SU1762726A1 - Method of fine tuning of acoustical surface-wave resonator center frequency - Google Patents

Method of fine tuning of acoustical surface-wave resonator center frequency

Info

Publication number
SU1762726A1
SU1762726A1 SU4801161/22A SU4801161A SU1762726A1 SU 1762726 A1 SU1762726 A1 SU 1762726A1 SU 4801161/22 A SU4801161/22 A SU 4801161/22A SU 4801161 A SU4801161 A SU 4801161A SU 1762726 A1 SU1762726 A1 SU 1762726A1
Authority
SU
USSR - Soviet Union
Prior art keywords
center frequency
fine tuning
wave resonator
resonator center
acoustical surface
Prior art date
Application number
SU4801161/22A
Other languages
Russian (ru)
Inventor
Ю.П. Кондратьев
В.В. Тимошев
В.Н. Федорец
В.И. Федосов
Original Assignee
Научно-исследовательский институт "Пульсар"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Научно-исследовательский институт "Пульсар" filed Critical Научно-исследовательский институт "Пульсар"
Priority to SU4801161/22A priority Critical patent/SU1762726A1/en
Application granted granted Critical
Publication of SU1762726A1 publication Critical patent/SU1762726A1/en

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  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

FIELD: microelectronics, in particular, practice of fabrication of acoustical surface-wave resonators. SUBSTANCE: working surface of resonator crystal is treated by a beam of argon ions at energy of 4 to 5 keV for 2 to 15 min, and plasma-chemical etching is performed for 1 to 8 min. EFFECT: enhanced percentage of yield of applicable resonators. 1 tbl
SU4801161/22A 1990-03-11 1990-03-11 Method of fine tuning of acoustical surface-wave resonator center frequency SU1762726A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4801161/22A SU1762726A1 (en) 1990-03-11 1990-03-11 Method of fine tuning of acoustical surface-wave resonator center frequency

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4801161/22A SU1762726A1 (en) 1990-03-11 1990-03-11 Method of fine tuning of acoustical surface-wave resonator center frequency

Publications (1)

Publication Number Publication Date
SU1762726A1 true SU1762726A1 (en) 1997-02-10

Family

ID=60532862

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4801161/22A SU1762726A1 (en) 1990-03-11 1990-03-11 Method of fine tuning of acoustical surface-wave resonator center frequency

Country Status (1)

Country Link
SU (1) SU1762726A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2494499C1 (en) * 2012-02-09 2013-09-27 Открытое акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" (ОАО "НИИ "Элпа") Method of making surface acoustic wave resonators

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2494499C1 (en) * 2012-02-09 2013-09-27 Открытое акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" (ОАО "НИИ "Элпа") Method of making surface acoustic wave resonators

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