SG72884A1 - Method for forming noble metal oxides and structures formed thereof - Google Patents
Method for forming noble metal oxides and structures formed thereofInfo
- Publication number
- SG72884A1 SG72884A1 SG1998004543A SG1998004543A SG72884A1 SG 72884 A1 SG72884 A1 SG 72884A1 SG 1998004543 A SG1998004543 A SG 1998004543A SG 1998004543 A SG1998004543 A SG 1998004543A SG 72884 A1 SG72884 A1 SG 72884A1
- Authority
- SG
- Singapore
- Prior art keywords
- noble metal
- metal oxides
- structures formed
- forming noble
- forming
- Prior art date
Links
- 150000004706 metal oxides Chemical class 0.000 title 1
- 229910000510 noble metal Inorganic materials 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/14—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to metal, e.g. car bodies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2202/00—Metallic substrate
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Wood Science & Technology (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
- Non-Volatile Memory (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US96460797A | 1997-11-05 | 1997-11-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG72884A1 true SG72884A1 (en) | 2000-05-23 |
Family
ID=25508764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG1998004543A SG72884A1 (en) | 1997-11-05 | 1998-11-05 | Method for forming noble metal oxides and structures formed thereof |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPH11224936A (en) |
KR (1) | KR100303935B1 (en) |
SG (1) | SG72884A1 (en) |
TW (2) | TW483156B (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100600283B1 (en) * | 1999-12-14 | 2006-07-13 | 주식회사 하이닉스반도체 | Alloy electrodes of capacitor and method for forming the same |
KR100687433B1 (en) * | 2000-07-29 | 2007-02-26 | 주식회사 하이닉스반도체 | Method for forming a bottom electrode of a capacitor |
KR20030025671A (en) * | 2001-09-22 | 2003-03-29 | 주식회사 하이닉스반도체 | Method for fabricating capacitor |
KR100735396B1 (en) * | 2005-10-19 | 2007-07-04 | 삼성전기주식회사 | thin flim capacitor and printed circuit board embedded capacitor and method for manufacturing the same |
JP2007242847A (en) * | 2006-03-08 | 2007-09-20 | Seiko Epson Corp | Capacitor, and manufacturing method thereof |
KR100878414B1 (en) * | 2006-10-27 | 2009-01-13 | 삼성전기주식회사 | Capacitor embedded printed circuit borad and manufacturing method of the same |
JP2014212310A (en) * | 2013-04-02 | 2014-11-13 | 東京エレクトロン株式会社 | Manufacturing method and manufacturing apparatus of semiconductor device |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02101649A (en) * | 1988-10-07 | 1990-04-13 | Victor Co Of Japan Ltd | Optical disk |
JP3239445B2 (en) * | 1992-06-09 | 2001-12-17 | セイコーエプソン株式会社 | Dielectric element, method of manufacturing the same, and semiconductor memory device |
US5585300A (en) * | 1994-08-01 | 1996-12-17 | Texas Instruments Incorporated | Method of making conductive amorphous-nitride barrier layer for high-dielectric-constant material electrodes |
WO1996010845A2 (en) * | 1994-10-04 | 1996-04-11 | Philips Electronics N.V. | Semiconductor device comprising a ferroelectric memory element with a lower electrode provided with an oxygen barrier |
JPH08153707A (en) * | 1994-11-29 | 1996-06-11 | Nec Corp | Manufacturing method for semiconductor device |
JP3188179B2 (en) * | 1995-09-26 | 2001-07-16 | シャープ株式会社 | Method of manufacturing ferroelectric thin film element and method of manufacturing ferroelectric memory element |
-
1998
- 1998-07-30 TW TW090101717A patent/TW483156B/en not_active IP Right Cessation
- 1998-07-30 TW TW087112561A patent/TW442959B/en not_active IP Right Cessation
- 1998-10-14 KR KR1019980042991A patent/KR100303935B1/en not_active IP Right Cessation
- 1998-10-20 JP JP10298381A patent/JPH11224936A/en active Pending
- 1998-11-05 SG SG1998004543A patent/SG72884A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR100303935B1 (en) | 2002-04-17 |
JPH11224936A (en) | 1999-08-17 |
TW483156B (en) | 2002-04-11 |
KR19990044856A (en) | 1999-06-25 |
TW442959B (en) | 2001-06-23 |
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