CN100437151C - High-light even facula adjustable projector - Google Patents

High-light even facula adjustable projector Download PDF

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Publication number
CN100437151C
CN100437151C CNB2007100539356A CN200710053935A CN100437151C CN 100437151 C CN100437151 C CN 100437151C CN B2007100539356 A CNB2007100539356 A CN B2007100539356A CN 200710053935 A CN200710053935 A CN 200710053935A CN 100437151 C CN100437151 C CN 100437151C
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China
Prior art keywords
light
optically focused
modulator
lamp
light source
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CNB2007100539356A
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CN101013168A (en
Inventor
赵升林
党亚军
菊池和夫
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Henan middle Optical Group Co., Ltd.
Nanyang Sino optics Electromechanical Equipment Co., Ltd.
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Henan Costar Group Co Ltd
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Abstract

The invention is a high-brightness uniform light adjustable light spot projecting device used for the optical coating monitoring system, and its main characteristics are: the light source firing box has the tungsten lamp with spotlight cover, one side of the box connecting with a fixed speed motor modulator through the supporting pillar, the outer light source of the modulator correspondingly connecting with the tungsten cylinder, and the cylinder has a focusing lens component which can move and adjust along the axis. Using this projector, it can not only produce high-brightness strong light source, but have stable modulation optical output, will achieve the desired uniform light effect. And light spot size is adjustable, so it can guarantee uniform and consistent light spot projecting, but also obtain the uniform small spot in long distance, and the light spot intensity is strong.

Description

High-light even facula adjustable projector
Technical field
The invention belongs to technical field of optical coating, especially for a kind of high-light even facula adjustable projector of optical membrane plating monitoring system.
Background technology
In technique known, the light projector device that is used for the optical coating monitoring, generally comprise light emitted, modulated light wave and three parts of optically focused transmission, the defective that exists is: what 1, the light emitted part adopted usually is incandescent lamp bulb, or side one plane or cambered surface catoptron are so that strengthen the brightness of emission light behind incandescent lamp bulb.Because the light that incandescent lamp itself sends is more weak, and light source is the directional light that scattered light or process reflection produce at the light of exit pupil direction emission, the light beam that sees through of exit pupil is very little in addition, overwhelming majority ray cast wastes to the light source tank wall, therefore the utilization factor of luminous energy is low, and the light of outgoing too a little less than, cause thus a little less than the light signal of supervisory system, monitoring identification difficulty is big, weak effect.
2, the modulator that is used for modulated light wave adopts the rotary power of common electric machine as chopper wheel usually, the fluctuation because of supply voltage often makes the chopper wheel rotating speed inhomogeneous, cause the wavelength and the frequency of modulated beam of light inhomogeneous thus, influence and reduced the monitoring accuracy and the monitoring effect of light signal.Secondly, the unthreaded hole on the chopper wheel mostly is circle or sector structure, and the light wave after the modulation is the approximate trapezoid curve, and its peak value is difficult for differentiating, and produces harmonic noise, brings difficulty for the monitoring of signal.
3, the collector lens in the optically focused mirrored cabinet, its spot position is fixing and nonadjustable, when the wavelength bandwidth range of transmitted light, owing to can't adjust the focal length of lens, and make the hot spot that projects on the comparison sheet excessive sometimes, can not all project on the comparison sheet, cause optical energy loss thus, and cause the decay of light signal.
Summary of the invention
The purpose of this invention is to provide and a kind ofly can produce intense light source, and can project high brightness and hot spot evenly, the high-light even facula adjustable projector of adjustable size.
Realize that the technical scheme that purpose of the present invention is taked is: this device is made up of light emitted case, modulator, optically focused lens barrel, wherein, in the light emitted case, be provided with the tungstohalogen lamp of band optically focused lampshade, casing one side connects the modulator of a band constant-seed motor by pillar, the output light source end correspondence of modulator is connected with the optically focused lens barrel, be provided with the focus lens assembly that can move axially adjusting in the lens barrel, the light beam output terminal of optically focused lens barrel is equipped with positioning link by ring flange.
Described tungstohalogen lamp is made up of halogen tungsten lamp, the optically focused lampshade and the lamp socket that have an ellipsoid, and the caustic surface of optically focused lampshade is towards the optical channel of lamp socket, and links to each other with the lamp socket spiral-lock.
Described lamp socket is packed on the preceding inwall of light emitted box body, the center of lamp socket is the cavity with optical channel, and communicate with the light source perforation hole that is provided with on the casing antetheca, lamp socket is an inclined-plane towards the end face of light source, halogen tungsten lamp and lampshade are tilting to be installed on this inclined-plane.
Angle α between the optically focused optical axis of described optically focused lampshade and the emergent light axis of light beam perforation hole is 10~30 °.
The sidewall of described casing correspondence respectively is provided with air inlet and heat radiation air outlet, and in the corresponding position of air inlet blower fan is housed, and is provided with the wind-force cushioning fender with the air inlet corresponding position in the casing, and and wall box between form air intake passage.
Described modulator is made up of modulator housing, chopper wheel and constant-seed motor, and chopper wheel is contained in the housing, and constant-seed motor is contained in outside the housing, and its output shaft is connected with the chopper wheel center, the circumference uniform distribution rectangle unthreaded hole of chopper wheel.
The barrel of described optically focused lens barrel is provided with and is used to regulate the axially movable adjustment hole of focus lens assembly.
Described focus lens assembly is made up of collector lens, lens holder, set screw, and collector lens is packed on the lens holder, and the set screw of installing on it is stretched out outside the adjustment hole.
Spare the adjustable hot spot light projector of light according to the high brightness that such scheme is made, not only can produce the intense light source of high brightness, and modulated light wave output is stable, can make the even light effect of modulated light wave reach perfect condition, and spot size is adjustable, can not only guarantee the homogeneity of hot spot projection, make it on remote, obtain even small light spot, and the light intensity of hot spot be stronger.Thereby can effectively avoid because of the excessive light projector loss of signal that causes of focal beam spot disperse area.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2 is the structural representation of chopper wheel.
Embodiment
Referring to Fig. 1, high-light even facula adjustable projector of the present invention, be by light emitted case 101, modulator, the optically focused lens barrel is formed, wherein, light emitted case 101 antethecas are provided with the light source perforation hole 109 that is used to launch light beam, inside is provided with the tungstohalogen lamp 102 that can produce the intense light source high brightness, this tungstohalogen lamp 102 is by halogen tungsten lamp, the optically focused lampshade and the lamp socket 107 that have ellipsoid are formed, lamp socket 107 is packed on the preceding inwall of light emitted box body 101, the centre of lamp socket 107 is the cavity structure that has optical channel 110, its end face towards light source is an inclined-plane, halogen tungsten lamp and lampshade are tilting to be installed on this inclined-plane, make the angle that has 10~30 ° between the emergent light axis of the optical axis of lampshade optically focused and light beam perforation hole, can avoid like this causing outgoing beam to carry blackening because of filament imaging on emergent light axis.Halogen tungsten lamp is positioned on the back focus of ellipsoidal spotlight cover, and the light that halogen tungsten lamp sends is through the reflection of optically focused lampshade, and its light all is focused on the emission focus, can make the light intensity of light source and colour temperature reach the strongest state.Because halogen tungsten lamp is the intense light source high brightness lamp, long time continuous working can produce very high heat, when temperature is too high, then power supply is produced impedance, thereby can cause the loss of voltage, reduce luminosity, the light intensity of influence emission light beam, this case the sidewall of light emitted case 101 respectively correspondence be provided with wind sheltering mouth 106 and heat radiation air outlet 103, and blower fan 105 is housed in the corresponding position of air inlet 106, for making each heat radiation of light fixture evenly, alleviate directly blowing of blower fan wind-force, in the casing corresponding, be provided with wind-force cushioning fender 104 with air inlet 106, this baffle plate can and wall box between form air intake passage, and on the circumferential wall of lamp socket 107, also laid a plurality of heat radiation air holes 108, can avoid illuminator overheated effectively, guarantee emission light intensity and stability.
In this case, be equipped with between modulator and the light emitted case and be used for heat insulation pillar 111, be used to avoid the influence of higher temperature that light emitted case 101 produces projecting beam.Described modulator comprises modulator housing 201, chopper wheel 202 and constant-seed motor 203, chopper wheel 202 is contained in the housing 201, constant-seed motor 203 is contained in outside the housing 201, and its output shaft is connected with chopper wheel 202 centers, the circumference uniform distribution rectangle unthreaded hole (referring to Fig. 2) of chopper wheel 202.Chopper wheel 202 unthreaded holes adopt rectangular configuration, can make the light wave curve after the modulation be the near sinusoidal curve, with the contrast of enhancing signal peak value, realize the high resolving power of monitor signal.The constant-seed motor of installing has the at the uniform velocity effect of modulated light wave, by constant-seed motor 203, drive chopper wheel 202 and remain at the uniform velocity rotation, can avoid causing the ANOMALOUS VARIATIONS of emission optical signal frequency, thereby reach the optimum efficiency of modulated light wave frequency uniformity because of chopper wheel 202 fluctuations of speed.Output light source hole 204 ends with modulator, correspondence is connected with the optically focused lens barrel of being made up of lens barrel 301a, 301b, the binding site of two lens barrels connects by securing member, in lens barrel 301b, be provided with the focus lens assembly that can move axially adjusting, and correspondence is provided with adjustment hole 305 on the barrel of lens barrel 301b.Focus lens assembly is made up of condenser lens 304, lens holder 302 and set screw 303, and collector lens 304 is packed on the lens holder 302, and the set screw 303 of installing on it is stretched out outside the adjustment hole 305.The light beam exit end of optically focused lens barrel 301b is fixed with positioning link 307 by ring flange 306, can be connected with the entrance pupil on the base plate in coating machine evaporation chamber and communicate by positioning link 307, outgoing beam can be projected plated film in the evaporation chamber relatively on the sheet.Also can be connected with optical splitter by positioning link 307, through reflector box, the plated film that outgoing beam is projected in the evaporation chamber compares on the sheet by optical splitter.When light modulated bands of a spectrum range, can be by adjusting the position of mobile collector lens 304, the hot spot that process is focused on all is incident upon plated film and compares on the sheet, and the luminance brightness that projects on the comparison sheet is strengthened, thereby can avoid because of the excessive light projector loss of signal that causes of focal beam spot disperse area, make the spot size that projects on the comparison sheet remain at optimum condition, and can improve the homogeneity and the stability of projection optical signal, improve the monitoring and the control effect of thickness with this.

Claims (7)

1, a kind of high-light even facula adjustable projector, form by light emitted case, modulator, optically focused lens barrel, it is characterized in that: the tungstohalogen lamp that in the light emitted case, is provided with band optically focused lampshade, casing one side connects the modulator of a band constant-seed motor by pillar, the output light source end correspondence of modulator is connected with the optically focused lens barrel, be provided with the focus lens assembly that can move axially adjusting in the lens barrel, the light beam output terminal of optically focused lens barrel is equipped with positioning link by ring flange.
2, high-light even facula adjustable projector according to claim 1, it is characterized in that: described tungstohalogen lamp is made up of halogen tungsten lamp, the optically focused lampshade and the lamp socket that have an ellipsoid, the caustic surface of optically focused lampshade is towards the optical channel of lamp socket, and links to each other with the lamp socket spiral-lock.
3, high-light even facula adjustable projector according to claim 2, it is characterized in that:, the center of lamp socket is the cavity with optical channel, and communicate with the light source perforation hole that is provided with on the casing antetheca, lamp socket is an inclined-plane towards the end face of light source, and halogen tungsten lamp and lampshade are tilting to be installed on this inclined-plane.
4, according to claim 2 or 3 described high-light even facula adjustable projectors, it is characterized in that: the angle α between the optically focused optical axis of described optically focused lampshade and the emergent light axis of light beam perforation hole is 10~30 °.
5, according to claim 1,2 or 3 described high-light even facula adjustable projectors, it is characterized in that: the sidewall of described light emitted box body correspondence respectively is provided with air inlet and heat radiation air outlet, with the corresponding position of air inlet blower fan is housed, is provided with the wind-force cushioning fender with the air inlet corresponding position in the casing, and and wall box between form air intake passage.
6, according to claim 1,2 or 3 described high-light even facula adjustable projectors, it is characterized in that: described modulator is made up of modulator housing, chopper wheel and constant-seed motor, chopper wheel is contained in the housing, constant-seed motor is contained in outside the housing, its output shaft is connected with the chopper wheel center, the circumference uniform distribution rectangle unthreaded hole of chopper wheel.
7, according to claim 1,2 or 3 described high-light even facula adjustable projectors, it is characterized in that: described focus lens assembly is made up of collector lens, lens holder, set screw, the barrel of described optically focused lens barrel is provided with and is used to regulate the axially movable adjustment hole of focus lens assembly, collector lens is packed on the lens holder, and the set screw of installing on it is stretched out outside the adjustment hole.
CNB2007100539356A 2007-02-01 2007-02-01 High-light even facula adjustable projector Active CN100437151C (en)

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CN100437151C true CN100437151C (en) 2008-11-26

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102854724B (en) * 2012-08-30 2014-11-05 深圳市绎立锐光科技开发有限公司 Adjustment method and device of projection light source
CN106556557A (en) * 2015-09-29 2017-04-05 中国辐射防护研究院 A kind of optical measurement chamber of measurement aerosol concentration
CN106851864B (en) * 2017-03-01 2019-08-23 华中科技大学 A kind of continuously adjustable concentration photo-thermal device of two-part
CN110145713B (en) * 2019-06-12 2021-04-20 徐州工程学院 LED projecting lamp of adjustable light center distance

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2472191Y (en) * 2001-03-20 2002-01-16 杨树梅 Membrane thickness monitor with inner reflecting and two optical beams
CN1707307A (en) * 2005-04-08 2005-12-14 中国科学院上海光学精密机械研究所 Optical film thickness monitoring system
JP2006030070A (en) * 2004-07-20 2006-02-02 Opto One Kk Film thickness inspection device
CN2763776Y (en) * 2004-12-30 2006-03-08 鸿富锦精密工业(深圳)有限公司 Film thickness monitoring controller
US20060082786A1 (en) * 2003-01-11 2006-04-20 Sang-Youl Kim Apparatus and method for measurement of film thickness using improved fast fourier transformation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2472191Y (en) * 2001-03-20 2002-01-16 杨树梅 Membrane thickness monitor with inner reflecting and two optical beams
US20060082786A1 (en) * 2003-01-11 2006-04-20 Sang-Youl Kim Apparatus and method for measurement of film thickness using improved fast fourier transformation
JP2006030070A (en) * 2004-07-20 2006-02-02 Opto One Kk Film thickness inspection device
CN2763776Y (en) * 2004-12-30 2006-03-08 鸿富锦精密工业(深圳)有限公司 Film thickness monitoring controller
CN1707307A (en) * 2005-04-08 2005-12-14 中国科学院上海光学精密机械研究所 Optical film thickness monitoring system

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Effective date of registration: 20090821

Address after: Henan Nanyang China Optics Group Co., Ltd. 254 Zhongzhou Road, Henan, China: 473000

Co-patentee after: Nanyang Sino optics Electromechanical Equipment Co., Ltd.

Patentee after: Henan middle Optical Group Co., Ltd.

Address before: Henan Nanyang China Optics Group Co., Ltd. 254 Zhongzhou Road, Henan, China: 473000

Patentee before: Henan Costar Group Co., Ltd.