SU1275176A1 - Gate-type charging arrangment - Google Patents

Abstract

The invention relates to pipe fittings and can be used in high-vacuum apparatus. The purpose of the invention is to increase productivity by creating conditions for the separate production of vacuum 33 WttW3l36 107 W5 fffff has a mind in the transitions of connections: a galuzov nozzle - the device body and a device body - a process chamber, which is achieved by using two independent one-way valves 30 and 31. Grinding of support-connecting plugs 25 with the mechanisms for moving the valves 30, 31 and their external branch pipes on one detachable rear flange 24 diagonally reduces the overall dimensions of the device, reduces the metal consumption, simplifies the manufacturing conditions and reduces the laboriousness of manufacturing and maintenance, improves the appearance and Terms and Conditions of Requirements for Safety. w Transfer of the hook 23 of the body, the support roller 46 and the hook 45 of the slide block: 109 and 2 fO ffOtff N9 LED a

Description

pa to the rear end of the slider 39 and the rear flange changes the order of operation of the shutter 30 - closes it in the rearmost position, freeing coaxially arranged front nozzles for the through movement of the 10S loader mechanisms and creates a backup position of the transducer; load on the carriage shut-off valve. 3 hp f-ly, 8 ill.

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The invention relates to reinforcement construction and can be used in high-vacuum apparatus.

The purpose of the invention is to increase the productivity due to the separate formation of a vacuum in the junctions of the compounds.

FIG. 1 shows the device, a general view; in fig. 2 shows section A-A in FIG. one; in fig. 3 is a section b-kg kg of FIG. 2 (substrate load; 1; holders); in fig. 4 shows a section BB in FIG. 2 (overload podposchkoderzhateley); in fig. 5 shows a section B-B in FIG. 1 (kinematic scheme of the fur, the closure of the shutter lock the outlet pipe); in fig. 6 is a view of FIG. 1 (location of external cylindrical nozzles with electric drives attached to them on a removable rear sealing flange of the housing); in fig. 7 - section D-Dnafig. four

(scheme of pumping gases from the airlock); in fig. 8 is a section d-d in FIG. 4 (schematic prrdukuigazov through the airlock).

The device comprises a box-shaped housing 1 of rectangular cross-section, formed by two side 2, top 3 and bottom 4 walls.

On the upper wall 3, two parallel nozzles are made — the rear boot 5 with sealing flags and sealing elements, the outer 6 and inner 7, and two radial holes, a large 8 vacuum and a small 9 purge with inert gases, and a front 10 with a connecting flange 11 ,

On the bottom wall 4 is made of the connecting pipe 12 coaxially with the front pipe 10 of the upper wall 3. It has an internal sealing flange 13 with a sealing element and an external connecting 14.

A flange 15 is made on one of the side walls 2, to which the means 16 for evacuating the body 1 is attached (Fig. 1-5).

On the inner side of the side walls 2 of the housing 1, two guides 17 are fixed in a mirror image, each of which has two longitudinal, parallel and upper 19, lower, 19, grooves with two supporting surfaces each and, respectively, mutually on the inner flange 7 of the loading nozzle 5. along the upper 20 and lower 21 of the support surface, which are located perpendicular to the flange 7 of the nozzle 5 (Fig. 8).

A thrust pad 22 with a hook 23 is fixed on the front wall of the housing 1, the reference plane of which is located parallel to the axis of the nozzles 10 and 12 (Figs. 1, 3 and 4).

In the rear part, the housing 1 is closed with a sealing flange 24 located perpendicular to the direction 17 of the side walls 2 (Fig. 1-6).

On the inner surface of the flange 24, two support-connecting plugs 25 are made; on the outer surface, coaxially with the plugs 25, there are two nozzles 26 with a thread 27 at the ends (r. 1, 2 and 5X Plugs 25 and the nozzles 26 are located diagonally on the flange 24, perpendicular to its A second thrust liner 28 with a hook 29 is fixed on the inner surface of the flange 24, the supporting plane of which is parallel to the plane of the liner 22 and the flange 24 (Fig. 1-6).

Inside the housing 1 there are two independent shutters, an overload 30 and a sealing 31.  31 The carriage 32 of the overload gate 30 is connected by means of two horizontal axes 33 and four rollers 34 fixed on their ends with upper longitudinal grooves 18 and four vertical axes 35 with four rollers 36 on them - with upper supporting planes 20 guides 17 (FIGS. 2 and 8) To the carriage 32, by means of four earrings 37, fixed rotationally on axles 33 of carriage 32 and axes 38, a slider 39 is attached, on the outside of which a valve 40 is fixed with a charging socket 41 and a holder 42 of substrate holders 4 rear end of the carriage 32, an abutment 44 is mounted, a hook 45 and a support roller 46 fixed to the axis 47 of the eyelet 4B are mounted on the back end of the pole 39, on the rear end 47 (FIG.  1, 3 and 4).  In the center of the carriage 32, an adjustable vertical stop 49 of the slider 39 is mounted in the open position of the shutter 30 (FIG. 8).  At the front end of the carriage 32, there is a stand 50 with a horizontal stop 51, limiting the displacement of the slide 39 to its extreme forward position (FIG.  3).  The valve 40, the slider 39 and the carriage 32 are arranged parallel to the inner sealing flange 7 of the charging port 5 of the housing 1 (FIG. 3). The carriage 32 and the slider 39 are interconnected by two stretched springs 52 (FIG.  3).  At the rear end of the carriage 32, there is an eyelet 53, the axis 54 of which is rotationally connected to the movement of the mash 30, including a link 55, an L-shaped double-arm lever 56 connected by an axis to the upper support-connecting fork 25 of the flange 24, an arc-shaped link 57, a rod 58 with directional bearings Qimi 59, located in the guide grooves of the upper fork 25 and the lead screw 60 connected and cooperating with the uterine nut 61 of the gearbox 62 of the electric drive 63 (Figs. 1 and 2).  The base of the rod 58 is connected to the end of the nozzle 26 by a bellows 64, a germatizing body 1 (FIG.  2).  The carriage 65 of the sealing gate 31 is connected by means of two horizontal axes 66 and four rods b, fixed at their ends, to the lower LONGITTED PENZSYAG-TI 19 and four vertical axes 68 with four rollers 69 on them - with shsedimna bearing surfaces 2 guides 17 (FIG.  eight).  To the carriage 65 by means of four earrings 70 fixed rotatably on axles 66 and axes x 71, on the side of the connecting nozzle 12, a slider 72 is connected. On the opposite side of the carriage 65, coaxially with the front nozzle 10 of the upper wall 3 of the housing G in the extreme front flap 3, the second holder 42 of the substrate holders 43 is fixed (FIG.  1, 3, 4, and 5), a sealing valve 73 located parallel to the slider 72 is attached. sealing flange 13pipe 12 (FIG.  1, 3 and 8).  At the front end of the carriage 65, an adjustable stop 74j is mounted at the front end of the slider 72 — a hook 75 and a support roller 76 fixed on the axis 77 of the lugs 78 (FIGS. 1, 3 and 4).  At the rear end of the carriage 65 there is a post 79 with a horizontal stop 80 limiting the displacement of the slider 72 to the rearmost position, and a horizontal eyelet 81, The carriage 65 is connected to the slider 72 by two extended springs 82 (FIG.  1, 3, 4 and 5).  The horizontal eye 81 of the carriage 65 is connected rotationally and movably by an axis with a shutter movement mechanism 31 including a link 83, an L-shaped double-arm lever 84 connected by an axis with a lower supporting-connecting fork 25 of the flange 24, an arc-shaped link 85, a rod 86 with guide guides rollers 87 located in the guide grooves of the lower fork 25, and a lead screw 88 connected and cooperating with the uterine nut 89 of the gearbox 90 of the electric drive 91.  The base of the rod 86 is connected to the end of the lower pipe 26 with a bellows 92, sealing the housing 1.  The outer flange 6 of the rear boot nozzle 5 of the upper wall 3 of the housing 1 has an external sealing gate valve 93 with a locking mechanism that includes a double-arm-shaped lever 94 rotatedly fixed by means of an axis 95 and lugs 96 on the wall 3 of the housing 1 Sfig.  1, 3 and 4).  To one arm 97 of the lever 94, a valve 93 is hingedly movably connected, and its other arm 98 is connected by a connecting rod 99 by an axle 100 to an eye 101 of a rod 102 having two guide rollers 103 located in the guide grooves 104 of the housing of the electric drive 105, and spindle screw 1 On, connected to the fallopian nut of the electric drive 105.  The actuator 105 is fixed with a flare nut 107 on the bracket 108 of the rear sealing flange 24.  An automatic manipulator torch-loader 109 with a rod 110, a gripping mechanism 111 and three grippers 112 are tightly connected to the connecting flange 11 of the front branch pipe 10, the gripping mechanism 111 and three grippers 112, the evacuation means 113 are attached to the branch pipe of the larger radial hole 8 of the branch pipe 5 (FIG.  7 and 8).  By its connecting flange 14 of the nozzle 12 of the bottom wall 4 of the housing 1, the device is hermetically connected to a vacuum process chamber 114 having a multi-stage transport processing device 115 with holders 42 of the submersible holders 43 (Fig.  one).  The substrates 11 are fixed to the sub-burners 43. The electric drives 63 and 91 with the electric motors 117 and 118 and the switches 119 and 120 are fixed to the branch pipes 26 of the flanges 24 with quick-release cap nuts 121 (FIG.  2, 5 and 6).  The moving mechanisms and locking the valves 30 and 31 with their electric actuators 63 and 91, the locking mechanism of the gate valve 93 with the electric actuator 10, and the mechanisms for moving the rod 110 and the grippers 112 of the manipulator-overload ka 109 with their electric drives have a flexible kinematic connection and work autonomously from a control unit equipped with a microprocessor or an electronic computer machine (computer), which generates signals for switching on and off of the corresponding electric motors according to the program specified in it.  The feedback signals about the implementation of the mechanisms of the commands of the computer issued in the ZVM switches 119 and 120, and others.  Each electric drive is supplied (FIG.  1, 2 and 5).  The device works as follows.  The mechanisms for moving and closing the overload gate 30 operate as follows (FIG.  1, 2, 3, 4 and 8).  After turning on the power supply of the electric motor 117 of the electric drive 63, the rotation of the motor core 117 is transferred by means of the reducer 62 to the mother-nut 61, which, rotating around its axis, screws into the lead screw 60 (Fig.  1, 2 and 5).  The lead screw 60 with the rod 58 and the guide rollers 59 attached to the ends of the axis connecting the rod 59 with the arcuate earring 57 makes a straight forward movement.  In this case, the rollers 59 are moved by rolling along the guide grooves of the support-connecting fork 25 and exclude the possibility of rotational oscillations of the driving screw 60, the rod 58 and the bellows 64, the rear end of the arcuate earring 57 performs straight line movements together with the rod 58, and the front rotational movements around the axis rotation of the L-shaped two shoulders lever 56, while at the same time the lever 56 and with it the rear end of the earring 55.  The front end of the earring 55, together with the shaft 54, the eye 53, the carriage 32 and the bolt 30 mounted on it, makes straight line movements of the bolt 30 and all the parts included in its composition: two horizontal axes 33 with four rollers 34, four vertical axes 35 roller 36, four earrings 37 and two axes 38 with sliders 39, valve 40 with socket 41 and holder 42, substrate holder 43 with substrate 116, hook 45 and support roller 46 of the slide 39, stops 44, 49 and 51 carriages, two brushes 52, pressing the slider 39 to the carriage 32.  The vertical stop 49 keeps the slider 39 and the valve 40 at a predetermined distance from the flange 7 and prevents the possibility of arbitrary, uncontrolled movement of it forward.  In this case, four horizontal rollers 34 move along the upper longitudinal grooves 18, and four vertical rollers move along the upper bearing surfaces 20 of the guides I7.  In this position, the valve 30 is moved until the bearing rollers 59 of the rod 58 come into contact with the rear bearing surfaces of the slots of the support-connecting fork 25.  Switch I19 provides a signal to the control unit, by which the motor 117 is turned off.  The shutter 30 stops at the extreme forward position.  When this occurs, the combination. The axes of the torch 109 and the clapia 40 with the charging socket 41 and the holder 42 with the for-holder 43.  By feeding reverse power to the motor I17, all the moving parts of the mechanisms are moved in the opposite direction and j is reciprocating movement of the shutter 30 in: to the back of the rear feed inlet 5 along the upper wall 3 of the housing I.  The first is to touch the support surface of the thrust liner 28, the support roller 46 of the slide 39.  His hook 45 at this moment is below the hook, 29 of the liner 28.  The carriage 32 continues to move until the contact of the anvil 44 on the surface has been inserted 28, rolling under the slider 39.  The earrings 37 rotate on axles 33 and 38 to a vertical position.  The slider 39 and valve 40 move in the direction of the flange 7 of the nozzle 5.  The valve 40 with its sealing surface deforms the sealing element of the flange 7 and forms with it a tight connection, through which the possibility of the penetration of gases into the body 1 is excluded.  At the same time, the roller 46, rotating on the axis 47 of the lugs 48 by rolling on the bearing surface of the liner 28, rises up together with the slider 39, and the hook 45 engages with the hook 29 (FIG. The Crawley 39 rests against the rear end of the horizontal stop 5 of the column 50 of the carriage 32.  Springs 52 Extendable. Switch 119 triggers a signal about the position of the shutter 30. It is closed, and elektronigom I17 is turned off.  This position of the mechanisms corresponds to the extreme rear position of the shutter 30, in which the axes of the valve 40 of the loading slot 41 and the holder 42 of sub-burners 43 are aligned with the axis of the flange 7 of the loading nozzle 5 (FIG.  four).  The mechanism for moving and closing the shutter 31 works in the same way as the shutter mechanism 30, with the difference that the locking of the shutter 31 does not take place in its rearmost position, but in the most forward one (Fig.  1, 3, 4, 5 and 8).  After turning on the power supply, the electric motor; 118, the electric drive 91 of the motor crust 1I8 91 is transmitted by means of a worm gearbox 90 with a nut nut 89, which, rotating around its axis, screws in the spindle 88.  The lead screw 88 with the rod 86 and the support directions by the rollers 87 fixed to the ends of the axis connecting the rod 86 to the arcuate link 85 makes a straight forward movement.  At the same time, the rollers 87 are moved by rolling along the guide grooves of the lower support-connecting fork 25 (Fig.  five).  The rear end of the shackle 85 performs straightline movements with the rod 86, and the front end is rotary around the axis of rotation of the L-shaped double arm 84, while rotating the lever 84 and with it the rear end of the shackle 83 (Fig.  five).  The front end of the earring 83, along with the eye 81, the carriage 65 and the bolt 31 mounted on it, makes rectilinear movements of the bolt 31 and all the parts included in it: the holder 42 with the substrate holder 43 and the substrate 116, horizontal axes 66 with four rollers 67, four vertical axes 68 with rollers 69, four earrings 70 and two axes 7 with a slider 72, valve 73, a hook 75, a support roller 76, stops 74 and 80 of the carriage 65, two springs 82, pressing the slider 72 to the carriage 65 (FIG.  1, 3, 4 and 5).  Here, the four horizontal rollers 67 move along the lower longitudinal grooves 19, and the four vertical rollers move along the lower support surfaces 21 of the guides 17 (Fig.  eight).  In this position, the shutter 31 moves until the roller 76 contacts the surface of the thrust insert 22.  The hook 75 is at this time above the hook 23 and does not touch it when the bolt 31 is moved.  The movement of the Slider 72 and the valve 73: is stopped, and the carriage 65 continues to move forward, rolling under the Sliders 72 (Fig.  1 and 3). The earrings 70 rotate on axles 66 and 71 to a vertical position.  The slider 72 and the valve 73 are displaced in the side of the flange 13 of the nozzle 12 (FIG. 4 and 3).  The valve 73 with its sealing surface deforms the sealing element of the flange 13 and forms with it a tight connection, through which the possibility of the penetration of gases from the chamber 114 into the body i and (the opposite (Figures 3 and 1) is excluded).  The roller 76, rotating on the axis 77 of the lugs 78, O1, is launched by rolling down the support surface of the liner 22 downwards with the slider 72, and the hook 75 engages with the hook 23 (FIG.  4 and 3).  The slider 72 rests against the rear end of the horizontal stop 80 of the rack 79 of the carriage 65.  The rims 82 are stretched.  Switch 120 issues a shutter position signal 31 Closed.  Motor 118 is turned off (FIG.  1, 3 and 5).  Moving the carriage 65 forward takes place until the rollers 87 touch the rear abutment surfaces of the guide grooves of the lower support-connecting fork 25 and turn the angle of connection of the lever 84 with the link 85 to 180 (4ig.  five).  This position of the mechanisms corresponds to the extreme front position of the bolt 31, in which the valve 73 axis is aligned with the axles of the flanges 14 and 13 of the nozzle 12, the holder 42, the substrate contains 43 located on the carriage 65 of the bolt 31, and the manipulator-loader 109 (FIG.  3).  The movement of the shutter 31 to the rearmost position is accomplished by applying reverse power to the electric motor 118 of the electric drive 91.  All moving parts of the electric actuator 91 and the mechanism for moving the gate 3 move in the opposite direction (Fig.  five).  The carriage 65 rolls out from under the slide 72, while the hook 75, which is engaged with the hook 23, holds the slide 72 in the extreme u: forward position.  The earrings 70 rotate on axles 66 and 71 and are rotated to an inclined position (Fig.  1, 3, 4 and 5).  Under the action of the force of compression of the springs 82, the mutual pressure of the bevels of the hooks 75 and 23 ,.  and tilting earrings 70, the valve 73 overcomes the resistance of the overpressure of gases P inside the housing 1, if any, is disconnected from the flange 13 of the nozzle 12 and removed from it by a distance fixed by the vertical stop of the carriage 65 (Fig.  8, Zi4).  In this position, the shutter 31 together with the valve 73, the holder 42, the substrate holder 43 and the substrate 116 is retracted in the direction of the flange 24, frees the space between the nozzles 10 and 12 for performing the operation of overloading the substrate holder 43 from the process chamber 114 by the manipulator 109 (FIG.  four).  The manipulator-torch 109 on: computer commands performs the returning and sequential transfer of the rod 110 with the mechanism 111 of the grippers and three grippers 112 along the axis of the nozzles 10 and 12, holding the back plates 43, holding them in the clamped position and releasing them grabs 112.  Rod 110 and the mechanism of 1G1 grippers with grippers 112 occupy one of four fixed positions: the initial, rearmost position, in which the mechanism 111 is in the socket 10 of the housing 1 and the grippers 112 do not touch valve 40 during its output to the overload position (Fig.  1, 3 and 4).  The overload position of the valve 40, in which the mechanism 111 is moved forward so that its grippers 112 during compression squeeze the substrate holder 43 fixed to the holder 42 in the loading slot 41 of the valve 40.  Standby overload position at which The OM mechanism 111 is moved forward so that the grippers 112 capture the substrate holder 43 attached to the holder 42 of the slide carriage 65 during compression.  The frontmost one in which the mechanism 111 is in the process chamber 114, and its grippers 112 clamp the substrate holder 43 mounted on the holder 42 of the transport and processing device I15 of the process chamber 114.  The grippers 112 are in one of two fixed positions decompressed, in which the substrate holder 43 enters freely between the lugs of the grippers 112, and in a compressed position, in which the lugs of the grippers 112 enter into the annular groove of the outer side of the shell of the substrate holder 43 and with a predetermined force applied to it bottom.  The outer sealing gateway 93 by the action of the electric drive 105 and the locking mechanism can take one of two extreme positions. The valve 93 is pressed against the flange 6 of the nozzle 5 by the sealing surface, deforms the sealing element and forms a tight connection with the flange 6, which can penetrate gas components from the atmosphere in the pipe 5; Open, in which the valve 93 is located perpendicular to the top wall 3 of the housing 1, and the pipe 5 is open dp manual or machine loading under spoon holders 43 with substrates 116 in the socket 41 of the valve 40.  The closing operation of the valve 93 is performed as follows.  After turning on the power, the electric drive 105 by means of a worm gearbox drives the lead screw 106, the rod 102 c l eyelet 101, and two rollers 103, which move by rolling along guide slots 104 (FIG.  1, 3 and 4).  The rod 99 rotates the lugs 101 on the axis 100 and pushes forward the shoulder 98 of the L-shaped lever 94, which at the same time turns the lugs 96 on the axis 95, along the arrow a, turning the arm 97 together with the valve 93 to the closed position and creates a hermetic valve connection 93 with flange 6 pipe 5 as a result of deformation of the sealing element.  The electric drive switch 105 you.  sends a closed signal to the control unit and the motor automatically turns off.  .  The opening operation of the valve 93 is accomplished by reversing the power supply to the actuator 105.  All moving parts of the actuator 105, the locking mechanism and the valve 93 move in the opposite direction until the switch sends an Open signal, after which the power of the actuator 105 is automatically turned off.  The operation of the boot device is performed in a system of flexible automatic control of production processes (GAUPP) and is built in accordance with the requirements of a specific technology.  Under conditions of providing ultra-high vacuum in chamber 114 and the presence of limited number of overload positions on the transport device 115 ", the device operates as follows.  The initial position of the valve 93 is open, the shutter 30 is closed, the manipulator 109 is the rearmost one, the shutter 31 is closed.  Inside the chamber 114, the processing of the substrates 116 takes place, all positions 115 are occupied by the substrate holders 43, the evacuation means 16 maintain the vacuum in the housing 1 and the manipulator 109 - P (Fig.  3).  The sequence of operations performed by the EX 1X device for the overload cycle of the substrate 116 from the atmosphere into the process chamber 114.  The substrate holder 43 with the substrate 116 is put on the holder 42 in the loading socket 41 of the valve 40.  The valve 93 closes the flange 6 of the nozzle 5, evacuates the gases from the nozzle 5 through the radial holes 8 by means of the vacuum pump 1 13 until the residual pressure of the gases P is opened, the shutter 30 is opened and brought to its extreme front position, the mechanism 111c is seized by the clamps 112 into the valve overload position 40, the substrate holder 43 is removed and the manipulator 109 is returned to its original position, the valve 30 is returned to the Closed position, the manipulator 109 is transferred to the backup overload position, the substrate holder is put on the holder 42 of the valve 31, schayut manipulator 109 uncompressed gripper 112B original position.  After the processing of the substrate 116 in the chamber 114 is completed, the shutter 31 is moved to the Open position, and the manipulator 109 is at the frontmost side, the substrate holder 3 with the substrate 116 is clamped with the grippers 112 and the manipulator 109 is returned to its original position.  Turning shutter 31 into the closed position, and shutter 30 into the open position.  The manipulator 109 is inserted into the socket 41 of the valve 40 and the substrate holder 43 is put on the holder 42, the manipulator 109 is returned to its original position, and the valve 30 is returned.  Closed position.  The gases are pumped out of the housing 1 to the residual pressure P,, the manipulator 109 is withdrawn to the standby overload position, the substrate holder 43 is clamped by the grippers 112 and the manipulator 109 is returned to the initial position, the shutter 31 is moved to the Open position. , and the manipulator 109 - to the extreme front position.  The substrate holder 43 is put on the holder 42 of the device 115, the manipulator 109 is returned to its original position, and the shutter 31 is put in the Closed position. Simultaneously an inert gas, such as nitrogen, is injected into the socket 5 through the opening 9, the valve 93 is moved to the Open position.  Manually or by robot, remove the substrate holder 43 from the holder 42 of the valve 40 and remove it, and in its place another substrate holder 43 with the substrate 116 is put on.  Next, the overload cycle is repeated.  The evacuation means 113 are operated only for the duration of the evacuation of the nozzle 5 with the valves 40 and 93 closed and the shutdown is isolated before opening the valve 40 and before inert gas inlet through the opening 9.  The overloading of substrate holders is greatly simplified under the conditions when the transport processing device 115, for example a carousel, has a backup holder 42.  Then the backup position overload on the gate 31 is not needed.  The operations of loading the next substrate holder 43 and unloading the treated substrate 116 are performed with one opener 31, and one-time transfer of the manipulator 109 to the extreme. front position.  The operation of the device with chambers 114 is even simpler, in which the processing of substrates takes place under conditions of low or medium akum, t. e.  Р is equal to Р and Р „.  The necessity of locking the flange 13 atrubka 12 on the wall 4 of the housing 1 by the attacker 31 in these cases is no longer necessary, the operations and the overloading of the substrate holders 43 are performed by the mechanisms of the driver 30 and the manipulator 109.  During the warm-up period of the housing 1, the electric actuators 63, 91 and 105 are removed by unscrewing the flare nuts 107 and 121 of the thread 27 of the branch pipes 26 of the bracket 108.  In their place, the manual mechanisms are temporarily installed and fastened with nuts 107 121.  Instead of electric actuators 63, 91 105, pneumatic grips of hydraulic actuators can be installed.  The control scheme and the operation principle of the mechanisms in this case varies.  The device has adjustment elements to obtain optimum operating conditions for the device.  The position of the valves 40 and 73 relative to the flanges 7 and 13 being sealed by them is adjusted by screwing the screw lugs of these valves into the bodies of the sliders 39 and 72 and the spacer of the calibrated gaskets between the valves 40 and 73 and the sliders 39 and 72 and screwing the vertical stops 49 into the holes of the carriages 32 and 65.  The position of the sliders 39 and 72 relative to the carriages 32 and 65 is adjusted by screwing in the horizontal stops 51 and 80 into the holes of the uprights 50 and 79 of the carriages 32 and 65.  The position of the carriages 32 and 65 relative to the housing 1 and the nozzles 5, 10 and I2 is adjusted by screwing the stops 44 and 74 into the ends of the carriages 32 and 65.  The position of the valve 93 relative to the sealing surface of the flange 6 of the nozzle 5 is adjusted by moving the hinge support of the valve 93 in the hole of the plug 97 of the lever 94.  All of the adjustable stops are lock nuts or other known stop parts.  Installation, adjustment and repair of mechanisms and valves of the device are made after the flange 24 is disconnected from the housing 1 and removed. The closures 30 and 31 of the housing 1 are suitable for carrying out assembly work and attacks.  Formula 1 of the invention, A slide type loading device, comprising a housing with transfer nozzles, evacuation nozzles and inlet lock connection nozzle, having a sealing outer valve and two evacuation holes, a rear sealing flange with a connecting nozzle on the outside and a supporting with a plug on the inside and with a connecting flange on the outlet branch pipe, as well as with sealing elements of the inlet sluice port in which the valve is installed, containing and Commercially hooks carriage and the slide connected thereto Th tyrm earrings, and support rollers vzaimodeystvuyulu1y with vkladshem body and valve with built therein derzhatelempodlozhkoderzhateley and shutter moving mechanism with electric manipulator overload podpozhkoderzhateley and the sluice valve, characterized in that In order to increase productivity, two independent gates with moving mechanisms and electric drives are installed in the housing, with the first gate being equipped with a valve with a socket and a holder It is mounted coaxially with the manipulator 61 2726 2557 56 with an overload torus and with the possibility of sealing the inlet lock port in the rearmost position, and the second shutter is equipped with a sealing valve, mounted parallel to the first shutter and oriented with the sealing valve in the direction of the outlet branch pipe of the housing, and also equipped with a holder for substrate holders mounted on the carriage from the side of the manipulator coaxially with it and installed with the possibility of sealing the outlet pipe in the extreme forward position.  2 The device according to claim.  I, that is, that the fixing plug and the relocation mechanisms; the gates with nozzles and electric drives attached to them are located diagonally on the rear sealing flange of the housing.    3 Device on PP.  1 and 2, differing in that the carriage hook, support roller and hook of the slide ram containing the valve with the seat and the holder of the podpozhkholder, are made on the rear ends of the carriage and slide, and the case contribution interacting with them is fixed on the inside of the rear sealing flange of the case.  four. The device according to claim.  1, that is, that the sluice valve is equipped with a locking mechanism with an electric actuator.  2 55 FIG. g F uAA (ZH-V vd 75 / JFi A

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Claims (4)

Claim 1. The loading device of the slide type, comprising a housing with overload nozzles, evacuation nozzles and an inlet lock nozzle having a sealing external valve and two evacuation holes, a rear sealing flange with a connecting pipe on the outside and a supporting-connecting plug on the inside and with a connecting flange on the outlet pipe, as well as with the sealing elements of the inlet lock pipe, in which a shutter is installed, containing a hooked carriage and a zun connected to it by four earrings, and a support roller interacting with the shell insert, and a valve with a holder for backing holders mounted therein, as well as a mechanism for moving the shutter with an electric actuator, an overload manipulator for backing holders and a sluice valve, characterized in that, in order to increase productivity , two self-contained shutters with moving mechanisms and electric drives are installed in the housing, the first shutter equipped with a valve with a socket and a holder for substrate holders, installed coaxially with the manipulator with an overload regulator and with the possibility of sealing the inlet lock pipe in the extreme rear position, and the second shutter is equipped with a sealing valve, is installed parallel to the first shutter and is oriented by the sealing valve towards the outlet pipe of the housing, and ΙΟ is equipped with a holder for substrate holders mounted on the carriage from the side of the manipulator coaxial with it and installed with the possibility of sealing the outlet pipe at the extreme front position. 2. The device pop. I, characterized in that the supporting-connecting plug and mechanisms for moving the shutters with nozzles and 2Q electric drives mounted on them are located diagonally on the rear. the sealing flange of the housing. i _ · 3. The device according to paragraphs. 1 and 2, about t- 25 characterized in that the carriage hook, the support roller and the hook of the slide slider containing the valve with the socket and the holder of the substrate holders are made at the rear ends _{30 of the} carriage and the slider, and the housing insert interacting with them is fixed to the inner side of the rear sealing flange of the housing. 4. The device according to π. 1, with the fact that the lock 35 valve is equipped with an electric locking mechanism. Aa FIG. 2 12,751 76 dd 6 18 113 FIG. 8