SG11201808252VA - Method for manufacturing wire saw apparatus and wire saw apparatus - Google Patents

Method for manufacturing wire saw apparatus and wire saw apparatus

Info

Publication number
SG11201808252VA
SG11201808252VA SG11201808252VA SG11201808252VA SG11201808252VA SG 11201808252V A SG11201808252V A SG 11201808252VA SG 11201808252V A SG11201808252V A SG 11201808252VA SG 11201808252V A SG11201808252V A SG 11201808252VA SG 11201808252V A SG11201808252V A SG 11201808252VA
Authority
SG
Singapore
Prior art keywords
wire saw
saw apparatus
manufacturing
manufacturing wire
wire
Prior art date
Application number
SG11201808252VA
Inventor
Yoshihiro Usami
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of SG11201808252VA publication Critical patent/SG11201808252VA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • B24B27/0633Grinders for cutting-off using a cutting wire
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • B24B29/04Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces for rotationally symmetrical workpieces, e.g. ball-, cylinder- or cone-shaped workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/36Single-purpose machines or devices
    • B24B5/363Single-purpose machines or devices for grinding surfaces of revolution in situ
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/36Single-purpose machines or devices
    • B24B5/37Single-purpose machines or devices for grinding rolls, e.g. barrel-shaped rolls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/30Handled filamentary material
    • B65H2701/36Wires
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H54/00Winding, coiling, or depositing filamentary material
    • B65H54/02Winding and traversing material on to reels, bobbins, tubes, or like package cores or formers
    • B65H54/28Traversing devices; Package-shaping arrangements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H59/00Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators
    • B65H59/10Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators by devices acting on running material and not associated with supply or take-up devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
SG11201808252VA 2016-04-21 2017-02-24 Method for manufacturing wire saw apparatus and wire saw apparatus SG11201808252VA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016085208A JP6589735B2 (en) 2016-04-21 2016-04-21 Manufacturing method of wire saw device
PCT/JP2017/006980 WO2017183295A1 (en) 2016-04-21 2017-02-24 Method for manufacturing wire saw apparatus and wire saw apparatus

Publications (1)

Publication Number Publication Date
SG11201808252VA true SG11201808252VA (en) 2018-10-30

Family

ID=60115941

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201808252VA SG11201808252VA (en) 2016-04-21 2017-02-24 Method for manufacturing wire saw apparatus and wire saw apparatus

Country Status (8)

Country Link
US (1) US11806827B2 (en)
JP (1) JP6589735B2 (en)
KR (1) KR102644660B1 (en)
CN (1) CN108778623B (en)
DE (1) DE112017001555T5 (en)
SG (1) SG11201808252VA (en)
TW (1) TWI715735B (en)
WO (1) WO2017183295A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110253775A (en) * 2019-07-26 2019-09-20 内蒙古中环光伏材料有限公司 A kind of slicer tension arm measure and control device and slice process

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4369934A (en) * 1981-02-03 1983-01-25 Spies Henry J Helical filament winding apparatus
JPH02124253A (en) 1988-10-28 1990-05-11 Toray Ind Inc Polishing method for roll surface of rubber roll
JPH11156694A (en) 1997-12-01 1999-06-15 Hitachi Ltd Wire saw cutting method and device
JP2000061801A (en) * 1998-08-18 2000-02-29 Hitachi Ltd Cutting method, cutting device and manufacture of semiconductor device
TW383249B (en) * 1998-09-01 2000-03-01 Sumitomo Spec Metals Cutting method for rare earth alloy by annular saw and manufacturing for rare earth alloy board
JP2000308925A (en) * 1999-04-28 2000-11-07 Kyocera Corp Wire guide member
JP2001246545A (en) * 1999-12-14 2001-09-11 Sumitomo Special Metals Co Ltd Cutting method and cutting device for rare earth alloy
MY126994A (en) * 1999-12-14 2006-11-30 Hitachi Metals Ltd Method and apparatus for cutting a rare earth alloy
JP4411062B2 (en) * 2003-12-25 2010-02-10 株式会社アライドマテリアル Super abrasive wire saw winding structure, super abrasive wire saw cutting device, and super abrasive wire saw winding method
US8075647B2 (en) * 2006-10-20 2011-12-13 Mitsubishi Electric Corporation Slurry for slicing silicon ingot and method for slicing silicon ingot using the same
DE102007016334B4 (en) 2007-04-04 2011-04-21 Siemens Ag Wire saw and method of making a wire saw
JP5003294B2 (en) * 2007-06-08 2012-08-15 信越半導体株式会社 Cutting method
JP4998241B2 (en) * 2007-12-11 2012-08-15 信越半導体株式会社 Method of cutting workpiece by wire saw and wire saw
CN201645272U (en) 2010-03-25 2010-11-24 陕西汉江机床有限公司 Numerical-control wire guiding roller grinder
JP5155428B2 (en) * 2011-07-15 2013-03-06 コマツNtc株式会社 Wire saw
EP3081517B1 (en) * 2015-04-17 2017-10-25 Schleuniger Holding AG Device for guiding and transporting products having the form of wire or elongated elements

Also Published As

Publication number Publication date
CN108778623B (en) 2020-07-03
CN108778623A (en) 2018-11-09
KR102644660B1 (en) 2024-03-07
TWI715735B (en) 2021-01-11
KR20180134891A (en) 2018-12-19
US11806827B2 (en) 2023-11-07
JP6589735B2 (en) 2019-10-16
WO2017183295A1 (en) 2017-10-26
TW201738022A (en) 2017-11-01
JP2017193021A (en) 2017-10-26
DE112017001555T5 (en) 2018-12-13
US20190105750A1 (en) 2019-04-11

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