JPH0686940A - Element cooling heating tester - Google Patents

Abstract

PURPOSE:To cool and heat a sample within a wide temp. region. CONSTITUTION:The cold head 12 of an extremely low temp. freezer 11, first and second cooling means 13, 14 and a heating means 15 are connected in series and a sample stage 18 is formed on the upper surface of the heating means 15. Further, for example, a spiral groove is formed to the heating means 15 and a heater 45 is arranged to the bottom of the spiral groove. As a result, a spatial heat insulating layer 46 and the first and second cooling means 13, 14 are arranged between the heater 45 and the extremely low temp. freezer 11 and, therefore, the unnecessary heating of the extremely low temp. freezer 11 due to the heating means 15 is suppressed. Further, by allowing a cooling medium whose temp. is lower than that of the first cooling means 13 to flow to the second cooling means 14, a sample can be precooled prior to the cooling of the sample to an extremely low temp. region due to the extremely low temp. freezer 11.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an element cooling / heating test apparatus.

[0002]

2. Description of the Related Art Various prior arts for element cooling and heating testers have been proposed. For example, in the conventional element cooling / heating test apparatus 70 shown in FIG.
1 cold head 72 and heating block 73 bolt 7
4 and the like are thermally coupled. A heater 75 is embedded inside the heating block 73, and the upper surface of the heating block forms a sample stage 76.

In this element cooling and heating tester 70,
An appropriate sample is placed on the sample stage 76, and it is cooled to an extremely low temperature region of about 10 K by the cryogenic refrigerator 71 or heated to a high temperature region by the heater 75.

[0004]

However, in the above-described prior art element cooling / heating test apparatus 70, the cryogenic refrigerator 71 is used.
For protection of, the heating by the heater 75 is 100 at most.
The limit was about ℃.

However, due to various demands, the sample is kept at several hundred degrees Celsius.
There is a demand for heating to a certain degree.

On the other hand, in the prior art disclosed in Japanese Utility Model Publication No. 61-45872, the sample is cooled with a cryogen such as liquid nitrogen in place of the cryogenic refrigerator. However, with this conventional technology, the sample can be heated up to about 300 ° C., but the cooling temperature limit becomes as high as about 77 K.

In view of the above, the technical problem of the present invention is to allow the sample to be cooled and heated in a wide temperature range.

[0008]

[Constitution of the invention]

[0009]

The technical means of the present invention taken to solve the above-mentioned technical problems of the present invention is an element cooling / heating test apparatus, a cryogenic refrigerator having a cold head, and one surface. Is thermally coupled to the cold head, the first cooling means having a first passage in which the first refrigerant flows is formed, and one surface is thermally coupled to the other surface of the first cooling means. The second cooling means in which the second passage, through which the second refrigerant having a temperature lower than that of the first refrigerant flows, is thermally coupled to the other surface of the second cooling means, and the heater is provided therein. At the same time, the second refrigerant flows through the inside of the heating means, and the sample stage is formed on the other surface of the heating means, and the space heat insulating layer is formed between the second cooling means and the heater.

[0010]

According to the above-described technical means of the present invention, the sample on the sample stage is cooled to the cryogenic region by the second cooling means and the cryogenic refrigerator, and the space heat insulating layer and the first cooling means are used. The sample is heated to a high temperature region after being insulated from the cryogenic refrigerator.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments embodying the technical means of the present invention will be described below with reference to the accompanying drawings.

In the element cooling / heating test apparatus 10 shown in FIGS. 1 to 3, a cold head 12 of a cryogenic refrigerator (for example, a reverse Stirling cycle / GM cycle refrigerator, a pulse tube refrigerator, etc.) and a first cooling means. 13, the second cooling means 14 and the heating means 15 are welded or bolts 16,
They are thermally coupled in series via 17 or the like. The upper surface of the heating means 15 forms a sample stage 18 on which a sample (not shown) is placed. Although not shown here, the cold head 12 to the vicinity of the sample stage 18 are generally housed in a vacuum container.

A cooling water passage (first passage) 20 through which a first refrigerant such as cooling water flows is formed inside the first cooling means 13, and a supply pipe 21 and a discharge pipe 22 are connected to both ends thereof. .

As can be seen from FIG. 2, an annular passage (second passage) 30 in which a second refrigerant having a temperature lower than that of the first refrigerant such as liquid nitrogen (LN ₂ ) flows inside the second cooling means 14. A coolant reservoir (second passage) 31 is formed. Further, the supply pipe 32 is connected to a part of the annular passage 30, and the annular passage 3
0 and the refrigerant reservoir 31 communicate with each other through a communication passage 33.
The conduction block 34 that divides the annular passage 30 and the refrigerant reservoir 31 plays a role of conducting the cold heat of the cold head 12 to the sample stage 18, like the outer wall portion 35 of the second cooling unit 14. The discharge hole 3 is provided on the upper surface of the second cooling means 14.
6 and 37 are open and communicate with the vertical passages 40 and 41 formed in the heating means 15, respectively. Further, the discharge pipe 38 communicates with a vertical passage 42 formed in the heating means 15, which will be described later.

The heating means 15 has a rectangular cross section in FIG.
Two planar spiral grooves 43 and 44 are formed as shown in FIG. 2 and communicate with the vertical passages 40 and 41, respectively. Here, a heater 45 is disposed so as to be in close contact with the upper bottom of the groove 43 (on the side of the sample stage 18). As a result, the space heat insulating layer 4 is provided between the heater 45 and the lower bottom of the groove 43.
6 is formed. It is desirable that the vertical lengths of the grooves 43 and 44 be formed as long as possible, and that the upper and bottom of the groove 43 be as close as possible to the sample stage 18 so that the heater 45 can be as close as possible to the sample stage 18. .

Electric power is supplied to the heater 45 from the outside via a connector 47. The grooves 43 and 44 are independent at one end, but are connected at the other end to communicate with the vertical passage 42.

In the present embodiment, the grooves 43, 44 are shown to have a rectangular cross-sectional shape, but the shape is not limited to this rectangular shape and may be vertically long such as a capsule-shaped section or an oval-shaped section. Any shape is acceptable. Also, the grooves 43, 4
Although the planar shape of 4 is shown as a spiral shape,
If the sample stage 18 can be heated efficiently, it is not particularly limited to this shape.

The operation of the element cooling / heating test apparatus 10 having the above construction will be described. First, when the sample is placed on the sample stage 18 and then the sample is cooled, the cryogenic refrigerator 11 is operated and the cold head is operated while injecting the second refrigerant from the supply pipe 32 of the second cooling means 14. The first cooling means 1 by the refrigerating capacity (several K to several tens of K) generated in 12
3. The sample is cooled through each block of the second cooling means 14 and the heating means 15.

At this time, the second injected from the supply pipe 32
The refrigerant flows through the annular passage 30, the refrigerant reservoir 31, and the grooves 43, 44.
Flow through each block of the second cooling means 14 and the heating means 15 and the sample to the temperature of the second refrigerant (77 K for LN ₂
Since it is pre-cooled to a certain degree, the cooling rate of the sample can be dramatically increased. In addition, in this embodiment, the second refrigerant is fed to the groove 4
Although it flows to both 3, 44, it may flow to only one of them.

When the sample is cooled, the first cooling means 13 is used.
No cooling water is supplied to the heater 45 and the heater 45 is not energized. Therefore, at the time of cooling the sample, the first cooling means 13 and the heating means 15 act as mere heat conductors. Then, after the temperature of the sample is lowered to the temperature of the second refrigerant or less,
The supply of the second refrigerant to the cooling means is stopped. Therefore, a temperature sensor (not shown) or the like is arranged on the sample stage 18.

On the other hand, when heating the sample, first, the first coolant is supplied to the cooling water passage 20 (the second coolant is not supplied), and then the heater 45 is energized. Here, since the heater 45 is arranged in a spiral shape according to the shape of the groove 43, the entire surface of the sample stage 18 can be heated uniformly, and thus the entire sample can be heated uniformly. The temperature of the sample stage 18 is constantly monitored by a temperature sensor or the like,
The sample is heated to a desired temperature by controlling the amount of electricity supplied to the heater 45. Further, since the heater 45 is disposed in close contact with the bottom of the groove 43, the sample stage 18 can be efficiently heated, and the space heat insulating layer 46 allows the heat transfer amount to the cryogenic refrigerator 11 side. It can be kept to a minimum. Further, among the heat generated by the heater 45, the heat transferred to the second cooling means 14 and the first cooling means 13 is
It is cooled by the cooling water flowing through the cooling water passage 18. Therefore, the heating amount of the cryogenic refrigerator 11 at the time of heating the sample is very small. As a result, the sample can be cooled and heated from an extremely low temperature region of about 10K to a high temperature region of about 800 ° C.

Although the arrangement state of the cooling water passage 20 is not particularly shown, it may be formed in a spiral shape like the heater 45, but the arrangement state is not particularly limited.

[0023]

As described above, in the element cooling heating test apparatus of the present invention, since the space heat insulating layer and the first cooling means are arranged between the heater and the cryogenic refrigerator, the cryogenic temperature by the heating means is reduced. Unnecessary heating of the refrigerator can be suppressed. Therefore,
The sample can be heated to a high temperature region and can be cooled to a cryogenic region without adversely affecting the cryogenic refrigerator.

Further, by flowing the second refrigerant having a temperature lower than that of the first refrigerant through the second cooling means, the sample can be pre-cooled prior to the cooling of the sample to the cryogenic region by the cryogenic refrigerator, so that the cryogenic refrigeration is performed. The cooling efficiency by the machine can be improved and the cooling time can be shortened.

[0025]

[Brief description of drawings]

FIG. 1 shows a block diagram of an element cooling / heating test apparatus according to an embodiment of the present invention.

FIG. 2 shows a view on arrow A in FIG.

FIG. 3 shows a view on arrow B in FIG.

FIG. 4 shows a block diagram of a conventional element cooling / heating test apparatus.

[Explanation of symbols]

 10 element cooling / heating test apparatus, 11 cryogenic refrigerator, 12 cold head, 13 first cooling means, 14 second cooling means, 15 heating means, 18 sample stage, 20 cooling water passage (first passage), 30 annular passage (Second passage), 31 Refrigerant reservoir (second passage), 45 Heater, 46 Space heat insulating layer.

Front page continuation (72) Inventor Kaoru Masuda 1-10-13 Hongo, Bunkyo-ku, Tokyo Inside Technoro Industrial Co., Ltd.

Claims (1)

[Claims] 1. A cryogenic refrigerator having a cold head, a first cooling means having one surface thermally coupled to the cold head and having a first passage formed therein, through which a first refrigerant flows, and one surface. A second coolant that is thermally coupled to the other surface of the first cooling means and in which a second coolant having a temperature lower than that of the first coolant flows
A second cooling means having a passage formed therein, one surface of which is thermally coupled to the other surface of the second cooling means, a heater is disposed inside the second cooling means, and the second refrigerant flows through the inside; An element cooling / heating test apparatus comprising a heating means having a sample stage formed on the other surface, and a space heat insulating layer is formed between the second cooling means and the heater.