SG11201808727PA - Predictive diagnostics systems and methods using vacuum pressure control valves - Google Patents

Predictive diagnostics systems and methods using vacuum pressure control valves

Info

Publication number
SG11201808727PA
SG11201808727PA SG11201808727PA SG11201808727PA SG11201808727PA SG 11201808727P A SG11201808727P A SG 11201808727PA SG 11201808727P A SG11201808727P A SG 11201808727PA SG 11201808727P A SG11201808727P A SG 11201808727PA SG 11201808727P A SG11201808727P A SG 11201808727PA
Authority
SG
Singapore
Prior art keywords
conductance
valve
international
actual
angular
Prior art date
Application number
SG11201808727PA
Other languages
English (en)
Inventor
David Brian Chamberlain
Vladislav Davidkovich
Scott Benedict
Gordon Hill
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of SG11201808727PA publication Critical patent/SG11201808727PA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0025—Electrical or magnetic means
    • F16K37/0041—Electrical or magnetic means for measuring valve parameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F9/00—Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine
    • G01F9/001—Measuring volume flow relative to another variable, e.g. of liquid fuel for an engine with electric, electro-mechanic or electronic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
    • F16K37/0083—For recording or indicating the functioning of a valve in combination with test equipment by measuring valve parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
    • F16K37/0075—For recording or indicating the functioning of a valve in combination with test equipment
    • F16K37/0091—For recording or indicating the functioning of a valve in combination with test equipment by measuring fluid parameters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
    • G01N17/008—Monitoring fouling

Landscapes

  • General Engineering & Computer Science (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Ecology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Environmental Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Details Of Valves (AREA)
  • Chemical Vapour Deposition (AREA)
  • Indication Of The Valve Opening Or Closing Status (AREA)
  • Physical Vapour Deposition (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Surgical Instruments (AREA)
SG11201808727PA 2016-05-10 2017-05-08 Predictive diagnostics systems and methods using vacuum pressure control valves SG11201808727PA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662333989P 2016-05-10 2016-05-10
US15/581,875 US10557736B2 (en) 2016-05-10 2017-04-28 Predictive diagnostics systems and methods using vacuum pressure control valves
PCT/US2017/031498 WO2017196702A1 (fr) 2016-05-10 2017-05-08 Systèmes et procédés de diagnostics prédictifs utilisant des vannes de régulation de pression sous vide

Publications (1)

Publication Number Publication Date
SG11201808727PA true SG11201808727PA (en) 2018-11-29

Family

ID=58710133

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201808727PA SG11201808727PA (en) 2016-05-10 2017-05-08 Predictive diagnostics systems and methods using vacuum pressure control valves

Country Status (8)

Country Link
US (2) US10557736B2 (fr)
EP (1) EP3420259B1 (fr)
JP (1) JP6967014B2 (fr)
KR (2) KR102381332B1 (fr)
CN (2) CN111022752B (fr)
SG (1) SG11201808727PA (fr)
TW (1) TWI680250B (fr)
WO (1) WO2017196702A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3318787A1 (fr) * 2016-11-03 2018-05-09 VAT Holding AG Système de soupape de régulation du vide destiné au fonctionnement régulé d'un processus sous vide
WO2018208489A1 (fr) * 2017-05-08 2018-11-15 Idex Health & Science Llc Ensemble de régulation d'écoulement présentant une mémoire non volatile localisée
JP6969465B2 (ja) * 2018-03-20 2021-11-24 株式会社島津製作所 目標開度推定器および圧力調整真空バルブ
JP7141418B2 (ja) * 2020-02-03 2022-09-22 Ckd株式会社 非密閉式バタフライバルブおよびその製造方法
US11686496B2 (en) * 2020-03-31 2023-06-27 Honeywell International Inc. Systems and methods for characterizing variable-air-volume (VAV) valves for use in HVAC systems
US20240202385A1 (en) * 2020-08-14 2024-06-20 Tae Ook KANG Method for designing vacuum system, method for selecting optimal pump capacity when designing vacuum system, and method for displaying design screen of vacuum system and apparatus therefor
US11841715B2 (en) * 2020-10-22 2023-12-12 Applied Materials, Inc. Piezo position control flow ratio control
JP7359178B2 (ja) * 2021-03-10 2023-10-11 横河電機株式会社 制御装置、制御方法、および、制御プログラム

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4322972A (en) * 1980-08-29 1982-04-06 Karjala Arnold L Method and apparatus for flow-rate verification and calibration
US5549137A (en) * 1993-08-25 1996-08-27 Rosemount Inc. Valve positioner with pressure feedback, dynamic correction and diagnostics
JP3397053B2 (ja) * 1996-09-30 2003-04-14 三菱自動車工業株式会社 ブレーキブースタ用流量制御装置
ATE252741T1 (de) 1998-08-24 2003-11-15 Fujikin Kk Verfahren zur erkennung einer verstopfung in einem druckmessenden durchflussre- gler und ein für diesen zweck verwendeter sensor
US7621290B2 (en) * 2005-04-21 2009-11-24 Mks Instruments, Inc. Gas delivery method and system including a flow ratio controller using antisymmetric optimal control
US7637152B2 (en) * 2005-06-07 2009-12-29 Surpass Industry Co., Ltd. Flow meter and flow-regulating system using the same
JP5111519B2 (ja) * 2007-12-05 2013-01-09 日立造船株式会社 真空容器の圧力制御方法および圧力制御装置
JP5596303B2 (ja) * 2009-05-28 2014-09-24 いすゞ自動車株式会社 エンジンの吸入空気量調整装置
JP5357679B2 (ja) 2009-09-24 2013-12-04 入江工研株式会社 コンダクタンスバルブ及び真空ポンプ
US8653979B2 (en) * 2010-04-13 2014-02-18 Valerie A. Obenchain Gas flow and pressure error alarm
US8421643B2 (en) * 2010-12-01 2013-04-16 Fisher Controls International Llc Automatic valve seating integrity test
EP2463558A1 (fr) 2010-12-07 2012-06-13 TA Hydronics S.A. Améliorations de l'équilibrage et vannes de contrôle
JP6014476B2 (ja) * 2012-12-04 2016-10-25 株式会社キッツエスシーティー バタフライ式圧力制御バルブ
JP2014126183A (ja) 2012-12-27 2014-07-07 Canon Anelva Corp コンダクタンスバルブ
DK3039500T3 (da) * 2013-08-26 2019-09-23 Spraying Systems Co Strømningsreguleringsventilsystem og -fremgangsmåde
JP6408233B2 (ja) 2014-03-27 2018-10-17 株式会社島津製作所 コントロールバルブおよび制御方法

Also Published As

Publication number Publication date
JP2019516916A (ja) 2019-06-20
EP3420259A1 (fr) 2019-01-02
US11480457B2 (en) 2022-10-25
TW201805558A (zh) 2018-02-16
CN111022752A (zh) 2020-04-17
JP6967014B2 (ja) 2021-11-17
EP3420259B1 (fr) 2021-03-03
CN109154406A (zh) 2019-01-04
TWI680250B (zh) 2019-12-21
KR20190005850A (ko) 2019-01-16
KR102381332B1 (ko) 2022-04-01
CN109154406B (zh) 2020-01-07
KR102337761B1 (ko) 2021-12-13
KR20210091354A (ko) 2021-07-21
CN111022752B (zh) 2022-06-17
US10557736B2 (en) 2020-02-11
US20170328756A1 (en) 2017-11-16
US20200124457A1 (en) 2020-04-23
WO2017196702A1 (fr) 2017-11-16

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