SU1355863A1 - Interferometer for measuring angles of turn of object around axis - Google Patents

Abstract

The invention relates to the field of measurement technology and can be used for precision measurement of the angles of rotation of various objects around an axis. The aim of the invention is to increase the sensitivity and accuracy of measuring the angles of rotation of an object, achieved by increasing the increment of the difference in the paths in the branches of the interferometer when the controlled object rotates due to repeated reflections of the interfering P1 beams in both branches. The laser beam 4 is divided into a beam splitter 2 into two, each of which is directed into a system of three flat mirrors. Mirror 5 — common to all branches — is associated with the object of measurement. With its reversal, the path length of a beam repeatedly reflected by a system of mirrors increases in one branch, and decreases in another. Due to this, a change in the path difference of interfering beams occurs, which is registered by the registration unit 10. 2 Il. i (L Type A in with SP CL 00 a 00 (Pu8. g

Description

The invention relates to a measurement technique and can be used to precisely measure the angles of rotation of various objects around an axis.

The purpose of the invention is to increase the sensitivity and accuracy of measuring the angles of rotation of an object by increasing the increment of the path difference in the branches x of the interferometer when the controlled object rotates due to multiple reflections of the interfering beams in both branches x.

Figure 1 shows the scheme of the interferometer; Fig. 2 is a view along arrow A in Fig. 1.

The interferometer diagram (Figs. 1 and 2) denotes laser 1, a beam splitter 2, beam 3 obtained by reflecting a part of the laser radiation by a plate., Beam 4, which represents the last part of the laser beam that passed 2, common to both branches of the interferometer flat mirror 5, fixed on the object to be monitored parallel to the axis of its rotation, flat mirrors 6 and 7, which form a blunt dihedral angle with each other whose edge is parallel to mirror 5 flat mirrors 8 and 9, perpendicular to mirrors 6 and 7 and forming edges E dihedral angles constitute proxy mirrors 6 and 7 to the mirror 5, acute angles T and the registration unit 10. The beam splitting surface of the plate 2 lies in the plane, which is the bisector of the dihedral angle formed by the mirror Nffl 6 and 7. The laser 1 is oriented so that the beams 3 and 4 are directed inside the dihedral angles formed by the mirrors 6 and 5, 7 and 5 respectively, under angles j 90 - ni (n is an odd number) to their edges and in parallel, mirrors 6 and 7. The interferometer works as follows.

The laser beam 1 is divided by plate 2 into two beams 3 and 4. Having reflected many times from mirrors 5, 6, 8 and 5, 7, 9, respectively, these beams are returned to the beam splitting plate 2, combined with it and interfere. The result of their interference is recorded by block 10. When mirror 5 is rotated, the optical path length of the beam in one of the branches increases and decreases in the other. Wherein

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an increment and difference in the course of the interfering beams occurs, which is registered by the block 1P.

As a result of multiple reflections of the beams in the branches of the interferometer, the small angles of rotation of the mirror 5 provide a significant increment of the difference in the path, in the result of which the sensitivity and accuracy of measurements increase.

Claims (1)

Invention Formula 0 five 0 five 0 five An interferometer for measuring the angles of rotation of an object around an axis, containing a radiation source, a beam-splitting plate installed in the path, a radiation beam of the source, two mirror systems installed along the beam passing and reflected by the beam-splitting plate, respectively, 5 located in such a way that its optical axis coincides with mirror. The image of the source beam axis formed by the beam-splitting plate is distinguished by 01 ic 0 in order to increase the sensitivity and accuracy of measurement, the mirror systems contain one common flat mirror fixed on a controlled rotation axis parallel to it, the second and third flat mirrors fixed so that their reflecting surfaces are facing the reflecting surface of the first mirror and form with each other a blunt dihedral angle, the edge of which is parallel to the first mirror, the fourth and fifth flat mirrors, fixed in such a way that they reflect 1e of the surface The spines are perpendicular to the second and third flat mirrors, respectively, facing the edges of the dihedral angles formed by the first and second, as well as the first and third mirrors, respectively, and the acute angles with these edges are 1, the source is laser-shaped and so that the axis. its beam is parallel to the second flat mirror and is with the edge of the dihedral angle formed by the first and second flat mirrors, an angle of 90 ° is n, gd, and is an odd number, and the beam splitter is oriented so 31355863 at the same time that it divides the surface of the Angle formed by the second and third parallel to the dihedral of the dihedral mirrors. Editor A. Ogar Compiled by M.Shemchukov Tehred I. Veres Proof-reader A. Obruchar Order 5767/37 Circulation 677 Subscription VNIIPI USSR State Committee for inventions and discoveries 113035, Moscow, Zh-35, Raushsk nab., 4/5 Production and printing company, Uzhgorod, Projecto st., 4 U8.f