SG11201901040WA - Automated 3-d measurement - Google Patents

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property :::` , MD HIM 0 11101 010 11111 01 II 0 0111E011 OHM 100 110 11110 ill 011 Organization International Bureau (10) International Publication Number 03 (43) International Publication Date .....•\"\"- WO 2018/031560 Al 15 February 2018 (15.02.2018) WIP0 I PCT (51) International Patent Classification: AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, G02B 21/00 (2006.01) G01N 21/95 (2006.01) CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, G02B 21/36 (2006.01) G06T 7/00 (2006.01) DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, (21) International Application Number: HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, PCT/US2017/045929 KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, (22) International Filing Date: OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, 08 August 2017 (08.08.2017) SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (25) Filing Language: English (26) Publication Language: English (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, (30) Priority Data: GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, 15/233,812 10 August 2016 (10.08.2016) US UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, (71) Applicant: KLA-TENCOR CORPORATION [US/US]; EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, Legal Department, One Technology Drive, Milpitas, Cali- MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, fornia 95035 (US). TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, (72) Inventors: XU, James Jianguo; 1029 Olmo Court, San KM, ML, MR, NE, SN, TD, TG). Jose, California 95129 (US). SOETARMAN, Ronny; _ 48353 Avalon Heights Terrace, Fremont, California 94539 Published: (US). — with international search report (Art. 2 I (3)) = (74) Agent: MCANDREWS, Kevin et al.; KLA-TENCOR = CORPORATION, Legal Department, One Technology Dri- ve, Milpitas, California 95035 (US). = (81) Designated States (unless otherwise indicated, for every = = kind of national protection available): AE, AG, AL, AM, (54) Title: AUTOMATED = - = = — _ = — _ E = = = ON = 111111111111111111 ' .: ) _ ill 11 .4 . ©' - 1 1 in ,—, M © co SEMI-AUTOMATED Il © ei 1 27 .47- -DrE METROLOGY ZETA WAFER / OFF 3111111111111 1.111 5 COMPUTER 4 3-D METROLOGY FIG. = further SEMI-AUTOMATED 3-D // 1 iNSTRUNIENTS SYSTEM \"/ MEASUREMENT 3-D SYSTEM (57) : A method of generating 3D information of a sample using an op- tical microscope includes: varying the distance between the sample and an objec- tive lens of the optical microscope at predetermined steps, capturing an image at each predetermined step. In one example, the method further includes: determin- ing a characteristic of each pixel in each captured image; determining, for each captured image, the greatest characteristic across all pixels in the captured image; and comparing the greatest characteristic for each captured image to determine if a surface of the sample is present at each step. In another example, the method includes: determining a characteristic of each pixel in each captured image; determining, for each captured image, a count of pixels that have a characteristic value within a first range; and determining if a surface of the sample is present at each step based on the count of pixels for each captured image. C