SG11201810262XA - Photosensitive resin composition - Google Patents

Photosensitive resin composition

Info

Publication number
SG11201810262XA
SG11201810262XA SG11201810262XA SG11201810262XA SG11201810262XA SG 11201810262X A SG11201810262X A SG 11201810262XA SG 11201810262X A SG11201810262X A SG 11201810262XA SG 11201810262X A SG11201810262X A SG 11201810262XA SG 11201810262X A SG11201810262X A SG 11201810262XA
Authority
SG
Singapore
Prior art keywords
resin composition
photosensitive resin
photosensitive
composition
resin
Prior art date
Application number
SG11201810262XA
Inventor
Makoto Hayasaka
Osamu Baba
Ryoji Okuda
Original Assignee
Toray Industries
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries filed Critical Toray Industries
Publication of SG11201810262XA publication Critical patent/SG11201810262XA/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/022Quinonediazides
    • G03F7/023Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • G03F7/037Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electroluminescent Light Sources (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
SG11201810262XA 2016-06-15 2017-06-07 Photosensitive resin composition SG11201810262XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016118522 2016-06-15
PCT/JP2017/021094 WO2017217293A1 (en) 2016-06-15 2017-06-07 Photosensitive resin composition

Publications (1)

Publication Number Publication Date
SG11201810262XA true SG11201810262XA (en) 2018-12-28

Family

ID=60664107

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201810262XA SG11201810262XA (en) 2016-06-15 2017-06-07 Photosensitive resin composition

Country Status (6)

Country Link
JP (1) JPWO2017217293A1 (en)
KR (1) KR102364136B1 (en)
CN (1) CN109313387B (en)
SG (1) SG11201810262XA (en)
TW (1) TWI726112B (en)
WO (1) WO2017217293A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7180459B2 (en) * 2018-03-26 2022-11-30 東レ株式会社 Method for producing alkali-soluble resin solution
JP2019172975A (en) * 2018-03-26 2019-10-10 東レ株式会社 Resin composition, resin sheet and cured film
JP7094150B2 (en) * 2018-05-31 2022-07-01 太陽ホールディングス株式会社 Photosensitive resin compositions, dry films, cured products, and electronic components
CN113614173B (en) * 2019-05-16 2023-09-29 株式会社力森诺科 Polyamide-imide resin composition and process for producing polyamide-imide resin
KR20220143710A (en) * 2020-02-20 2022-10-25 스미또모 베이크라이트 가부시키가이샤 Method for producing a photosensitive resin composition
CN117304225B (en) * 2023-09-12 2024-03-29 波米科技有限公司 Alkynyl-containing compound, positive photosensitive resin composition, and preparation methods and applications thereof

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3968884B2 (en) * 1998-05-01 2007-08-29 日本メクトロン株式会社 Photosensitive composition
JP3931484B2 (en) * 1999-06-03 2007-06-13 住友化学株式会社 Positive photoresist composition
JP4677687B2 (en) 2001-06-21 2011-04-27 東レ株式会社 Positive photosensitive resin precursor composition
KR100548625B1 (en) * 2003-03-24 2006-01-31 주식회사 엘지화학 High heat resistant transparent polyimide precursor and photosensitive resin composition using same
JP4955263B2 (en) * 2004-12-15 2012-06-20 イビデン株式会社 Printed wiring board
JP5061435B2 (en) 2005-08-01 2012-10-31 東レ株式会社 Heat-resistant resin precursor composition and semiconductor device using the same
JP5241280B2 (en) 2007-04-06 2013-07-17 旭化成イーマテリアルズ株式会社 Positive photosensitive resin composition
JP2009084435A (en) * 2007-09-28 2009-04-23 Fujifilm Corp Photosensitive resin composition, method for producing photo spacer, substrates for liquid crystal display device, liquid crystal display element, and liquid crystal display device
TWI399391B (en) * 2007-10-26 2013-06-21 Asahi Chemical Ind A polyimide precursor and a photosensitive resin composition containing a polyimide precursor
JP2009235311A (en) * 2008-03-28 2009-10-15 Toray Ind Inc Polyimide resin and heat-resistant resin composition using the same
US8530119B2 (en) * 2009-05-20 2013-09-10 Sumitomo Bakelite Co., Ltd. Positive photosensitive resin composition, cured film, protective film, interlayer insulating film, and semiconductor device and display element using the same
SG179087A1 (en) * 2009-09-10 2012-04-27 Toray Industries Photosensitive resin composition and method for producing photosensitive resin film
KR101333704B1 (en) * 2009-12-29 2013-11-27 제일모직주식회사 Positive type photosensitive resin composition
CN102713756B (en) * 2010-01-22 2014-10-15 日立化成杜邦微系统股份有限公司 Light-sensitive polymer composition, method for producing pattern, and electronic component
JP2012069734A (en) * 2010-09-24 2012-04-05 Toshiba Corp Manufacturing method of semiconductor device
JP5548604B2 (en) * 2010-12-21 2014-07-16 富士フイルム株式会社 Photosensitive resin composition
US9331295B2 (en) * 2011-12-20 2016-05-03 Seiko Epson Corporation Film-forming ink, film-forming method, method of manufacturing light emitting element, light emitting element, light emitting device, and electronic apparatus
WO2014115233A1 (en) 2013-01-28 2014-07-31 日立化成デュポンマイクロシステムズ株式会社 Resin composition, method for manufacturing pattern cured film, and semiconductor element
JPWO2015087830A1 (en) * 2013-12-11 2017-03-16 富士フイルム株式会社 Photosensitive resin composition, method for producing cured film, cured film, liquid crystal display device, and organic EL display device
WO2015137281A1 (en) * 2014-03-14 2015-09-17 東レ株式会社 Photosensitive resin composition
JP6447242B2 (en) 2014-05-15 2019-01-09 Jsr株式会社 Radiation-sensitive resin composition, insulating film, method for producing the same, and organic EL device
WO2016047483A1 (en) * 2014-09-26 2016-03-31 東レ株式会社 Organic el display device

Also Published As

Publication number Publication date
TWI726112B (en) 2021-05-01
CN109313387A (en) 2019-02-05
WO2017217293A1 (en) 2017-12-21
TW201833662A (en) 2018-09-16
KR102364136B1 (en) 2022-02-18
CN109313387B (en) 2021-11-26
KR20190017807A (en) 2019-02-20
JPWO2017217293A1 (en) 2019-04-04

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