SU378996A1 - - Google Patents

Info

Publication number
SU378996A1
SU378996A1 SU1681450A SU1681450A SU378996A1 SU 378996 A1 SU378996 A1 SU 378996A1 SU 1681450 A SU1681450 A SU 1681450A SU 1681450 A SU1681450 A SU 1681450A SU 378996 A1 SU378996 A1 SU 378996A1
Authority
SU
USSR - Soviet Union
Prior art keywords
product
electron beam
electron
processing
lens
Prior art date
Application number
SU1681450A
Other languages
English (en)
Russian (ru)
Inventor
А. А. Кафафоз М. П. Голубков А. Н. Кабанов
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to SU1681450A priority Critical patent/SU378996A1/ru
Application granted granted Critical
Publication of SU378996A1 publication Critical patent/SU378996A1/ru

Links

Landscapes

  • Electron Beam Exposure (AREA)
SU1681450A 1971-07-12 1971-07-12 SU378996A1 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU1681450A SU378996A1 (enExample) 1971-07-12 1971-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU1681450A SU378996A1 (enExample) 1971-07-12 1971-07-12

Publications (1)

Publication Number Publication Date
SU378996A1 true SU378996A1 (enExample) 1974-06-15

Family

ID=20482973

Family Applications (1)

Application Number Title Priority Date Filing Date
SU1681450A SU378996A1 (enExample) 1971-07-12 1971-07-12

Country Status (1)

Country Link
SU (1) SU378996A1 (enExample)

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