SG175022A1 - Substrate cool down control - Google Patents

Substrate cool down control Download PDF

Info

Publication number
SG175022A1
SG175022A1 SG2011071701A SG2011071701A SG175022A1 SG 175022 A1 SG175022 A1 SG 175022A1 SG 2011071701 A SG2011071701 A SG 2011071701A SG 2011071701 A SG2011071701 A SG 2011071701A SG 175022 A1 SG175022 A1 SG 175022A1
Authority
SG
Singapore
Prior art keywords
cool down
down control
substrate cool
substrate
control
Prior art date
Application number
SG2011071701A
Inventor
Jacob Newman
Dinesh Kanawade
Henry Barandica
Nir Merry
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG175022A1 publication Critical patent/SG175022A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0255—Sample holders for pyrometry; Cleaning of sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
    • G01K11/18—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance of materials which change translucency
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67103—Apparatus for thermal treatment mainly by conduction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67248—Temperature monitoring

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
SG2011071701A 2009-04-21 2010-04-12 Substrate cool down control SG175022A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17112809P 2009-04-21 2009-04-21
US12/758,206 US20100265988A1 (en) 2009-04-21 2010-04-12 Substrate cool down control
PCT/US2010/030741 WO2010123711A2 (en) 2009-04-21 2010-04-12 Substrate cool down control

Publications (1)

Publication Number Publication Date
SG175022A1 true SG175022A1 (en) 2011-11-28

Family

ID=42980946

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2011071701A SG175022A1 (en) 2009-04-21 2010-04-12 Substrate cool down control

Country Status (6)

Country Link
US (1) US20100265988A1 (en)
JP (1) JP2012525002A (en)
CN (1) CN102405510A (en)
SG (1) SG175022A1 (en)
TW (1) TW201039400A (en)
WO (1) WO2010123711A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006043324A1 (en) * 2006-09-15 2008-03-27 Robert Bosch Gmbh Plug-in sensor for combined pressure and temperature measurement
US10557190B2 (en) * 2013-01-24 2020-02-11 Tokyo Electron Limited Substrate processing apparatus and susceptor
KR102452722B1 (en) * 2015-08-27 2022-10-06 삼성전자주식회사 Substrate Processing Apparatus
US10571337B2 (en) * 2017-05-26 2020-02-25 Applied Materials, Inc. Thermal cooling member with low temperature control
CN107511589B (en) * 2017-10-17 2024-06-21 深圳华创兆业科技股份有限公司 Multi-axis laser slot milling machine
CN115315794A (en) * 2020-03-10 2022-11-08 东京毅力科创株式会社 Long wave infrared thermal sensor for integration into a tracking system
TWI815519B (en) * 2022-06-24 2023-09-11 樂華科技股份有限公司 Smart wafer transfer equipment and method

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH658516A5 (en) * 1982-08-20 1986-11-14 Mettler Instrumente Ag SCALE WITH ELECTROMAGNETIC POWER COMPENSATION.
JP2824003B2 (en) * 1993-02-16 1998-11-11 大日本スクリーン製造株式会社 Substrate temperature measurement device
JPH06295915A (en) * 1993-04-09 1994-10-21 F T L:Kk Manufacturing device for semiconductor device and manufacture of semiconductor device
US6602348B1 (en) * 1996-09-17 2003-08-05 Applied Materials, Inc. Substrate cooldown chamber
JP3966490B2 (en) * 1999-02-16 2007-08-29 株式会社小松製作所 Substrate temperature estimation apparatus and method, and substrate temperature control apparatus using the same
US6193811B1 (en) * 1999-03-03 2001-02-27 Applied Materials, Inc. Method for improved chamber bake-out and cool-down
CN101324470B (en) * 2001-12-26 2011-03-30 加拿大马特森技术有限公司 Temperature measurement and heat-treating methods and systems
KR100479988B1 (en) * 2002-07-24 2005-03-30 미래산업 주식회사 Method for compensating temperature in semiconductor test handler
US6976782B1 (en) * 2003-11-24 2005-12-20 Lam Research Corporation Methods and apparatus for in situ substrate temperature monitoring
US20060286807A1 (en) * 2005-06-16 2006-12-21 Jack Hwang Use of active temperature control to provide emmisivity independent wafer temperature
US8029186B2 (en) * 2004-11-05 2011-10-04 International Business Machines Corporation Method for thermal characterization under non-uniform heat load
US7642205B2 (en) * 2005-04-08 2010-01-05 Mattson Technology, Inc. Rapid thermal processing using energy transfer layers
KR20070053476A (en) * 2005-11-21 2007-05-25 삼성전자주식회사 Cooling apparatus for semiconductor manufacturing equipment
US7398693B2 (en) * 2006-03-30 2008-07-15 Applied Materials, Inc. Adaptive control method for rapid thermal processing of a substrate
US7412346B2 (en) * 2006-10-27 2008-08-12 Intel Corporation Real-time temperture detection during test
JP2008117956A (en) * 2006-11-06 2008-05-22 Daikin Ind Ltd Substrate cooling apparatus
US20090034582A1 (en) * 2007-08-02 2009-02-05 Tokyo Electron Limited Tbs Broadcast Center Apparatus for hot plate substrate monitoring and control

Also Published As

Publication number Publication date
WO2010123711A3 (en) 2011-01-20
WO2010123711A2 (en) 2010-10-28
TW201039400A (en) 2010-11-01
JP2012525002A (en) 2012-10-18
CN102405510A (en) 2012-04-04
US20100265988A1 (en) 2010-10-21

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