SU1762726A1 - Method of fine tuning of acoustical surface-wave resonator center frequency - Google Patents
Method of fine tuning of acoustical surface-wave resonator center frequencyInfo
- Publication number
- SU1762726A1 SU1762726A1 SU4801161/22A SU4801161A SU1762726A1 SU 1762726 A1 SU1762726 A1 SU 1762726A1 SU 4801161/22 A SU4801161/22 A SU 4801161/22A SU 4801161 A SU4801161 A SU 4801161A SU 1762726 A1 SU1762726 A1 SU 1762726A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- center frequency
- fine tuning
- wave resonator
- resonator center
- acoustical surface
- Prior art date
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
FIELD: microelectronics, in particular, practice of fabrication of acoustical surface-wave resonators. SUBSTANCE: working surface of resonator crystal is treated by a beam of argon ions at energy of 4 to 5 keV for 2 to 15 min, and plasma-chemical etching is performed for 1 to 8 min. EFFECT: enhanced percentage of yield of applicable resonators. 1 tbl
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4801161/22A SU1762726A1 (en) | 1990-03-11 | 1990-03-11 | Method of fine tuning of acoustical surface-wave resonator center frequency |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU4801161/22A SU1762726A1 (en) | 1990-03-11 | 1990-03-11 | Method of fine tuning of acoustical surface-wave resonator center frequency |
Publications (1)
Publication Number | Publication Date |
---|---|
SU1762726A1 true SU1762726A1 (en) | 1997-02-10 |
Family
ID=60532862
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SU4801161/22A SU1762726A1 (en) | 1990-03-11 | 1990-03-11 | Method of fine tuning of acoustical surface-wave resonator center frequency |
Country Status (1)
Country | Link |
---|---|
SU (1) | SU1762726A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2494499C1 (en) * | 2012-02-09 | 2013-09-27 | Открытое акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" (ОАО "НИИ "Элпа") | Method of making surface acoustic wave resonators |
-
1990
- 1990-03-11 SU SU4801161/22A patent/SU1762726A1/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2494499C1 (en) * | 2012-02-09 | 2013-09-27 | Открытое акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" (ОАО "НИИ "Элпа") | Method of making surface acoustic wave resonators |
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