SU1654789A1 - Apparatus for electronic components environmental testing - Google Patents

Abstract

This invention relates to semiconductor manufacturing and can be used for environmental testing.

Description

The invention relates to the field of semiconductor manufacturing and can be used for climate tests while simultaneously measuring the electrical parameters of electronic products (IET), in particular integrated circuits (IC).

The purpose of the invention is to reduce energy consumption and increase productivity by increasing the intensity of heat transfer.

FIG. 1 shows a device, a longitudinal section; FIG. 2 is a section A-A in FIG. one; in fig. 3 is a section BB in FIG. 1, FIG. 4 - duct, incision

The device contains a gaseous coolant preparation unit, made in the form of the first 1 and second 2 cylinders, in the first cylinder 1 are placed the heater 3 and the cooler 4, the heater 3 in the form of a quartz cylindrical lamp, on which the metal spiral 5 is wound, the cooler 4 in the form of a tube evaporator pipe 6 is connected to a source of liquid nitrogen supply (not shown) through a pipeline on which electromagnetic valve 6 is installed. Cylinder 1 by input 7 is connected to a source of heat carrier gas (not shown), and Exit 9 - with the microchamber 10. The cylinder 2 is connected to the inlet 11 of the microchamber 10 and outlet duct 12 through the coaxial passage 8 - with a silencer (not shown). Cylinder 2 is surrounded by thermal insulation 13.

The Kvartsev cylindrical lamp is attached to the contact-holders 14 mounted on electrical insulating sleeves 15. The voltage to these holders is supplied using heat-resistant drives connected to connector 16. At the entrance to the microcamera 10 there is a hot junction of thermocouple 17 graduated chromel-alumel The cold ends of which are also connected to the connector 16. The ratio of the surface area of the spiral Sc to the area of the active part of the 5L quartz cylindrical lamp is defined as

is 4: 5 ratio

tempeh area of lovestone in helix S, and the non-metallic part of lnmpa LP

Experimentally, in the process of using the proposed heater and the ratio of these cases (2 L ef4 and heat transfer cisnt decreased, it was determined by the increase in time g (

reducing the accuracy of maintaining the gaseous flow iypn / cc ymper

same flow turbulization at 0x

O l

increases | and equals n1, ill. r and “gehenna. The device works as follows.

som

IN THE INITIAL STATE, 1 (ll fir TOD10TOVKI

gaseous heat carrier produces an upper position in this psm ispipug

IEM (IC) 18 I load into the contacting device (CU) 1G of the control panel with the equipment of the control panel (CRO) 20 on the plane of which is ngcc |

The r33oo6pajnor preparation unit (j and the-thinner body is transferred to the extreme position of it (Fig. 1) and connected to the microcamera 10, after which it is automatically underneath, - (with the flow of gaseous heat-transfer agent (prepared with

air), which enters through cylinder 1, heats up or cools depending on the selected mode and enters microcamera 10, where, washing the subjects of the IET 18, informs them of the specified -. The temperature at which the measurement of the parameters is carried out Then the gaseous plunger is partially given up its energy to the IET 18 body, the contact 1L / yvuyu device, the 19 microcamera 10 and the difference IHOU

parts of the pulse KIO 2C cylinder 2 sheet goes to the device output

After completing the measurement of the njpaner ditch of the IET 18 unit under the ogpvkch gaseous coolant, regenerate i g by the unit

its position IEG 1B and, -i, k, t 7 p K /

19 and others are placed in their place. Then the cycle repeats.

When tested in the heating mode, the flow of gaseous heat transfer fluid washing heater 3 is favored by the presence of a metal spiral 5 on the surface of a quartz cylindrical lamp and is highly turbulized. The consequence of this is a significant increase in the intensity of the heat transfer coefficient of the heat transfer coefficient and in the process of energy transfer from the heater 3 to the flow of the gaseous coolant. In this case, an electric current is not supplied to the metal coil 5, it is heated from a quartz cylindrical lamp, and its total surface area is 4-5 times larger than the surface of the active part of a quartz cylindrical lamp, i.e. The metal coil plays the role of an additional (passive) heater, which allows ensuring, with maximum efficiency, the transfer of energy emitted by a quartz cylindrical lamp to the flow of a gaseous heat transfer medium.

The heat transfer coefficient a depends to a large extent on the value of the Re (Reynolds) criterion. Due to the presence of the metal spiral 3, it is increased by 1.5 times, if we proceed only from the structural dimensions. If we take into account the character of the flow around the turns of the metal spiral, the criterion Re will increase even more and, consequently, the coefficient a will increase approximately 2-2.5 times.

The metal coil 5 also performs its positive role during tests in the cooling mode, since the extremely turbulent or gaseous flow promotes more intensive mixing and evaporation of liquid nitrogen supplied through the solenoid valve 7 and the tubular evaporator 4,

The removal of the exhaust gaseous coolant through the coaxial channel of the duct 8 has several advantages.

Thus, the flow of exhaust gaseous coolant, having almost the same temperature as the flow of gaseous coolant in cylinder 1, is a very effective additional heat insulator for the entire heater 3.

In addition, this flow, washing the axial channel of the duct 8, gives it a part of its

the remaining energy, as a result of which it is utilized. The efficiency of this process is enhanced by the turbulization of the exhaust gaseous flow, thanks to the presence of annular projections 22 (FIG.

2) in a coaxial duct 8.

Since the exhaust gaseous stream does not extend beyond the microcamera 10 through its end surface adjacent to the gasket .21. to internal volume

the casing 23, the surface adjacent to the microcamera 10 is not covered with a layer of snow, and frost does not form on the surface of the contacting device 19.

In this case, the exhaust flow

The coaxial channel allows reducing the working pressure of the gaseous coolant while maintaining the high quality of the testing process, which also allows energy savings.

Claims (1)

Apparatus of the Invention A device for environmental testing of electronic equipment, comprising a gas preparation unit a heat carrier with a heater and a cooler, a micro chamber and a source of heat carrier gas, characterized in that, in order to reduce energy consumption and increase productivity by increasing the heat exchange rate, it prepares the heat carrier gas in the form of coaxially placed first and second cylinders in the first of which placed the cooler and a heater made in the form of a quartz cylindrical lamp with a metal spiral wound along its entire surface, the inlet of the first cylinder is connected to a source of heat carrier gas, and the output is with a microcamera, the cavity of which is associated with the input of the second cylinder, the output of which is the output of the device, the ratio of the surface area Sc of the helix to the area of the active part of the quartz lamp Sn being in the range 4-5. F bb Fig.Z FIG. 2