CN110253775A - A kind of slicer tension arm measure and control device and slice process - Google Patents
A kind of slicer tension arm measure and control device and slice process Download PDFInfo
- Publication number
- CN110253775A CN110253775A CN201910680989.8A CN201910680989A CN110253775A CN 110253775 A CN110253775 A CN 110253775A CN 201910680989 A CN201910680989 A CN 201910680989A CN 110253775 A CN110253775 A CN 110253775A
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- tension
- arm
- tension arm
- pulley
- crossbar
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- 238000000034 method Methods 0.000 title claims abstract description 10
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 44
- 239000010432 diamond Substances 0.000 claims abstract description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 29
- 239000010703 silicon Substances 0.000 claims abstract description 29
- 238000005259 measurement Methods 0.000 claims abstract description 11
- 238000012360 testing method Methods 0.000 claims abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 229910000831 Steel Inorganic materials 0.000 description 10
- 238000005520 cutting process Methods 0.000 description 10
- 239000010959 steel Substances 0.000 description 10
- 238000005299 abrasion Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The present invention provides a kind of slicer tension arm measure and control device, tension arm component includes the first tension arm and the second tension arm set up separately in silicon rod two sides, first tension arm includes first pulley, the first rocker arm and first crossbar, and the second tension arm includes second pulley, the second rocker arm and second crossbar；Pressure test component is used to detect the tension value of tension arm component, including the first pressure sensor of the installed position of first pulley and first crossbar is set and be arranged in second pulley and second crossbar installed position second pressure sensor；Angle measurement component is used to detect the deviation angle of tension arm component, including the second angle sensor for being located at the first angle sensor of one end setting of first rocker arm far from first crossbar and being arranged positioned at the second rocker arm far from one end of second crossbar.The present invention also proposes a kind of slice process of slicer tension arm measure and control device.Present invention reduces diamond wire breakage ratios, improve the yields of silicon wafer, guarantee product quality, improve production efficiency.
Description
Technical field
The invention belongs to photovoltaic silicon single-crystal wafer machine accessory technical fields, more particularly, to a kind of slicer tension arm observing and controlling
Device and slice process.
Background technique
With the great increase of environmental pollution, finds clean energy resource and become as the necessary demand of society.Photovoltaic industry is to people
Class provides and its advantageous production of energy resource, the mankind can use solar power generation and benefit the people, therefore, photovoltaic industry
It comes into being so that developing solar energy becomes particularly important.
Currently, photovoltaic industry carries out processing cutting to silicon rod and square rod using diamond wire cutting mode, diamond wire is being cut
Silicon rod is constantly ground in the process, while certain abrasion is also resulted in golden steel wire itself, causes to be embedded in golden steel wire surface
On diamond molecule be gradually worn diminution, cause the tension in the cutting process of diamond wire by tension arm uneven,
To increase the broken string probability of diamond wire, and then increase the rejection rate of silicon wafer.Simultaneously as tension is set in existing cutting process
Value is fixed value, i.e., 50% or so of generally golden steel wire rupture pull force, as the diamond particles on golden steel wire surface are ground
Damage, causes the rupture pull force of golden steel wire to reduce, and in the case where not changing the tension value of tension arm, the stress of golden steel wire increases,
Just considerably increase the probability to break when Buddha's warrior attendant wire cutting.If carrying out tension adjustment by modes such as shutdown in cutting process, change
Varied tention parameter will lead to stop position and obtain the obvious stria of cleavage generation, influences slicing yield.
Summary of the invention
The problem to be solved in the present invention is to provide a kind of slicer tension arm measure and control device and slice process, are especially applicable in
It is used during silicon rod and square rod cutting, reduces the broken string probability of current slicer golden steel wire in cutting process, improve
The yields of silicon wafer guarantees product quality, improves production efficiency.
In order to solve the above technical problems, the technical solution adopted by the present invention is that:
A kind of slicer tension arm measure and control device, comprising:
Tension arm component: including setting up the first tension arm and the second tension arm in silicon rod two sides, first tension arm separately
Including first pulley, the first rocker arm and first crossbar, described first crossbar one end is connect with the first pulley, and described first is horizontal
The bar other end is connect with one end of first rocker arm；Second tension arm includes that second pulley, the second rocker arm and second are horizontal
Bar, described second crossbar one end are connect with the second pulley, one end of the second crossbar other end and second rocker arm
Connection；Diamond wire is wrapped in the first pulley and the second pulley；
Pressure test component: for detecting the tension value of the tension arm component, including first pressure sensor and second
The installed position of the first pulley Yu the first crossbar, institute is arranged in pressure sensor, the first pressure sensor
State the installed position that the second pulley Yu the second crossbar is arranged in second pressure sensor；
Angle measurement component: for detecting the deviation angle of the tension arm component, including first angle sensor and
Two angular transducers, the first angle sensor are located at first rocker arm and are arranged far from one end of the first crossbar, institute
State second angle sensor be located at second rocker arm far from the second crossbar one end be arranged.
Further, the first pulley and the second pulley are symmetrically arranged at the silicon rod two sides, and described
First pulley is identical as the second pulley outer dimension.
Further, the axis on the length direction of the first pulley and the second pulley central axis and the silicon rod
Line is arranged in parallel.
Further, first crossbar setting identical and in the same direction with the second crossbar length, first rocker arm with
The second rocker arm length is identical and setting in the same direction.
Further, the first crossbar is vertically arranged with first rocker arm, and the second crossbar is shaken with described second
Arm is vertically arranged.
It further, further include external controller, the controller is used to detect and control the work of the tension arm component
Make state.
Further, the controller can be supervised in real time by the first pressure sensor and the second pressure sensor
Control and analyze the pressure value of the tension arm component.
Further, the controller can be supervised in real time by the first angle sensor and the second angle sensor
Control and analyze the angle of the tension arm component drift.
Further, the diamond wire line footpath is 60um.
A kind of slice process of slicer tension arm measure and control device, using described in any item measure and control devices as above, comprising:
S1: first tension arm and described the are detected with the first pressure sensor and the second pressure sensor
The tension value of two tension arms, and the diamond wire line footpath is 60um；
S2: with the diamond wire into the increase of knife-edge positions, the tension of first tension arm and second tension arm
Value, which synchronizes, to be gradually reduced；
S3: when the diamond wire is not more than 10mm, first tension arm and second tension arm into knife-edge positions
Tension value is 9-10N；
S4: when the diamond wire is greater than 10 into knife-edge positions and is not less than 120mm, first tension arm and described second
The tension value of tension arm is 8.5-9.5N；
S5: when the diamond wire is greater than 120 into knife-edge positions and is not less than 140mm, first tension arm and described the
The tension value of two tension arms is 8-9N；
S6: when the diamond wire is greater than 140 into knife-edge positions and is not less than 160mm, first tension arm and described the
The tension value of two tension arms is 7.5-8.5N；
S7: when the diamond wire is greater than 160 into knife-edge positions and is not less than 160mm, first tension arm and described the
The tension value of two tension arms is 7-8N；
S8: the silicon rod diameter is 210mm.
Measure and control device designed by the invention, by the pressure that tension arm middle pulley Yu cross bar installed position is arranged in
Sensor can monitor the tension value of tension arm in real time, and then the tension curve of analysis tension arm can be shown by controller, reduce
The broken string probability of golden steel wire improves the yields of silicon wafer, guarantees product quality, improves production efficiency.
Detailed description of the invention
Fig. 1 is a kind of perspective view of slicer tension arm measure and control device of one embodiment of the invention；
Structural schematic diagram when Fig. 2 is the tension arm vertical position of one embodiment of the invention；
Structural schematic diagram when Fig. 3 is the tension arm obliquity of one embodiment of the invention.
In figure:
10, silicon rod 20, diamond wire 30, tension arm component
31, the first tension arm 311, first pulley 312, the first rocker arm
313, first crossbar 32, the second tension arm 321, second pulley
322, the second rocker arm 323, second crossbar 40, pressure test component
41, first pressure sensor 42, second pressure sensor 50, angle measurement component
51, first angle sensor 52, second angle sensor
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.
The embodiment of the present invention proposes a kind of slicer tension arm measure and control device, as shown in Figure 1-3, include tension arm component
30, pressure test component 40, angle measurement component 50 and controller, wherein tension arm component 30 includes setting up separately at 10 liang of silicon rod
The first tension arm 31 and the second tension arm 32 of side, the first tension arm 31 include first pulley 311, the first rocker arm 312 and first
One end of cross bar 313, first crossbar 313 is fixedly connected with first pulley 311, the other end of first crossbar 313 and the first rocker arm
312 one end is fixedly connected, and the first rocker arm 312 can drive first pulley 311 to do offset movement by first crossbar 313.Second
Tension arm 32 includes second pulley 321, the second rocker arm 322 and second crossbar 323, one end of second crossbar 323 and second pulley
321 are fixedly connected, and the other end of second crossbar 323 is fixedly connected with one end of the second rocker arm 322, and the second rocker arm 322 can pass through
Second crossbar 323 drives second pulley 321 to do offset movement.Diamond wire 20 is wrapped in first pulley 311 and second pulley 321
On, silicon rod 10 is located in first pulley 311 and second pulley 321, that is to say on diamond wire 20, and relative to diamond wire 20
Do movement vertically downward.
Further, further, first pulley 311 and second pulley 321 are symmetrically arranged at the two sides of silicon rod 10,
And first pulley 311 is identical as the outer dimension of second pulley 321.The central axis of first pulley 311 and second pulley 321 with
Axis on the length direction of silicon rod 10 is arranged in parallel.First crossbar 313 is identical as the length of second crossbar 323 and sets in the same direction
It sets, the setting identical and in the same direction with the length of the second rocker arm 322 of the first rocker arm 312.First crossbar 313 is vertical with the first rocker arm 312
Setting, second crossbar 323 are vertically arranged with the second rocker arm 322.
Pressure test component 40 is used to detect the tension value of tension arm component 30, including first pressure sensor 41 and second
Pressure sensor 42, first pressure sensor 41 are arranged in the installed position of first pulley 311 Yu first crossbar 313, ascend the throne
It is contacted on 311 center inner wall of first pulley and with first crossbar 313, in cutting process, silicon rod 10 moves straight down, together
When diamond wire 20 moved horizontally around first pulley 311 and second pulley 321, the frictional force between silicon rod 10 and diamond wire 20 makes
Obtaining diamond wire 20 has a pressure F to first pulley 311 when mobile around first pulley 311, and first pulley 311 then suppresses first
Cross bar 313, and then first pulley 311 detects the pressure of first crossbar 313 by first pressure sensor 41, is transmitted further to outer
On the controller (figure omits) connect, controller can be by display (figure omits) real-time display with control panel, and passes through
Controller calculates the tension value for analyzing the first tension arm 31, while can also calculate the tension value and standard tension value of actual measurement
Comparison, and then the change curve of the tension value of actual measurement can be seen in real time.Correspondingly, the setting of second pressure sensor 41 is sliding second
Wheel 321 and the installed position of second crossbar 323, in cutting process, silicon rod 10 move down when, the second tension arm 32 by
Identical to 20 pressure F of diamond wire, second pulley 321 detects the pressure of second crossbar 323 by second pressure sensor 42, then
It is transferred on external controller, controller can be by having the display real-time display of control panel, and passes through controller meter
The tension value of the second tension arm 32 is precipitated in point counting, while also calculating the tension value of actual measurement and the comparison of standard tension value, in turn
The change curve of the tension value of actual measurement can be seen in real time.
Angle measurement component 50 is used to detect the deviation angle of tension arm component 30, including first angle sensor 51 and the
Two angular transducers 52, first angle sensor 51 are located at the first rocker arm 312 and are arranged far from one end of first crossbar 313, and second
Angular transducer 52 is located at the second rocker arm 322 and is arranged far from one end of second crossbar 323.
Further, external controller is used to detect and control the working condition of tension arm component 30.Controller passes through the
One pressure sensor 41 and second pressure sensor 42 can monitor and analyze the first tension arm 31 and the second tension arm 32 in real time
Pressure value；It can be monitored in real time by first angle sensor 51 and second angle sensor 52 and analyze 31 He of the first tension arm
The deviation angle of second tension arm 32.
When the tension value of actual measurement exceeds or is less than standard tension value, controller can be in time by being arranged in the first tension
The angular transducer 52 on first angle sensor 51 and the second tension arm 32 on arm 31, respectively to the first rocker arm 312 and
Two rocker arms 322 are controlled, and are made the first rocker arm 312 and the second rocker arm 322 while being offset inward or deviating outward simultaneously, with adjustment
Pressure and then adjustment first tension arm 31 and second tension arm 32 pair gold of the diamond wire 20 to first pulley 311, second pulley 321
The tension value of rigid line 20, reaches the first tension arm 31 and the tension value of the second tension arm 32 in critical field, reduces diamond wire
The abrasion loss of 20 surface diamond particles, and then the broken string probability of golden steel wire is reduced, the yields of silicon wafer is improved, guarantees product product
Matter.
Further, in the present embodiment, the line footpath of diamond wire 20 is 60um, and the diameter of silicon rod 10 is 210mm, tension value
Range is 7-10N.
A kind of slice process of slicer tension arm measure and control device, including as above described in any item measure and control devices, comprising:
S1: the first tension arm 31 and the second tension arm 32 are detected with first pressure sensor 41 and second pressure sensor 42
Tension value, and the line footpath of diamond wire 20 be 60um.
S2: with the increase into knife-edge positions of diamond wire 20, the tension value of the first tension arm 31 and the second tension arm 32 is equal
It synchronizes and gradually reduces.
S3: it is not more than 10mm, the tension of the first tension arm 31 and the second tension arm 32 into knife-edge positions when diamond wire 20
Value is 9-10N.
S4: it is greater than 10 into knife-edge positions and not less than 120mm, the first tension arm 31 and the second tension arm when diamond wire 20
32 tension value is 8.5-9.5N.
S5: it is greater than 120 into knife-edge positions and not less than 140mm, the first tension arm 31 and the second tension when diamond wire 20
The tension value of arm 32 is 8-9N.
S6: it is greater than 140 into knife-edge positions and not less than 160mm, the first tension arm 31 and the second tension when diamond wire 20
The tension value of arm 32 is 7.5-8.5N.
S7: it is greater than 160 into knife-edge positions and not less than 160mm, the first tension arm 31 and the second tension when diamond wire 20
The tension value of arm 32 is 7-8N.
S8: the silicon rod diameter is 210mm.
Measure and control device designed by the invention, by the pressure that tension arm middle pulley Yu cross bar installed position is arranged in
Sensor, can monitor the tension value of tension arm in real time, and then the tension curve of analysis tension arm can be shown by controller, when
For force value not when marking in range, controller controls tension arm by angle controller, is adjusted in time, makes tension arm
Tension value reduces the broken string probability of golden steel wire within acceptability limit, improves the yields of silicon wafer, guarantees product quality,
Improve production efficiency.
The embodiments of the present invention have been described in detail above, content is only the preferred embodiment of the present invention, no
It can be believed to be used to limit the scope of the invention.Any changes and modifications in accordance with the scope of the present application,
It should still fall within the scope of the patent of the present invention.
Claims (10)
1. a kind of slicer tension arm measure and control device characterized by comprising
Tension arm component: including setting up the first tension arm and the second tension arm in silicon rod two sides separately, first tension arm includes
First pulley, the first rocker arm and first crossbar, described first crossbar one end are connect with the first pulley, and the first crossbar is another
One end is connect with one end of first rocker arm；Second tension arm includes second pulley, the second rocker arm and second crossbar, institute
It states second crossbar one end to connect with the second pulley, the second crossbar other end is connect with one end of second rocker arm；
Diamond wire is wrapped in the first pulley and the second pulley；
Pressure test component: for detecting the tension value of the tension arm component, including first pressure sensor and second pressure
Sensor, the first pressure sensor are arranged in the installed position of the first pulley Yu the first crossbar, and described
The installed position of the second pulley Yu the second crossbar is arranged in two pressure sensors；
Angle measurement component: for detecting the deviation angle of the tension arm component, including first angle sensor and second jiao
Spend sensor, the first angle sensor is located at one end setting of first rocker arm far from the first crossbar, and described the
Two angular transducers are located at second rocker arm and are arranged far from one end of the second crossbar.
2. a kind of slicer tension arm measure and control device according to claim 1, which is characterized in that the first pulley and institute
It states second pulley and is symmetrically arranged at the silicon rod two sides, and the first pulley and the second pulley outer dimension phase
Together.
3. a kind of slicer tension arm measure and control device according to claim 2, which is characterized in that the first pulley and institute
Second pulley central axis is stated to be arranged in parallel with the axis on the length direction of the silicon rod.
4. a kind of slicer tension arm measure and control device according to claim 1-3, which is characterized in that described first
Cross bar setting identical and in the same direction with the second crossbar length, first rocker arm and the second rocker arm length are identical and in the same direction
Setting.
5. a kind of slicer tension arm measure and control device according to claim 4, which is characterized in that the first crossbar and institute
It states the first rocker arm to be vertically arranged, the second crossbar is vertically arranged with second rocker arm.
6. -3,5 described in any item a kind of slicer tension arm measure and control devices according to claim 1, which is characterized in that further include
External controller, the controller are used to detect and control the working condition of the tension arm component.
7. a kind of slicer tension arm measure and control device according to claim 6, which is characterized in that the controller passes through institute
Stating first pressure sensor and the second pressure sensor can monitor in real time and analyze the pressure value of the tension arm component.
8. a kind of slicer tension arm measure and control device according to claim 7, which is characterized in that the controller passes through institute
Stating first angle sensor and the second angle sensor can monitor in real time and analyze the angle of the tension arm component drift.
9. -3,5, a kind of described in any item slicer tension arm measure and control devices of 7-8 according to claim 1, which is characterized in that institute
Stating diamond wire line footpath is 60um.
10. a kind of slice process of slicer tension arm measure and control device, which is characterized in that using such as any one of claim 1-9
The measure and control device, comprising:
S1: first tension arm and second described is detected with the first pressure sensor and the second pressure sensor
The tension value of the arm of force, and the diamond wire line footpath is 60um；
S2: with the diamond wire into the increase of knife-edge positions, the tension value of first tension arm and second tension arm is same
Step gradually reduces；
S3: when the diamond wire is not more than 10mm, the tension of first tension arm and second tension arm into knife-edge positions
Value is 9-10N；
S4: when the diamond wire is greater than 10 into knife-edge positions and is not less than 120mm, first tension arm and second tension
The tension value of arm is 8.5-9.5N；
S5: when the diamond wire into knife-edge positions be greater than 120 and be not less than 140mm, first tension arm with described second
The tension value of the arm of force is 8-9N；
S6: when the diamond wire into knife-edge positions be greater than 140 and be not less than 160mm, first tension arm with described second
The tension value of the arm of force is 7.5-8.5N；
S7: when the diamond wire into knife-edge positions be greater than 160 and be not less than 160mm, first tension arm with described second
The tension value of the arm of force is 7-8N；
S8: the silicon rod diameter is 210mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910680989.8A CN110253775A (en) | 2019-07-26 | 2019-07-26 | A kind of slicer tension arm measure and control device and slice process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910680989.8A CN110253775A (en) | 2019-07-26 | 2019-07-26 | A kind of slicer tension arm measure and control device and slice process |
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| Publication Number | Publication Date |
|---|---|
| CN110253775A true CN110253775A (en) | 2019-09-20 |
Family
ID=67928388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910680989.8A Pending CN110253775A (en) | 2019-07-26 | 2019-07-26 | A kind of slicer tension arm measure and control device and slice process |
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| CN (1) | CN110253775A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111873202A (en) * | 2020-08-25 | 2020-11-03 | 青岛高测科技股份有限公司 | Diamond wire cutting force measuring device and using method |
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| CN107052452A (en) * | 2014-04-30 | 2017-08-18 | 硅电子股份公司 | The method for cutting out many particularly sections of uniform thickness simultaneously by workpiece |
| US20190105750A1 (en) * | 2016-04-21 | 2019-04-11 | Shin-Etsu Handotai Co., Ltd. | Method for manufacturing wire saw apparatus and wire saw apparatus |
| CN210633896U (en) * | 2019-07-26 | 2020-05-29 | 内蒙古中环光伏材料有限公司 | Slicer tension arm measurement and control device |
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| JP2012000733A (en) * | 2010-06-18 | 2012-01-05 | Toyo Advanced Technologies Co Ltd | Workpiece cutting method and wire saw |
| CN101973079A (en) * | 2010-11-01 | 2011-02-16 | 英利能源（中国）有限公司 | Tool set for positioning tension arm of silicon block or silicon bulk cutting apparatus |
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| CN111873202A (en) * | 2020-08-25 | 2020-11-03 | 青岛高测科技股份有限公司 | Diamond wire cutting force measuring device and using method |
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