SU347960A1 - METHOD OF MANUFACTURING A MICROSHEM BY SPRAYING A MATERIAL THROUGH A MASK - Google Patents
METHOD OF MANUFACTURING A MICROSHEM BY SPRAYING A MATERIAL THROUGH A MASKInfo
- Publication number
- SU347960A1 SU347960A1 SU1475463A SU1475463A SU347960A1 SU 347960 A1 SU347960 A1 SU 347960A1 SU 1475463 A SU1475463 A SU 1475463A SU 1475463 A SU1475463 A SU 1475463A SU 347960 A1 SU347960 A1 SU 347960A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- mask
- spraying
- manufacturing
- substrate
- microshem
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title description 4
- 239000000463 material Substances 0.000 title description 4
- 238000005507 spraying Methods 0.000 title description 4
- 239000000758 substrate Substances 0.000 description 9
- 240000000218 Cannabis sativa Species 0.000 description 1
- 241000209504 Poaceae Species 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
Description
Изобретение относитс к области технологии изготовлени микросхем вакуумным напылением и может быть использовано при нанесении слоев на активную подложку, заранее выставленную с маской.The invention relates to the field of manufacturing microcircuits by vacuum spraying and can be used when applying layers on an active substrate, pre-exposed with a mask.
Известные способы изготовлени микросхем напылением материала через маску не обеспечивают получени микросхем с большим количеством элементов и надежного прижати маски к нодложке с заранее заданным и регулнруемым усилием прижати .The known methods of manufacturing microcircuits by spraying the material through a mask do not provide for obtaining microcircuits with a large number of elements and reliably pressing the mask to the backing with a predetermined and regular pressing force.
Дл получени микросхем с большим количеством элементов и обеспечени надежного прижати маски к нодложке с заранее заданным и регулируемым усилием прижати подложку с маской помегцают в однородное магнитное поле и через маску нронускают носто нный ток.To obtain microcircuits with a large number of elements and to ensure reliable pressing of the mask to the substrate with a predetermined and adjustable force, press the substrate with a mask into a uniform magnetic field and receive a constant current through the mask.
Сущность описываемого изобретени заключаетс в следуюш,ем. Если подложку, закрепленную на подложкодержатсле, поместггь плюсами магнита в нлоскостн, нараллельной магнитным силовым лини м, а маскуThe essence of the described invention is as follows. If the substrate is fixed on the substrate, place the pluses of the magnet in the plane, with a parallel magnetic force line, and the mask
закренить над подложкой так, чтобы через нее можно было нропускать ток в перпендикул рном к магнитным силовым линн м направлении , то при соответствуюш,ем выборе напразлеии тока на маску будет действовать сила, прижимаюш,а маску к подложке. Предлагаемый способ имеет преимуш,ества перед способом фотолитографии в том случае, когда нужно изготавливать многолипейные схемы .из материалов , трав ш,ихс в одном и том же травителе .to fix it over the substrate in such a way that current can be passed through it in a direction perpendicular to the magnetic force lynn, then with the appropriate choice of current spacing, the mask will act on the mask, and the mask will act on the substrate. The proposed method has advantages in front of the photolithography method in the case when it is necessary to produce multi-pattern schemes out of materials, grasses, grass, and the same picker.
Предмет изобретени Subject invention
Сиособ изготовлени микросхем напылением материала через маску, отличающийс тем, что, с целью нолучени микросхем с большим количеством элемеитов и обеснечени надежного прижати маски к подложке с заранее заданным и регулируемым усилием прижати , подложку с маской помещают в однородное магнитное поле и через маску пропускают посто нный ток.The method for manufacturing microcircuits by spraying a material through a mask, characterized in that, in order to get microcircuits with a large number of elements and reliably press the mask to the substrate with a predetermined and adjustable pressing force, the substrate with the mask is placed in a uniform magnetic field and a constant is passed through the mask current.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU722475463A SU670355A1 (en) | 1972-06-16 | 1972-06-16 | Conveying system for ring-feeding of ingots |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU722475463A SU670355A1 (en) | 1972-06-16 | 1972-06-16 | Conveying system for ring-feeding of ingots |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| SU347960A1 true SU347960A1 (en) | |
| SU670355A1 SU670355A1 (en) | 1979-06-30 |
Family
ID=20457299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU722475463A SU670355A1 (en) | 1972-06-16 | 1972-06-16 | Conveying system for ring-feeding of ingots |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU670355A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT404437B (en) * | 1995-10-19 | 1998-11-25 | Voest Alpine Ind Anlagen | Conveying device for transferring elongated stock |
-
1972
- 1972-06-16 SU SU722475463A patent/SU670355A1/en active
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