SU423893A1 - - Google Patents

Info

Publication number
SU423893A1
SU423893A1 SU1665739A SU1665739A SU423893A1 SU 423893 A1 SU423893 A1 SU 423893A1 SU 1665739 A SU1665739 A SU 1665739A SU 1665739 A SU1665739 A SU 1665739A SU 423893 A1 SU423893 A1 SU 423893A1
Authority
SU
USSR - Soviet Union
Prior art keywords
chamber
working
reagent
working chamber
metallization
Prior art date
Application number
SU1665739A
Other languages
English (en)
Russian (ru)
Original Assignee
А. В. Куликов, С. Л. Бейлинсон, А. Г. Шкловский, П. П. Отопков
, Л. П. Кулакова
Всесоюзный научно исследовательский , конструкторско технологический институт природных алмазов , инструмента
Устройство Химической Металлизации
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by А. В. Куликов, С. Л. Бейлинсон, А. Г. Шкловский, П. П. Отопков, , Л. П. Кулакова, Всесоюзный научно исследовательский , конструкторско технологический институт природных алмазов , инструмента, Устройство Химической Металлизации filed Critical А. В. Куликов, С. Л. Бейлинсон, А. Г. Шкловский, П. П. Отопков
Priority to SU1665739A priority Critical patent/SU423893A1/ru
Application granted granted Critical
Publication of SU423893A1 publication Critical patent/SU423893A1/ru

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Nozzles (AREA)
SU1665739A 1971-06-04 1971-06-04 SU423893A1 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU1665739A SU423893A1 (enrdf_load_stackoverflow) 1971-06-04 1971-06-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1665739A SU423893A1 (enrdf_load_stackoverflow) 1971-06-04 1971-06-04

Publications (1)

Publication Number Publication Date
SU423893A1 true SU423893A1 (enrdf_load_stackoverflow) 1974-04-15

Family

ID=20477980

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1665739A SU423893A1 (enrdf_load_stackoverflow) 1971-06-04 1971-06-04

Country Status (1)

Country Link
SU (1) SU423893A1 (enrdf_load_stackoverflow)

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