SG11202100703SA - Systems for workpiece processing with plasma - Google Patents
Systems for workpiece processing with plasmaInfo
- Publication number
- SG11202100703SA SG11202100703SA SG11202100703SA SG11202100703SA SG11202100703SA SG 11202100703S A SG11202100703S A SG 11202100703SA SG 11202100703S A SG11202100703S A SG 11202100703SA SG 11202100703S A SG11202100703S A SG 11202100703SA SG 11202100703S A SG11202100703S A SG 11202100703SA
- Authority
- SG
- Singapore
- Prior art keywords
- plasma
- systems
- workpiece processing
- workpiece
- processing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32633—Baffles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201862712051P | 2018-07-30 | 2018-07-30 | |
PCT/US2019/036328 WO2020027919A1 (en) | 2018-07-30 | 2019-06-10 | Systems for workpiece processing with plasma |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202100703SA true SG11202100703SA (en) | 2021-02-25 |
Family
ID=67108144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202100703SA SG11202100703SA (en) | 2018-07-30 | 2019-06-10 | Systems for workpiece processing with plasma |
Country Status (6)
Country | Link |
---|---|
US (1) | US20210287884A1 (en) |
JP (1) | JP7451490B2 (en) |
KR (1) | KR20210039422A (en) |
CN (1) | CN112673450B (en) |
SG (1) | SG11202100703SA (en) |
WO (1) | WO2020027919A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7261675B2 (en) * | 2019-07-01 | 2023-04-20 | 東京エレクトロン株式会社 | Heat treatment apparatus and heat treatment method |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5584936A (en) * | 1995-12-14 | 1996-12-17 | Cvd, Incorporated | Susceptor for semiconductor wafer processing |
US5846332A (en) * | 1996-07-12 | 1998-12-08 | Applied Materials, Inc. | Thermally floating pedestal collar in a chemical vapor deposition chamber |
KR19980071011A (en) * | 1997-01-24 | 1998-10-26 | 조셉 제이. 스위니 | High Temperature and High Flow Rate Chemical Vapor Deposition Apparatus and Related Deposition Methods |
US6972071B1 (en) * | 1999-07-13 | 2005-12-06 | Nordson Corporation | High-speed symmetrical plasma treatment system |
JP4330315B2 (en) * | 2002-03-29 | 2009-09-16 | 東京エレクトロン株式会社 | Plasma processing equipment |
JP4180304B2 (en) | 2002-05-28 | 2008-11-12 | 東京エレクトロン株式会社 | Processing equipment |
US7009281B2 (en) * | 2003-03-14 | 2006-03-07 | Lam Corporation | Small volume process chamber with hot inner surfaces |
WO2005124845A1 (en) * | 2004-06-15 | 2005-12-29 | Hitachi Kokusai Electric Inc. | Substrate processing equipment and semiconductor device manufacturing method |
US7845309B2 (en) * | 2004-07-13 | 2010-12-07 | Nordson Corporation | Ultra high speed uniform plasma processing system |
KR100868953B1 (en) | 2004-10-15 | 2008-11-17 | 가부시키가이샤 히다치 고쿠사이 덴키 | Substrate processing apparatus and semiconductor device manufacturing method |
JP4654738B2 (en) * | 2005-04-05 | 2011-03-23 | パナソニック株式会社 | Plasma processing equipment |
CN100358097C (en) | 2005-08-05 | 2007-12-26 | 中微半导体设备(上海)有限公司 | Semiconductor technology processing system and method |
US20070266945A1 (en) * | 2006-05-16 | 2007-11-22 | Asm Japan K.K. | Plasma cvd apparatus equipped with plasma blocking insulation plate |
WO2008024681A2 (en) | 2006-08-22 | 2008-02-28 | Nordson Corporation | Apparatus and methods for handling workpieces in a processing system |
US8603249B2 (en) * | 2006-12-11 | 2013-12-10 | Lg Electronics Inc. | Lift pin driving device and manufacturing apparatus having same |
US20080296261A1 (en) * | 2007-06-01 | 2008-12-04 | Nordson Corporation | Apparatus and methods for improving treatment uniformity in a plasma process |
KR100927375B1 (en) * | 2007-09-04 | 2009-11-19 | 주식회사 유진테크 | Exhaust unit, exhaust control method using same, substrate processing apparatus including the exhaust unit |
US7824146B2 (en) * | 2007-09-07 | 2010-11-02 | Advanced Technology Development Facility | Automated systems and methods for adapting semiconductor fabrication tools to process wafers of different diameters |
US20110049100A1 (en) * | 2008-01-16 | 2011-03-03 | Charm Engineering Co., Ltd. | Substrate holder, substrate supporting apparatus, substrate processing apparatus, and substrate processing method using the same |
JP2010171286A (en) * | 2009-01-26 | 2010-08-05 | Hitachi High-Technologies Corp | Plasma processing apparatus |
JP5455462B2 (en) * | 2009-06-23 | 2014-03-26 | 株式会社日立ハイテクノロジーズ | Plasma processing equipment |
US10026436B2 (en) * | 2009-07-01 | 2018-07-17 | Nordson Corporation | Apparatus and methods for supporting workpieces during plasma processing |
JP5757710B2 (en) * | 2009-10-27 | 2015-07-29 | 東京エレクトロン株式会社 | Plasma processing apparatus and plasma processing method |
US8597462B2 (en) * | 2010-05-21 | 2013-12-03 | Lam Research Corporation | Movable chamber liner plasma confinement screen combination for plasma processing apparatuses |
US9443753B2 (en) | 2010-07-30 | 2016-09-13 | Applied Materials, Inc. | Apparatus for controlling the flow of a gas in a process chamber |
KR101062683B1 (en) * | 2010-09-01 | 2011-09-06 | 주성엔지니어링(주) | Process apparatus using plasma which injects and vents proocess gas through inner side wall of process chamber, and method of processing a substrate using the same |
US9070536B2 (en) * | 2012-04-24 | 2015-06-30 | Applied Materials, Inc. | Plasma reactor electrostatic chuck with cooled process ring and heated workpiece support surface |
US9948214B2 (en) * | 2012-04-26 | 2018-04-17 | Applied Materials, Inc. | High temperature electrostatic chuck with real-time heat zone regulating capability |
CN105122431A (en) * | 2013-03-13 | 2015-12-02 | 应用材料公司 | Pulsed pc plasma etching process and apparatus |
WO2015023435A1 (en) * | 2013-08-12 | 2015-02-19 | Applied Materials, Inc. | Recursive pumping for symmetrical gas exhaust to control critical dimension uniformity in plasma reactors |
JP2015162266A (en) * | 2014-02-26 | 2015-09-07 | 株式会社日立ハイテクノロジーズ | plasma processing apparatus |
JP6424726B2 (en) * | 2015-04-27 | 2018-11-21 | 株式会社Sumco | Susceptor and epitaxial growth apparatus |
JP6738485B2 (en) * | 2016-08-26 | 2020-08-12 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Low pressure lift pin cavity hardware |
US10418270B2 (en) * | 2016-12-07 | 2019-09-17 | Tel Fsi, Inc. | Wafer edge lift pin design for manufacturing a semiconductor device |
US10679827B2 (en) | 2017-01-25 | 2020-06-09 | Applied Materials, Inc. | Method and apparatus for semiconductor processing chamber isolation for reduced particles and improved uniformity |
-
2019
- 2019-06-10 CN CN201980051030.6A patent/CN112673450B/en active Active
- 2019-06-10 US US17/263,626 patent/US20210287884A1/en not_active Abandoned
- 2019-06-10 WO PCT/US2019/036328 patent/WO2020027919A1/en active Application Filing
- 2019-06-10 KR KR1020217006062A patent/KR20210039422A/en not_active Application Discontinuation
- 2019-06-10 SG SG11202100703SA patent/SG11202100703SA/en unknown
- 2019-06-10 JP JP2021505186A patent/JP7451490B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN112673450B (en) | 2024-06-11 |
JP7451490B2 (en) | 2024-03-18 |
KR20210039422A (en) | 2021-04-09 |
US20210287884A1 (en) | 2021-09-16 |
WO2020027919A1 (en) | 2020-02-06 |
CN112673450A (en) | 2021-04-16 |
JP2021532598A (en) | 2021-11-25 |
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