SU1577819A1 - Method of producing contrast narrow-band filter having one layer of metal - Google Patents

Abstract

The invention relates to the technology of manufacturing optical filters by applying interference coatings on a substrate by a physical method and allows to increase the transmittance and reduce the distortion of the shape of the spectral curve. The method involves applying coating layers in a vacuum while simultaneously recording the intensity of the transmitted monochromatic radiation. The deposition of the quarter-wave stop layers stops at the turning points of the characteristic of the detected radiation intensity, the first resonating layer at a predetermined point, while fixing the point corresponding to the end of the deposition of the first resonating layer, and the deposition of the metal layer is stopped when the radiation intensity values are between radiation intensity at a fixed point and at a predetermined end point of the deposition of the first resonant layer. 2 Il.

Description

The invention relates to the technology of making optical filters by applying interference coatings to a substrate by a physical method.

The aim of the invention is to increase the transmittance and reduce the distortion of the shape of the spectral curve.

Figure 1 shows the change in the recorded signal in the manufacture of the filter in figure 2 - the spectral curves of the resulting filters.

Curves 1 and 3 relate to cases where the signal value is outside the range of values recorded before and after the application of the first resonating layer.

The manufacture of filters according to the proposed method is carried out on serial vacuum installations of the type UVN-2M-2 and others with subcollet equipment for the manufacture of interference coatings and with a photocontrol system of layer thicknesses at extreme points.

The photocontrol system includes: an illuminator (KGM lamp), focusing and transmitting optics (lenses, mirrors, glass plates), an MDR-4 monochromator, a photodetector, a recording device KSP4. The control of the thickness of the layers forming the filter is carried out directly on the manufactured parts.

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with

Manufacturing a 550 nm filter, for example “with a layer of silver, construction VNVNV 1.75 NA 1.75 N B N B N B P, where B is a high refractive index LnS dielectric layer, H is a low J Ag is a silver layer, and P is a substrate of glass, which is carried out as follows.

A control wavelength of 550 nm is installed on a WDR-4 monochromator. Film-forming materials LnS, h Ag, and K8 glass substrates are loaded into the evaporators. Pump the UVN-2M-2 unit to Pa. Include the rotation of the substrate and the photocontrol system. A PSC recorder is installed on the 98 divisions and the first fifth layers of LnS are deposited successively and, ceasing the sputtering at the first turning (extreme) points. An approximate count by division of the PSC 4 will be

The sixth layer is the first resonating layer and it should be applied with regard to the phase shift from the metal, i.e. 1.75 N. It is plotted as follows: the divisions of the PSC are set at 4 50 divisions and 1.75 N are sprayed. The count will be as follows: 50-81 - 54. The values of and 2 are fixed.

Then a layer of metal (silver) is sprayed in order to obtain a filter with maximal transmission and an undistorted spectral shape.

50

five

0

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0

the curve, the sputtering is stopped after passing the sharp A maxi-i mum signal A in the A2 A range of A.

The remaining layers are sprayed over the extremes, including the second resonating layer.

Claims (1)

Invention Formula A method of manufacturing a single-layer contrast narrowband filter consisting in applying a multilayer vacuum coating consisting of quarter-wave feet, a first resonating layer, a metal layer and a second resonating layer to the substrate, recording the intensity of the transmitted monochromatic radiation during the deposition, while sputtering the quarter-wave stop layers are stopped at the turning points of the characteristic of the detected radiation intensity, the first resonating layer is determined in advance The deposited point and the deposition of the metal layer cease after the passage of the maximum value of the recording intensity of the radiation, characterized in that, in order to increase the transmissions to reduce the distortion of the spectral curve, the characteristic point is additionally fixed before the application of the resonating layer, and the deposition of the metal layer is stopped radiation intensity, which are in the interval between the radiation intensity at a fixed point and at a predetermined end point neither the first resonant layer. Urn vi 8 N 8 N in 1.15N Ad 1.75N VN in N in t g s 4 s e 7 in 9 th and ptz Fig 1 r.% 50 40 20 500 550 Phie.g L, # m