JP3247714B2 - Element heating / cooling test equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an element heating / cooling test apparatus.

[0002]

2. Description of the Related Art Various devices have been proposed in the prior art for element heating / cooling test equipment. For example, in a conventional element heating / cooling test apparatus 70 shown in FIG.
Heating block 73 is attached to bolt 7
4 and the like. A heater 75 is embedded inside the heating block 73, and the upper surface of the heating block forms a sample stage 76.

In this element heating / cooling test apparatus 70,
An appropriate sample is placed on the sample stage 76 and cooled to a cryogenic region of about 10 K by a cryogenic refrigerator 71 or heated to a high temperature region by a heater 75.

[0004]

However, in the above-mentioned prior art element heating / cooling test apparatus 70, a cryogenic refrigerator 71 is used.
Heating by the heater 75 is 100
The limit was about ° C.

[0005] However, due to various demands, 300 specimens are required.
There is a demand for heating to about ° C.

On the other hand, in the prior art disclosed in Japanese Utility Model Publication No. 61-45872, a sample is cooled with a cryogen such as liquid nitrogen instead of a cryogenic refrigerator. However, with this conventional technique, the sample can be heated to about 300 ° C., but the limit of the cooling temperature is as high as about 77 K at most.

Accordingly, it is an object of the present invention to make it possible to heat and cool a sample in a wide temperature range.

[0008]

Configuration of the Invention

[0009]

In order to solve the above-mentioned technical problems of the present invention, the technical means of the present invention is to provide an element heating / cooling test apparatus including a cryogenic refrigerator having a cold head, Are thermally coupled to the cold head and have a cooling water passage formed therein, and one surface is thermally coupled to the other surface of the cooling device, and a heater is disposed therein and That is, the heating means has a sample stage formed on the surface, and a space heat insulating layer is formed between the cooling means and the heater.

[0010]

According to the above-mentioned technical means of the present invention, the sample on the sample stage is cooled to the cryogenic region by the cryogenic refrigerator, and the cryogenic refrigerator is cooled via the space heat insulating layer and the cooling means. After heat insulation, the sample is heated to a high temperature region.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment embodying the technical means of the present invention will be described below with reference to the accompanying drawings.

1 and 2, a cryogenic refrigerator (for example, a reverse Stirling cycle / GM cycle refrigerator or a pulse tube refrigerator) in an element heating / cooling test apparatus 10 is shown.
1 cold head 12, cooling means 13 and heating means 1
4 is thermally coupled in series via bolts 15, 16 and the like. The upper surface of the heating means 14 forms a sample stage 17 on which a sample (not shown) is placed. Although not shown here, the cold head 12 to the vicinity of the sample stage 17 are generally housed in a vacuum vessel.

A cooling water passage 18 through which cooling water flows is formed inside the cooling means 13. A spiral groove 19 as shown in FIG. 2 is formed inside the heating means 14,
The groove 19 is open on the side of the heating means 14 which is in contact with the cooling means 13. At the bottom of the groove 19, a spiral heater 20 is disposed so as to be in close contact with the groove 19. As a result, a space heat insulating layer 21 is formed between the heater 20 and the cooling means 13. It is desirable that the groove 19 be formed as deep as possible, and that the heater 20 be as close to the sample stage 17 as possible. Further, in this embodiment, the shape of the groove 19 and the arrangement of the heater 20 are shown as spiral shapes, but the shape is not particularly limited as long as the sample stage 17 can be efficiently heated.

The operation of the device heating / cooling test apparatus 10 having the above configuration will be described. First, after placing the sample on the sample stage 17, when cooling the sample, the cryogenic refrigerator 11 is operated and the sample is cooled via the cooling means 13 and the heating means 14 by the refrigeration output generated in the cold head 12. Cooling. At this time, the cooling water does not flow into the cooling water passage 18 and the heater 20 is not energized. Therefore, when the sample is cooled, the cooling means 13 and the heating means 14 simply act as heat conductors.

On the other hand, when heating the sample, first, cooling water is supplied to the cooling water passage 18, and then the heater 20 is energized. Here, since the heater 20 is arranged in a spiral shape, the entire surface of the sample stage 17 can be uniformly heated, and thus the entire sample can be uniformly heated. The temperature of the sample stage 17 is constantly monitored by a temperature sensor (not shown) or the like, and the amount of electricity supplied to the heater 20 is controlled.
The sample is heated to a desired temperature. Further, since the heater 20 is disposed in close contact with the bottom of the groove 19, the sample stage 17 can be efficiently heated, and the heat transfer amount to the cryogenic refrigerator 11 side can be reduced by the space heat insulating layer 21. Minimized. Further, of the heat generated by the heater 20, the heat transmitted to the cooling means 13 is cooled by the cooling water flowing through the cooling water passage 18. Therefore, the amount of heating of the cryogenic refrigerator 11 when heating the sample is very small. As a result, the sample can be heated and cooled from a very low temperature range of about 10K to a high temperature range of about 300 ° C.

Although the arrangement of the cooling water passage 18 is not specifically shown, it may be formed in a spiral shape like the heater 20, but the arrangement is not particularly limited.

[0017]

As described above, in the element heating / cooling test apparatus of the present invention, since the space heat insulating layer and the cooling means are provided between the heater and the cryogenic refrigerator, the cryogenic refrigerator using the heating means is provided. Unnecessary heating can be suppressed. Therefore, the sample can be heated to a high temperature region and cooled to a cryogenic region without adversely affecting the cryogenic refrigerator.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an element heating / cooling test apparatus according to an embodiment of the present invention.

FIG. 2 shows a front view of a main part in FIG.

FIG. 3 shows a configuration diagram of a conventional device heating / cooling test apparatus.

[Explanation of symbols]

 Reference Signs List 10 element heating / cooling test apparatus, 11 cryogenic refrigerator, 12 cold head, 13 cooling means, 14 heating means, 17 sample stage, 18 cooling water passage, 20 heater, 21 space heat insulating layer.

Continuation of the front page (56) References JP-A-1-104349 (JP, A) JP-A-61-68547 (JP, A) JP-A-1-43350 (JP, A) JP-A-4-150952 (JP, A) , A) Fully open 1988-107729 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) B01L 7/00 B01L 11/00-11/02 G01N 25/00

Claims (1)

(57) [Claims] A cryogenic refrigerator having a cold head; cooling means having one surface thermally coupled to the cold head and having a cooling water passage formed therein; The heating means is thermally coupled, has a heater disposed therein, and has a sample stage formed on the other surface, and a space heat insulating layer is formed between the cooling means and the heater. An element heating / cooling test apparatus, characterized in that: