SG11202006936RA - Cleaning components and methods in a plating system - Google Patents

Cleaning components and methods in a plating system

Info

Publication number
SG11202006936RA
SG11202006936RA SG11202006936RA SG11202006936RA SG11202006936RA SG 11202006936R A SG11202006936R A SG 11202006936RA SG 11202006936R A SG11202006936R A SG 11202006936RA SG 11202006936R A SG11202006936R A SG 11202006936RA SG 11202006936R A SG11202006936R A SG 11202006936RA
Authority
SG
Singapore
Prior art keywords
methods
plating system
cleaning components
cleaning
components
Prior art date
Application number
SG11202006936RA
Other languages
English (en)
Inventor
Kyle M Hanson
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of SG11202006936RA publication Critical patent/SG11202006936RA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/20Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • B08B3/022Cleaning travelling work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/08Cleaning containers, e.g. tanks
    • B08B9/093Cleaning containers, e.g. tanks by the force of jets or sprays
    • B08B9/0936Cleaning containers, e.g. tanks by the force of jets or sprays using rotating jets
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/02Cleaning or pickling metallic material with solutions or molten salts with acid solutions
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/004Sealing devices
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06Suspending or supporting devices for articles to be coated
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00Processes for servicing or operating cells for electrolytic coating
    • C25D21/08Rinsing
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/04Electroplating with moving electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/12Semiconductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Electrochemistry (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Electroplating Methods And Accessories (AREA)
SG11202006936RA 2018-02-01 2019-01-30 Cleaning components and methods in a plating system SG11202006936RA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862625277P 2018-02-01 2018-02-01
PCT/US2019/015910 WO2019152555A1 (en) 2018-02-01 2019-01-30 Cleaning components and methods in a plating system

Publications (1)

Publication Number Publication Date
SG11202006936RA true SG11202006936RA (en) 2020-08-28

Family

ID=67391903

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202006936RA SG11202006936RA (en) 2018-02-01 2019-01-30 Cleaning components and methods in a plating system

Country Status (6)

Country Link
US (1) US11214890B2 (ko)
KR (1) KR102454873B1 (ko)
CN (1) CN111655910B (ko)
SG (1) SG11202006936RA (ko)
TW (1) TWI723337B (ko)
WO (1) WO2019152555A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114555870A (zh) * 2021-03-17 2022-05-27 株式会社荏原制作所 镀覆装置以及镀覆装置的接触部件清洗方法
CN113930835A (zh) * 2021-11-25 2022-01-14 博罗县环贸精密电镀有限公司 一种用于电镀槽自动化的清洗装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6186873B1 (en) * 2000-04-14 2001-02-13 International Business Machines Corporation Wafer edge cleaning
JP3284496B2 (ja) * 2000-08-09 2002-05-20 株式会社荏原製作所 めっき装置及びめっき液除去方法
US7029567B2 (en) * 2001-12-21 2006-04-18 Asm Nutool, Inc. Electrochemical edge and bevel cleaning process and system
TWI355298B (en) * 2004-01-26 2012-01-01 Applied Materials Inc Apparatus for electroless deposition of metals ont
CN101389415A (zh) 2006-02-22 2009-03-18 赛迈有限公司 单侧工件处理
US8371316B2 (en) 2009-12-03 2013-02-12 International Test Solutions, Inc. Apparatuses, device, and methods for cleaning tester interface contact elements and support hardware
US9309603B2 (en) * 2011-09-14 2016-04-12 Applied Materials, Inc Component cleaning in a metal plating apparatus
SG11201406133WA (en) * 2012-03-28 2014-10-30 Novellus Systems Inc Methods and apparatuses for cleaning electroplating substrate holders
KR102092416B1 (ko) * 2012-03-30 2020-03-24 노벨러스 시스템즈, 인코포레이티드 역전류 디플레이팅을 이용한 전기도금 기판 홀더의 클리닝
JP2015062956A (ja) 2012-09-19 2015-04-09 株式会社荏原製作所 研磨装置
US10416092B2 (en) * 2013-02-15 2019-09-17 Lam Research Corporation Remote detection of plating on wafer holding apparatus
US9399827B2 (en) * 2013-04-29 2016-07-26 Applied Materials, Inc. Microelectronic substrate electro processing system
KR101620420B1 (ko) * 2014-09-16 2016-05-12 주식회사 포스코 롤 세정장치 및 세정방법
US10047453B2 (en) 2015-05-26 2018-08-14 Applied Materials, Inc. Electroplating apparatus
US10307798B2 (en) * 2015-08-28 2019-06-04 Taiwan Semiconducter Manufacturing Company Limited Cleaning device for cleaning electroplating substrate holder

Also Published As

Publication number Publication date
CN111655910B (zh) 2022-07-22
WO2019152555A1 (en) 2019-08-08
CN111655910A (zh) 2020-09-11
TW201941837A (zh) 2019-11-01
KR102454873B1 (ko) 2022-10-13
US20190233966A1 (en) 2019-08-01
KR20200104944A (ko) 2020-09-04
US11214890B2 (en) 2022-01-04
TWI723337B (zh) 2021-04-01

Similar Documents

Publication Publication Date Title
IL274749B (en) System and method for washing hands
ZA202003999B (en) System and methods
IL276586A (en) Device and method for cleaning a surface
SG10201705206QA (en) Cleaning apparatus, plating apparatus using the same, and cleaning method
GB201821278D0 (en) Drone-based cleaning method and system
IL271139A (en) Systems, devices and methods for cleaning toilets
GB202003743D0 (en) Systems and methods for tank cleaning
SG11202005931XA (en) Local interaction systems and methods
SG11201911753QA (en) Cleaning device and cleaning method
EP3823508C0 (de) Reinigungsvorrichtung und reinigungssystem
GB201804807D0 (en) Interaactive systems and methods
EP3718652C0 (de) Reinigungsverfahren und reinigungsvorrichtung
EP3435294C0 (en) SYSTEMS AND METHODS FOR SOLVING INVERSE PROBLEMS WITH A COUPLED AUTOENCODER
GB201509404D0 (en) Ultrasonic pre-cleaning bath and method
IL284494A (en) Method and system for cleaning sediment in a pumping line
SG11202011564RA (en) Electroplating apparatus and electroplating method
ZA202107916B (en) Pulse delivery cleaning systems and methods
SG11202006936RA (en) Cleaning components and methods in a plating system
IL266849A (en) System and method for optical plethysmography
SG11202106509UA (en) Plating apparatus and plating method
GB201817362D0 (en) Circuitry and method
GB201803129D0 (en) Method in liquid chiromatorgraphy
GB2564012B (en) System and method for cleaning a receptacle
GB201803519D0 (en) Improvements in frying technology
EP3820344C0 (de) Eimer und reinigungssystem, das einen solchen eimer umfasst