SG153018A1 - Ceramic heater, method of manufactruing the same and deposition apparatus for forming a thin layer using the ceramic heater - Google Patents

Ceramic heater, method of manufactruing the same and deposition apparatus for forming a thin layer using the ceramic heater

Info

Publication number
SG153018A1
SG153018A1 SG200808729-8A SG2008087298A SG153018A1 SG 153018 A1 SG153018 A1 SG 153018A1 SG 2008087298 A SG2008087298 A SG 2008087298A SG 153018 A1 SG153018 A1 SG 153018A1
Authority
SG
Singapore
Prior art keywords
ceramic heater
same
manufactruing
forming
thin layer
Prior art date
Application number
SG200808729-8A
Other languages
English (en)
Inventor
Seong-Min Lee
Jeong-Duck Choi
Je-Ho Chae
Original Assignee
Komico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komico Ltd filed Critical Komico Ltd
Publication of SG153018A1 publication Critical patent/SG153018A1/en

Links

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
SG200808729-8A 2007-11-27 2008-11-25 Ceramic heater, method of manufactruing the same and deposition apparatus for forming a thin layer using the ceramic heater SG153018A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070121643A KR101177749B1 (ko) 2007-11-27 2007-11-27 세라믹 히터, 이의 제조 방법 및 이를 갖는 박막 증착 장치

Publications (1)

Publication Number Publication Date
SG153018A1 true SG153018A1 (en) 2009-06-29

Family

ID=40847822

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200808729-8A SG153018A1 (en) 2007-11-27 2008-11-25 Ceramic heater, method of manufactruing the same and deposition apparatus for forming a thin layer using the ceramic heater

Country Status (3)

Country Link
KR (1) KR101177749B1 (ko)
SG (1) SG153018A1 (ko)
TW (1) TWI398185B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101333629B1 (ko) * 2013-07-03 2013-11-27 (주)보부하이테크 낮은 누설전류와 전력효율이 향상된 반도체 제조용 질화알루미늄 세라믹히터의 제조방법 및 이에 의해 제조된 낮은 누설전류와 전력효율이 향상된 반도체 제조용 질화알루미늄 세라믹히터
US11330673B2 (en) * 2017-11-20 2022-05-10 Applied Materials, Inc. Heated substrate support

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4445595B2 (ja) * 1995-09-12 2010-04-07 日本特殊陶業株式会社 セラミックヒータ、セラミックグロープラグおよびその製造方法
JPH11260534A (ja) * 1998-01-09 1999-09-24 Ngk Insulators Ltd 加熱装置およびその製造方法
JP2000290777A (ja) * 1999-04-07 2000-10-17 Tokyo Electron Ltd ガス処理装置、バッフル部材、及びガス処理方法
JP2001102157A (ja) * 1999-10-01 2001-04-13 Ngk Insulators Ltd セラミックスヒータ
JP2003212658A (ja) * 2002-10-30 2003-07-30 Ibiden Co Ltd 窒化アルミニウム焼結体およびセラミック基板
JP4761723B2 (ja) * 2004-04-12 2011-08-31 日本碍子株式会社 基板加熱装置
TW200709296A (en) * 2005-05-31 2007-03-01 Tokyo Electron Ltd Plasma treatment apparatus and plasma treatment method

Also Published As

Publication number Publication date
KR101177749B1 (ko) 2012-08-29
TW200932032A (en) 2009-07-16
TWI398185B (zh) 2013-06-01
KR20090054785A (ko) 2009-06-01

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