SU1212996A2 - Method of protecting surface of dielectric material articles - Google Patents
Method of protecting surface of dielectric material articles Download PDFInfo
- Publication number
- SU1212996A2 SU1212996A2 SU843759407A SU3759407A SU1212996A2 SU 1212996 A2 SU1212996 A2 SU 1212996A2 SU 843759407 A SU843759407 A SU 843759407A SU 3759407 A SU3759407 A SU 3759407A SU 1212996 A2 SU1212996 A2 SU 1212996A2
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- product
- dielectric material
- film
- material articles
- protecting surface
- Prior art date
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- Surface Treatment Of Glass (AREA)
Description
112112
Изобретение относитс к способам , обработки травлением изделий из неорганических диэлектрических материалов, преимущественно стекло- изделий, может быть использовано в микроэлектронной технике и приборостроении и вл етс усовершенствованием способа по авт. ев .№ 990706,,The invention relates to methods for etching processing of products from inorganic dielectric materials, mainly glass products, can be used in microelectronic engineering and instrument making and is an improvement of the method according to the authors. ev. No. 990706 ,,
Цель изобретени - повьппение надежности защиты.The purpose of the invention is to increase the reliability of protection.
По предлагаемому способу усилие прижати пленки к изделию обеспечивает надежное прилегание пленки к изделию в .процессе травлени и исключает попадание паров кислотъ. под пленку и возникновение подтра- вов. Величину усили прижати пленки к изделию определ ют, исход из условий прочности материала издели экспериментальным путем.According to the proposed method, the pressure of the film to the product ensures a reliable adhesion of the film to the product in the etching process and eliminates the ingress of acid vapors. under the film and the emergence of streaks. The amount of force applied to the film against the product is determined based on the strength of the material of the product experimentally.
На чертеже показан вариант устройства , с помощью которого осуществл ют способ.The drawing shows a variant of the device with which the method is carried out.
На ст гивающий болт 1 устанавливают нижнюю прижимную губку 2 с предварительно наклеенной резиновой прокладкой 3 дл равномерной передачи усили . На нижнюю прижимную губку 2 устанавливают изделие 4 с предварительно наклеенньми мас12996 A lower clamping sponge 2 with a pre-glued rubber gasket 3 is applied to the tightening bolt 1 to evenly transmit the force. On the lower clamping sponge 2 install the product 4 with pre-pasted mas12996
ками 5 из липкой поливинилхлорид- ной пленки. Затем устанавливают верхнюю прижимную губку 6 с предварительно наклеенной резиновой про5 кладкой 3, резиновую шайбу 7, фто- роп ластошайбу 8 и ст гивают фторопластовой гайкой 9, После сборки изделие покрывают восковой смесью 10, за исключением мест, подлежащихkami 5 of adhesive PVC film. Then install the upper clamping sponge 6 with a pre-glued rubber strap 3, rubber washer 7, fluoroplastic washer 8 and shrink with a fluoroplastic nut 9. After assembly, the product is coated with a wax mixture 10, except for
10 травлению, и погружают устройство с изделием в кислоту, по окончании травлени разбирают устройство и удал ют защитное покрытие с издели , Требуемое усилие поджати пленки10 by etching, and immerse the device with the product in acid, after the etching is finished, disassemble the device and remove the protective coating from the product. Required film pressing force
ts к изделию создаетс путем предварительной деформации резиновой шайбы, степень деформации которой зависит от толщины издели и определ етс зазором между фторопластовой шайбой.The ts to the product is created by pre-deforming the rubber washer, the degree of deformation of which depends on the thickness of the product and is determined by the gap between the fluoroplastic washer.
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Внешний осмотр изделий после травлени показывает полное отсутствие подтравов.An external inspection of products after pickling shows the complete absence of subtrains.
Таким образом, предлагаемьй спо25 соб-. обеспечивает повышение надежности защиты изделий при травлении и изготовлении качественных изделий за счет надежного прилегани пленки к изделию в процессе длительного травлени .Thus, the proposed 25 provides increased reliability of protection of products during etching and manufacturing of high-quality products due to reliable adhesion of the film to the product during the process of long-term etching.
Редактор И.ДербакEditor I. Derbak
Составитель О.Самохина Техред Т.ДубинчакCompiled by O. Samokhina Tehred T. Dubinchak
Заказ 721/34Order 721/34
Тираж 458 iПодписноеCirculation 458 iSignal
ВНИИПИ Государственного комитета СССРVNIIPI USSR State Committee
по делам изобретений и открытий 113035, Москва, Ж-35., Раушска наб., д. 4/5for inventions and discoveries 113035, Moscow, Zh-35., Raushsk nab. 4/5
Филиал ППП Патент, г. Ужгород, ул. Проектна , 4Branch PPP Patent, Uzhgorod, st. Project, 4
Корректор А.Т скоProofreader A.T. sko
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU843759407A SU1212996A2 (en) | 1984-07-05 | 1984-07-05 | Method of protecting surface of dielectric material articles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SU843759407A SU1212996A2 (en) | 1984-07-05 | 1984-07-05 | Method of protecting surface of dielectric material articles |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU990706 Addition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU1212996A2 true SU1212996A2 (en) | 1986-02-23 |
Family
ID=21126220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU843759407A SU1212996A2 (en) | 1984-07-05 | 1984-07-05 | Method of protecting surface of dielectric material articles |
Country Status (1)
| Country | Link |
|---|---|
| SU (1) | SU1212996A2 (en) |
-
1984
- 1984-07-05 SU SU843759407A patent/SU1212996A2/en active
Non-Patent Citations (1)
| Title |
|---|
| Авторское свидетельство СССР № 990706, кл. С 03 С 15/00, 1981. * |
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