SG115618A1 - Dynamically adjustable slurry feed arm for wafer edge profile improvement in cmp - Google Patents

Dynamically adjustable slurry feed arm for wafer edge profile improvement in cmp

Info

Publication number
SG115618A1
SG115618A1 SG200400653A SG200400653A SG115618A1 SG 115618 A1 SG115618 A1 SG 115618A1 SG 200400653 A SG200400653 A SG 200400653A SG 200400653 A SG200400653 A SG 200400653A SG 115618 A1 SG115618 A1 SG 115618A1
Authority
SG
Singapore
Prior art keywords
cmp
edge profile
wafer edge
feed arm
slurry feed
Prior art date
Application number
SG200400653A
Other languages
English (en)
Inventor
Lin Bih-Tiao
Huang Soon-Kang
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Publication of SG115618A1 publication Critical patent/SG115618A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
SG200400653A 2003-02-20 2004-02-12 Dynamically adjustable slurry feed arm for wafer edge profile improvement in cmp SG115618A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/371,456 US6821895B2 (en) 2003-02-20 2003-02-20 Dynamically adjustable slurry feed arm for wafer edge profile improvement in CMP

Publications (1)

Publication Number Publication Date
SG115618A1 true SG115618A1 (en) 2005-10-28

Family

ID=32868335

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200400653A SG115618A1 (en) 2003-02-20 2004-02-12 Dynamically adjustable slurry feed arm for wafer edge profile improvement in cmp

Country Status (4)

Country Link
US (1) US6821895B2 (zh)
CN (1) CN1285979C (zh)
SG (1) SG115618A1 (zh)
TW (1) TWI233859B (zh)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7086933B2 (en) * 2002-04-22 2006-08-08 Applied Materials, Inc. Flexible polishing fluid delivery system
US6939210B2 (en) * 2003-05-02 2005-09-06 Applied Materials, Inc. Slurry delivery arm
US20050026551A1 (en) * 2003-07-30 2005-02-03 Berman Michael J> Method to improve control in CMP processing
US6929961B2 (en) * 2003-12-10 2005-08-16 Hitachi Global Storage Technologies Netherlands B. V. Dual function array feature for CMP process control and inspection
US20050164603A1 (en) * 2004-01-22 2005-07-28 House Colby J. Pivotable slurry arm
US20060027533A1 (en) * 2004-08-06 2006-02-09 Yaojian Leng System for dynamic slurry delivery in a CMP process
CN101934491B (zh) * 2004-11-01 2012-07-25 株式会社荏原制作所 抛光设备
JP2006147773A (ja) * 2004-11-18 2006-06-08 Ebara Corp 研磨装置および研磨方法
CN100379891C (zh) * 2005-05-18 2008-04-09 北京科技大学 一种铜银纳米颗粒分散氧化物光学薄膜制备方法
US20070131562A1 (en) * 2005-12-08 2007-06-14 Applied Materials, Inc. Method and apparatus for planarizing a substrate with low fluid consumption
US8409993B2 (en) * 2007-06-07 2013-04-02 Taiwan Semiconductor Manufacturing Company, Ltd. Method and system for controlling copper chemical mechanical polish uniformity
KR20110102378A (ko) * 2008-11-26 2011-09-16 어플라이드 머티어리얼스, 인코포레이티드 화학적 기계적 폴리싱을 위한 엔드 포인트 제어를 이용한 화학 물질과 연마 입자의 2 라인 혼합 방법
US8888136B2 (en) * 2009-02-25 2014-11-18 GM Global Technology Operations LLC Methods of preventing or reducing the effects of roof impact in automotive applications
US8360817B2 (en) * 2009-04-01 2013-01-29 Ebara Corporation Polishing apparatus and polishing method
CN102380814A (zh) * 2010-09-01 2012-03-21 无锡华润上华半导体有限公司 化学机械研磨的方法及装置
CN102023649B (zh) * 2010-12-27 2012-03-28 天津市环欧半导体材料技术有限公司 磨片机砂浆流量自动调节装置及其方法
US20130017762A1 (en) * 2011-07-15 2013-01-17 Infineon Technologies Ag Method and Apparatus for Determining a Measure of a Thickness of a Polishing Pad of a Polishing Machine
US20160365253A1 (en) * 2015-06-09 2016-12-15 Macronix International Co., Ltd. System and method for chemical mechanical planarization process prediction and optimization
US20190056210A1 (en) * 2017-08-16 2019-02-21 Agathon AG, Maschinenfabrik Measuring device
CN108857600B (zh) * 2018-07-25 2023-07-14 浙江工业大学 一种基于光催化的钴基合金加工方法及加工平台
CN109290918A (zh) * 2018-11-13 2019-02-01 江苏利泷半导体科技有限公司 用于非晶片制程的全自动抛光生产线
CN109290917A (zh) * 2018-11-13 2019-02-01 江苏利泷半导体科技有限公司 全自动非晶制程抛光系统
JP7145098B2 (ja) 2019-02-21 2022-09-30 株式会社荏原製作所 研磨装置、研磨方法、および研磨液供給位置決定プログラムを記録した記録媒体
TWI836340B (zh) * 2021-01-29 2024-03-21 澳大利亞商瑞思邁私人股份有限公司 頭戴式顯示系統
US11752592B2 (en) * 2021-07-16 2023-09-12 Taiwan Semiconductor Manufacturing Co., Ltd. Slurry enhancement for polishing system
CN113664712A (zh) * 2021-08-13 2021-11-19 芯盟科技有限公司 涡流侦测装置以及金属层厚度的测量方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6159075A (en) * 1999-10-13 2000-12-12 Vlsi Technology, Inc. Method and system for in-situ optimization for semiconductor wafers in a chemical mechanical polishing process
US6303507B1 (en) * 1999-12-13 2001-10-16 Advanced Micro Devices, Inc. In-situ feedback system for localized CMP thickness control
US6409579B1 (en) * 2000-05-31 2002-06-25 Koninklijke Philips Electronics N.V. Method and apparatus for conditioning a polish pad at the point of polish and for dispensing slurry at the point of polish

Also Published As

Publication number Publication date
US20040166686A1 (en) 2004-08-26
CN1523461A (zh) 2004-08-25
US6821895B2 (en) 2004-11-23
TWI233859B (en) 2005-06-11
TW200416103A (en) 2004-09-01
CN1285979C (zh) 2006-11-22

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