SG162631A1 - System and processing of a substrate - Google Patents
System and processing of a substrateInfo
- Publication number
- SG162631A1 SG162631A1 SG200809409-6A SG2008094096A SG162631A1 SG 162631 A1 SG162631 A1 SG 162631A1 SG 2008094096 A SG2008094096 A SG 2008094096A SG 162631 A1 SG162631 A1 SG 162631A1
- Authority
- SG
- Singapore
- Prior art keywords
- substrate
- processing
- station
- surface inspection
- top surface
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Sorting Of Articles (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A system for processing a substrate comprising a loading station for receiving the substrate; a bottom surface inspection station for inspecting the bottom surface of the substrate; a top surface inspection station for inspecting the top surface of the substrate and; a sorting station for sorting the substrate into a predetermined category based upon the bottom surface inspection and top surface inspection.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200809409-6A SG162631A1 (en) | 2008-12-17 | 2008-12-17 | System and processing of a substrate |
TW098143507A TW201033600A (en) | 2008-12-17 | 2009-12-17 | System and processing of a substrate |
PCT/SG2009/000484 WO2010071609A2 (en) | 2008-12-17 | 2009-12-17 | System and processing of a substrate |
CN2009801503236A CN102439707A (en) | 2008-12-17 | 2009-12-17 | System and processing of a substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG200809409-6A SG162631A1 (en) | 2008-12-17 | 2008-12-17 | System and processing of a substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
SG162631A1 true SG162631A1 (en) | 2010-07-29 |
Family
ID=42269270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200809409-6A SG162631A1 (en) | 2008-12-17 | 2008-12-17 | System and processing of a substrate |
Country Status (4)
Country | Link |
---|---|
CN (1) | CN102439707A (en) |
SG (1) | SG162631A1 (en) |
TW (1) | TW201033600A (en) |
WO (1) | WO2010071609A2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2812914A1 (en) * | 2012-02-07 | 2014-12-17 | ISMECA Semiconductor Holding SA | A device for sorting components |
TW201421013A (en) * | 2012-11-16 | 2014-06-01 | Prov Technology Corp | Electronic device inspection and classification equipment |
TW201500733A (en) * | 2013-06-25 | 2015-01-01 | Chiuan Yan Technology Co Ltd | Conductive glass inspection system |
US9341580B2 (en) * | 2014-06-27 | 2016-05-17 | Applied Materials, Inc. | Linear inspection system |
CN110108716A (en) * | 2019-05-06 | 2019-08-09 | 华侨大学 | A kind of automation substrate wafer defect and thickness detecting system |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7190446B2 (en) * | 2003-12-19 | 2007-03-13 | Asm Assembly Automation Ltd. | System for processing electronic devices |
KR100814284B1 (en) * | 2007-02-06 | 2008-03-18 | 한미반도체 주식회사 | Vision system for sawing & placement equipment |
KR100869539B1 (en) * | 2007-04-13 | 2008-11-19 | (주)제이티 | Apparatus for inspecting semiconductor |
-
2008
- 2008-12-17 SG SG200809409-6A patent/SG162631A1/en unknown
-
2009
- 2009-12-17 TW TW098143507A patent/TW201033600A/en unknown
- 2009-12-17 CN CN2009801503236A patent/CN102439707A/en active Pending
- 2009-12-17 WO PCT/SG2009/000484 patent/WO2010071609A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2010071609A3 (en) | 2013-10-24 |
CN102439707A (en) | 2012-05-02 |
WO2010071609A2 (en) | 2010-06-24 |
TW201033600A (en) | 2010-09-16 |
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