SU1114879A1 - Interferention device for measuring displacements - Google Patents

Abstract

INTERFERENTIAL DEVICE FOR MEASUREMENT OF DISPLACEMENTS, containing sequentially installed and optically coupled source of monochromatic radiation, a light splitter for dividing radiation into two branches, a reflector with two mutually perpendicular reflecting edges, for bonding with a controlled object and placed in one of the branches of radiation so that one of its faces is perpendicular to the direction of radiation, the mirror, the mouth / soleno angle at 45 to the other face of the reflector, placed in another branch of the radiation and located on a common base with a controlled object, a photodetector and a recording unit connected to the output of the photodetector, characterized in that, in order to increase the measurement accuracy while simultaneously moving the object along two coordinate axes, it is equipped with a beam splitter installed in the course of both branches of radiation between the light splitter and the reflector and the perry mirror, the second mirror installed at the exit of the beam splitter so that its reflecting surface is parallel to the barrel face of the body tipper, a third mirror placed on a common base with a controlled object and optically connected to the beam splitter through the second grain, a mirror pyramid placed at the exit of the beam splitter so that its faces are located during the radiation beams, one of which reflected from the reflector and the first mirror, and the other from the third mirror 4, the second photodetector, and the second 00 registration unit, both photodetectors Cj J nick are opposite the corresponding faces of the pyramid during the radiation beams.

Description

The invention of spmgosite to the measuring technique and to be used to measure displacements along two coordinates, I) 1 axes simultaneously jHiiieifiH x sizes and amplitudes of which were selected. It is well known that the organizer of this project is due to changes (elely, containing: i, ee, after which the radiation source is optically connected and optically coupled, in the light of radiation, the radiation is divided into two netv, photonic radiation Mirror l-VT serpentine; e1P th p from the branch; 1 evil and rassolayem (on a common basis with a controlled object, and block pa rastrap, 1p, electrically per second for the output (output receiver H He ioc-rai-iai The structure of the measurement is low, and the measurement is difficult and difficult ii3: —energy of the laser; s11; yenin in d, in the coordinates of the coordinates. visually to the proposed technical note and the resultant signal that is available is the interference of the device for measuring the transmission eI: e and y5 containing its sequence 1 -c; -installed and optically coupled ESTONIC n-yochnomatich As a radiation emitter 5, a light diffuser, pre assigned to section 1 and e-pup 51 on two branches, a reflector with a mutual II eper, 1 durally) i reflective, III – tl m face, H1 rell for each) and con - roll o6i eKToi-i and t azzmeshchennr; In radiation so that one of its faces is reflected in the direction; but radiation, a mirror mounted under the shield to the other face of the reflector pa3N erii; eHiioe in D | On a base with a KoHTpoJU-ipyeMhiM object, a photodetector and a reg-source radium unit, output-output-to-jitter -J-NsdnnnIkAnn device is a low accuracy of measurement at o, g; coordinate axes. The purpose of the invention is to improve the accuracy of measurements while moving . SRI object along two coordinate axes Said object is achieved; that an interfacing device for measuring displacements containing a sequentially installed and optically coupled source of monochromatic radiation, a light splitter designed for dividing the radiation of one pa two branches, a reflector with two mutually perpendicular reflectors of the Grain No. 1, designed for skidleting with controlled object and located in one of the branches of the radiation so that one of its faces is feather; shi cooler on the left side and on, mirror, set at an angle of 4 to the other reflector, dimensioned in another branch is located on the common base-H1 and with a controlled object, a photodetector and a recording unit connected to the output of the photoreceiver are equipped with a secondary capacitor installed in the course of the oOSix radiation branch of the light source and reflector and the first mirror; with the second mirror installed at the output of the beam splitter so that its reflecting surface is 1garaly.1 the working face of the light-beam ..., the third mirror, we place ii.iN on the section l of the base of the controllable object that is connected to the splitter - through the second mirror ,, mirror gsh-oamidoyz on the side of the case, so that its face is in the course of the beams because of it, one of the EE-i otragken from the reflector and the first mirror and the other one from the third mirror 5 by the second photographer and the second RR unit, both photodetectors of races Yolozhl opposite the corresponding pyrammy / d faces during radiation beams, The drawing shows an optical interference device for measuring displacements. 7 and the third 8 mirrors, mirror pyramid 95 two photodetectors 10 and 115 two blocks 12 and 13 registratsii. The photodetector 2 is located on the beam of light from the radiation source 1 and divides the beam into two wind turbines, C1i: the splitter 3 is located during both branches of the radiation, reflector 4 is rigidly fixed on the surface of the object under test 5, the first mirror 6 is mounted on a common basis with controlled object 5

and is located at an angle of 45 to the vertical face of the reflector 4, the second mirror 7 is also located on a common base with the object 5 and is installed with a plane perpendicular to the radiation incident on it from a third of its mirror 8, the reflecting surface of which is paraplelny working face of the splitter, mirror of the pyramid 9 is located In the path of the light beams from the output of the splitter, the photodetectors 10 and 11 are located at the output of the corresponding light beam from the mirror pyramid 9 and are electrically connected to the blocks 12 and 13 respectively and.

Reflector 4 is made in the form of a glass cube with two mirrored cavities whose cavities are perpendicular to the light beams falling on them from the beam splitter 3 and the mirror 6. The size of the reflector 4 faces is chosen to be large with the maximum expected displacement along any of the two measured coordinate axes.

The device works as follows.

. The light beam of the monochromatic radiation source 1 is divided by light splitter 2 into two parallel branches 14 and 15 °. Branch 14 is in turn divided by beam splitter 3 into subject 16 and support 17 beams. Both beams 16 and 17, reflecting respectively from the horizontal facet of the reflector 4 and from the second 7 and

A third 8 mirrors form at the output of the beam splitter 3 an interference pattern 18, the intensity of which is converted by the photoreceiver 11 into an electrical signal measured by the recording unit 13. Branch 15 is also divided by beam splitter 3 into objective 19 and reference 20 beams. Both beams 19 and 20, reflecting respectively from the vertical face of the reflector 4 and mirror b and from the second 7 and third 8 mirrors, form an interference pattern 21J at the output of the splitter 3 whose intensity is converted by the photoreceiver 10 into an electrical signal measured by the recording unit 12. The displacement of the object 5 along the vertical coordinate axis leads to the displacement of the interference fringes of the pattern 18, this leads to a change in the magnitude of the electrical signal on the photodetector 11, which is registered by the registration unit 13. Anapogic to displace an object 5 along a horizontal coordinate axis, a change occurs.

, the magnitude of the electrical signal at the output of the photodetector 10, which is registered by the registration unit 12.

Due to the fact that the change in the intensity of both HbDc interfering patterns due to the displacement of the measurement object 5 along the vertical and horizontal axes occurs independently of one another5, the device allows the device to separately measure along two coordinate axes at the same time, which allows it to be distributed applications.

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Claims (1)

INTERFERENCE MEASUREMENT DEVICE FOR MEASUREMENT OF MOVEMENTS, containing a sequentially installed and optically coupled source of monochromatic radiation, a light splitter designed to separate radiation into two branches, a reflector with two mutually perpendicular reflective faces, designed to be bonded to a controlled object and placed in one of the radiation branches so that one of its faces is perpendicular to the direction of radiation, a mirror mounted at an angle of 45 ° to the other side of the reflector is placed located in a different branch of radiation and located on a common base with the object being monitored, a photodetector and a recording unit connected to the output of the photodetector, characterized in that, in order to increase the measurement accuracy while moving the object along two coordinate axes, it is equipped with a beam splitter installed in the course of both branches of radiation between the light splitter and the reflector and the first. a mirror, a second mirror installed at the output of the beam splitter so that its reflecting surface is parallel to the working face of the beam splitter (S body, a third mirror placed on a common base with a controlled object and optically connected to the beam splitter through a second mirror, calo, 'mirror pyramid, placed at the output of the beam splitter so that its faces are located in the course of radiation beams, one of which is reflected from the reflector and the first mirror, and the other from the third mirror, the second photodetector and the second recording unit, both the receiver are located opposite the corresponding faces of the pyramid during the radiation beams.