SG115477A1 - Fluid control apparatus - Google Patents

Fluid control apparatus

Info

Publication number
SG115477A1
SG115477A1 SG200203062A SG200203062A SG115477A1 SG 115477 A1 SG115477 A1 SG 115477A1 SG 200203062 A SG200203062 A SG 200203062A SG 200203062 A SG200203062 A SG 200203062A SG 115477 A1 SG115477 A1 SG 115477A1
Authority
SG
Singapore
Prior art keywords
control apparatus
fluid control
fluid
control
Prior art date
Application number
SG200203062A
Other languages
English (en)
Inventor
Yamaji Michio
Tsubota Kenji
Hoshiyama Hidenaga
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG115477A1 publication Critical patent/SG115477A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Fluid-Pressure Circuits (AREA)
SG200203062A 2001-05-23 2002-05-22 Fluid control apparatus SG115477A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001154359A JP2002349797A (ja) 2001-05-23 2001-05-23 流体制御装置

Publications (1)

Publication Number Publication Date
SG115477A1 true SG115477A1 (en) 2005-10-28

Family

ID=18998709

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200203062A SG115477A1 (en) 2001-05-23 2002-05-22 Fluid control apparatus

Country Status (10)

Country Link
US (1) US6868867B2 (fr)
EP (1) EP1260743B1 (fr)
JP (1) JP2002349797A (fr)
KR (1) KR20020090145A (fr)
CN (1) CN1386987A (fr)
CA (1) CA2387241A1 (fr)
DE (1) DE60210702T2 (fr)
IL (1) IL149796A0 (fr)
SG (1) SG115477A1 (fr)
TW (1) TW524945B (fr)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7196369B2 (en) * 2002-07-15 2007-03-27 Macronix International Co., Ltd. Plasma damage protection circuit for a semiconductor device
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
WO2007017937A1 (fr) * 2005-08-10 2007-02-15 Fujikin Incorporated Dispositif de régulation de fluide
US20060070400A1 (en) * 2004-10-01 2006-04-06 Hussmann Corporation Modular header system
JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
US7320339B2 (en) * 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007046697A (ja) * 2005-08-10 2007-02-22 Fujikin Inc 継手付き流体制御器
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
JP4818835B2 (ja) * 2006-07-04 2011-11-16 東京エレクトロン株式会社 気体供給ユニット
US8196609B2 (en) * 2006-08-23 2012-06-12 Horiba Stec, Co., Ltd. Integrated gas panel apparatus
US8074677B2 (en) * 2007-02-26 2011-12-13 Applied Materials, Inc. Method and apparatus for controlling gas flow to a processing chamber
JP2008291941A (ja) * 2007-05-25 2008-12-04 Surpass Kogyo Kk 流体機器ユニット構造
US7806143B2 (en) 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US20090137192A1 (en) * 2007-11-28 2009-05-28 Mks Instruments, Inc. Multi-zone pressure control system
JP5727703B2 (ja) * 2010-01-27 2015-06-03 株式会社ダイヘン 流体供給装置、および流体供給装置を備えた燃料電池システム
JP5775696B2 (ja) * 2011-01-31 2015-09-09 株式会社フジキン 流体制御装置
JP5785813B2 (ja) * 2011-08-10 2015-09-30 株式会社フジキン 流体制御装置
WO2013046660A1 (fr) 2011-09-30 2013-04-04 株式会社フジキン Dispositif d'alimentation en gaz
US9188990B2 (en) 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
JP5616416B2 (ja) 2012-11-02 2014-10-29 株式会社フジキン 集積型ガス供給装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6147113B2 (ja) 2013-06-27 2017-06-14 株式会社フジキン 流体制御装置用継手および流体制御装置
JP6404101B2 (ja) * 2013-12-05 2018-10-10 Ckd株式会社 配管継手、流体供給制御装置、及び配管接続構造
TWI651486B (zh) * 2013-12-05 2019-02-21 Ｃｋｄ股份有限公司 流體供給控制裝置
JP6486035B2 (ja) * 2014-08-28 2019-03-20 株式会社フジキン マニホールドバルブおよび流体制御装置
US9934956B2 (en) * 2015-07-27 2018-04-03 Lam Research Corporation Time multiplexed chemical delivery system
US10768641B2 (en) 2015-08-26 2020-09-08 Fujikin Incorporated Flow dividing system
JP6082082B2 (ja) * 2015-10-29 2017-02-15 株式会社堀場エステック 流体機構及び該流体機構を構成する支持部材
KR102148090B1 (ko) * 2016-01-28 2020-08-25 가부시키가이샤 후지킨 유체 제어 장치 및 가스 라인부의 착탈 방법
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
WO2018168559A1 (fr) * 2017-03-15 2018-09-20 株式会社フジキン Joint et dispositif de commande de fluide
JP7446618B2 (ja) * 2018-10-26 2024-03-11 株式会社フジキン 流体供給システム、流体制御装置、及び半導体製造装置
WO2020137572A1 (fr) * 2018-12-27 2020-07-02 株式会社フジキン Dispositif de commande de fluide, bloc de jonction et procédé de production pour dispositif de commande de fluide
JP2022529263A (ja) * 2019-04-15 2022-06-20 ラム リサーチ コーポレーション ガス送給用のモジュール式構成要素システム
CN112228420B (zh) * 2020-10-15 2022-07-19 河南恒创精密制造股份有限公司 一种具有液压结构元件的液压块
US20220372997A1 (en) * 2021-05-24 2022-11-24 Festo Se & Co. Kg Fluid control system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6109303A (en) * 1998-04-27 2000-08-29 Ckd Corporation Process gas supply unit
GB2353353A (en) * 1999-06-23 2001-02-21 Mks Instr Inc Integrated gas delivery system
US6216739B1 (en) * 1999-04-30 2001-04-17 Benkan Corporation Integrated gas control device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2731080B2 (ja) 1991-05-31 1998-03-25 株式会社本山製作所 ガス制御装置
JPH11159649A (ja) * 1993-02-10 1999-06-15 Ckd Corp 円筒状開閉弁取付構造
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
US5836355A (en) * 1996-12-03 1998-11-17 Insync Systems, Inc. Building blocks for integrated gas panel
US6152175A (en) * 1997-06-06 2000-11-28 Ckd Corporation Process gas supply unit
US6068016A (en) * 1997-09-25 2000-05-30 Applied Materials, Inc Modular fluid flow system with integrated pump-purge
US6142164A (en) * 1998-03-09 2000-11-07 Ultra Clean Technology Systems & Service, Inc. Method and apparatus for removing leaking gas in an integrated gas panel system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6109303A (en) * 1998-04-27 2000-08-29 Ckd Corporation Process gas supply unit
US6216739B1 (en) * 1999-04-30 2001-04-17 Benkan Corporation Integrated gas control device
GB2353353A (en) * 1999-06-23 2001-02-21 Mks Instr Inc Integrated gas delivery system

Also Published As

Publication number Publication date
EP1260743B1 (fr) 2006-04-19
US20020185185A1 (en) 2002-12-12
CA2387241A1 (fr) 2002-11-23
KR20020090145A (ko) 2002-11-30
IL149796A0 (en) 2002-11-10
DE60210702D1 (de) 2006-05-24
TW524945B (en) 2003-03-21
DE60210702T2 (de) 2006-11-09
EP1260743A3 (fr) 2003-05-07
CN1386987A (zh) 2002-12-25
US6868867B2 (en) 2005-03-22
EP1260743A2 (fr) 2002-11-27
JP2002349797A (ja) 2002-12-04

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