SG11201909393SA - Positive-type photosensitive resin composition, thermal crosslinking agent for positive-type photosensitive resins, patterned cured film and method for producing same, semiconductor element, and electronic device - Google Patents
Positive-type photosensitive resin composition, thermal crosslinking agent for positive-type photosensitive resins, patterned cured film and method for producing same, semiconductor element, and electronic deviceInfo
- Publication number
- SG11201909393SA SG11201909393SA SG11201909393SA SG11201909393SA SG 11201909393S A SG11201909393S A SG 11201909393SA SG 11201909393S A SG11201909393S A SG 11201909393SA SG 11201909393S A SG11201909393S A SG 11201909393SA
- Authority
- SG
- Singapore
- Prior art keywords
- positive
- type photosensitive
- resin composition
- electronic device
- semiconductor element
- Prior art date
Links
- 239000011347 resin Substances 0.000 title abstract 2
- 229920005989 resin Polymers 0.000 title abstract 2
- 239000011342 resin composition Substances 0.000 title abstract 2
- 239000003431 cross linking reagent Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 150000001875 compounds Chemical class 0.000 abstract 3
- 125000000217 alkyl group Chemical group 0.000 abstract 2
- 125000004432 carbon atom Chemical group C* 0.000 abstract 2
- 125000003700 epoxy group Chemical group 0.000 abstract 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/022—Quinonediazides
- G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31058—After-treatment of organic layers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Disclosed is a positive-type photosensitive resin composition, comprising an (A) alkali-soluble resin, a (B) compound represented by the following foiniula () or a compound represented by the following 5 formula (2), and a (C) compound having two or more epoxy groups, R 1 0 1 OR6 R20 NN0 R5 N N ,r A R - 0 OR wherein R 1 to R 6 each independently represent an alkyl group having 1 to 10 carbon atoms, (1) R 7 0 HO R 8 0 OR 9 OH OR 19 H3C - C—CH 3 R 11 0 OH OR 12 (2) 10 wherein R' to R 12 each independently represent an alkyl group having 1 to 10 carbon atoms. 56
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2017/017754 WO2018207294A1 (en) | 2017-05-10 | 2017-05-10 | Positive-type photosensitive resin composition, thermal crosslinking agent for positive-type photosensitive resins, patterned cured film and method for producing same, semiconductor element, and electronic device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201909393SA true SG11201909393SA (en) | 2019-11-28 |
Family
ID=64104604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201909393S SG11201909393SA (en) | 2017-05-10 | 2017-05-10 | Positive-type photosensitive resin composition, thermal crosslinking agent for positive-type photosensitive resins, patterned cured film and method for producing same, semiconductor element, and electronic device |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP7092121B2 (en) |
KR (1) | KR102425708B1 (en) |
CN (1) | CN110582726B (en) |
SG (1) | SG11201909393SA (en) |
TW (1) | TWI781171B (en) |
WO (1) | WO2018207294A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7151874B2 (en) * | 2019-03-27 | 2022-10-12 | 昭和電工マテリアルズ株式会社 | Resin composition, cured product, semiconductor element and electronic device |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006243563A (en) * | 2005-03-04 | 2006-09-14 | Fuji Photo Film Co Ltd | Photosensitive solder resist composition and photosensitive solder resist film, and permanent pattern and method for forming the same |
JP4640037B2 (en) | 2005-08-22 | 2011-03-02 | Jsr株式会社 | Positive photosensitive insulating resin composition and cured product thereof |
JP5067028B2 (en) | 2007-06-12 | 2012-11-07 | 日立化成工業株式会社 | Positive photosensitive resin composition, method for producing resist pattern, and electronic device |
CN101855596B (en) * | 2007-11-12 | 2013-05-22 | 日立化成株式会社 | Positive-type photosensitive resin composition, method for production of resist pattern, semiconductor device, and electronic device |
JP2010073948A (en) | 2008-09-19 | 2010-04-02 | Gigaphoton Inc | Power supply device for pulse laser |
KR101397771B1 (en) * | 2008-12-26 | 2014-05-20 | 히타치가세이가부시끼가이샤 | Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device |
EP2618216B1 (en) * | 2010-09-16 | 2019-05-29 | Hitachi Chemical Co., Ltd. | Positive photosensitive resin composition, method of creating resist pattern, and electronic component |
JP5846110B2 (en) | 2011-12-09 | 2016-01-20 | 信越化学工業株式会社 | Chemically amplified negative resist composition, photocurable dry film, method for producing the same, pattern forming method, and film for protecting electric / electronic parts |
JP2014202849A (en) * | 2013-04-03 | 2014-10-27 | 日立化成株式会社 | Photosensitive adhesive composition, production method of pattern cured film using the same, and electronic component |
JP5981465B2 (en) | 2014-01-10 | 2016-08-31 | 信越化学工業株式会社 | Negative resist material and pattern forming method using the same |
JP6034326B2 (en) | 2014-03-26 | 2016-11-30 | 富士フイルム株式会社 | Semiconductor device and composition for forming insulating layer |
JP2015200819A (en) * | 2014-04-09 | 2015-11-12 | 日立化成デュポンマイクロシステムズ株式会社 | Positive photosensitive resin composition, patterned cured film using the same, and production method thereof |
JP2015206013A (en) * | 2014-04-23 | 2015-11-19 | 日立化成株式会社 | Photosensitive adhesive composition, method for manufacturing semiconductor device using the same, and semiconductor device |
JP6199811B2 (en) * | 2014-06-18 | 2017-09-20 | 信越化学工業株式会社 | Positive photosensitive resin composition, photocurable dry film, method for producing the same, laminate, and pattern forming method |
JP2016177027A (en) * | 2015-03-19 | 2016-10-06 | 日立化成株式会社 | Photosensitive resin composition, patterned cured film formed by using the photosensitive resin composition, and organic el display device including the patterned cured film as ink-repelling bank film |
-
2017
- 2017-05-10 CN CN201780090330.6A patent/CN110582726B/en active Active
- 2017-05-10 SG SG11201909393S patent/SG11201909393SA/en unknown
- 2017-05-10 JP JP2019516802A patent/JP7092121B2/en active Active
- 2017-05-10 WO PCT/JP2017/017754 patent/WO2018207294A1/en active Application Filing
- 2017-05-10 KR KR1020197029304A patent/KR102425708B1/en active IP Right Grant
-
2018
- 2018-05-09 TW TW107115716A patent/TWI781171B/en active
Also Published As
Publication number | Publication date |
---|---|
CN110582726A (en) | 2019-12-17 |
TWI781171B (en) | 2022-10-21 |
TW201901301A (en) | 2019-01-01 |
JP7092121B2 (en) | 2022-06-28 |
KR102425708B1 (en) | 2022-07-28 |
CN110582726B (en) | 2023-08-04 |
KR20200006522A (en) | 2020-01-20 |
WO2018207294A1 (en) | 2018-11-15 |
JPWO2018207294A1 (en) | 2020-03-12 |
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