SU1675833A1 - Apparatus for justification and exposure of photographic stencil and support - Google Patents

Abstract

The invention allows to automate the process of skewing the image from the photomask onto the substrates. The purpose of the invention is to automate work, increase productivity and reliability. The substrates are in a cassette and are fed by a substrate ejector. At the command of the reader, a search for the photo masks that are in the photo mask cassette is performed. The photoblock is pushed out of this cassette by a photomask pusher. The latter moves the photo mask to the guides. Moving, the photoblock rests on the main stop, and the levers press and fix it. After combining the photomask with the base marks, the substrate moves onto the table and locks onto the latches. The substrate is sucked onto the suction cup and then pressed against the photo mask. Exposure is performed. After that, the substrate and the photomask in the reverse order are moved to the corresponding cassettes using the pushers. 4 sludge. (/) WITH

Description

The invention relates to the field of microelectronics and can be used in electronic, radio engineering and other industrial areas in the manufacture of thin-film hybrid integrated circuits (GIS), for example, for multiple transfer of an image from a photomask to substrates.

The aim of the invention is to automate the operation, improve the performance and reliability of the device combining and exposure.

FIG. 1 shows the device, a general view; in fig. 2 is a view A of FIG. one; in fig. 3 shows a section BB in FIG. 2; in fig. 4 shows a section B-B in FIG. 2

The device for combining and exposing comprises table 1 (Fig. 1), a mechanism 2 for moving the cassette with substrates, a mechanism 3 for moving the cassettes with photo masks, transporting devices containing the following mechanisms: a mechanism 4 for pushing the substrates out of the cassette, a mechanism 5 for pushing the substrates into the cassette a mechanism 6 for pushing the photomask out of the cassette; a mechanism 7 for pushing the photomask into the cassette (Fig. 2); and also a mechanism 8 for fixing the substrate (Fig. 3) and a mechanism 9 for fixing the photomask.

Table 1 comprises plate 10 (FIG. 2) in which groove 11 is made and guide 12 for substrate 13. shown on table 1

3

ate

00

with

CJ

conventionally thin lines (Fig. 3), Another guide 14 (Fig. 2) for the substrate is made removable. It has a groove 15 (Fig. 3), through which the L-shaped part of the lever 16 passes. The latter has the possibility of oscillatory movement around the axis 17 and the spring 18 presses against the bore 19 of the electromagnet 20. The lever 16, the axis 17, spring 18, measles 19 and an electromagnet 20 constitutes a substrate fixation mechanism 8. Three stops for fixing the substrate 13, two lateral stops 21 (FIG. 2) and one main stop 22 are mounted on the plate 10. The temporary stop 22 is located on the right side of the center of the substrate 13 and the photo mask 23 (the substrate and the photo pattern on the table 1 are shown thin lines), On the left side of the center of the substrate 13 and the photomask 23, there is a main stop 24 for fixing the photomask 23. Under the center of the substrate 13, located on the table 1, there is a vacuum suction pad 25 (fmg. 3) and application 26, in the center which made the hole 27 connected to a vacuum system. Under the piston 26, compressed air is supplied through the nozzle 28. On the piston 26 there is a strip 29 (Fig. 1), a flat spring 30, two screws 31c with a lock nut, which serve to adjust the stroke of the piston 26 upwards. On the plate 10 (FIG. 3), on four bones 32, a movable cancer 33 is installed, with two guides 34 and 35 for the photomask 23 executed on it. Guides 12 and 14 for the substrates and guides 34 and 35 for the photo masks represent the track on which the substrates and the photomasks move, the movable frame 33 is pressed against three ball bearings 36 (figs. 2 and 3) by four springs 37 (fig. 2).

Seats for ball bearings 36 are shifted (have eccentricity) relative to common axes of trees 38 (FIG. 3). On the latter, there are fixed worm wheels 39, which are meshed with worms 40 connected to electric motors 41.

On the table 1, the mechanism 9 for fixing the photomask 23, which contains. an electromagnet 42 (Fig. 3), which is connected by a lobe 43 to a lever system consisting of rods 44-47 (Figs. 3 and 4), levers 48-54 and a bar 55. Lever 48 sits down axis 56, lever 51 on axis 57, lever 52 on axis 58, lever 49 on axis 59, lever 50 on axis 60, levers 49 and 50 are on plate 10 and their ends touch spring-loaded levers 53 and 54, on the axes of rotation of which are springs 61. The latter provide pressure levers. 53 and 54 (Figs. 2 and 3) of the photomask 23 to the nugget neck 34 and 35.

The levers 53 and 54 are located on the movable frame 33.

On the movable frame 33 (FIG. 2), on the axis 62, a lever 63 for lateral fixation of the photomask of the photomask fixing mechanism is mounted. The lever 63 is spring-loaded with a tension spring 64, has the possibility of oscillatory movement around the axis 62, is clamped and one end

The lever 0 is terminated by a flat spring 65. The stretcher lever 63 is pressed against the stop 66 by the stretch spring 64. The lever 63 for the side fixation of the photomasks is located by the emitting diode 67 and the photodiode 68.

5 On the plate 10 is made a groove 69 (Fig. 2), in

which is placed the pusher 70 of the substrate (Fig. 1-3), recessed L-shaped.

On the table between guides 12 and

0 14 (FIG. 2), several LEDs 71 and photodiodes 72 (in this case, five LEDs and five photodiodes) are mounted. The LEDs 71 and the photodiodes 72 are informers for the reader.

5 (not shown), which is intended to recognize information on the number of holes arranged in a certain sequence on the accompanying map 73, which is located in the lower

The cartridge cell 74 is shown. The required photo mask 22 is searched for using the accompanying map 73. The extreme LEDs 75 (Fig. 2) and the photo diodes 76 are used to determine the presence of the substrate 13 on the guides 12 and 14.

5 On the table 1 conventionally shown basic

marks 77 (Fig. 2), which are located on the photomask placed on the table 1. Above the base signs 77 there is an illuminator 78 (Figs. 1 and 3), above the base signs 0, a base sensor 79. Above the photomasks 23, located on the table 1, is the source 80 of light.

The mechanism 2 for moving the substrate cassette (FIG. 1) comprises a cartridge 74 c.

5, the substrates 13 arranged therein and the accompanying card 73 in the lower cell of the cassette. The cartridge 74 is installed in the housing 81. In the latter, there are radiating diode 82 and photodiode 83, which

0 determines the presence of the cassette 74 in the housing 81. The housing 81 with the screw 84 can be moved up and down to the limit switches 85 and 86. The insert 84 is driven by the actuator 87 through bevel gears 88

5 and 89. The flag 90 can rotate with the gear 88. When rotating, the flag 90 occurs between the emitting diodes 91 and 92 and the photodiodes 93 and 94.

The mechanism 3 for moving cassettes with photo masks (Fig. 1) contains two cassettes

95 with photo masks 23 arranged in them. The cassettes 95 are mounted in the housing 96, which can be moved up and down with the screw 97 to the limit switches 98 and 99. The screw 97 is driven by the actuator 100 through bevel gears 101 and 102. The flag 103 can rotate together with gear 101. When rotating, the flag 103 passes between the emitting diodes 104, 106 and 108 and the photodiodes 105, 107 and 109. The screw 110 of the cartridge 95 can move to the slots 11 in the horizontal direction (Fig. 2, shown by arrows). Screw 110 (FIG. 1) is driven in rotation by drive 111. Moving cassettes 95 is limited by limit switches 112 and 113.

The mechanism 4 for pushing the substrates out of the cassette comprises an ejector 114 (FIG. 1), the pushing part of which has a rectangular shape, slide 115, crank 116, drive 117, safety device 118, axis 119, connecting link 115 with the mounting frame, limit switches 120 and 121.

The mechanism 5 for pushing the substrates into the cassette (FIG. 1) comprises the substrate pusher 70, slide 122, crank 123, drive 124, axis 125, limit switches 126 and 127.

A mechanism 6 for ejecting a photomask from a cassette (FIG. 1) comprises an ejector 128, a slide 129, a crank 130, an actuator 131. an axis 132, limit switches 133 and 134.

A mechanism 7 for pushing the photomask into the cassette (Fig. 2) comprises a pushing bar 135, link 136, crank 137, drive 138, axis 139, two guides 140, limit switches 141 and 142. Mechanism 7 is conventionally shown in a horizontal position. All pushers and pushers in mechanisms 4, 5, 6 and 7 for pushing and pushing the substrates and photomasks are spring-loaded.

Mechanisms 5, 6 and 7 have the same safety devices that are in mechanism 4 (Fig. 1. Position 118). A light control photo sensor 143 is installed on the housing of the light source 80 (Fig. 1).

The device for combining and exposure works as follows.

A robot (not shown) installs a cartridge 74 (FIG. 1) with the substrates 13 and an accompanying card 73 into the housing 81. In this case, the cartridge 74 intersects the light beam emerging from the emitting diode 82, and the photodiode 83 gives the command to turn on the drive 87 Last, rotate counterclockwise.

through a conical pair 88 and 89 transmits rotation to the screw 84, which moves the body 81 with the cartridge 74 down. The flag 90, rotating counterclockwise, crosses the beam emerging from the emitting diode 91, darkens the photodiode, which issues a command ng to stop the drive 87. The lower cell in which the accompanying card 73 is located. So that the accompanying card 73 ends up above the guides 12 and 14, located on the plate 10, by 0.1-1 mm. When the drive 87 is stopped, the drive 117 is turned on, which drives the crank 11 b in rotation, and the latter begins to move the slide 115 to the right, rotating it around the axis 119. The curbing 115 with its upper end moves the ejector 114 to the right, and the accompanying card 73 moves to table 1. Accompanying card

73, the passage between the five emitting diodes 71 and the five photodiodes 72 allows, from the reader, to determine the consignment of the batch of substrates in the cassette 74. The emitting diode 75 and the photodiode 76 provide information on the passage of the accompanying map 73 or the substrates 13. On the table 1, along the guides 12 and 14, if the accompanying card 73 or the substrate 13 n cassette 74 does not appear, the device stops, the sound and light signals (not shown) are turned on. After that, the operator must determine the reason for the absence of the accompanying map 73 and the substrate 13, eliminate this cause and turn on the device for further work. The link 115, reaching the rightmost position, does not stop, moves to the leftmost position and stops by the end switch 120. While the slide 115 is in the extreme right position, the end switch 121 turns on the drive 87 and, with some delay, the drive 124, the Drive 87, turning the flag 90 counterclockwise, darkens the photodiode 94, which gives the command to turn off the drive 87. This cassette 74 is lowered, and the cell in which the accompanying card 73 should be located in a position that is below the arrangement of the guides 12 and 14 on the table 1 by 0.1-1 mm.

The cassette 74 is prepared to receive the accompanying card 73, and the activated drive 124 by the crank 123 moves the slide 122 to the left. Together with the slide, the pusher 70 moves, which pushes the accompanying card 73 into the cassette.

74. The rocker 122, without stopping in the leftmost position, returns to its original position.

extreme right position and stops at limit switch 127.

The reader gives the command to search for the corresponding photomask. For this, if necessary, the drive 111 is turned on, which with the screw 110 moves the body 96, and with it the two cassettes 95 to one of the desired extreme positions. In the extreme positions, the cassettes are stopped by the end switches 112 or 113. Then, by turning the actuator 100 on one side or the other through a conical pair 101 and 102 with a screw 97, the cassettes 95 are raised or lowered, depending on the information of the reader, and stopped at the position where the necessary photomask 23 takes the initial position to push it onto the table 1. When the cassette 95 moves upwards, the flag 103 rotates clockwise and the photodiode 107 is triggered at the right moment, and the drive 100 stops. In this case, the desired photomask stops above; guides 34 and 35 at a distance of 0.1-1 mm. When the cassette 95 moves, the anis flag 103 rotates counterclockwise and at the right moment the photodiode 109 is triggered and the actuator 100 stops. In this case, the desired photo pattern also stops above the guides 34 and 35 at a distance of 0.1-1 mm. In the first and second cases, the flag 103 occupies the same position between the photodiodes 107 and 109.

After the photomask takes the initial position, designed to push it onto table 1, an electromagnet 42 is turned on, which through a system of levers 48-50 (Fig. 3, 4), the pushers 44-47 and the bar 55 lifts the inner edges of the levers 53 and 54 1-2 mm so that photomask 23 can move under them.

Then the actuator 131 and the rocker 129 are turned on, with the crank 130 starting to move to the left side, moving in the same direction and the spring-loaded ejector 128. The latter moves the photomask 23 to the guides 34 and 35 (Fig. 3). As the photomask 23 moves along the guides 34 and 35, the photomask 23 presses on one of the ends of the photomask fixing lever 63. The other end of the photomask fixing lever 63 by the flat spring 65 pushes against the photomask 23 and as the photomask advances, the spring presses it onto the side wall of the guide 34 (Fig. 3). Moving further, the photomask 23 rests on the main stop 24 and the linkage 129 by the limit switch 133 stops, and with it stops on the

guides 34 and 35 and photo mask 23 (fig. 1 and 2) After that, electromagnet 42 and levers 53 and 54 are de-energized with their internal ends using torsion springs 61 to press and lock photo mask 23 on guides 34 and 35 (Fig. 3), which is also pressed flat spring 65 to the side wall of the guide 34. Then the actuator 131 and the rocker 129 are turned on together

0 with the ejector 128 occupy the extreme right position and the actuator 131 is de-energized by the end switch 134.

The limit switch 134 also issues a command to turn on the drive 100, which is rotated counterclockwise, turning the flag 103 dims the photodiode 105, which gives the command to turn off the drive 100. The cell without a photomask takes up a position 0.1-1 mm below the guides

0 34 and 35. At this position, the cassette 95 is ready to accept the photomask 23 back to the same cell from which it came out.

At the same time, turning on the actuator 131, which moves the slide 129 to the extreme right position, includes three rotational drives of the eccentric shafts 38 on which the ball bearings 36 are seated (Fig. 2).

The movable frame 33 together with the fixed photo mask 22 begins to oscillate on the ball bearings 36, which are eccentric rotating and oscillate until the base signs 77 on the photo mask 23 are compatible with the basic signs

5 in the 79 base sensor.

The combination mechanism in the proposed device is similar to the mechanism of Ya2MZ, 859, included in the installation of EM-552A,

The principle of operation of the combining mechanism of the EM-552A Ya2M3.859 serial unit is based on the conversion of similar signals from photodiodes reacting to the luminous flux passing through the basic signs of the photomask into positive pulses of variable duty cycle in the absence of alignment, photomask with its basic position or into constant levels Log, I TTL-logic (stopping the engines of the mechanism of combining) with the combination of the photomask with its basic position along the coordinates X, Y, Z with the subsequent conversion of these signals into control commands engines of the mechanism of combination.

5 After combining the base characters at the same time as the drives are disconnected (Fig. 3), the drive 87 is turned on. Checkbox 90 makes one turn counterclockwise and the photodiode issues a command to stop the drive 87. Cartridge 74 is lowered to

one step down. The command to turn on drive 117 is given, ejector 114 moves substrate 13 to table 1. After limit switch 121 is activated, ejector 114 stops and electromagnet 20 turns on (Fig. 3) and lever substrate 16 and spring-loaded ejector 114 lock onto latches 21 and 22 (Fig. 2).

Simultaneously with the activation of the electromagnet 20, a drive 87 is turned on, which lowers the cartridge 74, and with it the empty cell guide below the guides 12 and 14, located on the table 1, by 0.1-1 mm, and on command from the photodiode 94 the drive 87 stops.

After the electromagnet 20 has been activated, a vacuum is connected through the opening 27 and a substrate 13 is sucked into the vacuum suction unit 25, which is fixed on the vacuum suction unit 25. The drive 117 is turned on, the ejector 114 moves to the left and occupies the initial position. The electromagnet 20 is turned off and the lever 16 moves to the substrates 13. Then compressed air is supplied through the nozzle 28, the piston 26 together with the substrate 13 moves up and the substrate 13 is pressed against the photomask 23. Further movement of the substrate stops as two screws 31 (Fig. 1 ) abutted on plate 10.

Then, the light source 80 is turned on and the substrate 13 is exposed. The photocell 143 of the illumination control unit (Fig. 1) commands the light source 80 to turn off.

After the end of the exposure operation, compressed air is turned off, the piston 26 (Fig. 3) is flattened down by a spring 30 (Fig. 1), the substrate 13 is placed on the guides 12 and 14 (Fig. 2), the vacuum is turned off, the actuator 124 is turned on, and the pusher 70 is turned on substrate (Fig. 1-3) moves the substrate in the cassette 74 and the actuator 124, without stopping, returns the slide to its original position, in which it is stopped by the limit switch 127. And the limit switch 126 when contacting with the slide when it was in the leftmost position, gives the command to on drive 87. Drive 87 lowers cassette 74 down one step, equal to the distance between substrates 13 in cassette 74, and the photodiode issues a command to turn on drive 117. The rocker moves the ejector 114 to the right and it sends the next substrate to table 1 , After which the cycle of operation of the device is repeated.

Step lowering of the cassette 74 is carried out until the last substrate is exposed. Then the limit switch 86 issues a command

to turn on the drive 87 with reverse rotation and the cassette 74 starts to rise until the limit switch 85 is activated. After the cassette 74 stops in the upper extreme position, the cassette 74

0, a cartridge 74 with unexposed substrates is placed in place of the device from its device and replaced in its place. After that, the cycle of operation of the device is repeated.

If you learn from the accompanying card 73 floor5, saying that the photo mask 23 on the table 1 needs to be replaced, then the reader (not shown) issues a command to turn on the electromagnet 42. which through the system

0 levers squeezes the levers 53 and 54 from the photomask 23 (Fig. 3). Then, the drive 138 (Fig. 2) is turned on. The pushing member 135 (Fig. 2) is moved by the slide along the guides 140 and starts to move to the right. In the same

5, the pusher 135 moves the photomask 23 on the table 1. As soon as the rocker is in the extreme right position, the photomask 23 enters its cell in the cassette 95. The final

0 switch 142, which gives the command to search and remove the necessary photo-directory. At the same time, not stopping in the right-most position, moves to the left-most position and stops at the end switch 141.

After the command to move the photomask to table 1 is given, the cycle of operation of the device is repeated.

0 When moving the substrate and the photomask on the table 1 to remove dust from them, the substrates and photomasks are blown with purified compressed air. Devices for blowing substrates and photo masks conditionally not

5 are shown.

The advantage of the proposed device in comparison with the known one is as follows.

A cassette with substrates and cassettes with photo templates on the proposed device are arranged vertically, which allows the proposed device to be used in GAL FM (flexible automated protective mask forming line), since

5, it is possible to automatically replace cassettes with substrates and photo masks with transport robots.

Improves device performance by reducing the path of the substrate from the cassette to the table 1 to the zone

the exposure and the number of cassettes with substrates up to one unit (in the well-known bottom of the cassette: one is unloading, another is loading, which significantly reduces the time when replacing the cassette on the proposed device).

The dimensions of the device are reduced by eliminating the store with photo masks made in the form of a wheel, as well as by reducing the number of cassettes with substrates. (Instead of two cassettes, one is used).

The reliability of the device is improved as in the proposed device, the substrates and the photomasks are forced to move using a crank mechanism, which reduces the initial and final movement speed of the products, and in the known device, the substrates and photomasks move on inclined surfaces for their own weight, which can lead to jamming, jamming of the substrates and photo patterns on the transport rails, and the possibility of splitting products,

The fact that the main stops 22 and 24 (Fig. 2) of the mechanisms for fixing the substrates and photomasks in the proposed device are installed on opposite sides of the location of the vacuum sucker 25 (in the known device the main stops are installed on one side of the vacuum sucker) allows a cassette with substrates cassettes with photo masks can also be positioned on opposite sides of the location of the vacuum suction cup, and this arrangement of the cassettes allows the substrates and photo masks to be fed onto the table 1 by ejectors 114 and 128 for estvleni exposure process, and also permits the displacement of the substrates and photomasks kzsse- you back in 70 mi zatalkivatel and 135. In this case, the movement of substrates and photomasks is effected along the shortest path that allows substantially increase productivity.

The vertical arrangement of the cassettes with the substrates and the photomasks makes it possible to fully automate the process of exposing, since the replacement of the cassettes is carried out using a transport robot serving the entire line.

To reliably move substrates and photomasks from cassettes to table 1 and from table 1 back to cassettes, the guides in the cells of the cassettes for the substrates and the photo masks have the ability to be above the corresponding guides on the table at the time of unloading, and at the time of loading the substrates or photo masks into the cassettes for substrates or photomasks in the cells of the cassettes have the opportunity to be located below the respective guides on the table.

The fact that the photomask fixation levers are spring-loaded, are located on the movable frame and, through a system of levers, interact with the electromagnet, allows the photomask 23 to be securely fixed by the levers 53 and 54 on the movable frame 33, without any interaction of these levers with the levers 49

5 and 50 during oscillation of the movable frame 33 on ball bearings 36 rotating eccentrically on the shafts 38. To release the levers 53 and 54 from the photomasks 23 (when the frame 33 does not oscillate), the levers 53 and 54 interact with a system of levers, in particular levers 49 and 50, which makes it possible to press two levers 53 and 54 using a single electromagnet 42.

The fact that the side fixing lever 63 of the fotoshablon of the photomask fixing mechanism is located on the movable frame 33 is spring-loaded, has the possibility of oscillatory movement around the axis 62, is glued-shaped and one end

0 of the lever ends with a flat spring 65 allows the photomask 23 to be pressed against the side wall of the guide 34 by the force of the ejector 128, without using a separate drive for this purpose, which

5 simplifies the design of the device.

The fact that the pushers and pushers for substrates and photo masks in the device are located on opposite sides of the respective cassettes and the substrate pusher is located below the photomask guides, and the photomask pusher is located above the photomask guides to allow the substrates and photomasks to move to the area

5 to expose them and place them above the vacuum sucker at different levels, and then from this zone transport them to the appropriate cassettes.

Claims (1)

Invention Formula 0 A device for combining and exposing a photomask and a substrate, containing a table with a suction cup, an illuminator, cassettes for substrates and photomasks, conveying devices, 5 mechanisms for fixing substrates and photo masks, characterized in that, in order to automate work, increase productivity and reliability, ejectors and eztalki gaels of substrates and photo masks are inserted into it, and the pushers are located on opposite sides of the plane in which the guides for photo masks are located on the table on the track of the movement of the substrates on both sides of the suction cup stops are installed, the mechanism for fixing the photomasks is made in the form of spring-loaded levers, located on the movable frame with the possibility of interaction with the drive, and the spring-loaded side locking lever of the photomask fixing mechanism is made of a tongue-shaped shape and is mounted with the possibility of oscillatory-rotational movement, well n FIG. I / 3, Q Hyg 15,. M Type A eleven ten FIG. 2 60 50 6f 5C Bb hoSepHymo W 80 USH Air V-V rotated 13 59 Fig.z TS & A 57 Fy