JP2010073948A - Power supply device for pulse laser - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stabilize discharging by preventing a residual voltage from being applied in an opposite direction between discharge electrodes after discharging, and to prevent a synchronization shift of next discharging from being performed by an influence of residual vibration generated after discharging by attenuating the residual vibration in a short time. <P>SOLUTION: In a power supply circuit for a pulse laser comprising a two-stage magnetic pulse compressing circuit, and a reset circuit RC, a resistance R1 and an inductor L1 are connected in parallel to transfer capacitors C1 and C2 or Cp. Consequently, a magnetic core reset time of a magnetic core of each transfer stage can be controlled to prevent the residual voltage from being applied in the opposite direction between the discharge electrodes. Furthermore, the vibration of a voltage generated by residual energy after magnetic reset completion can be quickly attenuated. Here, the series circuit of the resistance R1 and the L1 may be connected dividedly in parallel to the transfer capacitors C1, C2, and Cp of respective stages of the magnetic compressing circuit. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a power source for a pulsed laser such as an excimer laser, and more specifically, can stabilize the transfer time of a magnetic compression module (MPC), and is a twin-chamber (two-stage type) oscillation type laser. The present invention relates to a pulse laser power supply device suitable for application to an apparatus.

In order to meet the demand for higher integration of semiconductor devices, excimer laser devices are used as light sources for semiconductor exposure apparatuses.
In recent years, in order to improve the throughput of the exposure apparatus and make the circuit pattern ultra-fine, the double chamber system including the oscillation stage laser and the amplification stage laser shown in Patent Document 1 and Patent Document 2 has increased the output. It is measured.
In the future, as the integration of semiconductor devices progresses and the node process becomes 32 nm, the exposure apparatus will be required for high NA (1.3 to 1.5) by liquid immersion technology and introduction of technologies such as double patterning. In order to increase the throughput of this 32-nm node exposure apparatus, ArF excimer lasers are required to have a high repetition frequency (6 kHz or more) and a high output (60 W or more).

In order to respond to the demand for higher output, the double chamber system is composed of an oscillation stage laser that produces laser light with high light quality (spectral performance, etc.) and small output, and an amplification stage laser that amplifies the laser light. The form of the double chamber system is roughly classified into a MOPA (Master Oscillator Power Amplifier) system in which no resonator mirror is provided in the amplification stage chamber and a MOPO (Master Oscillator Power Oscillator) system in which a resonator mirror is provided.
In the double chamber system, it is necessary to adjust the discharge timing of the oscillation stage laser and the amplification stage laser. When the discharge and emission timings of the oscillation stage laser and the amplification stage laser are shifted, the laser beam emitted from the oscillation stage laser is Not amplified well.

  In an excimer laser, a pair of main discharge electrodes for exciting a laser gas are disposed inside a laser chamber so as to face each other with a predetermined distance in a direction perpendicular to the laser oscillation direction. A high voltage pulse is applied to the pair of main discharge electrodes, and when the voltage applied between the main discharge electrodes reaches a certain value (breakdown voltage), the laser gas between the main discharge electrodes breaks down and main discharge starts. The laser medium is excited by this main discharge. Therefore, such an exposure gas laser device performs pulse oscillation by repeating main discharge, and the emitted laser light becomes pulse light.

FIG. 5 shows a configuration example of a high voltage pulse generator of a power supply device for generating discharge in the laser chamber and exciting laser gas in the laser device.
The high-voltage pulse generator of the pulse laser power supply device of FIG. 5 is composed of a two-stage magnetic pulse compression circuit using three magnetic switches SR1, SR2, SR3 made of a saturable reactor and a step-up transformer TC1. The magnetic switch SR1 is for reducing switching loss in the solid-state switch SW which is a semiconductor switching element such as IGBT, and is also called magnetic assist.
The first magnetic switch SR2 and the second magnetic switch SR3 constitute a two-stage magnetic pulse compression circuit.

When the main capacitor C0 is charged by a charger (not shown), the switch SW is turned on, and the time integral value of the charging voltage Vc0 of the main capacitor C0 applied to both ends of the magnetic assist SR1 is determined by the characteristic of the magnetic assist SR1. , The magnetic assist SR1 is saturated and the magnetic switch is turned on, and a current flows through the primary capacitor C0, the magnetic assist SR1, the primary side of the step-up transformer TC1, and the loop of the switch SW. At the same time, a current flows through the secondary side of the step-up transformer TC1 and the loop of the capacitor C1, and the charge stored in the main capacitor C0 is transferred to be charged in the capacitor C1.
When the capacitor C1 is charged, when the time integration value of the voltage Vc1 in the capacitor C1 reaches a limit value determined by the characteristics of the magnetic switch SR2, the magnetic switch SR2 is saturated and the magnetic switch is turned on, and the capacitor C1, the capacitor C2, the magnetic switch A current flows through the loop of the switch SR3, and the charge stored in the capacitor C1 is transferred to charge the capacitor C2.

  Thereafter, when the time integration value of the voltage Vc2 in the capacitor C2 reaches a limit value determined by the characteristics of the magnetic switch SR3, the magnetic switch SR3 is saturated and the magnetic switch is turned on, and the capacitors C2, the peaking capacitor Cp, and the magnetic switch SR3 A current flows through the loop, and the charge stored in the capacitor C2 is transferred to charge the peaking capacitor Cp. When the peaking capacitor Cp is charged and the voltage Vcp reaches a certain value (breakdown voltage) Vb, main discharge starts between main discharge electrodes in a chamber (not shown), and the laser medium is excited by this main discharge, and the laser Light is generated.

After performing the magnetic pulse compression, it is necessary to perform magnetic reset of the cores of the magnetic switch, step-up SR1 to SR3, and transformer TC1.
There are various methods for magnetic reset. One of them is a reset winding in the core, and this reset winding is provided with a reset circuit that sends a direct current in the direction opposite to the main winding. There is a method of passing a current (reset current) through the reset winding.
In FIG. 5, a reset circuit RC for resetting the magnetic switches SR1, SR2, SR3 and the transformer TC1 is provided. By the reset circuit RC, the magnetic switches SR1, SR2, SR3, the transformer TC1 are provided. To reset.
That is, reset coils LR1, LR2, LR3, TR1 are wound around the cores of the magnetic switches SR1, SR2, SR3, and the transformer TC1, and the reset coils LR1, LR2, LR3, TR1 are a reactor L, a DC power supply E Connected in series.
Then, a reset current Ir is supplied to the reset windings LR1, LR2, LR3, TR1 to reset the magnetic switches SR1, SR2, SR3 and the transformer TC1.

The power supply circuit using the magnetic pulse compression circuit as described above has an advantage that a high-speed pulse voltage can be obtained with a relatively simple circuit configuration, but it is not sufficient in the processing of the reflected energy from the load and the surplus energy at the core reset. There was a problem.
In order to deal with such a problem, for example, in the devices described in Patent Document 3 and Patent Document 4, a diode or a resistor and a diode are inserted on the circuit to suppress the reflected voltage. With such a configuration, the diode can be attenuated up to the forward voltage of the diode.
JP 2001-24265 A JP 2004-342964 A Japanese Patent Laid-Open No. 4-193073 JP-A-11-112300

FIG. 6 shows a time chart of the voltage applied between the electrodes of the discharge chamber at the time of magnetic reset. The vertical axis of the figure shows the voltage Vcp of the peaking capacitor Cp, the horizontal axis shows the time t, and the figure shows the fluctuation of the voltage Vcp during 6 kHz operation.
As shown in the figure, after a negative high voltage pulse is generated and a discharge is generated between the discharge electrodes ((1) discharge timing in the figure), the voltage Vcp is inverted and rises.
When the resetting of the magnetic switches SR1, SR2, SR3 and the transformer TC1 is completed (the final magnetic reset completion timing in FIG. 2), the voltage Vcp attenuates while oscillating (the residual energy decay period in FIG. 3). ).

In the power supply circuit, in order to increase the repetition frequency of the main discharge and perform high repetition operation, it is necessary to shorten the reset time of the saturable reactor and the transformer.
However, when the reset time and cycle are shortened, the positive voltage applied to the chamber after discharge (between the discharge electrodes) increases and the high-frequency discharge operation becomes unstable. Further, due to the influence of residual energy vibration, the next discharge causes a delay time in the pulse generation operation.
That is, as shown in FIG. 6, if the repetition frequency of the main discharge is 6 kHz and the discharge cycle is 166.7 μs, for example, the residual vibration is not attenuated until the next discharge, and is applied between the electrodes after the discharge. The positive voltage increases.

That is, if the repetition frequency of the main discharge is increased and a high repetition operation is performed, the following two problems arise.
(1) When a high frequency operation is performed, it is necessary to quickly terminate the magnetic reset of each saturable reactor and transformer. In order to end the reset earlier, the magnetic reset of each saturable reactor or the like is terminated earlier.
The reset operation is performed by applying a potential difference between the capacitors at both ends of the core in the opposite direction to that during main transfer. Faster reset means increasing the potential difference between both ends of the core. This increases the positive voltage applied to the chamber after discharge.

This point will be further described.
The reset order ends in ascending order of core Vt product. In the circuit of FIG. 5, the order is SR3 → SR2 → TC1.
When the reset is completed, the inductance value becomes small at both ends of the saturable reactor with components having a small frequency (long period). For example, when the resetting of the magnetic switch SR3 is completed, the capacitors C2 and Cp at both ends thereof are connected without inductance. The capacity functions as a parallel composite capacity of C2 // Cp.
For this reason, at the end of resetting of the magnetic switch SR2, the capacitors C1, C2, and Cp are connected in parallel. During the reset operation of the transformer TC1, a voltage is applied to the capacitor C1.
That is, the reset is performed in a state where a voltage is applied to the combined capacitance of C1 // C2 // Cp. Therefore, during this period, the voltage applied to the discharge portion of the discharge chamber is equivalent to the voltage Vcp of the peaking capacitor Cp, and is the voltage applied to the combined capacitance of C1 // C2 // Cp. Since this voltage affects the next discharge, it is necessary to keep it below the upper limit.

FIG. 7 shows a vibration image of the residual energy after reset.
As shown in the figure, the magnetic reset time of the saturable reactor at each stage is the earliest in the final stage, and thereafter, the reset is completed in the order to the transfer source. Since the Vt product of the transfer source magnetic core is the largest, the reset time decreases toward the final stage saturable reactor. The residual energy is attenuated along the path shown in FIG.
The Vt product is the product of the applied voltage and the time until saturation, and indicates the amount of energy that can be stored in the saturable reactor.
As described above, in order to end the reset operation early, it is necessary to increase the applied voltage across the core, and as a result, the residual voltage applied to the discharge part of the chamber increases. In order to stabilize the high-frequency discharge operation, it is desirable to suppress this residual voltage and not apply the Vcp voltage to the positive side after discharge.

(2) The residual energy when the reset time of the last saturable reactor is finished vibrates. Since the main circuit of the magnetic compression circuit has no element that absorbs this surplus energy, and if an element that absorbs the surplus energy is provided, the loss increases, and such an element cannot be inserted. It becomes attenuation. For this reason, it vibrates.
This oscillating voltage causes a minute potential difference between the voltages at both ends of the saturable reactor, and slightly moves the reset point of the saturable reactor that has been reset. When the reset point changes, the saturation time changes and the delay time of the high voltage pulse changes. As a result, the output delay time of the high voltage pulse changes and affects the synchronous control between the oscillation stage laser and the amplification stage laser in the double chamber system.

In the double chamber system, the laser oscillation synchronization timing of the two chambers is important. In particular, since the timing of energy injection (high voltage pulse voltage) into two laser chambers has a great influence on laser oscillation and optical performance, the delay time control of the high voltage pulse must be controlled in nanosecond order. It is necessary to suppress the delay time change.
As shown in FIG. 8, the magnetic reset is to bring the core state back to the magnetic reset point from the saturation region of the core (the magnetic switch is on) as shown in FIG. If there is, the magnetic reset point moves as shown in FIG. For this reason, the start position at the time of transfer of the next pulse changes, and the output delay time of the high voltage pulse changes.

Conventionally, the problems (1) and (2) have been dealt with as follows.
The above problem (1), that is, the problem that the positive voltage applied to the chamber after discharge becomes large is the voltage applied during the reset operation of the step-up transformer TC1, but in the past, The optimum value of the reset current value of the step-up transformer TC1 was confirmed, and the adjustment was made by the number of reset windings.
However, in order to perform a high repetition operation, it is necessary to physically increase the reset time. For this purpose, the voltage applied to the step-up transformer TC1 must be increased, and the voltage exceeds the upper limit value.
Furthermore, as shown in FIG. 5, in the case of the reset method in which the reset current is made to flow through the reset winding, since the reset circuit is common, the individual injection energy to the core such as the saturable reactor cannot be finely controlled. . In addition, when the initial reset point of the core changes due to the return energy from the discharge part of the discharge chamber (energy not consumed in the discharge chamber), it is difficult to design the numerical value of the reset time.
For this reason, the order of resetting the cores is automatically fixed in the order of SR3 → SR2 → TC1.
Conventionally, since the operating frequency is slow, there is no need to increase the reset time. If the allowable value is exceeded, it is sufficient if the peak value is suppressed by the method described in Patent Documents 3 and 4. It was.

The problem described in (2) above, that is, the problem that the residual energy vibrates when the reset time ends, can be solved to some extent by the methods disclosed in Patent Documents 3 and 4 described above. However, in this method, since the diode is inserted into the attenuation circuit, the voltage can be lowered only to the forward drop voltage of the diode.
In addition, since the operating frequency has been slow at the maximum operating frequency so far, some circuits have a circuit configuration in which vibration is attenuated by the next pulse operation by natural attenuation due to stray resistance components.
The present invention has been made to solve the above-described problems, and an object of the present invention is to prevent a residual voltage in the reverse direction from being applied between the discharge electrodes after the discharge, thereby preventing the discharge in the chamber. In addition to stabilization, the residual vibration generated after the discharge is attenuated in a short time to prevent the next discharge from being out of synchronization due to the influence of the residual vibration.

In the present invention, the above problem is solved as follows.
(1) A transformer charged with a voltage charged to the main capacitor is applied to the primary side, a magnetic compression circuit connected to the secondary side of the transformer and composed of a saturable reactor and a transfer capacitor, and a reset current applied to the reset winding. In a pulsed laser power supply device having a reset circuit for magnetically resetting the transformer and the saturable reactor by reversely exciting the core by flowing, a series circuit of a resistor and an inductor is connected in parallel with the transfer capacitor.
That is, a resistor is inserted in parallel with the transfer capacitor in order to consume residual energy when the magnetic reset is completed. However, when only the resistor is inserted, a loss occurs because a current also flows through the resistor during main transfer. Therefore, an inductor is inserted in series with the resistor in order to reduce the loss during the main transfer.
(2) In the above (1), the series circuit of the resistor and the inductor is connected in parallel to the final transfer capacitor of the magnetic compression circuit.
(3) In the above (1), the series circuit of the resistor and the inductor is divided and connected in parallel to the transfer capacitor at each stage of the magnetic compression circuit.

In the present invention, the following effects can be obtained.
(1) Since a series circuit of a resistor and an inductor is connected in parallel with the transfer capacitor, the magnetic reset time of the magnetic core of each transfer stage can be controlled, and the magnetic core of the saturable reactor in the final stage can be controlled. By delaying the resetting, it is possible to suppress the application of the positive voltage to the discharge part of the chamber and to stabilize the high frequency discharge operation.
In addition, the vibration of the voltage due to the residual energy after completion of the final magnetic reset can be rapidly attenuated, and the magnetic reset point of the magnetic core can be prevented from changing due to the residual vibration. The start position can be stabilized.
Further, since the inductor is connected in series with the resistor, the current flowing through the resistor can be cut off during the main transfer, and the loss during the main transfer due to the connection of the resistor can be reduced.
(2) By connecting the series circuit of the resistor and inductor in parallel with the transfer capacitor at the final stage of the magnetic compression circuit, the transfer time to the transfer capacitor at the final stage is the fastest. Can be the least.
(3) The series circuit of the resistor and inductor is divided and connected in parallel to the transfer capacitor at each stage of the magnetic compression circuit, so that it is effective for optimizing the resistance loss and the resistance size. It is.

FIG. 1 is a diagram showing a configuration of a high voltage pulse generator of a pulse laser power supply circuit according to a first embodiment of the present invention.
FIG. 1 shows a configuration in which a series circuit of a resistor R1 and an inductor L1 is connected in parallel to a peaking capacitor Cp that is a final stage capacitor of the high-voltage pulse generator of the power supply circuit shown in FIG. This is the same as that shown in FIG.
That is, a two-stage magnetic pulse compression circuit using three magnetic switches SR1, SR2, SR3 composed of saturable reactors and a step-up transformer TC1, and a reset for resetting the magnetic switches SR1, SR2, SR3, transformer TC1. A circuit RC is provided. As described above, the pulse compression operation is performed by the two-stage magnetic compression circuit, and the peaking capacitor Cp is charged. When this voltage reaches the breakdown voltage, main discharge starts between the main discharge electrodes in the chamber, and laser light is generated.
The power supply circuit is preferably applied to a power supply apparatus of a double chamber system having the above-described oscillation stage laser and amplification stage laser, but can also be applied to a single chamber laser apparatus having one chamber.

In the present embodiment, as shown in FIG. 1, a resistor R1 and an inductor L1 are connected in parallel to the peaking capacitor Cp, whereby the magnetic reset time of the magnetic core of each transfer stage can be controlled. At the same time, the vibration of the voltage due to the residual energy after completion of the final magnetic reset can be rapidly attenuated.
Here, when only a resistor is simply inserted, a loss occurs due to this resistor during main transfer (transfer of energy of the capacitor C0 to the discharge chamber).
In order to suppress this loss as much as possible, a coil (inductor L1) is inserted in series with the resistor R1. Since the main transfer has a frequency component that is about two orders of magnitude larger than the vibration energy described above, the current flowing through the resistor can be cut off.
As described above, by providing a series circuit of the resistor R1 and the inductor L1, the magnetic reset time of the saturable reactor of each transfer stage can be controlled. That is, as shown in FIG. 1, the reset time of the core of the last stage magnetic switch SR3 can be delayed by inserting the resistor R1. Thereby, the peak value of a residual voltage can be suppressed for discharge stabilization.

Here, the reset operation will be described.
FIG. 2A is a diagram for explaining a reset operation in a conventional circuit in which a resistor and an inductor are not inserted.
In this figure, after discharging, a reset current flows through the reset circuit, so that a current flows in the direction of A in the figure, and the charge charged in the peaking capacitor Cp shifts to the capacitor C2, and the voltage of the capacitor C2 increases. To do. Thereby, a voltage of (Vc2−Vcp) is applied to the saturable reactor SR3, and when the VT product (Vc2−Vcp) × t reaches a constant value, the core of the saturable reactor SR3 is reset. Similarly, when the reset current flows, a current flows in a direction B in FIG. 6 and the charge charged in the capacitor C2 shifts to the capacitor C1, and the voltage of the capacitor C1 increases. As a result, a voltage of (Vc1−Vc2) is applied to the saturable reactor SR2, and when the VT product (Vc1−Vc2) × t reaches a certain value, the core of the saturable reactor SR2 is reset.
Further, the capacitor C1 is charged, so that Vc1 is applied to the step-up transformer TC1, and when the VT product reaches a constant value, the core of the step-up transformer TC1 is reset.
In the magnetic compression circuit, the VT product is normally set in the order of saturable reactor SR3 <SR2 <step-up transformer TC1, so in the case of the circuit of FIG. 2A, saturable reactor SR3 → SR2 → step-up transformer TC1. Will be reset in this order.

FIG. 2B is a diagram for explaining the reset operation when the series circuit of the resistor R1 and the inductor L1 is inserted in parallel with the capacitor Cp at the final stage as in the present invention.
In this figure, after discharging, a reset current flows through the reset circuit, so that a current flows in the direction A in this figure. In this case, since the resistor R1 and the inductor L1 are connected in parallel, Most of them flow through a series circuit of a resistor R1 and an inductor L1, and the voltage of the capacitor C2 does not rise so much. For this reason, the voltage applied to the saturable reactor SR3 is small, and the reset of the core of the saturable reactor SR3 is delayed.
On the other hand, as described above, the voltages of (Vc1−Vc2) and Vc1 are applied to the saturable reactor SR2 and the step-up transformer TC1, and when the VT product reaches a constant value, the core is reset.
That is, by inserting the resistor R1 in parallel with the capacitor and appropriately selecting the value of the resistor R1, the reset time of the saturable reactor can be controlled, and if configured as shown in FIG. The reset of the core of the saturable reactor SR3 of the stage can be delayed.
While the reset of the core of the saturable reactor SR3 in the final stage is not completed, the voltage of the capacitor C2 in the preceding stage is not transmitted to the capacitor Cp and does not appear on the load side.
Accordingly, during this period, the reset voltage of the core that takes the longest reset time, in this case, the transformer TC1, is increased to quickly end the reset of the transformer TC1.
That is, by optimizing the resistance value of the resistor R1, the reset current value, and the like, the voltage (VCp) applied to the discharge part of the discharge chamber can be suppressed.

Further, as in this embodiment, by connecting the resistor R1 and the inductor L1 in parallel to the peaking capacitor Cp, the residual energy is consumed by flowing through the resistor R1, and the residual energy rapidly vibrates on the main circuit. Can be attenuated.
FIG. 3 is a time chart of the voltage applied between the electrodes of the discharge chamber at the time of magnetic reset. The vertical axis of the figure shows the voltage Vcp of the peaking capacitor Cp, the horizontal axis shows the time t, and the figure shows the fluctuation of the voltage Vcp during 6 kHz operation.
As shown in the figure, after a negative high voltage pulse is generated and a discharge is generated between the discharge electrodes ((1) discharge timing in the figure), the voltage Vcp is inverted and rises.
Then, after the magnetic core reset is completed, the voltage Vcp attenuates while oscillating (residual energy decay period in FIG. 2).
In this embodiment, since the resistor R1 is connected in parallel with the peaking capacitor Cp, the residual energy is consumed by the resistor R1 and rapidly decays as shown in FIG. Attenuates.
For this reason, it is possible to prevent the magnetic reset point from moving as shown in FIG. 8 due to the residual vibration, and it is possible to stabilize the start position when the next pulse is transferred.
Also, as described above, by delaying the reset of the core of the saturable reactor SR3 in the final stage, the positive voltage that reverses and rises after the occurrence of discharge does not appear on the load side, and is positive in the discharge part of the chamber. The application of the voltage on the side can be suppressed, and the high-frequency discharge operation can be stabilized.

The values of the resistor R1 and the inductor L1 (hereinafter, the value of the resistor R1 is denoted by R and the value of the inductor L1 is denoted by L) are determined as follows.
The vibration component (voltage) due to the residual energy after completion of the magnetic reset needs to be converged before the next discharge operation. Assuming that the discharge operation cycle is T and the final reset time of the magnetic core is t, the decayable time τ is expressed by the following equation (1).
τ = T−t (1)
Here, τ must be less than or equal to the value determined by the time constant of the total capacitance value C (capacitance value when all are connected in parallel) of each stage and the resistance value R, and the following equation (2) Need to be satisfied.
τ> RC
R <τ / C (2)
The value of the inductor L is determined as follows because the current at the time of main transfer is blocked and the current is required to flow at the time of attenuation after reset.
The transfer time at the time of main transfer is fast and the frequency component is on the order of 10 MHz, but the frequency component at the time of attenuation is on the order of 100 kHz, and the value of the two-digit frequency component is different. Therefore, the inductance value L is selected so that the impedance is commensurate with this.

In Patent Documents 3 and 4, a diode is used, but in the present invention, a diode cannot be used.
This means that vibration energy absorption (attenuation) must be less than a few volts with respect to the main transfer applied voltage (about 30 kV), but when a diode is used, the vibration energy must be kept below a specified value of a few volts. This is because they cannot.
In other words, when blocking the loss during main transfer using a diode, current will flow through the diode when absorbing vibration energy, but normally multiple diodes are connected in series considering the breakdown voltage. At that time, only the forward voltage of the diode becomes several tens of volts or more.

FIG. 4 is a diagram showing the configuration of the high voltage pulse generator of the power supply circuit according to the second embodiment of the present invention.
In FIG. 1, the series circuit of the resistor R1 and the inductor L1 is connected in parallel to the peaking capacitor Cp which is the final stage capacitor, but in FIG. 4, the series circuit of the resistor and the inductor is arranged in parallel to each transfer capacitor. The other configurations are the same as those shown in FIG.
In this embodiment, as shown in FIG. 4, a series circuit of a resistor R1 and an inductor L1 is connected in parallel to the peaking capacitor Cp, a series circuit of a resistor R2 and an inductor L2 is connected in parallel to the capacitor C2, A series circuit of a resistor R3 and an inductor L3 is connected in parallel with the capacitor C1.
As described above, by dividing the transfer capacitors in parallel and connecting a series circuit of resistors and inductors and appropriately setting the values of the respective resistance values, the heat generation and the size of the resistors can be optimized. In addition, by appropriately adjusting the value of each resistance value and the value of the reset current, it is possible to set the reset end timing of each magnetic core.

It is a figure which shows the structure of the high voltage pulse generator of the power supply circuit for pulse lasers of the 1st Example of this invention. It is a figure explaining magnetic reset, such as a magnetic switch provided in the circuit. In a present Example, it is a time chart of the voltage applied between the electrodes of a discharge chamber at the time of a magnetic reset. It is a figure which shows the structure of the high voltage pulse generator of the power supply circuit for pulse lasers of the 2nd Example of this invention. It is a figure which shows the structural example of the high voltage pulse generator of the power supply device for pulse lasers. It is a figure which shows the time chart of the voltage applied between the electrodes of the discharge chamber at the time of a magnetic reset. It is a figure which shows the vibration image of the residual energy after reset. It is a figure explaining the movement of the magnetic reset point by a residual vibration.

Explanation of symbols

C0 Main capacitor SW switch L1 Reactor SR1, SR2, SR3 Magnetic switch TC1 Step-up transformer C1, C2 Capacitor Cp Peaking capacitor L1 Inductor R1 Resistor RC Reset circuit TR1, LR1, LR2, LR3 Reset winding L Inductor E DC power supply

Claims (3)

A transformer charged with a voltage charged to the main capacitor is applied to the primary side, a magnetic compression circuit composed of a saturable reactor and a transfer capacitor connected to the secondary side of the transformer, and a reset current flowing through the reset winding. A pulse laser power supply device comprising a reset circuit that reversely excites a core and magnetically resets the transformer and the saturable reactor,
A pulse laser power supply device, wherein a series circuit of a resistor and an inductor is connected in parallel with the transfer capacitor. 2. The pulse laser power supply device according to claim 1, wherein the series circuit of the resistor and the inductor is connected in parallel to a transfer capacitor at a final stage of the magnetic compression circuit. 2. The pulse laser power supply device according to claim 1, wherein the series circuit of the resistor and the inductor is divided and connected in parallel to a transfer capacitor at each stage of the magnetic compression circuit.

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