом насосе заданном зазоре между ротором и статрром всевозможно получить : высокую степень сжати иэза значительных утечекмежду д«уШ параллельными паздми. Дл уменьшени . утечек можно сократить зазор между ротором и статором, однако это ведет к снижейию надежности работы насоса . .The molecular vacuum pump is known, the stator contains a stator with a drum inside it, and spiral paeses, with a breakup and made at least on one of the adjoining stator features, or ba abana 11. . :. :,: In this pump, it is possible to get a given gap between the rotor and the static level: a high degree of compression and significant leakage between parallel and parallel pazdmi. To reduce. Leaks can reduce the gap between the rotor and the stator, but this leads to a decrease in the reliability of the pump. .
Целью изобретени вл етс повышение степени сжати ,The aim of the invention is to increase the degree of compression,
Указанна цель достигаетс тем, что каждый спиральный паз на части его длины разделен на несколько Kaiналов перегЬродками пр моугольного сечени , расположенными параллельно.This goal is achieved by the fact that each spiral groove is divided into several Kainals into parts of its length by rectangular cross-sections, arranged in parallel.
Йа фиг. 1 изображен предложенный насос, общий вид на фиг. 2 - развертка спиральных предложенного насоса.Ya FIG. 1 shows the proposed pump, a general view of FIG. 2 - a scan of the proposed spiral pump.
Молекул рный вакуумный васос содержит статор i с расположенным в нем враадаюгдамс барабаном 2 и спиральные пазы.З, разделенные пере ачкой 4 и выполненные по крайней мере на- одйой из сопр женных поверхностей статора 1 или. барабана 2. Каждый . спиральный паз 3 на части его ДЛИНЫ разделен.на несколько каналов 5 перегЬрод1сами . 6 пр моугольного сечени The molecular vacuum pump contains a stator i with a drum 2 and spiral grooves located inside it. The tracks are separated by interchange 4 and are made at least from the adjoining surfaces of stator 1 or. drum 2. Everyone. The spiral groove 3 is divided into parts of its LENGTH divided into several channels with 5 channels. 6 rectangular sections
расположенными пар.аллёльно. При быстром эрааденйи fjoTopa относительно статора;; молекулы--получают направленный импульс и по спиральным каналам направл ютс к форвакуумному насосу (на чертеже не показан), т.е. осуществл етс перекачивающее действйе .. .located par.allno. With the rapid eraadeny fjoTopa relative to the stator ;; molecules — receive a directed impulse and are directed along spiral channels to the backing pump (not shown in the drawing), i.e. The pumping action is carried out.
Увеличение аналов на поверхности ротора поз вбл еТ уменьшить переТеЧки газа в отка чййаёмую емкость и увеличить степень сжати .Increasing the canals on the surface of the rotor will reduce the gas transfer to the rejected capacity and increase the compression ratio.
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7310183A FR2222886A5 (en) | 1973-03-21 | 1973-03-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU667162A3 true SU667162A3 (en) | 1979-06-05 |
Family
ID=9116654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU742008772A SU667162A3 (en) | 1973-03-21 | 1974-03-20 | Molecular vacuum pump |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US3912415A (en) |
| JP (1) | JPS49128306A (en) |
| BE (1) | BE812288A (en) |
| CH (1) | CH579219A5 (en) |
| DE (1) | DE2411247C2 (en) |
| FR (1) | FR2222886A5 (en) |
| GB (1) | GB1459933A (en) |
| IT (1) | IT1014568B (en) |
| NL (1) | NL7403784A (en) |
| SU (1) | SU667162A3 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8105614A (en) * | 1981-12-14 | 1983-07-01 | Ultra Centrifuge Nederland Nv | HIGH VACUUM MOLECULAR PUMP. |
| JPS6238899A (en) * | 1985-08-14 | 1987-02-19 | Osaka Shinku Kiki Seisakusho:Kk | Spiral groove type vacuum pump |
| DE3627642C3 (en) * | 1985-08-14 | 1996-03-21 | Rikagaku Kenkyusho | Vacuum pump with thread channel |
| JPS6351195U (en) * | 1986-09-20 | 1988-04-06 | ||
| JPH06205706A (en) * | 1992-12-09 | 1994-07-26 | Ciba Geigy Ag | Contact lens case |
| GB2585936A (en) * | 2019-07-25 | 2021-01-27 | Edwards Ltd | Drag pump |
| EP4194700A1 (en) * | 2023-04-18 | 2023-06-14 | Pfeiffer Vacuum Technology AG | Vacuum pump with a holweck pump stage with variable holweck geometry |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR536278A (en) * | 1921-06-01 | 1922-04-29 | Helical pump for high vacuum | |
| US1492846A (en) * | 1922-05-11 | 1924-05-06 | Mullard Radio Valve Co Ltd | Vacuum pump |
| FR1293546A (en) * | 1961-02-09 | 1962-05-18 | Alsacienne Constr Meca | Improvements to rotary molecular pumps |
| US3697190A (en) * | 1970-11-03 | 1972-10-10 | Walter D Haentjens | Truncated conical drag pump |
| DE2118738C3 (en) * | 1971-04-17 | 1974-11-14 | Dornier Dmbh, 7990 Friedrichshafen | Molecular pump, consisting of a cylindrical stator provided with an internal thread |
-
1973
- 1973-03-21 FR FR7310183A patent/FR2222886A5/fr not_active Expired
-
1974
- 1974-03-08 CH CH326074A patent/CH579219A5/xx not_active IP Right Cessation
- 1974-03-08 DE DE2411247A patent/DE2411247C2/en not_active Expired
- 1974-03-14 BE BE141990A patent/BE812288A/en unknown
- 1974-03-15 GB GB1167374A patent/GB1459933A/en not_active Expired
- 1974-03-18 JP JP49030147A patent/JPS49128306A/ja active Pending
- 1974-03-20 SU SU742008772A patent/SU667162A3/en active
- 1974-03-20 NL NL7403784A patent/NL7403784A/xx not_active Application Discontinuation
- 1974-03-21 US US453498A patent/US3912415A/en not_active Expired - Lifetime
- 1974-04-08 IT IT20962/74A patent/IT1014568B/en active
Also Published As
| Publication number | Publication date |
|---|---|
| NL7403784A (en) | 1974-09-24 |
| US3912415A (en) | 1975-10-14 |
| FR2222886A5 (en) | 1974-10-18 |
| JPS49128306A (en) | 1974-12-09 |
| DE2411247A1 (en) | 1974-09-26 |
| BE812288A (en) | 1974-09-16 |
| CH579219A5 (en) | 1976-08-31 |
| IT1014568B (en) | 1977-04-30 |
| DE2411247C2 (en) | 1983-03-24 |
| GB1459933A (en) | 1976-12-31 |
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