SG155128A1 - Photovoltaic device comprising a sputter deposited passivation layer as well as a method and apparatus for producing such a device - Google Patents
Photovoltaic device comprising a sputter deposited passivation layer as well as a method and apparatus for producing such a deviceInfo
- Publication number
- SG155128A1 SG155128A1 SG200900629-7A SG2009006297A SG155128A1 SG 155128 A1 SG155128 A1 SG 155128A1 SG 2009006297 A SG2009006297 A SG 2009006297A SG 155128 A1 SG155128 A1 SG 155128A1
- Authority
- SG
- Singapore
- Prior art keywords
- producing
- well
- passivation layer
- sputter deposited
- photovoltaic device
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 4
- 238000002161 passivation Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 238000001035 drying Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
- Physical Vapour Deposition (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/028,457 US20090199901A1 (en) | 2008-02-08 | 2008-02-08 | Photovoltaic device comprising a sputter deposited passivation layer as well as a method and apparatus for producing such a device |
| EP08101435A EP2088630A1 (en) | 2008-02-08 | 2008-02-08 | Photovoltaic device comprising a sputter deposited passivation layer as well as method and apparatus for producing such a device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG155128A1 true SG155128A1 (en) | 2009-09-30 |
Family
ID=41071295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG200900629-7A SG155128A1 (en) | 2008-02-08 | 2009-01-29 | Photovoltaic device comprising a sputter deposited passivation layer as well as a method and apparatus for producing such a device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2009188407A (ja) |
| KR (1) | KR20090086324A (ja) |
| SG (1) | SG155128A1 (ja) |
| TW (1) | TW201001738A (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6567119B1 (ja) * | 2018-03-27 | 2019-08-28 | キヤノントッキ株式会社 | 基板処理装置及びその制御方法、成膜装置、電子部品の製造方法 |
-
2009
- 2009-01-29 SG SG200900629-7A patent/SG155128A1/en unknown
- 2009-02-03 TW TW098103406A patent/TW201001738A/zh unknown
- 2009-02-05 KR KR1020090009186A patent/KR20090086324A/ko not_active Application Discontinuation
- 2009-02-06 JP JP2009025552A patent/JP2009188407A/ja not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| TW201001738A (en) | 2010-01-01 |
| JP2009188407A (ja) | 2009-08-20 |
| KR20090086324A (ko) | 2009-08-12 |
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