SU515884A1 - Криогенный сверхвысоковакуумный насос - Google Patents

Криогенный сверхвысоковакуумный насос

Info

Publication number
SU515884A1
SU515884A1 SU2019987A SU2019987A SU515884A1 SU 515884 A1 SU515884 A1 SU 515884A1 SU 2019987 A SU2019987 A SU 2019987A SU 2019987 A SU2019987 A SU 2019987A SU 515884 A1 SU515884 A1 SU 515884A1
Authority
SU
USSR - Soviet Union
Prior art keywords
cryogenic
vacuum pump
ultrahigh vacuum
vessel
pump
Prior art date
Application number
SU2019987A
Other languages
English (en)
Russian (ru)
Inventor
Марксэн Петрович Ларин
Original Assignee
Ленинградский Ордена Ленина Политехнический Институт Им. М.И. Калинина
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ленинградский Ордена Ленина Политехнический Институт Им. М.И. Калинина filed Critical Ленинградский Ордена Ленина Политехнический Институт Им. М.И. Калинина
Priority to SU2019987A priority Critical patent/SU515884A1/ru
Priority to US05/572,915 priority patent/US4009585A/en
Priority to GB17800/75A priority patent/GB1502877A/en
Priority to DE2519170A priority patent/DE2519170C2/de
Priority to FR7513510A priority patent/FR2269648B1/fr
Application granted granted Critical
Publication of SU515884A1 publication Critical patent/SU515884A1/ru

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
SU2019987A 1974-04-30 1974-04-30 Криогенный сверхвысоковакуумный насос SU515884A1 (ru)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SU2019987A SU515884A1 (ru) 1974-04-30 1974-04-30 Криогенный сверхвысоковакуумный насос
US05/572,915 US4009585A (en) 1974-04-30 1975-04-29 Method of producing vacuum in recipient and vacuum pump for effecting same
GB17800/75A GB1502877A (en) 1974-04-30 1975-04-29 Method of producing vacuum in a receptacle and a vacuum pump for effecting same
DE2519170A DE2519170C2 (de) 1974-04-30 1975-04-30 Verfahren zur Erzeugung von Vakuum in einem Rezipienten und Vakuumpumpe zur Durchführung dieses Verfahrens
FR7513510A FR2269648B1 (enExample) 1974-04-30 1975-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU2019987A SU515884A1 (ru) 1974-04-30 1974-04-30 Криогенный сверхвысоковакуумный насос

Publications (1)

Publication Number Publication Date
SU515884A1 true SU515884A1 (ru) 1976-05-30

Family

ID=20583231

Family Applications (1)

Application Number Title Priority Date Filing Date
SU2019987A SU515884A1 (ru) 1974-04-30 1974-04-30 Криогенный сверхвысоковакуумный насос

Country Status (5)

Country Link
US (1) US4009585A (enExample)
DE (1) DE2519170C2 (enExample)
FR (1) FR2269648B1 (enExample)
GB (1) GB1502877A (enExample)
SU (1) SU515884A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
SU1698481A1 (ru) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный адсорбционный насос
US6330801B1 (en) 1999-06-11 2001-12-18 Francis J. Whelan Method and system for increasing cryopump capacity
US6367267B1 (en) * 2000-09-22 2002-04-09 Applied Epi, Inc. Integrated phase separator for ultra high vacuum system
US6718775B2 (en) 2002-07-30 2004-04-13 Applied Epi, Inc. Dual chamber cooling system with cryogenic and non-cryogenic chambers for ultra high vacuum system
US7526917B1 (en) * 2008-08-11 2009-05-05 Hoffman John C Gas diffusion vacuum device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3188785A (en) * 1960-04-29 1965-06-15 James W Butler Vacuum cold trap
US3144756A (en) * 1962-07-23 1964-08-18 Ion Physics Corp Vacuum system cooling trap
US3216207A (en) * 1962-10-15 1965-11-09 Continental Oil Co Cold trap assembly for high vacuum systems
US3379132A (en) * 1965-08-16 1968-04-23 Integral Process Syst Inc Cryogenic pump
US3360949A (en) * 1965-09-20 1968-01-02 Air Reduction Cryopumping configuration
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump

Also Published As

Publication number Publication date
GB1502877A (en) 1978-03-08
FR2269648A1 (enExample) 1975-11-28
FR2269648B1 (enExample) 1978-02-24
US4009585A (en) 1977-03-01
DE2519170C2 (de) 1982-02-04
DE2519170A1 (de) 1975-11-20

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