SU326915A1 - - Google Patents

Info

Publication number

SU326915A1

SU326915A1 SU1430888A SU1430888A SU326915A1 SU 326915 A1 SU326915 A1 SU 326915A1 SU 1430888 A SU1430888 A SU 1430888A SU 1430888 A SU1430888 A SU 1430888A SU 326915 A1 SU326915 A1 SU 326915A1

Authority

SU

USSR - Soviet Union

Prior art keywords

diffusion

diffusant

polished

structures

sources

Prior art date

1970-04-06

Links

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• Global Dossier
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• 238000009792 diffusion process Methods 0.000 description 15
• 238000000034 method Methods 0.000 description 7
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
• 229910052710 silicon Inorganic materials 0.000 description 5
• 239000010703 silicon Substances 0.000 description 5
• 235000012239 silicon dioxide Nutrition 0.000 description 4
• 239000007789 gas Substances 0.000 description 3
• 239000004065 semiconductor Substances 0.000 description 3
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
• 229910052681 coesite Inorganic materials 0.000 description 2
• 229910052906 cristobalite Inorganic materials 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 2
• 239000010453 quartz Substances 0.000 description 2
• 150000003839 salts Chemical class 0.000 description 2
• 239000000377 silicon dioxide Substances 0.000 description 2
• 229910052682 stishovite Inorganic materials 0.000 description 2
• 229910052905 tridymite Inorganic materials 0.000 description 2
• UOZODPSAJZTQNH-UHFFFAOYSA-N Paromomycin II Natural products NC1C(O)C(O)C(CN)OC1OC1C(O)C(OC2C(C(N)CC(N)C2O)OC2C(C(O)C(O)C(CO)O2)N)OC1CO UOZODPSAJZTQNH-UHFFFAOYSA-N 0.000 description 1
• 241000700647 Variola virus Species 0.000 description 1
• AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000007664 blowing Methods 0.000 description 1
• ALEXXDVDDISNDU-JZYPGELDSA-N cortisol 21-acetate Chemical compound C1CC2=CC(=O)CC[C@]2(C)[C@@H]2[C@@H]1[C@@H]1CC[C@@](C(=O)COC(=O)C)(O)[C@@]1(C)C[C@@H]2O ALEXXDVDDISNDU-JZYPGELDSA-N 0.000 description 1
• 239000006071 cream Substances 0.000 description 1
• 230000001934 delay Effects 0.000 description 1
• 238000009826 distribution Methods 0.000 description 1
• 239000011261 inert gas Substances 0.000 description 1
• 239000007791 liquid phase Substances 0.000 description 1
• 230000000873 masking effect Effects 0.000 description 1
• 230000007935 neutral effect Effects 0.000 description 1
• QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
• 239000007800 oxidant agent Substances 0.000 description 1
• 239000000843 powder Substances 0.000 description 1
• 238000002360 preparation method Methods 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 230000007704 transition Effects 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (1)