SG158017A1 - Lithographic apparatus and method - Google Patents
Lithographic apparatus and methodInfo
- Publication number
- SG158017A1 SG158017A1 SG200903707-8A SG2009037078A SG158017A1 SG 158017 A1 SG158017 A1 SG 158017A1 SG 2009037078 A SG2009037078 A SG 2009037078A SG 158017 A1 SG158017 A1 SG 158017A1
- Authority
- SG
- Singapore
- Prior art keywords
- lithographic apparatus
- heating
- cooling devices
- final element
- projection system
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12931408P | 2008-06-18 | 2008-06-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG158017A1 true SG158017A1 (en) | 2010-01-29 |
Family
ID=40981412
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200903707-8A SG158017A1 (en) | 2008-06-18 | 2009-06-01 | Lithographic apparatus and method |
SG2011090693A SG177192A1 (en) | 2008-06-18 | 2009-06-01 | Lithographic apparatus and method |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG2011090693A SG177192A1 (en) | 2008-06-18 | 2009-06-01 | Lithographic apparatus and method |
Country Status (7)
Country | Link |
---|---|
US (1) | US8451423B2 (de) |
EP (1) | EP2136250A1 (de) |
JP (2) | JP4972127B2 (de) |
KR (1) | KR101118659B1 (de) |
CN (2) | CN101609268B (de) |
SG (2) | SG158017A1 (de) |
TW (1) | TWI421644B (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20070115859A (ko) * | 2005-03-18 | 2007-12-06 | 가부시키가이샤 니콘 | 노광 방법 및 노광 장치, 디바이스 제조 방법, 그리고 노광장치의 평가 방법 |
NL2004808A (en) | 2009-06-30 | 2011-01-12 | Asml Netherlands Bv | Fluid handling structure, lithographic apparatus and device manufacturing method. |
EP2365390A3 (de) * | 2010-03-12 | 2017-10-04 | ASML Netherlands B.V. | Lithographische Vorrichtung und Verfahren |
WO2012097833A1 (en) | 2011-01-20 | 2012-07-26 | Carl Zeiss Smt Gmbh | Method of operating a projection exposure tool |
JP6122252B2 (ja) * | 2012-05-01 | 2017-04-26 | キヤノン株式会社 | 露光装置及びデバイスの製造方法 |
JP6041541B2 (ja) * | 2012-06-04 | 2016-12-07 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
US9377566B1 (en) | 2012-12-31 | 2016-06-28 | Nlight, Inc. | Flexible irradiance in laser imaging |
DE102013203338A1 (de) * | 2013-02-28 | 2014-08-28 | Carl Zeiss Smt Gmbh | Modellbasierte Steuerung einer optischen Abbildungseinrichtung |
JP6216460B2 (ja) * | 2013-08-30 | 2017-10-18 | エーエスエムエル ネザーランズ ビー.ブイ. | 液浸リソグラフィ装置 |
WO2016096508A1 (en) * | 2014-12-19 | 2016-06-23 | Asml Netherlands B.V. | A fluid handling structure, a lithographic apparatus and a device manufacturing method |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4509852A (en) | 1980-10-06 | 1985-04-09 | Werner Tabarelli | Apparatus for the photolithographic manufacture of integrated circuit elements |
AU2747999A (en) | 1998-03-26 | 1999-10-18 | Nikon Corporation | Projection exposure method and system |
EP1420300B1 (de) | 2002-11-12 | 2015-07-29 | ASML Netherlands B.V. | Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
SG121818A1 (en) | 2002-11-12 | 2006-05-26 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
SG121822A1 (en) | 2002-11-12 | 2006-05-26 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
US7738074B2 (en) | 2003-07-16 | 2010-06-15 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP1524558A1 (de) * | 2003-10-15 | 2005-04-20 | ASML Netherlands B.V. | Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
DE602004030365D1 (de) | 2003-10-22 | 2011-01-13 | Nippon Kogaku Kk | Belichtungsvorrichtung, belichtungsverfahren und verfahren zur bauelementeherstellung |
US7394521B2 (en) | 2003-12-23 | 2008-07-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
CN1938646B (zh) * | 2004-01-20 | 2010-12-15 | 卡尔蔡司Smt股份公司 | 曝光装置和用于投影透镜的测量装置 |
JP5167572B2 (ja) * | 2004-02-04 | 2013-03-21 | 株式会社ニコン | 露光装置、露光方法及びデバイス製造方法 |
EP3252533B1 (de) | 2004-02-04 | 2019-04-10 | Nikon Corporation | Belichtungsvorrichtung, belichtungsverfahren und verfahren zur herstellung eines artikels |
JP4543767B2 (ja) | 2004-06-10 | 2010-09-15 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
US7304715B2 (en) | 2004-08-13 | 2007-12-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7701550B2 (en) * | 2004-08-19 | 2010-04-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7397533B2 (en) | 2004-12-07 | 2008-07-08 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
SG124359A1 (en) * | 2005-01-14 | 2006-08-30 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
JP5040646B2 (ja) | 2005-03-23 | 2012-10-03 | 株式会社ニコン | 露光装置及び露光方法、並びにデバイス製造方法 |
US7440076B2 (en) * | 2005-09-29 | 2008-10-21 | Asml Netherlands B.V. | Lithographic apparatus, device manufacturing method and device manufactured thereby |
JP2007184336A (ja) | 2006-01-05 | 2007-07-19 | Canon Inc | 露光装置及びデバイス製造方法 |
US7701551B2 (en) | 2006-04-14 | 2010-04-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7675604B2 (en) * | 2006-05-04 | 2010-03-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Hood for immersion lithography |
DE102006021797A1 (de) * | 2006-05-09 | 2007-11-15 | Carl Zeiss Smt Ag | Optische Abbildungseinrichtung mit thermischer Dämpfung |
US8634053B2 (en) | 2006-12-07 | 2014-01-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
EP2131241B1 (de) | 2008-05-08 | 2019-07-31 | ASML Netherlands B.V. | Flüssigkeitshandhabungsstruktur, lithografische Vorrichtung und Vorrichtungsherstellungsverfahren |
SG159467A1 (en) | 2008-09-02 | 2010-03-30 | Asml Netherlands Bv | Fluid handling structure, lithographic apparatus and device manufacturing method |
-
2009
- 2009-05-13 EP EP09160135A patent/EP2136250A1/de not_active Withdrawn
- 2009-05-26 TW TW098117538A patent/TWI421644B/zh not_active IP Right Cessation
- 2009-06-01 SG SG200903707-8A patent/SG158017A1/en unknown
- 2009-06-01 SG SG2011090693A patent/SG177192A1/en unknown
- 2009-06-11 JP JP2009139705A patent/JP4972127B2/ja active Active
- 2009-06-17 US US12/486,425 patent/US8451423B2/en not_active Expired - Fee Related
- 2009-06-18 KR KR1020090054513A patent/KR101118659B1/ko not_active IP Right Cessation
- 2009-06-18 CN CN200910147537XA patent/CN101609268B/zh active Active
- 2009-06-18 CN CN201110371139.3A patent/CN102402132B/zh active Active
-
2012
- 2012-04-06 JP JP2012087035A patent/JP5290448B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2012138630A (ja) | 2012-07-19 |
US20090316121A1 (en) | 2009-12-24 |
CN101609268A (zh) | 2009-12-23 |
EP2136250A1 (de) | 2009-12-23 |
CN102402132A (zh) | 2012-04-04 |
US8451423B2 (en) | 2013-05-28 |
JP5290448B2 (ja) | 2013-09-18 |
SG177192A1 (en) | 2012-01-30 |
JP4972127B2 (ja) | 2012-07-11 |
JP2010004039A (ja) | 2010-01-07 |
KR101118659B1 (ko) | 2012-03-06 |
CN101609268B (zh) | 2012-01-18 |
CN102402132B (zh) | 2015-04-22 |
TW201009506A (en) | 2010-03-01 |
KR20090131669A (ko) | 2009-12-29 |
TWI421644B (zh) | 2014-01-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG158017A1 (en) | Lithographic apparatus and method | |
DK2702330T3 (da) | Fremgangsmåde og væskehaneanordning til bevaring af temperaturen af en væske i et væskedistributionssystem | |
ZA201200229B (en) | System and method for managing thermal issues in one or more industrial processes | |
EP2366757A4 (de) | Druck- und temperatursteuerungssystem für mindestens einen chemischen reaktor | |
NO20073245L (no) | Fremgangsmate og system til dannelse av flytende LNG | |
EP2845093A4 (de) | System und verfahren zur bereitstellung einer sozialen plattform für anwendungsentwicklung und -verteilung | |
EP2820119A4 (de) | Vorrichtung, system und verfahren zur modifizierung oder konzentration von zelldepletierter flüssigkeit | |
BR112012028419A2 (pt) | composição de transferência de calor, sistema de refrigeração, método de substituição de um fluido de transferência de calor existente contido em sistema de transferência de calor, e sistema de transferência de calor. | |
BR112015032134A2 (pt) | sistema de filtração de sangue contendo substrato revestido de manose | |
DK1987298T3 (da) | Apparat og fremgangsmåde til opvarmning og/eller køling | |
EP2304536A4 (de) | Systeme und verfahren zur immersiven interaktion mit tatsächlichen und/oder simulierten einrichtungen zur prozess-, umwelt- und industriesteuerung | |
DK2457177T3 (da) | Kvalifikationssystem og -fremgangsmåde til drift af koldvandsanlæg | |
NL1035770A1 (nl) | Lithographic apparatus and thermal optical manipulator control method. | |
FI20086218A0 (fi) | Menetelmä lämmönvaihtoa varten, järjestelmä ja käyttö | |
WO2014199035A3 (fr) | Plateau distributeur pour colonne de contact gaz/liquide avec systeme de distribution secondaire | |
GB2510710A (en) | Multi-phase distribution system, sub sea heat exchanger and a method of temperature control for hydrocarbons | |
EP2919044A4 (de) | Numerisches simulationssystem und numerisches simulationsverfahren für atmosphärenfluss durch numerische strömungsmechanik | |
BR112012026945A2 (pt) | método e aparelho para controlar a temperatura de um líquido, e, método e aparelho para determinar a temperatura de um líquido | |
BRPI0918984A2 (pt) | método e sistema para controlar um processo industrial | |
HK1209308A1 (en) | Biological information processing system, biological information measurement device, control device, method for controlling these, and storage medium | |
DK2921788T3 (da) | Varmeenergitransportsystem, varmevekslingssystem og fremgangsmåde til varmeenergitransport | |
WO2010123843A3 (en) | Observable moment encryption | |
EP3062901A4 (de) | Vorrichtung und verfahren zum wärme- und massenaustausch zwischen einem gas und einer flüssigkeit | |
EP2823281A4 (de) | Vorrichtung und verfahren zur regelung der temperatur in einer strömenden flüssigkeit in einem laborprobenverarbeitungssystem | |
BRPI1106076A2 (pt) | "método implementado por processador, sistema de transferência de fundos de conta pré-paga, e, meio tangível legível por computador." |