CN2763776Y

CN2763776Y - Film thickness monitoring controller

Info

Publication number: CN2763776Y
Application number: CN 200420103612
Authority: CN
Inventors: 张庆州
Original assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Current assignee: Hongfujin Precision Industry Shenzhen Co Ltd; Hon Hai Precision Industry Co Ltd
Priority date: 2004-12-30
Filing date: 2004-12-30
Publication date: 2006-03-08
Anticipated expiration: 2014-12-30

Abstract

The utility model relates to a film thickness monitoring controller, which comprises a light source, a light detector, a single light meter, a plurality of light conducting elements and a light filter. The light source is used for providing light signals, wherein parts of the light signals are used as reference light signals and parts of the light signals are used as monitoring light signals. The light detector is used for detecting the input reference light signals and the monitoring light signals. The single light meter is used for filtering the input reference light signals and the monitoring light signals into single color light. The light conducting elements is used for transmitting the reference light signals generated by the light source to the single light meter, simultaneously the monitoring light signals generated by the light source can be transmitted to a film and the monitoring light signals reflected by the film can be transmitted to the signal light meter. The light filter is positioned between the single light meter and the light detector for selecting the light signals with corresponding monitoring wave length from the signal color light filtered by the signal color meter. The utility model can effectively eliminate the influence of monitoring results, e. g. other stray light, vibration, etc. In addition, all the elements are connected by the light conducting elements and thus the assembly of the film thickness monitoring controller is more convenient.

Description

The film thickness monitoring device

[technical field]

The utility model is about a kind of film thickness monitoring device, is meant the film thickness monitoring device in a kind of optical thin film manufacturing field especially.

[background technology]

Optical thin film is to reach its effect by interference effect basically, is meant that on optical element or separate substrates one or more layers dielectric film of plating or metal film or dielectric film membrane stack or metal film membrane stack change the light wave transmission characteristic.It is widely used in optical instrument, as a lot of fields such as image sensor, semiconductor laser, interferometer, glasses and optical fiber communication assembly, particularly be accompanied by combining of digital camera and portable electron devices such as mobile phone, the camera model demand progressively increases, corresponding a large amount of low-pass filters, infrared cutoff filter, high-level efficiency anti-reflective film, the colored filters etc. of just needing, it all relates to optical coating.

Optical thin film generally requires very high to thickness error, the narrow band filter slice used of optical fiber communication for example, and its total film number is about 100 layers, and the allowable error of each layer is about 0.003% film design.United States Patent (USP) the 5th, 156, No. 727, disclose shield that a kind of utilization can change shape and control the design of film thickness, it is after plated film is finished, thickness at coating system film that externally measured substrate plates, and change the shield shape according to measurement result and revise follow-up coating film thickness and distribute, this kind changes this plate shape again and revises the mode that follow-up coating film thickness distributes after plated film is finished, can't in coating process, carry out correct correction immediately, its operation is loaded down with trivial details and precision is low, than for the higher optical coating of complexity or accuracy requirement, is making still some difficulty for some designs.

Another kind of control light film film thickness is the optical thin film monitoring, and it is the gordian technique of preparation optical thin film, and he directly affects reflectivity, transmittance spectral characteristic and the polarization characteristic of film.The optical thin film monitoring is meant in optical thin film and is coated with in the process, for guaranteeing to produce qualified film product, (its measurement is carried out simultaneously) measured and controlled to reflectivity (or transmissivity) to film in process of plating in coating process, and measurement result is used for the film Thickness Control.During monitoring,, stop the rete evaporation, thereby realize control thicknesses of layers in case when measuring numerical value and reaching, just close plate washer immediately with the corresponding numerical value of desired film.

Please refer to Fig. 1, a kind of film thickness monitoring device 1 of existing optical thin film is as United States Patent (USP) the 3rd, 645, No. 623 disclose, it is made up of power supply 101, light source 102,

condenser

111 and 112, light hurdle 12, light

hurdle light hole

121 and 122, plane mirror 131, lens 141, monitoring substrate 15, plate 151, vacuum bell jar 152, lens 142, plane mirror 132, receiver 161, net grid 17,

condenser

113 and 114, receiver 162.This optical thickness monitor device 1 directly utilizes nature light path light conducting signal, the all strict light modulation contraposition in position of the installation site of each parts and angle and monitoring substrate 15, and very easily influence the aligning of light path in the use because of reasons such as vibrations, thereby influence monitoring precision.In addition, receiver is arranged to wide wave zone receiver usually, do not carry out sufficient Filtering Processing before the receiver 161 of this optical thin film supervising device 1 and 162 receiving optical signals, other wavelength can cause interference to monitoring when the monitoring single wavelength, thereby can influence measuring accuracy.

In view of this, provide a kind of good film thickness monitoring device of precision high stability of monitoring in fact for necessary.

[utility model content]

The purpose of this utility model is to provide a kind of good film thickness monitoring device of precision high stability of monitoring in fact for necessary.

The utility model film thickness monitoring device, in order to the film thickness in the monitoring coating process, it comprises a light source, a light detector, a single light apparatus, a plurality of light-guide device and a filtering apparatus.Wherein this light source is in order to provide light signal, and wherein the part conduct is with reference to light signal, and part is as the monitoring light signal; This light detector can be understood the variation of thickness in order to the reference optical signal and the monitoring light signal of detecting input by detecting result's variation; This single light apparatus is in order to reference optical signal and monitoring light signal filter monochromatizing light with input; These a plurality of light-guide devices are passed to single light apparatus in order to the reference optical signal that light source is sent, and the monitoring light signal that simultaneously light source is sent is passed to film and the monitoring light signal of film reflection is passed to single light apparatus; This filtering apparatus is between single light apparatus and light detector, in order to select the light signal of corresponding monitoring wavelength in the monochromatic light that filters from single light apparatus.

Compared with prior art, the utility model film thickness monitoring device is selected the light signal of corresponding monitoring wavelength in the monochromatic light that single light apparatus filters by filtering apparatus, effectively got rid of of the influence of other parasitic light to monitoring result, in addition, connect each parts by light-guide device, do not need the installation site between each one accurately to aim at adjustment with angle, only need light-guide device and each component alignment are got final product, increased the convenience of this film thickness monitoring device assembling and can effectively will hang down the influence of vibrations monitoring result.

[description of drawings]

Fig. 1 is existing film thickness monitoring device synoptic diagram.

Fig. 2 is the utility model first embodiment film thickness monitoring device synoptic diagram.

Fig. 3 is the utility model second embodiment film thickness monitoring device synoptic diagram.

Fig. 4 is the structural representation of two fiber optic collimator devices of the utility model second embodiment film thickness monitoring device.

[embodiment]

Please refer to Fig. 2, the utility model film thickness monitoring device is in order to the coating film thickness in the monitoring coating apparatus, and this film thickness monitoring device comprises light source 20, a plurality of light-guide device 21, light detector 23, single light apparatus 24 and filtering apparatus 25.

Light source 20 is generally Halogen lamp LED, and in order to light signal to be provided, part conduct is with reference to light signal after modulator (Chopper) 201 modulation for it, and a part conducts to the coating chamber 40 and the single light apparatus 24 of coating apparatus respectively as the monitoring light signal by light-guide device 21.

A plurality of light-guide devices 21 are passed to single light apparatus 24 in order to the reference optical signal that light source 20 is sent, and the monitoring light signal that light source 20 is sent is passed to film and the monitoring light signal of film reflection is passed to single light apparatus 24 simultaneously.It comprises optical fiber 211 and

condenser

2111 and 2112, optical fiber 212 and

condenser

2121 and 2122, optical fiber 213 and condenser 2131 and 2132.Wherein optical fiber 211 connects light source 20 and single light apparatus 24, and condenser 2111 is in order to sending light source 20 and modulated part optical signals is polymerized to optical fiber 211, in another section of optical fiber 211 by condenser 2112 input single light apparatus 24 and as with reference to light signal.Optical fiber 212 connects light source 20 and

coating chamber

40,2112 one-tenth one small angles of condenser 2121 and condenser, it can send light source 20 and modulated part optical signals is polymerized to optical fiber 212, imports coating chambers 40 and is incident in the film that is positioned at substrate 401 in the coating chamber 40 by condenser 2122 in another section of optical fiber 212.Optical fiber 213 connects coating chamber 40 and single light apparatus 24, and condenser 2131 is in order to being polymerized to optical fiber 213 with optical fiber 212 incidents and through the light of film reflection, at the other end of optical fiber 213 by condenser 2132 input single light apparatus 24 and as the monitoring light signal.

Light detector 23 is used to detect reference optical signal and monitoring light signal, and it mostly needs the different wavelength that detect to use for wide wave zone (as 400nm-1100nm) to provide on the processing procedure.Reference optical signal that its detecting light source transmits and light source light signal can be understood the variation of thickness through the monitoring light signal of film reflection by detecting result's variation.

Single light apparatus 24 is divided into monochromatic light in order to the light signal with optical fiber 211 and optical fiber 213 transmission, and is corresponding with the rete supervisory wavelength from the monochromatic light that monochromator 24 exit slits come out, and uses monochromator can reduce the influence of certain parasitic light to measuring-signal.

Filtering apparatus 25 is arranged between optical detector 23 and the single light apparatus 24, in order to select the light signal of corresponding monitoring wavelength in the monochromatic light that filters from single light apparatus.It comprises a rotating disk 251 and an a plurality of optical filter 252 and motor 253 that is arranged on the rotating disk 251, rotating disk 251 can rotate around axle 254 between single light apparatus 24 and optical detector 23, it is provided with a plurality of through holes 2511 and helical teeth 2512 near the peripheral part, a plurality of optical filters 252 promptly are arranged in a plurality of through holes 2511 of rotating disk 251, motor 253 comprises a drive link 2531, drive link 2531 ends are provided with the helical teeth 2532 that matches with the helical teeth 2512 of rotating disk 251, drive drive link 2531 rotations by motor 253, and the helical teeth 2512 by rotating disk 252 cooperates with the helical teeth 2532 of drive link 2531 and can drive dial rotation, thereby makes arbitrary filter plate in a plurality of filter plates 252 place light path between monochromator 24 and the optical detector 23.

The explanation of course of work principle: the light that light source 20 sends is derived two respectively and restrainted light after modulators modulate, and is wherein a branch of by condenser 2111 focusing and as importing single light apparatus 24 with reference to light signal by optical fiber 211, the formation reference path.Another is restrainted through after condenser 2121 focusing, by optical fiber 212 input coating chambers 40, enters optical fiber 213 input single light apparatus 24, formation monitoring light path as the monitor optical signal by condenser 2131 focusing after the film reflection.By monochromator 24 light signal is divided into monochromatic light, and by filter 25 selections and corresponding other parasitic light of wave filter filtering of required supervisory wavelength, thereby only allow single monitoring wavelength pass through, recording reference optical signal and monitoring light signal by detector, provide Thickness Variation situation in the monitor procedure by counter again.

Please refer to Fig. 3, the film thickness monitoring device of the utility model second embodiment is similar substantially to first embodiment, and one comprises light source 20, a plurality of light-guide device 21, light detector 23, single light apparatus 24 and filtering apparatus 25.Its difference is to adopt a pair of fiber optic collimator device 31 to replace the condenser 2122 and the condenser 2131 of the separation in first embodiment, adopts two fiber optic collimator devices 32 to replace the condenser 2112 and the condenser 2132 of the separation in first embodiment.

Please refer to Fig. 4, is that example explains with two fiber optic collimator devices 31, and this pair fiber optic collimator device 31 comprises an optical fiber contact pins 311 and collimation lens 312 and a sleeve 313.This optical fiber contact pins has a through hole 3111, optical fiber 312 and optical fiber 313 are interspersed in above-mentioned through hole 3111 and are fixed in it by viscose glue, collimation lens 312 also is projected to film at a certain angle in order to the beam collimation that optical fiber 312 is sent, after the film emission, be projected to collimation lens end face 3121 in opposite direction, import the optical fiber 213 that light beam converges into single light apparatus 24 by collimation lens 312 with equal angular.Sleeve 313 is in order to fixing two optical fiber contact pins 311 and collimation lens 312.

The utility model film thickness monitoring device only allows single monitoring wavelength pass through, and all the other all parasitic lights of filtering, has effectively increased the degree of accuracy of optical monitoring, makes the optical coating processing procedure be stablized and effectively control.In addition, connect each parts by light-guide device, do not need the installation site between each one accurately to aim at adjustment, only need light-guide device and each component alignment are got final product, increased the convenience of this film thickness monitoring device assembling and can effectively will hang down the influence of vibrations monitoring result with angle.

Claims

1. a film thickness monitoring device, be used for monitoring the film thickness of coating process, it comprises a light source, one light detector, one single light apparatus, a plurality of light-guide devices, this light source provides light signal, wherein the part conduct is with reference to light signal, part is as the monitoring light signal, the reference optical signal of this light detector detecting input and monitoring light signal, understand the variation of thickness by detecting result's variation, this single light apparatus is with the reference optical signal and the monitoring light signal filter monochromatizing light of input, these a plurality of light-guide devices are passed to single light apparatus with the reference optical signal that light source sends, the monitoring light signal that simultaneously light source is sent is passed to film and the monitoring light signal of film reflection is passed to single light apparatus, it is characterized in that: this film thickness monitoring device also comprises a filtering apparatus, and it selects corresponding light signal of monitoring wavelength between single light apparatus and light detector and from the monochromatic light that single light apparatus filters.

2. film thickness monitoring device as claimed in claim 1 is characterized in that: this light source is a Halogen lamp LED.

3. film thickness monitoring device as claimed in claim 1 is characterized in that: these a plurality of light-guide devices comprise a plurality of optical fiber and are arranged at the condenser at a plurality of optical fiber two ends.

4. film thickness monitoring device as claimed in claim 1, it is characterized in that: these a plurality of light-guide devices comprise three optical fiber, and an optical fiber is passed to single light apparatus with the part optical signals of light source, and an optical fiber is passed to film with the part optical signals of light source, and another optical fiber is passed to single light apparatus with light signal.

5. film thickness monitoring device as claimed in claim 4 is characterized in that: these a plurality of light-guide devices comprise the condenser that is arranged at three optical fiber two ends.

6. film thickness monitoring device as claimed in claim 4, it is characterized in that: two optical fiber ends that are connected with single light apparatus are connected with a pair of fiber optic collimator device, two optical fiber ends that are connected with optical thin film also are connected with a pair of fiber optic collimator device, and two optical fiber ends that are connected with optical fiber are respectively arranged with condenser.

7. film thickness monitoring device as claimed in claim 1 is characterized in that: this filtering apparatus comprises a rotating disk and a plurality of optical filter.

8. film thickness monitoring device as claimed in claim 7 is characterized in that: this rotating disk is provided with a plurality of through holes near the peripheral part, and above-mentioned a plurality of optical filters promptly are installed on this a plurality of through holes.

9. film thickness monitoring device as claimed in claim 7 is characterized in that: this filtering apparatus comprises a motor, and this motor comprises that a drive link is in order to drive the rotating disk rotation.

10. film thickness monitoring device as claimed in claim 9 is characterized in that: this drive link end is that scroll bar cooperates with turbine with rotating disc, and drive link end and rotating disc periphery are respectively arranged with the helical teeth that cooperatively interacts.