SG76564A1 - An apparatus and method to transport inspect and measure objects and surface details at high speeds - Google Patents

An apparatus and method to transport inspect and measure objects and surface details at high speeds

Info

Publication number
SG76564A1
SG76564A1 SG1998004084A SG1998004084A SG76564A1 SG 76564 A1 SG76564 A1 SG 76564A1 SG 1998004084 A SG1998004084 A SG 1998004084A SG 1998004084 A SG1998004084 A SG 1998004084A SG 76564 A1 SG76564 A1 SG 76564A1
Authority
SG
Singapore
Prior art keywords
inspect
transport
high speeds
surface details
measure objects
Prior art date
Application number
SG1998004084A
Inventor
Chuang Ping Derg
Ho Choon Leong
Sim Wee Lee
Lee Choon Giap
Ng Boon Long
Neo Kee Chen George
Seah Chee Hian
Original Assignee
Rahmonic Resources Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rahmonic Resources Pte Ltd filed Critical Rahmonic Resources Pte Ltd
Priority to SG1998004084A priority Critical patent/SG76564A1/en
Priority to GB0114507A priority patent/GB2361313B/en
Priority to AU20193/00A priority patent/AU2019300A/en
Priority to PCT/SG1999/000130 priority patent/WO2000033027A1/en
Priority to CN99815888A priority patent/CN1367872A/en
Publication of SG76564A1 publication Critical patent/SG76564A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
SG1998004084A 1998-11-30 1998-11-30 An apparatus and method to transport inspect and measure objects and surface details at high speeds SG76564A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SG1998004084A SG76564A1 (en) 1998-11-30 1998-11-30 An apparatus and method to transport inspect and measure objects and surface details at high speeds
GB0114507A GB2361313B (en) 1998-11-30 1999-11-30 An apparatus and method to transport, inspect and measure objects and surface details at high speeds
AU20193/00A AU2019300A (en) 1998-11-30 1999-11-30 An apparatus and method to transport, inspect and measure objects and surface details at high speeds
PCT/SG1999/000130 WO2000033027A1 (en) 1998-11-30 1999-11-30 An apparatus and method to transport, inspect and measure objects and surface details at high speeds
CN99815888A CN1367872A (en) 1998-11-30 1999-11-30 Method and apparatus to transport, inspect and measure objects and surface details at high speeds

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG1998004084A SG76564A1 (en) 1998-11-30 1998-11-30 An apparatus and method to transport inspect and measure objects and surface details at high speeds

Publications (1)

Publication Number Publication Date
SG76564A1 true SG76564A1 (en) 2000-11-21

Family

ID=20430138

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998004084A SG76564A1 (en) 1998-11-30 1998-11-30 An apparatus and method to transport inspect and measure objects and surface details at high speeds

Country Status (5)

Country Link
CN (1) CN1367872A (en)
AU (1) AU2019300A (en)
GB (1) GB2361313B (en)
SG (1) SG76564A1 (en)
WO (1) WO2000033027A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6532063B1 (en) * 2000-11-10 2003-03-11 Semiconductor Technologies & Instruments 3-D lead inspection
JP4228778B2 (en) * 2003-05-21 2009-02-25 ウシオ電機株式会社 Pattern inspection device
JP2004361329A (en) * 2003-06-06 2004-12-24 Ushio Inc Method and device for inspecting pattern
EP1639311A4 (en) * 2003-06-18 2006-10-25 Amfit Inc Method and system for capturing and supporting 3-d contour
US7289646B2 (en) 2003-06-30 2007-10-30 Weyerhaeuser Company Method and system for simultaneously imaging multiple views of a plant embryo
CN100554952C (en) * 2005-08-03 2009-10-28 鸿劲科技股份有限公司 Integrated circuit detector
CN101936916A (en) * 2009-07-02 2011-01-05 法国圣-戈班玻璃公司 Equipment for detecting defects of separated low-rigidity transparent or translucent body and method thereof
US9485473B2 (en) * 2012-09-13 2016-11-01 Alstom Technology Ltd Method and system for determining quality of tubes
CN111965215A (en) * 2020-08-13 2020-11-20 长江存储科技有限责任公司 Packaged chip defect detection device and method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06265323A (en) * 1993-03-16 1994-09-20 Hitachi Ltd Outer shape inspection device
JPH085568A (en) * 1994-06-15 1996-01-12 Hitachi Ltd Lead inspection apparatus
JPH10153413A (en) * 1996-11-21 1998-06-09 M C Electron Kk Appearance and dimension inspection device for ic lead

Also Published As

Publication number Publication date
WO2000033027A9 (en) 2001-11-08
GB0114507D0 (en) 2001-08-08
WO2000033027A1 (en) 2000-06-08
GB2361313A (en) 2001-10-17
GB2361313B (en) 2003-06-11
AU2019300A (en) 2000-06-19
CN1367872A (en) 2002-09-04

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