JP2000236680A - Pulse power device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable stable load operation for preventing polarized magnetization and saturation of a transformer, without inserting a diode circuit into the secondary winding of the transformer. SOLUTION: A tertiary winding is formed in a pulse transformer PT having a gap, and this tertiary winding is provided with a diode circuit D2 which is in a blocking direction with respect to a pulse main current, becomes energized at discharging of magnetizing energy, and absorbs the magnetizing energy. This device also includes connecting a reactor circuit in series with the secondary winding of the transformer and to prevent the magnetizing energy from being discharged to a load side. It also includes providing a switching circuit which short-circuits the tertiary winding with a low impedance, excluding intervals where the transformer generates pulse main currents, and to discharge the residual energy of the secondary winding-side capacitor through the tertiary winding.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse power supply device which combines a pulse generation circuit using a power semiconductor switch and a magnetic pulse compression circuit to generate a large current pulse of a narrow width at high repetition, and more particularly to a pulse transformer. The prevention of magnetic saturation and magnetic polarization.

[0002]

2. Description of the Related Art FIG. 8 shows an example of a conventional pulse power supply device.
Pulse generating circuit 1, the provided first stage capacitor C ₀ of the power, leave initial charging the capacitor C ₀ by the high-pressure charger 2, through saturable reactors SI ₀ from the capacitor C ₀ ON control of the semiconductor switch SW ₀ supplies a pulse current _{I 0} to the pulse transformer PT. The saturable reactor SI ₀ performs a saturation operation after the semiconductor switch SW ₀ is completely turned on to generate a pulse current I ₀ , whereby the switch S
To reduce the responsibilities of W _0.

[0003] Pulse magnetic pulse compression circuit 3 ₁ 2-stage, 3 ₂ are cascade-connected to the secondary side of the transformer PT, a capacitor with the pulse current I ₁ that is pressurized by the first stage of the magnetic pulse generator 3 ₁ the pulse transformer PT C ₁ is a high pressure charge, the next stage of the magnetic pulse compression circuit shown polarity of the pulse current I ₂ narrow that magnetic pulse compression by saturable reactor SI ₁ at the charging voltage of the capacitor C ₁ is operated magnetic switch 3 which supplies _2. Similarly, the magnetic switch operation of the saturable reactor SI _2, with magnetic pulse compression pulse width magnetic pulse compression circuit 3 _2, and outputs the pulse current I ₃ in the shown polarity.

[0004] pulse output of the magnetic pulse compression circuit 3 _2,
A narrow and high voltage pulse current is supplied to a load 4 such as a chamber of a laser head. Load 4, the main discharge electrodes E peaking capacitor C _P in parallel circuit of the _LM and the preionization electrode E _LA
Is provided, and when the peaking capacitor C _P is charged to a certain voltage level by the pulse current, the capacitor C _P ′
Was subjected to pre-ionization of the tube gas discharge by preionization electrode E _LA through, obtain the main discharge in the main discharge electrodes E _LM This preionization.

Here, the saturable reactors SI ₀ , SI ₁ ,
SI ₂ is provided with a magnetic reset winding and magnetic reset circuits MR ₀ , MR ₂ and MR ₃ , respectively, and supplies a DC reset current after the saturation operation of the saturable reactor to excite them to the opposite polarity and saturate them. . The magnetic reset circuit MR ₁ prevents magnetic saturation and magnetic bias of the core by supplying a DC bias current to the reset coil of the pulse transformer PT. These magnetic reset circuits may supply a reset current collectively from one reset power supply.

In the pulse power supply device having such a configuration, the discharge of the load 4 does not consume all of the applied pulse energy, and a part of the energy that cannot be consumed returns to the pulse generation circuit 1 side. This returning energy is called kickback energy. The kickback energy appears as recharging voltage of the peaking capacitor C _P after load discharge as reflected energy from the pulse generating circuit (residual charge).

[0007] If the recharge voltage of the peaking capacitor C _P is reversed polarity, influence the state of the load 4, when the load becomes the laser head is sometimes output energy of the next discharge becomes unstable .

[0008] To eliminate the recharge voltage of opposite polarity of the peaking capacitor C _P, and may be provided diode D ₀ in the output stage of the magnetic pulse compression circuit 3 _2, a reactor L _H provided in parallel with the load 4, the peaking capacitor C Suppresses the generation of _P recharge voltage.

The intervention of the diode D ₀ and the reactor L _H causes the magnetic reset current to interfere with the pulse transformer PT.
It becomes the following side shorting galvanically, inconvenience to the magnetic resetting of the magnetic reset circuit MR ₁ pulse transformer PT and saturable reactors SI ₁ by ~MR _3, SI ₂ generated.

That is, when the reset voltage is applied to the pulse transformer PT and the saturable reactors SI ₁ and SI ₂ , the diode D ₀ for extinguishing the residual charge of the peaking capacitor C _P becomes conductive, and the reactor L _H In this case, a short-circuit state occurs, so that the secondary side thereof is almost short-circuited with respect to application of a reset voltage such as a pulse transformer PT, and a reset voltage cannot be established. In particular, the pulse transformer PT is tends to return by supplying reset current in the magnetic reset circuit MR ₁ desaturate, sufficient reset is not performed by the interposition of such a diode D ₀ of the secondary side, the magnetic The body is gradually demagnetized and may eventually saturate.

[0011] Therefore, the diode circuit D ₁ is provided on the secondary side of the pulse transformer PT, by the polarity of the diode circuit D ₁ in the reverse direction to the magnetic reset current of the pulse transformer PT, the pulse transformer magnetic reset As a result, demagnetization and saturation of the pulse transformer are prevented, and the magnetic reset of the saturable reactors SI ₁ and SI ₂ is ensured.

The diode D ₀ and the diode circuit D ₁
Is appropriately changed depending on the difference in the configuration of the load and the difference in the configuration of the magnetic pulse compression circuit. In place of the pulse transformer PT is provided a saturable transformer, there is also a case of providing a diode circuit D ₁ on the secondary side.

[0013]

[SUMMARY OF THE INVENTION Conventionally device, by providing the diode circuit D ₁ on the secondary side of the pulse transformer PT, to prevent saturation magnetic deviation of the pulse transformer PT, saturable reactors SI _1, SI ₂ Can be reliably performed in a short time.

Here, the diode circuit D ₁ needs to have a withstand voltage that will not be damaged by a high voltage (several kV to several hundred V) applied to the capacitor C ₁ . Therefore, the actual configuration of the diode circuit D ₁ is the number of diode elements in those series.

[0015] In the diode circuit D ₁ of the this configuration, to require those large, high forward voltage, to reduce the turns ratio of the equivalent to the pulse transformer PT, circuit loss is large. Further, the circuit of the diode circuit D ₁ increases the loop inductance of the current I ₁ and affects the magnetic pulse compression effect.

Further, since the impedance when the diode circuit D ₁ is viewed from the capacitor C ₁ is infinite in the current blocking direction of the diode circuit D ₁ , the capacitor C ₁ has the opposite polarity due to kickback energy from the load side. Place again charge transfer to the load side as reflected energy from the capacitor C ₁ when it is charged, there is a case where the next discharge operation of the load becomes unstable.

As a method for solving such inconvenience,
A pulse transformer PT and Gapped transformer scheme omitting the diode circuit D ₁ and the magnetic reset circuit MR ₁ is considered. When adopting this gapped transformer residual magnetic flux of the diode D ₀ and reactors L _H by a pulse transformer PT even when the load short-circuit condition occurs, the return to zero, thereby preventing the DC magnetic deviation or magnetic saturation.

However, in the case of employing a pulse transformer with a gap, the pulse transformer PT emits magnetization energy by returning the magnetic flux to an initial value after the core is magnetized by the pulse main current. The current is generated in the capacitor C ₁ side magnetic flux change in the core to release the magnetic energy, the current is the polarity of charging the capacitor C ₁ in the opposite direction to the current I _1, the capacitor C ₁ to the load side An energy transfer is caused to make the next discharge operation of the load unstable.

An object of the present invention, without interposing diode circuit D ₁ to the secondary winding of the transformer, a pulse power supply device capable of obtaining a stable operation of the load while preventing transformer magnetic bias-saturated To provide.

[0020]

According to the present invention, in order to solve the above-mentioned problems, a tertiary winding is provided on a pulse transformer with a gap, and the tertiary winding is blocked when the transformer generates a pulse main current. And a diode circuit that conducts when the magnetic energy is released from the transformer after the main pulse current flows and absorbs the magnetic energy.

Further, by providing a reactor circuit in series with the main pulse current path flowing through the secondary winding of the transformer, the impedance of the secondary winding is increased when the magnetizing energy is released, and the magnetizing energy is released to the load side. To prevent
This is to promote emission to the diode circuit side.

A switch circuit for short-circuiting the tertiary winding with low impedance except during a period in which the pulse transformer generates a pulse main current is provided, and a capacitor having the same charge polarity as the pulse main current is connected to a capacitor on the secondary winding side. When residual energy remains, this energy is released through the tertiary winding.

Therefore, the present invention has the following features.

(First invention) A pulse power supply device for supplying a pulse main current to a primary winding of a pulse transformer, compressing a pulse main current obtained for a secondary winding of the pulse transformer with a magnetic pulse, and supplying the compressed pulse current to a load. In the pulse transformer,
A tertiary winding provided with a gap for supplying the pulse main current to the secondary winding to prevent magnetization by releasing magnetization energy after the core is magnetized; A diode circuit is provided which is in a blocking direction with respect to the polarity of the pulse main current generated in the above and conducts with respect to the emission of the magnetization energy to absorb the magnetization energy.

(Second Invention) A reactor circuit is provided in series with the secondary winding of the pulse transformer, and a reactor circuit for increasing the impedance on the secondary winding side when the magnetization energy is emitted is provided.

(Third Invention) The pulse transformer is used to
Except for the period during which the pulse main current is supplied to the next winding side,
A switch circuit for short-circuiting the next winding with low impedance is provided.

[0027]

FIG. 1 is a circuit diagram showing an embodiment of the present invention. Portions figure differs from FIG. 8, to remove the diode circuit D _1, the pulse transformer PT is provided with a third winding while those with gaps, a pulsed main current pulse transformer for this third winding lies in providing a diode circuit D ₂ for absorbing the magnetization energy conducting upon release of the magnetization energy after generation.

The diode circuit D ₂ has, for example, a configuration in which a plurality of diodes are connected in series and the wiring inductance thereof is used for the reactor, a configuration in which a reactor having a small inductance is connected to the diode in series, and a current limiting resistor is further provided. It is configured to be connected in series.

The polarity of the primary, secondary, and tertiary windings of the pulse transformer PT is indicated by “•”. When the pulse main current I ₀ flows through the primary winding, the diode circuit D ₂ moves in the blocking direction. The polarity is decided so that it becomes.

According to this configuration, all the pulse main current of the pulse transformer PT shifts to the secondary winding, and supplies the pulse current to the load 4. Thereafter, when the pulse transformer PT emits magnetization energy, the current is reversed polarity to the pulse main current, the tertiary winding of the diode circuit D ₂ conducts. In this conduction, the diode circuit D ₂ equivalently exhibits a low impedance such that only the layer voltage of the diode and the wiring inductance are provided, and most of the magnetization energy from the pulse transformer PT is discharged to the tertiary winding side, It dissipated in the diode diode circuit D ₂ and the like.

[0031] From the foregoing, in this embodiment, the pulse transformer PT is by the gapped, the residual magnetic flux even when the diode D ₀ and reactors L _H load short-circuit condition occurs, the return to zero, polarized Magnetic and magnetic saturation can be prevented.

In addition, to release the magnetizing energy from the pulse transformer PT, the current flowing through the capacitor C ₁ on the secondary winding side is reduced, and the capacitor C ₁ is prevented from being charged in the opposite direction to the current I _1. it can. In other words, when the magnetization energy is released from the pulse transformer PT, the capacitor C ₁
Energy transfer from the load to the load can be extremely small, and the next discharge operation of the load can be stabilized.

Note that the primary, secondary, and
Number tertiary winding n _1, n _2, n ₃ is appropriately designed, n ₃
Breakdown voltage of ≦ n ₁ in the diode circuit D ₂ to be reduced. When n ₃ ≧ n ₂ , the current capacity of the diode circuit D ₂ can be reduced, the wiring inductance viewed from the pulse transformer PT can be made smaller than that of the secondary winding, and the degree of magnetization energy absorption on the tertiary winding can be reduced. Can be higher.

FIG. 2 is a circuit diagram showing another embodiment of the present invention. 1 differs from FIG. 1 in that a reactor L _S is provided in series with the secondary winding of the pulse transformer.

This reactor L _S has a pulse transformer P
Increasing the impedance of the secondary winding side when the release of the magnetization energy from T, to prevent the magnetization energy is released to the load side, it is intended to promote the release of the diode circuit D ₂ side.

Conventionally, the pulse transformer PT is designed to reduce the inductance inserted in series with the secondary winding in order to obtain a narrow pulse current at the input and output.
FIG. 3 equivalently shows an input / output circuit of the pulse transformer PT. When the tertiary winding is not provided, the inductances L ₁ and L ₂ inserted in the primary and secondary windings and the capacitor C ₁ ,
The oscillation period τ of the pulse current is determined by C ₂ , which is given by the following equation.

[0037]

(Equation 1)

In this equation, the inductance L ₂ is
When converted into the primary side of the pulse transformer PT, the inductance becomes 1 / (n ₂ / n ₁ ) ² times the number of turns n ₁ and n _{2 of} the pulse transformer, and as the turns ratio (n ₂ / n ₁ ) increases, The influence of the pulse current on the oscillation cycle is reduced. That is,
The inductance inserted in the secondary winding of the pulse transformer PT does not significantly affect the oscillation period τ of the pulse current.

Therefore, in the present embodiment, the reactor L _S is inserted in series with the secondary winding of the pulse transformer PT to increase the impedance on the secondary winding side.

Thus, when the magnetization energy is released from the pulse transformer PT (the tertiary winding diode circuit D ₂
), The impedance of the secondary winding is 3
Make it sufficiently higher than the impedance of the next winding, prevent the magnetization energy from being released to the load side,
To promote the release of the diode circuit D ₂ side, further stabilize the next discharge operation of the load.

The reactor L _S affects the oscillation cycle of the pulse main current when the primary / secondary turns ratio (n ₁ / n ₂ ) of the pulse transformer PT is small. The inductance is determined in consideration of the influence of. Effect of inductance of the pulse main reactor for current L _S, the diode in the reactor L _S in parallel provided to bypass the reactor L _S by the diode is conductive for a pulse main current from the pulse transformer PT When the magnetizing energy is released, the diode may be in the blocking direction and the reactor L _S may be inserted.

FIG. 4 is a circuit diagram showing another embodiment of the present invention. Portions figure differs from that of Figure 1 is in the diode circuit D ₂ to the point obtained by adding a switch circuit.

This switch circuit comprises a diode circuit D ₂
A semiconductor switch (transistor, etc.) SW ₁ in parallel is provided, diode circuit D ₂ to be able to short-circuit both ends of the tertiary winding by the switch operation with respect to the polarity of the current operating arrested. The switch circuit is composed of a semiconductor switch SW ₁
The provision of the gate circuit G ₁ for causing the switching operation.

The gate signal applied to the gate circuit G ₁ is:
While the pulse main current flows from the pulse transformer PT is a semiconductor switch SW ₁ to the OFF state, subsequent to the ON state.

By providing such a switch circuit, the capacitor C ₁ on the secondary winding side of the pulse transformer PT is provided.
To when the same polarity residual energy of the pulse main current remains, this energy is released through the third winding to prevent the re-transition energy to the load side from the capacitor C _1.

FIG. 5 shows the operation timing of the switch circuit. Pulsed main current from the pulse transformer PT, by the time t ₁ the semiconductor switch SW ₀ is turned on, the voltage V
_The current I ₀ is generated by discharging the capacitor C ₀ initially charged to C _0.
Occurs as Accordingly, the oscillating current I is applied to the secondary winding.
₁ occurs and charges the capacitor C ₁ (voltage V _C1 ). Then, the saturable reactor SI ₁ is at time t ₂ operates magnetic switch and discharged from the capacitor C ₁ to the load side.

In response to such an operation, the semiconductor switch SW ₁ is turned off at least during the period from the time t ₁ at which the pulse main current is generated to the time t _{2 at} which the discharge of the capacitor C ₁ is completed. Turn it on during the excluded period.

In FIG. 1 or FIG. 2, by providing the tertiary winding and the diode circuit D ₂ , the impedance of the tertiary winding is reduced when the magnetizing energy is released from the pulse transformer PT, and the secondary winding (load) is provided. To prevent re-input of residual energy to the side. However, in the direction of the pulse main current from the pulse transformer PT, the diode circuit D of the tertiary winding is used.
₂ becomes the blocking direction, and the tertiary winding becomes high impedance.

[0049] Therefore, as shown in FIG. 5, when the capacitor C ₁ in kickback energy from the load is recharged to the same polarity as the charging, it is shifted the charges to 3 winding side Otherwise, the load may re-migrate to the load side, causing unstable operation of the load.

[0050] Therefore, in this embodiment, while the pulse main current flows advance prevents the flow turns off the switch SW ₁ to the pulse main current tertiary, capacitor C ₁
Of the 3 winding side by turning on the switch SW ₁ at the time of discharge leave a low impedance, to absorb the remaining energy is shifted to the 3 winding side when the capacitor C ₁ has been recharged, the load Prevent unstable operation.

[0051] In addition, it is also possible to provide a resistor or a reactor for current limiting in series to the semiconductor switch SW _1. Conversely, it can be configured to divert shown a modification of Figure 6 tertiary, the diode circuit D ₂ to the circuit connection of the semiconductor switch SW _1. In this configuration, not via the wiring inductance L _F included in the diode circuit D _2, can absorb residual energy at a sufficiently low impedance. The diode D ₃ is provided in series with the semiconductor switch SW _1, it is to protect the semiconductor switch SW ₁ from a reverse voltage.

In each of the above embodiments, there are conventionally various configurations other than the circuit portion of the pulse transformer PT, and the same effects can be obtained by applying this embodiment to these modified circuits. Can be.

For example, as shown in FIG. 7A, a saturable transformer ST is provided in the secondary winding of the pulse transformer PT, and a capacitor C1 is connected to the peaking capacitor C from the secondary winding of the saturable transformer ST. the series type of the pulse power supply connected in series to the _P, provided third winding and diode circuit D _2. Capacitor C ₁ in this case, is charged through the diode D ₄ in trans operation of the saturable transformer ST, supplies a pulse current to the peaking capacitor C _P side by discharging the magnetic switch operation of the saturable transformer ST.

In FIG. 7B, when the primary and secondary turns ratio of the saturable transformer ST is 1 in the circuit configuration of FIG. 7A, the saturable reactor SI is used instead of the saturable transformer ST.
_This is the case when the operation is set to ₃ , and the operation is in series.

[0055]

As described above, according to the present invention, a tertiary winding is provided in a pulse transformer with a gap, and the tertiary winding is in a blocking direction when the transformer generates a pulse main current, and has a magnetization direction. Since a diode circuit that conducts when energy is released and absorbs magnetizing energy is provided, a stable operation of the load can be obtained while preventing the transformer from being demagnetized and saturated.

Also, since a reactor circuit is provided in series with the main pulse current path flowing through the secondary winding of the pulse transformer,
When the magnetizing energy is released, the impedance on the secondary winding side is increased, the magnetizing energy is prevented from being released to the load side, the release to the diode circuit side can be promoted, and the load operation can be further stabilized.

In addition, since a switch circuit for short-circuiting the tertiary winding with low impedance is provided except during a period in which the pulse transformer generates a pulse main current, the capacitor on the secondary winding side has the same charge polarity as the pulse main current. When the residual energy remains, this energy can be released through the tertiary winding, and the load operation can be further stabilized.

[Brief description of the drawings]

FIG. 1 is a circuit diagram of a pulse power supply device showing an embodiment of the present invention.

FIG. 2 is a circuit diagram of a pulse power supply device according to another embodiment of the present invention.

FIG. 3 is an input / output circuit diagram of a pulse transformer.

FIG. 4 is a circuit diagram of a pulse power supply device according to another embodiment of the present invention.

FIG. 5 is an operation timing of a switch circuit in the circuit of FIG. 4;

FIG. 6 is a modification example of the switch circuit in the circuit of FIG. 4;

FIG. 7 is a modified example of the secondary side of the pulse power supply device to which the present invention is applied.

FIG. 8 is a circuit example of a conventional pulse power supply device.

[Explanation of symbols]

1 ... pulse generating circuit 2 ... high voltage charger 3 _1, 3 ₂ ... magnetic pulse compression circuit 4 ... load PT ... pulse transformer SW _0, SW ₁ ... semiconductor switch SI _0, SI _1, SI _2, SI ₃ ... saturable reactor L _S ... reactor _{C 0, C 1, C 2} ... capacitor C _P ... peaking capacitor _{MR 0, MR 1, MR 2} , MR 3 ... magnetic reset circuit D ₂ ... diode circuit G ₁ ... gate circuit D ₃ ... diodes ST ... Saturable transformer

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor: Seio Higashi 2-1-1-17 Osaki, Shinagawa-ku, Tokyo Inside the company Meidensha Corporation (72) Inventor Masayuki Tani 2-1-1, Osaki, Shinagawa-ku, Tokyo Stock Association Inside the company Meidensha (72) Inventor Tadashi Shibuya 2-1-1-17 Osaki, Shinagawa-ku, Tokyo F-term in the company Meidensha 5F071 GG05 JJ05 5H790 BA02 BB03 BB08 CC01 DD04 EA01 EA07 EA03 EA07

Claims (3)

[Claims] 1. A pulse power supply device for supplying a pulse main current to a primary winding of a pulse transformer, compressing a pulse main current obtained in a secondary winding of the pulse transformer with a magnetic pulse, and supplying the compressed pulse current to a load. The pulse transformer is provided with a tertiary winding, and provided with a gap capable of supplying the pulse main current to the secondary winding and preventing demagnetization by releasing magnetization energy after the core is magnetized. A pulse circuit provided with a diode circuit that is in a blocking direction with respect to the polarity of the pulse main current generated in the next winding and conducts with respect to emission of the magnetization energy to absorb the magnetization energy. Power supply. 2. The reactor according to claim 1, wherein a reactor circuit is provided in series with a secondary winding of the pulse transformer and increases an impedance of the secondary winding when the magnetization energy is released. Pulse power supply. 3. A switch circuit for short-circuiting the tertiary winding with low impedance except during a period in which a pulse main current is supplied from the pulse transformer to the secondary winding side. 3. The pulse power supply device according to 2.