SG192443A1 - Single substrate processing head for particle removal using low viscosity fluid - Google Patents

Single substrate processing head for particle removal using low viscosity fluid Download PDF

Info

Publication number
SG192443A1
SG192443A1 SG2013049945A SG2013049945A SG192443A1 SG 192443 A1 SG192443 A1 SG 192443A1 SG 2013049945 A SG2013049945 A SG 2013049945A SG 2013049945 A SG2013049945 A SG 2013049945A SG 192443 A1 SG192443 A1 SG 192443A1
Authority
SG
Singapore
Prior art keywords
feeds
plate
substrate
bore
applicator
Prior art date
Application number
SG2013049945A
Other languages
English (en)
Inventor
Arnold Kholodenko
Cheng-Yu Lin
Leon Ginzburg
Mark Mandelboym
Gregory A Tomasch
Anwar Husain
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Publication of SG192443A1 publication Critical patent/SG192443A1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0404—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0414—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
    • H10P72/0456—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers in-line arrangement
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3306—Horizontal transfer of a single workpiece
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85938—Non-valved flow dividers

Landscapes

  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning By Liquid Or Steam (AREA)
SG2013049945A 2008-06-30 2009-06-30 Single substrate processing head for particle removal using low viscosity fluid SG192443A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US12/165,577 US8584613B2 (en) 2008-06-30 2008-06-30 Single substrate processing head for particle removal using low viscosity fluid

Publications (1)

Publication Number Publication Date
SG192443A1 true SG192443A1 (en) 2013-08-30

Family

ID=41445969

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2013049945A SG192443A1 (en) 2008-06-30 2009-06-30 Single substrate processing head for particle removal using low viscosity fluid

Country Status (7)

Country Link
US (2) US8584613B2 (https=)
JP (1) JP2011527123A (https=)
KR (2) KR101632974B1 (https=)
CN (1) CN102105967B (https=)
SG (1) SG192443A1 (https=)
TW (1) TWI423366B (https=)
WO (1) WO2010002905A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7849554B2 (en) * 2009-04-28 2010-12-14 Lam Research Corporation Apparatus and system for cleaning substrate
MX380822B (es) * 2014-09-11 2025-03-12 Huntsman Int Llc Método para diseñar y fabricar una barra distribuidora para aplicar una mezcla viscosa líquida espumable en un laminador.

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276011A (en) * 1979-02-21 1981-06-30 American Cyanamid Company Spinnerette assembly
US5618566A (en) * 1995-04-26 1997-04-08 Exxon Chemical Patents, Inc. Modular meltblowing die
SG45121A1 (en) * 1995-10-28 1998-01-16 Inst Of Microelectronics Apparatus for dispensing fluid in an array pattern
US6220843B1 (en) * 1998-03-13 2001-04-24 Nordson Corporation Segmented die for applying hot melt adhesives or other polymer melts
US6689215B2 (en) 1998-09-17 2004-02-10 Asml Holdings, N.V. Method and apparatus for mitigating cross-contamination between liquid dispensing jets in close proximity to a surface
US7000622B2 (en) * 2002-09-30 2006-02-21 Lam Research Corporation Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus
JP3955197B2 (ja) * 2001-09-28 2007-08-08 アルプス電気株式会社 ウエット処理用ノズルおよびウエット処理装置
US7093375B2 (en) 2002-09-30 2006-08-22 Lam Research Corporation Apparatus and method for utilizing a meniscus in substrate processing
US20050260789A1 (en) * 2004-05-21 2005-11-24 Texas Instruments Incorporated Method and system for applying an adhesive substance on an electronic device
JP4343031B2 (ja) * 2004-05-31 2009-10-14 東京エレクトロン株式会社 基板処理方法及び基板処理装置
WO2006137800A2 (en) 2005-06-23 2006-12-28 Akzo Nobel Coatings International B.V. Dispenser
JP2007158161A (ja) 2005-12-07 2007-06-21 Elpida Memory Inc ウエハ洗浄装置及びウエハ洗浄方法
US20080038448A1 (en) 2006-08-11 2008-02-14 Lam Research Corp. Chemical resistant semiconductor processing chamber bodies

Also Published As

Publication number Publication date
JP2011527123A (ja) 2011-10-20
CN102105967B (zh) 2014-10-08
WO2010002905A1 (en) 2010-01-07
TWI423366B (zh) 2014-01-11
KR20110028530A (ko) 2011-03-18
TW201009981A (en) 2010-03-01
US20140041581A1 (en) 2014-02-13
CN102105967A (zh) 2011-06-22
KR101632974B1 (ko) 2016-06-23
US8584613B2 (en) 2013-11-19
US20090320942A1 (en) 2009-12-31
KR20110044327A (ko) 2011-04-28

Similar Documents

Publication Publication Date Title
Williams Finding beauty in a broken world
SG192443A1 (en) Single substrate processing head for particle removal using low viscosity fluid
Buza et al. Environmental protection in the Apuseni Mountains: the role of environmental non-governmental organisations (ENGOs)
Łukaszkiewicz et al. From the heap to the park–reclamation and adaptation of degraded urban areas for recreational functions in Poland
Holmes Flint implements and fossil remains from a sulphur spring at Afton, Indian Territory
BE1028204A9 (nl) Scherminrichting en werkwijze voor het opvouwen en ontvouwen van de scherminrichting
Hey A History of the Peak District Moors
Marchand et al. Signed by Valerius: an Early Imperial wall painting from the fort of Deir el-Atrash in the Egyptian Eastern Desert
LU102428B1 (de) Solarmodul mit Einspannrahmen
Kulakov The weapon of horizon Sösdala-Untersiebenbrunn in Amberland
Minns Trialeti
Allen Directory of the City of Mineral Point for the Year 1859: Containing Also a Sketch of the History, Mines and Business of the Place
Price A speleotourism in peninsular Malaysia
Strahorn To the Rockies and Beyond: Or A Summer on the Union Pacific Railroad and Branches. Saunterings in the Popular Health, Pleasure, and Hunting Resorts of Nebraska, Dakota, Wyoming, Colorado, Utah, Idaho, Oregon, Washington and Montana...
Robinson The History and Antiquities of the Parish of Stoke Newington in the County of Middlesex: Containing an Account of the Prebendal Manor, the Church, Charities, Schools, Meeting Houses, &c., with Appendices...
Steele Cattle ranching in the American West
Berenguer Five thousand years of rock art in the Atacama Desert: Long-term environmental constraints and symbolic devices
Butler Great Sand Dunes National Park
CN204607236U (zh) 自走式水稻大棚育秧联合作业机分体膜盘铺设机构
Schreiber Jr et al. Fox Township, Elk County
Rossiter Michael Meadows, The Living Rock: The Inventionof Climbing in Eastern Australia, Brisbane: Living RockPress, 2015, ISBN 9 7809 9254 4027, 376 pp., $39.95.
DOG Growers Reap Golden HarvesI
Ashcroft Miner and Merchant in Socorro's Boom Town Economy, 1880–1893
McCrindle The road to reining health
PLAys flonthly Catalogut