SU1500822A1 - Method of measuring plane angle of an object - Google Patents

Abstract

The invention relates to instrumentation technology and can be used to measure the flat angles of optical components with flat reflective surfaces. The aim of the invention is to improve the accuracy and speed of measurements. As an angle sensor, a tunable laser with a dispersive resonator is used, whose tunable reflector is made in the form of a multifaceted prism. On the prism set the measured object. The laser beam is expanded to a size that provides reflection from two adjacent faces and the object's face. Rotate a multifaceted prism with an object. The wavelengths of the dual-frequency laser generation are measured at the same time when radiation is reflected from the first face of an object and the first face of a multifaceted prism, then when reflected from pairs of neighboring Q faces of a multifaceted prism, the normals to which are located inside the measured angle multifaceted prism and the second face of the object. The measured values of the wavelengths and the known angular dispersion of the resonator determine the angles between the normals to the reflecting surfaces, which cause the two-frequency generation of laser radiation, and the angle between the normals to the first and second edges of the object is determined as the sum of the angles obtained. The remaining angles of the object are determined similarly. 2 Il.

Description

The invention relates to instrumentation technology and can be used to measure the flat angles of optical components with flat reflective surfaces.

The aim of the invention is to improve the accuracy and performance of measurements.

Figure 1 shows the block diagram of the device that implements the proposed method; figure 2 - the relative location of the object, many.

face prism and cross section of the expanded laser beam (hatched).

The device contains a rotary table 1, on which a multifaceted prism 2 and object 3 are located. As the angle sensor a tunable laser with a dispersive resonator is used, in which the prism 2 is a tunable reflector. Active substance 4, element 5, approx. giving angular dispersion, beam expander 6 and output reflector 7

sc go

1h5

8, the laser communicates optically with a multichannel laser wavelength meter 9.

As element 5, a dispersion prism or diffraction grating can be used (in Fig. 1, a transmission grid is shown). The expander 6 of the laser beam can serve as a lens or prism two-coordinate telescope. The magnification of the telescope is chosen so that a laser beam falling on a multi-faceted prism 2 and object 3 can experience simultaneous reflection from the adjacent faces of the multi-faceted prism and the object's face.

The method of measuring the flat angles of an object is implemented as follows.

The object to be measured 3 is installed together with a multifaceted prism 2 on the turntable. Expand the laser beam to a size that provides reflection from two adjacent faces of a multifaceted prism 2 and the face of an object 3 (see Figure 2). Drive t swivel

From the measured values of the wavelengths J and Ha of a known dependence of DC), each j-e symbol is calculated.

table 1. in rotation and turn on the laser.

Wavelengths are measured. Radiation of the angle between the qth face of the multi-point caused by the reflection of the laser beam from the first face of the object 3, thereby fixing the angular position of the normal to this face during the rotation of the object 3, and simultaneously appearing in the laser spectrum of the wavelengths

 , caused by reflection from the first facet of a polyhedral prism 2 (j is the current measurement number).

granular prism and second edge of the object

Jil

Lg

- Lmj) di.

ii-f

Statistical averaging of the values of Fo is performed and the refined value of the angle is determined.

The flat angle between

.and the first facet of the object:

 R u () d.

XCJ)

lt

Statistical averaging is performed to determine the refined value of the angle Ф,.

From the measured values of the pairs of wavelengths L, the generation due to the reflection of the laser beam from the i-th and (1 + 1) -th faces of the polyhedral prism 2, and the known dependence D (1), each je value of the angles P is calculated between the normals to the adjacent faces of a multifaceted prism; I..

.. city (

Perform a statistical averaging of each of the calculated angles.

 .-. The determined T values are determined. - and find their sum --1

f,.

1, 1

By measuring the measured wavelengths J and Ya of the known DC dependence, each jth angle between the qth facet and the polynomial angle between the qth facet of a polyhedral prism and the second facet of the object are calculated.

Jil

Lg

- Lmj) di.

ii-f

Statistically averaged values of Fo are produced and the updated value of the angle is determined.

The flat angle between

40 consecutive first and second faces of object 3 are measured.

-,

1 in the laser spectrum of a pair of wavelengths and - D two-frequency generation, caused by the simultaneous reflection of the laser beam from the i-th and (1 + 1) -th faces of the prism Сi 1, 2, .. q-I, where 45 q is the number of faces of the multifaceted prism. 2, the normals to which are located inside the measured angle formed by the normals to the edges of the object). Marked amount

. bi. Similarly, the rest is determined

angles of object 3

: f, ..

Claims (2)

1. A method for measuring flat angles of an object, comprising: An object with one of the reflection prisms of wavelength l and corresponding to the appearance in the laser spectrum of the same, as before, values of wavelengths A - caused by reflection from the second face of the object 3 is attached to the 50th due to reflection from the qth 50. According to measured wavelengths   f  And the known angular dispersion and () of the resonator calculate. Each j-e value of the angle between A f and tunable laser, rotate the reflector, fix the normals to the reflecting edges of the object, and determine the angles between the edges of the object by changing the wavelength of the tunable laser radiation, so that , in order to increase the accuracy and performance of the measurement, as a reflector -, as sum . bi. Similarly, the rest angles of object 3 : f, .. Invention Formula 1. A method for measuring flat angles of an object, comprising: tunable laser, rotate the reflector, fix the normals to the reflecting edges of the object and determine the angles between the edges of the object by changing the wavelength of the tunable laser radiation, so that in order to increase the accuracy and performance of the measurement, as a reflector the resonator uses a multifaceted reception, the laser beam is expanded in the plane of dispersion and in its perpendicular direction until the beam is reflected from two adjacent faces of the prism and from the object's face, pairs of wavelengths of two-frequency laser generation are measured and, taking into account the angular dispersion of the resonator determines the angle between the normal to one of the object's faces and the normal to the nearest prism edge angle; successively determine the angles between the normals to the adjacent pairs of prism faces located inside the angle formed Normal mi to m grand object, then determining the angle between the normal to the latter side of the prism positioned inside measured 00822 angle and the normal to the second face of the object, after which the angle between the first and second faces of the object is determined as the sum of the measured angles and the angles between the other faces of the object are determined in a similar way. 2. The method according to n.lj, which is different from ay - yi and with the fact that measuring angles to when turning a multifaceted prism within the range of angles in which. dual-frequency generation occurs, caused by the reflection of radiation from the same face of a prism or face 15 of the object and the closest angular position of the prism face, pairs of wavelengths of double-frequency lasing are measured many times in the process of tuning the resonator and the measurement results 20 each angle is averaged. figure 1 gjus.z