CN109557146B - Diamond wire breakage detection device and breakage prediction method thereof - Google Patents
Diamond wire breakage detection device and breakage prediction method thereof Download PDFInfo
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 93
- 239000010432 diamond Substances 0.000 title claims abstract description 93
- 238000001514 detection method Methods 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 15
- 238000005299 abrasion Methods 0.000 claims abstract description 14
- 230000008859 change Effects 0.000 claims abstract description 13
- 238000007781 pre-processing Methods 0.000 claims abstract description 12
- 238000007619 statistical method Methods 0.000 claims abstract description 7
- 230000036541 health Effects 0.000 claims description 8
- 238000009826 distribution Methods 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 2
- 230000003321 amplification Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012544 monitoring process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012806 monitoring device Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/24—Investigating the presence of flaws
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- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
The diamond wire breakage detection device comprises a capacitance sensor group, a preprocessing circuit, an A/D converter and a computer, wherein the capacitance sensor group monitors and detects the diamond wire in real time, the diamond wire with different wear degrees enables the capacitance sensor group to output capacitance value signals with different corresponding sizes, the capacitance value signals are filtered and amplified by the preprocessing circuit to ensure that the signals are fidelity and amplified to the identifiable intensity, the processed signals are transmitted to the computer through the A/D converter, and the computer performs statistical analysis on the obtained capacitance value signals to characterize the state of the diamond wire; the broken line prediction method specifically comprises the steps that a capacitance sensor group monitors the abrasion condition of the diamond line in real time, a capacitance value signal containing the abrasion condition of the diamond line is output, a probability density evolution rule curve of the detected diamond line can be obtained after the capacitance value signal is calculated and analyzed by a computer, and the prediction of broken diamond line can be realized according to the probability density change rule curve.
Description
Technical Field
The invention belongs to the technology of fault diagnosis of diamond wire slicing machine equipment, and particularly relates to a diamond wire breakage detection device and a wire breakage prediction method thereof.
Background
Slicing by using a diamond wire slicing machine is a key step for processing and manufacturing silicon wafers, but in the diamond wire slicing process, the wire breakage of the diamond wire is often caused by jumper wires and other reasons, a lead guide wheel and a workpiece to be sliced can be damaged, normal operation production is affected, and serious economic loss is caused.
Some diamond wire breakage detection devices in the current market can only detect when the diamond wire breaks, give an alarm and take corresponding measures. Or some of the existing diamond wire detection devices can generate some errors, so that an error alarm signal or delay alarm is generated, and no device for monitoring the diamond wire in real time and simultaneously carrying out health estimation is arranged.
Disclosure of Invention
In order to solve the problems, the invention provides a diamond wire breakage detection device and a wire breakage prediction method thereof, and the related device has a simple preparation method, can monitor the health state of the diamond wire in real time, detect and estimate the abrasion loss of the diamond wire in real time, ensure the safety of the diamond wire, and prevent the wire breakage in advance to cause unnecessary economic loss.
A diamond wire breakage detection device and a breakage prediction method thereof are characterized in that:
the diamond wire breakage detection device comprises a capacitance sensor group, a preprocessing circuit, an A/D converter and a computer, wherein the capacitance sensor group monitors and detects diamond wires in real time, the diamond wires with different wear degrees enable the capacitance sensor group to output capacitance value signals with different corresponding sizes, the capacitance value signals are filtered and amplified by the preprocessing circuit, the signals are enabled to be fidelity and amplified to the identifiable intensity, the processed signals are transmitted to the computer through the A/D converter, and the computer carries out statistical analysis on the states of the diamond wires through the corresponding capacitance value signals;
the broken line prediction method specifically comprises the steps that the capacitance sensor group monitors the abrasion condition of the diamond line in real time, outputs capacitance value signals corresponding to the abrasion condition, and obtains a probability density evolution rule curve after calculation and analysis of the capacitance value signals by a computer, and the broken line of the diamond line can be predicted according to the probability density evolution rule;
the probability density curve is a curve with normal distribution under the condition that the diamond wire works normally, and when the diamond wire is broken, the curve is obviously deviated or deformed; when the curve exhibits some slight deviation, it is explained that the diamond wire is worn or the diamond on the diamond wire is dropped.
Furthermore, the capacitance sensor group not only can detect when the diamond wire breaks, sends a shutdown instruction to a computer to enable the machine to send out, but also can monitor the abrasion condition of the diamond wire in real time, and can conduct health prediction and broken wire prediction on the diamond wire according to probability density statistics.
Further, the preprocessing circuit is used for filtering and amplifying, so that the signal is fidelity and amplified to the identifiable intensity, and the electric signal of the capacitance measured by the capacitance sensor is very weak, and is usually amplified by the amplifying circuit.
Further, the a/D converter is a circuit for converting an analog signal into a digital signal, converting an analog quantity with continuous time and continuous amplitude into a digital signal with discrete time and discrete amplitude, and finally transmitting the digital signal to a computer for statistical analysis.
Further, the capacitive sensor group is specifically a full-bridge circuit formed by four pairs of capacitive sensors, and two polar plates of each capacitive sensor are symmetrically arranged, so that the four pairs of capacitive sensors form an eight-sided column structure, and the diamond wire passes through the center line of the vertical shaft of the column, namely, the two polar plates of each capacitive sensor are symmetrically distributed on the diamond wire.
Further, the number of the capacitive sensors can be changed according to actual requirements, columns with different numbers of side faces are formed, and the more the capacitive sensors are, the more the side faces are, the higher the measurement sensitivity is.
Further, taking four pairs of capacitance sensor measuring diamond wires as an example, the probability density curve is calculated as follows:
let the change of the capacitance sensor C1 be C in the Δt time period 1 (C 1x1 ,C 1x2 ,C 1x3 ,…C 1xn ) The change of the capacitance sensor C2 is C 2 (C 2x1 ,C 2x2 ,C 2x3 ,…C 2xn ) The change of the capacitance sensor C3 is C 3 (C 3x1 ,C 3x2 ,C 3x3 ,…C 3xn ) The change of the capacitance sensor C4 is C 4 (C 4x1 ,C 4x2 ,C 1x3 ,…C 4xn ) The average value and the total average value of the capacitances can be calculated
Further calculate the variance and the total variance of each capacitance acquisition signal
Further calculate the mean square errorAnd total time ofProbability->
From the above formula, a function of the probability density curve can be obtained:
the beneficial effects of the invention are as follows: the parallel use of four pairs of capacitive sensors, non-contact measurement and effectively improves sensitivity. Different from the traditional detection device, the diamond wire breakage detection device can detect the state of the diamond wire in real time, and conduct health prediction and breakage detection on the diamond wire, so that the breakage monitoring of the diamond wire is effectively realized, the cost is greatly saved, and the working efficiency is improved.
Drawings
Fig. 1 is a system block diagram of a diamond wire breakage detection device according to the present invention.
Fig. 2 is a schematic view of the diamond wire passing through the sensor according to the present invention.
FIG. 3 is a graph of total capacitance over time.
FIG. 4 is a graph of probability density distribution under normal operating conditions.
Fig. 5 is a schematic diagram of probability density distribution curves of diamond wire breakage or abrasion.
In the above figures, the reference numerals correspond to the component names as follows:
120-capacitance sensor group, 130-preprocessing circuit; a 140-A/D converter; 150-a computer; 210-steel wire; 220-diamond particles; 230-capacitive sensor plate.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to the attached drawings.
A diamond wire breakage detection device and a breakage prediction method thereof, wherein:
the diamond wire breakage detection device, as shown in fig. 2, comprises a capacitance sensor group 120, a preprocessing circuit 130, an a/D converter 140 and a computer 150, wherein the capacitance sensor group 120 monitors and detects the diamond wire in real time, the diamond wires with different wear degrees enable the capacitance sensor group 120 to output capacitance value signals with different corresponding sizes, the capacitance value signals are filtered and amplified by the preprocessing circuit 130 to ensure that the signals are fidelity and amplified to the identifiable intensity, the processed signals are transmitted to the computer 150 through the a/D converter 140, and the computer 150 performs statistical analysis on the states of the diamond wire through the corresponding capacitance value signals.
The capacitive sensor group 120 not only can detect when the diamond wire breaks, and send the detection to the computer 150 to send a shutdown command to the machine, but also can monitor the abrasion condition of the diamond wire in real time, and can perform health prediction and broken wire prediction on the diamond wire according to probability density statistics.
The preprocessing circuit 130 filters and amplifies the signal to a recognizable intensity, and the electric signal of the capacitance measured by the capacitance sensor group 120 is very weak, and is usually amplified by an amplifying circuit.
The a/D converter 140 is a circuit for converting an analog signal into a digital signal, converting an analog signal with continuous time and continuous amplitude into a digital signal with discrete time and discrete amplitude, and finally transmitting the digital signal to the computer 150 for statistical analysis.
The capacitive sensor group 120, specifically, is a full-bridge circuit composed of four pairs of capacitive sensors, and the two pole plates 230 of each capacitive sensor are symmetrically arranged, so that the four pairs of capacitive sensors form an eight-sided column structure, and the diamond wire passes through the center line of the vertical axis of the column, that is, the two pole plates of each capacitive sensor are symmetrically distributed with respect to the diamond wire, see fig. 2.
The number of the capacitive sensors can be changed according to actual requirements to form columns with different numbers of side surfaces, and the more the capacitive sensors are, the more the side surfaces are, the higher the measurement sensitivity is.
In the method for predicting disconnection, specifically, the capacitance sensor group 120 monitors the abrasion condition of the diamond wire in real time, outputs a capacitance value signal corresponding to the abrasion condition, and the capacitance value signal is calculated and plotted by the computer 150 to obtain a probability density graph, so that the prediction of disconnection of the diamond wire can be performed according to the probability density graph.
The probability density curve is a curve with normal distribution under the condition that the diamond wire works normally, and when the diamond wire is broken, the curve is obviously deviated or deformed; when the curve exhibits some slight deviation, it is explained that the diamond wire is worn or the diamond on the diamond wire is dropped.
Taking four pairs of capacitance sensor measuring diamond wires as an example, the probability density curve is calculated by the following steps:
let the change of the capacitance sensor C1 be C in the Δt time period 1 (C 1x1 ,C 1x2 ,C 1x3 ,…C 1xn ) The change of the capacitance sensor C2 is C 2 (C 2x1 ,C 2x2 ,C 2x3 ,…C 2xn ) The change of the capacitance sensor C3 is C 3 (C 3x1 ,C 3x2 ,C 3x3 ,…C 3xn ) Capacitance sensor C4 is changed to C 4 (C 4x1 ,C 4x2 ,C 1x3 ,…C 4xn ) The average value and the total average value of the capacitances can be calculated
Further calculate the variance and the total variance of each capacitance acquisition signal
Further calculate the mean square errorAnd total time ofProbability->
From the above formula, a function of the probability density curve can be obtained:
normally, probability density patterns are normally distributed, as shown in fig. 4, once the diamond wire is broken or worn, some measured deltacs are obviously inconsistent, and jump occurs, so that the probability density curves shift or change and evolve into a schematic diagram as shown in fig. 5, and therefore, the device can be used for monitoring the broken wire and the worn condition of the diamond wire in real time.
Specifically, in actual operation, the follow-up stable work of machine can be influenced in broken of a complete buddha's warrior attendant line, also can waste cost when wasting time, so this buddha's warrior attendant line broken string detection device can real-time detection buddha's warrior attendant line's wearing and tearing condition, carries out the broken string condition of control buddha's warrior attendant line according to its probability density curve, can effectively prevent its broken string, saves cost. Most monitoring devices at present have no function of detecting the state of the diamond wire in real time, and only an alarm can be given when the wire is broken, so that the diamond wire broken wire detecting device has obvious advantages: 1. the abrasion detection can be performed to detect the state of the diamond wire in real time. 2. Health prediction can be performed, and the health state of the patient can be detected according to the probability density graph. 3. The wire breakage prediction can be performed, the wire breakage of the diamond wire is predicted according to the probability density graph, and the wire breakage is prevented. In addition, the sensitivity of the detection device is very high, and the sensor can be popularized to be a regular polyhedron without contact measurement.
The diamond wire breakage detection device can also automatically detect diamond wire breakage and stop in time, so that loss caused by broken wire evacuation is prevented.
The above description is merely of preferred embodiments of the present invention, and the scope of the present invention is not limited to the above embodiments, but all equivalent modifications or variations according to the present disclosure will be within the scope of the claims.
Claims (4)
1. A broken wire prediction method of a diamond wire broken wire detection device is characterized in that:
the diamond wire breakage detection device comprises a capacitance sensor group, a preprocessing circuit, an A/D converter and a computer, wherein the capacitance sensor group monitors and detects diamond wires in real time, the diamond wires with different wear degrees enable the capacitance sensor group to output capacitance value signals with different corresponding sizes, the capacitance value signals are filtered and amplified by the preprocessing circuit, the signals are enabled to be fidelity and amplified to the identifiable intensity, the processed signals are transmitted to the computer through the A/D converter, and the computer carries out statistical analysis on the states of the diamond wires through the corresponding capacitance value signals;
the capacitive sensor group is a full-bridge circuit formed by four pairs of capacitive sensors, and two polar plates of each capacitive sensor are symmetrically arranged, so that the four pairs of capacitive sensors form an eight-sided column structure, and the diamond wire passes through the center line of the vertical shaft of the column, namely the two polar plates of each capacitive sensor are symmetrically distributed on the diamond wire;
the broken line prediction method specifically comprises the steps that the capacitance sensor group monitors the abrasion condition of the diamond line in real time, outputs capacitance value signals corresponding to the abrasion condition, and obtains a probability density curve after the capacitance value signals are calculated and drawn by a computer, and the broken line of the diamond line can be predicted according to the probability density curve;
the probability density curve presents a curve with normal distribution under the condition that the diamond wire is normal, and when the diamond wire is broken, the curve is obviously deviated or deformed; when the curve shows some tiny deviation, the situation that the diamond wire is worn or the diamond on the diamond wire falls off is indicated;
taking four pairs of capacitance sensor measuring diamond wires as an example, the probability density curve is calculated by the following steps:
let the change of the capacitance sensor C1 be C in the Δt time period 1 (C 1x1 ,C 1x2 ,C 1x3 ,…C 1xn ) The change of the capacitance sensor C2 is C 2 (C 2x1 ,C 2x2 ,C 2x3 ,…C 2xn ) The change of the capacitance sensor C3 is C 3 (C 3x1 ,C 3x2 ,C 3x3 ,…C 3xn ) The change of the capacitance sensor C4 is C 4 (C 4x1 ,C 4x2 ,C 1x3 ,…C 4xn ) The average value and the total average value of the capacitances can be calculated
Further calculate the variance and the total variance of each capacitance acquisition signal
Further calculate the mean square errorAnd total time->Probability->
From the above formula, a function of the probability density curve can be obtained:
2. the wire breakage prediction method of a wire breakage detection device according to claim 1, characterized in that: the capacitance sensor group not only can detect when the diamond wire breaks, sends a shutdown instruction to a computer to enable the machine to send out, but also can monitor the abrasion condition of the diamond wire in real time, and can conduct health prediction and broken wire prediction on the diamond wire according to probability density statistics.
3. The wire breakage prediction method of a wire breakage detection device according to claim 1, characterized in that: the preprocessing circuit has the functions of filtering and amplifying, so that the signal is fidelity and amplified to the identifiable intensity, the electric signal of the capacitance measured by the capacitance sensor can be very weak, and the amplification is usually carried out by the amplifying circuit.
4. The wire breakage prediction method of a wire breakage detection device according to claim 1, characterized in that: the A/D converter is used as a circuit for converting analog signals into digital signals, converting analog quantities with continuous time and continuous amplitude values into digital signals with discrete time and discrete amplitude values, and finally transmitting the digital signals to a computer for statistical analysis.
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| CN110421731B (en) * | 2019-08-01 | 2021-08-27 | 东华大学 | Diamond wire breakage online detection system |
| CN114527331B (en) * | 2022-02-10 | 2023-02-10 | 天纳能源科技（上海）有限公司 | Capacitor analysis method and system |
| CN118003493A (en) * | 2024-03-27 | 2024-05-10 | 广东思谷智能技术有限公司 | Diamond wire breakage detection method based on magnetic sensing |
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