CN105984042A - Wire monitoring system, wire saw device and method for monitoring wire - Google Patents

Wire monitoring system, wire saw device and method for monitoring wire Download PDF

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Publication number
CN105984042A
CN105984042A CN201510090766.8A CN201510090766A CN105984042A CN 105984042 A CN105984042 A CN 105984042A CN 201510090766 A CN201510090766 A CN 201510090766A CN 105984042 A CN105984042 A CN 105984042A
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CN
China
Prior art keywords
line
sensor
wire
wire sawing
gauze
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CN201510090766.8A
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Chinese (zh)
Inventor
R·叙埃尔迪亚
O·施奈德
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Applied Materials Switzerland SARL
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Applied Materials Switzerland SARL
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Filing date
Publication date
Priority to EP14190928.3A priority Critical patent/EP3015238A1/en
Priority to EP14190928.3 priority
Application filed by Applied Materials Switzerland SARL filed Critical Applied Materials Switzerland SARL
Publication of CN105984042A publication Critical patent/CN105984042A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064Devices for the automatic drive or the program control of the machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades

Abstract

The present disclosure provides a wire monitoring system (100) for a wire saw device. The wire monitoring system (100) includes a sensor arrangement (110) configured to be positioned adjacent to a wire (22) of the wire saw device, wherein the sensor arrangement (110) is adapted to detect a bow of the wire (22), and wherein the sensor arrangement (110) includes at least one sensor configured to be moved during operation of the wire saw device.

Description

Line monitoring system, wire sawing apparatus and the method being used for monitoring line
Technical field
Embodiment described herein relate to a kind of line monitoring system for wire sawing apparatus, a kind of wire sawing apparatus and A kind of method of the line for monitoring in wire sawing apparatus.The wire sawing apparatus of the present embodiment be particularly well-suited to cutting or Sawing hard material (such as silico briquette or quartz wedge), such as, be used for cutting silicon wafer, silicon ingot or the like.
Background technology
Wire sawing apparatus is used for cutting hard material (such as, silicon) workpiece or ingot bar.Use wire sawing apparatus cuts Or wafered workpiece or ingot bar are so that cutting, square-cut or section.In this wire sawing apparatus, from bobbin Line sending, and guided by wire guider and elastic threads.Different types of line can be used in wire sawing apparatus.Example As, diamond wire can be used in combination with coolant.
During cutting, along the rapid portable cord of line length, and it is being essentially perpendicular to the cut direction in line direction On by workpiece feeding plate or workbench will be relatively slowly travelling workpiece or ingot bar.Workpiece is executed along cut direction The vertical force of ledger line, and the counteracting force of line is caused line upwardly-deformed in the side contrary with cut direction by workpiece Or bending.If line bow increases, at the certain value of bow, may result in broken string, it means that need time-consuming replacing Line.The follow-up replacing of broken string and line reduces the aggregate efficiency of wire sawing apparatus.On the other hand, in order to make operator Can measure and bend and intermittent stopping cutting technique is time-consuming and relatively costly.Additionally, when stopping cutting technique, Kerf can be visible in rest position, even short situation about stopping also can be seen.
In view of the foregoing, it is desirable to reduce or avoid the generation of broken string, in order to realize the more efficient of wire sawing apparatus Rate.
Summary of the invention
In view of mentioned above, it is provided that a kind of line monitoring system for wire sawing apparatus, a kind of wire sawing apparatus and Plant the method for monitoring the line in wire sawing apparatus.The further aspect of the embodiment of the present invention, advantage and feature Will be apparent from dependent claims, description and accompanying drawing.
According to an aspect, it is provided that a kind of line monitoring system for wire sawing apparatus.Line monitoring system includes passing Sensor arranges, and configures the arrangement of described sensor and is positioned generally proximate the line of wire sawing apparatus, and wherein sensor arrangement is suitable Together in detection line bow and/or wire jumper, and wherein sensor arrangement includes at least one sensor, configures described biography Sensor moves during the operation of wire sawing apparatus.
According on the other hand, it is provided that a kind of line monitoring system for wire sawing apparatus.Line monitoring system includes passing Sensor arranges, and configures the arrangement of described sensor and is positioned generally proximate the line of wire sawing apparatus, and wherein sensor arrangement is suitable Together in detection line bow and/or wire jumper, wherein sensor arrangement includes a single sensor, configures described biography Sensor moves during the operation of wire sawing apparatus, and the moving direction of this sensor is essentially perpendicular to the line side of movement To;And controller, configure described controller during the operation of wire sawing apparatus, control at least one sensor Mobile, wherein configure described controller at least one biography the most mobile between the first location and the second location Sensor, in region between the first location and the second location, at least some of location of its center line.
According to another aspect, it is provided that a kind of wire sawing apparatus.Wire sawing apparatus includes line monitoring system described herein. Specifically, line monitoring system includes that sensor arranges, and configures the arrangement of described sensor and is positioned generally proximate scroll saw The line of device, wherein sensor arrangement is suitable for detecting line bow and/or wire jumper, and wherein sensor arrangement includes At least one sensor, configures described sensor and moves during the operation of wire sawing apparatus.
According to another aspect, it is provided that a kind of wire sawing apparatus.Wire sawing apparatus includes line monitoring system.Line monitoring is System includes that sensor arranges, and configures the arrangement of described sensor and is positioned proximate to the line of wire sawing apparatus, Qi Zhongchuan Sensor arrangement is suitable for detecting line bow and/or wire jumper, and wherein sensor arrangement includes a single sensor, Configuring described sensor to be moved during the operation of wire sawing apparatus, the moving direction of this sensor is the most vertical Straight in line moving direction;And controller, configure described controller and control at least during the operation of wire sawing apparatus The movement of one sensor, wherein configures described controller and periodically moves between the first location and the second location At least one sensor dynamic, district between the first location and the second location, at least some of location of its center line In territory.
According on the other hand, it is provided that a kind of method of line for monitoring in wire sawing apparatus.Described method includes During the operation of wire sawing apparatus running fix in the line of adjacent threads saw device sensor with detection line bow and/ Or wire jumper.
Embodiment is also directed to the equipment for implementing disclosed method and includes for performing each described side The part of appliance of method step.The computer that by nextport hardware component NextPort, can be programmed by Suitable software, by above-mentioned two The combination in any of person or perform these method steps in any other manner.Additionally, according to the enforcement of the present invention Example is also directed to the method for operating described device and system.This includes for implementing device and system The method step of each function.
Accompanying drawing explanation
Therefore, the mode of the features described above structure of the embodiment of the present invention can be understood in detail, refer to described herein Embodiment obtain being discussed in greater detail of embodiment summarized briefly above.Accompanying drawing relates to the enforcement of the present invention Example, and be described as follows:
Fig. 1 illustrates according to embodiment described herein the gauze being positioned on line guide cylinder and line monitoring system Front schematic view;
Fig. 2 illustrates according to the schematic horizontal stroke that embodiment described herein the wire sawing apparatus with line monitoring system Side cross-sectional view;
Fig. 3 illustrates the cross-sectional schematic side view of Fig. 2 wire sawing apparatus, and wherein the line of wire sawing apparatus is arch;
Fig. 4 illustrates and is positioned at the gauze on line guide cylinder and line monitoring according to further embodiment described herein The front schematic view of system;With
Fig. 5 illustrates according to embodiment described herein the method flow diagram for monitoring the line in wire sawing apparatus.
Detailed description of the invention
With detailed reference to various embodiments of the present invention, shown in all figures, these embodiments is one or more Individual example.In the following description of accompanying drawing, identical reference numbers same components.It is said that in general, only retouch State the difference about separate embodiment.Each example is provided by the way of explaining the embodiment of the present invention, And these examples are not meant to be the restriction of embodiment.Additionally, diagram can be used in conjunction with other embodiments For or be described as the feature of part of an embodiment to produce another embodiment.Purpose is this description bag Include this modifications and variations.
Described wire sawing apparatus is understood to be a kind of wire sawing apparatus, the most considerably long line (" line length "), Such as at least 1km, especially at least 10km or even at least 100km, it is wound on wire guider (such as line Guide cylinder) around, and form net or gauze.Term " line length " refers to the total length of line, and not only It is only for the line of sawing in preset time.Line moves (" moving direction of line ") along its length.At saw Cut period, will can be essentially perpendicular to the movement of line by the sheet material of sawing in the contact area of gauze and sheet material Direction moves through gauze.Cutting speed and/or can be in preset time is determined by the sheet material translational speed of sawing In amount, sawing effectively cuts area.As used herein, use term " to cut " and " section " or " saw Cut " synonym.
Scroll saw is a kind of for making silicon wafer and widely used technology.Scroll saw is cheap, and provides stable Performance.Line bow can be an index of cut quality and/or wafer quality.If bending too high, then can drop Low cut quality and/or wafer quality.When machine, line or material existing problems or fault, can such as occur Gao Gong.Without detecting and eliminate these problems in time, then can cause broken string, and also can reduce and cut Cut quality and/or wafer quality.Some wire sawing apparatus do not have the means of bow detection, and are to rely on operator Observation (this observation is the most time-consuming) or use the array of multiple inductance sensor.Later approach may not Enough accurate, possibly cannot timely respond to and/or possible too expensive (such as, for producing in enormous quantities).
Fig. 1 illustrates according to embodiment described herein the gauze 20 being positioned on line guide cylinder 10 and for scroll saw The front schematic view of the line monitoring system 100 of device (especially semiconductor line saw device).Line volume 22 Around online guide cylinder 10, and form gauze 20.According to combining with other embodiments as described herein Some embodiments, each line guide cylinder 10 provides a line monitoring system 100.
Line monitoring system 100 includes that sensor arranges (arrangement) 110, configures described sensor row Row are positioned generally proximate line 22 or the gauze 20 of wire sawing apparatus, and wherein sensor arrangement 110 is suitable for detecting line 22 or the bow of gauze 20, and wherein sensor arrangement 110 includes at least one sensor, configures described biography Sensor moves during the operation of wire sawing apparatus.Term used herein " operates " and may indicate that cutting technique. In other words, configure at least one sensor to move during cutting technique.Term used herein " operates " Can also indicate that a kind of situation or the state of line 22 or the movement of gauze 20, i.e. indicatrix saw device, this Situation or state roll off the production line 22 or gauze 20 move (the most in the direction of movement).
In some implementations, wire sawing apparatus is semiconductor line saw device.But, the invention is not restricted to quasiconductor Wire sawing apparatus.Application can include slurry scroll saw, diamond wire scroll saw, such as at the solaode using silicon In production, on sow, cutting the dicer (Squarers) and/or in the semiconductor industry of fragment of brick. Wire sawing apparatus according to embodiment described herein can also be used for cutting other materials, such as hard and fragility material Material, sapphire and metal.
Line 22 can be spirally wound on wire guider (such as line guide cylinder 10) around, and can at two or One layer of parallel lines part is formed, the most as shown in Figure 2 between more line guide cylinders.This layer is referred to alternatively as line Net 20.Line 22 can be diamond wire.Line guide cylinder 10 can have in the circumferential surface of online guide cylinder 10 The one or more line gathering sill (not shown) provided.One or more line gathering sills are applicable to guide and put down The line part of line part.Can two or more line gathering sills arranged in parallel with arranged in parallel or guide line portion Point.The quantity of parallel lines gathering sill may correspond to the quantity of parallel lines part or slicing processes.Such as, can roll up Initial line 22 makes gained gauze 20 include at least 100 parallel lines parts.This 100 lines will be forced through Workpiece or the ingot bar of the gauze 20 of 22 are sliced into 101 wafer.
The moving direction of line 22 (or gauze 20) generally extends along line length.It is being essentially perpendicular to line Travelling workpiece or ingot bar in the cut direction of moving direction.Line 22 or the movement of gauze 20 along moving direction Speed can be at least 5m/s, at least 25m/s and can especially about 25m/s.Such as, during operation Line 22 or the translational speed of gauze 20 between 10m/s and 15m/s, and during starting and stopping Speed can be less.Additionally, online 22 or in the case of gauze 20 moves back and forth, to line 22 or gauze 20 Frequently slow down to accelerate in the opposite direction.
Term " generallyperpendicular " and " substantial parallel " relate to the big of such as one direction and other direction Vertical or substantial parallel orientation on body, wherein with some number of degrees of precise perpendicularity or parallel orientation (such as, Up to 10 ° or even as high as 15 °) deviation be still considered to be " generallyperpendicular " and " substantially respectively Upper parallel ".
According to configuring at least one sensor with some embodiments of other embodiments as described herein combination It is essentially perpendicular to line 22 or the moving direction of gauze 20 and moves.Such as, line 22 or the shifting of gauze 20 Dynamic direction can be essentially perpendicular to the cylinder axis 12 of line guide cylinder 10.Or, the shifting of at least one sensor Dynamic direction can be substantially parallel to the cylinder axis 12 of line guide cylinder 10.
In some implementations, configure at least one sensor along gauze 20 width at least partially and especially It is removable along the whole width of gauze 20.By along at least some of mobile at least the one of gauze 20 width Individual sensor, can whole monitoring gauze 20, and bow can be detected under high accuracy.Such as, can be along gauze At least some of (such as, between the first location and the second location) of 20 width periodically (the most back and forth) At least one sensor mobile.Primary importance and the second position can correspond respectively to the marginal portion of gauze 20 Or end section.
According to some embodiments that can combine with other embodiments as described herein, at least one sensor is at it Translational speed on moving direction is in the range of 0.005 to 1m/s, is specifically in 0.01 to 0.5 In the range of m/s, and more specifically it is about 0.01m/s.In certain embodiments, at least one passes The translational speed of sensor is smaller than 0.1m/s.Such as, such as two specified points of primary importance and the second position Between, the translational speed of at least one sensor can be about 0.1m/s or the least.In some embodiments In, the periodically frequency of movement is in the range of 0.25 to 2 circulation per minute, and the most every Minute 0.3 to 0.5 circulation.Such as, described frequency may correspond to every 2 minutes or every 3 minutes one follow Ring.Can be defined as at least one sensor one is moved rearwards by moving forward with one for one circulation.Example As, a circulation can be defined as moving to the second position from primary importance and returning to primary importance.According to Some embodiments, described frequency can be depending on the speed of table, material to be cut and broken string before critical At least one in bow.In certain embodiments, described frequency can be adjustable.Such as, if do not had Detect that problem, frequency may correspond to every 2 minutes or circulation in every 3 minutes, and if be detected that such as The problems such as high line bow, then frequency can be increased.
In some implementations, line monitoring system 100 includes that clamping device 120, described clamping device are configured For clamping at least one sensor.Such as, at least one sensor is movably mounted at clamping device On 120.At least one sensor can be movably mounted on clamping device 120, clamping device 120 It is that the moving direction being essentially perpendicular to line 22 or gauze 20 may move as mentioned above.In certain embodiments, Clamping device 120 include (or) track or guide rail.
According to some embodiments that can combine with other embodiments as described herein, clamping device 120 is generally The moving direction being perpendicular to line 22 or gauze 20 extends.Such as, at least one clamping device 120 is generally The moving direction being perpendicular to line 22 or gauze 20 extends.In certain embodiments, clamping device 120 can be big The cylinder axis 12 being parallel to line guide cylinder 10 on body extends.
In some implementations, line monitoring system 100 includes that actuator 130, described actuator are configured to move At least one sensor dynamic, especially in operation (such as the cutting technique) period of wire sawing apparatus.According to some Embodiment, configuration actuator 130 along at least one sensor moving direction (such as, primary importance with Between the second position) periodically move back and forth at least one sensor.Primary importance and the second position can be distinguished Marginal portion or end section corresponding to gauze 20.In certain embodiments, configuration actuator 130 is big It is perpendicular to line 22 or the moving direction of gauze 20 on body and/or moves at least along clamping device 120 as mentioned above One sensor.The moving direction of clamping device 120 at least one sensor of definable.In some implementations, Configuration actuator 130 along the line 22 or at least one sensor of gauze 20 (such as, periodically) transverse shifting (or sensing station).
Actuator 130 can include electromotor, as in electric engine, air motor and Stepping motor extremely Few one.For at least one sensor mobile, line monitoring system 100 can include actuating device (not shown), Described actuating device is configured in the movement of at least one sensor transmit or the shifting of switch actuator 130 Dynamic.Actuating device can connect actuator 130 and at least one sensor.
In certain embodiments, at clamping device 120, actuator 130 is provided.Such as, actuator 130 Can be integrated in clamping device 120 and maybe can attach to clamping device 120.Illustrative example institute such as Fig. 1 Show, actuator 130 is attached to one end or the side part of clamping device 120.
According to embodiment, actuator 130 includes that encoder, described encoder are arranged to relative to line 22 or gauze 20 position at least one sensor.Encoder allows at least one sensor relative to line 22 Or being accurately positioned of gauze 20, and also allow the accurate detection of line bow.Encoder can be rotary coding Device.Encoder can be a kind of the axle of actuator 130 or the angle position of axis or motion to be converted into simulation Or the electromechanical device of digital code.From axle or the angle position of axis or motion, it may be determined that at least one sensor Relative to line 22 or the position of gauze 20.
According to some embodiments that can combine with other embodiments as described herein, sensor arrangement 100 includes Only one single-sensor, and it is particularly configured to during the operation of wire sawing apparatus the only one list moved Sensor.One single-sensor also referred to as " bow detection sensor ".One single-sensor can be foot No more, because sensor is moving.The available workload reduced and cost manufacture have the line of movable sensor Monitoring system 100, provides the monitoring to line bow under the precision improved simultaneously.
According to some embodiments that can combine with other embodiments as described herein, at least one sensor is joined It is set to detect line 22 or the position (such as, relative at least one sensor) and/or at least of gauze 20 Distance between individual sensor and line 22 or gauze 20.
Such as, at least one sensor include (or) inductance sensor, capacitance sensor with contact biography At least one in sensor.Inductance sensor and capacitance sensor be suitably adapted for sense wire 22 close to (example As, if line 22 is based on ferrum).At least one sensor can be digital sensor or analog sensed Device.The measurement result of at least one inductance sensor or capacitance sensor (also referred to as " Measurement results " or " measure ") can be that continuous result (in the case of analog sensor) or numeric results (pass in numeral In the case of sensor).If result is continuous print, then this may indicate that at least one sensor and line 22 Or the absolute distance between gauze 20.
Result be numeric results embodiment in, if the distance between at least one sensor and line 22 Less than threshold distance, then at least one sensor can be such as with 0 response, and if described distance is higher than institute State threshold value, then at least one sensor can be with 1 response.Can be such as by grasping during or before cutting technique Author pre-sets threshold distance (also referred to as " threshold value "), or threshold distance may correspond at least one The sensing distance of sensor, when i.e. only reaching described sensing distance, at least one sensor can detect Line 22 or the existence of gauze 20.Such as, threshold value especially can be situated between 0.1mm and 1.0mm Between 0.2mm and 0.6mm.
The present invention provides line monitoring system 100 to monitor the cutting progress of wire sawing apparatus, and especially one is used for Quasiconductor and/or the wire sawing apparatus of solar wafer.Line monitoring system 100 allows to monitor under the precision improved Line 22 or the bow of gauze 20.Line monitoring system 100 can have movable sensor, and the available work reduced Measure and become original manufacture.
According to some embodiments that can combine with other embodiments as described herein, line monitoring system can be configured Detect for wire jumper.Term " wire jumper " may indicate that such a situation: should be in First Line gathering sill The line being arranged and guiding jumps in the second line gathering sill or adjacent lines gathering sill so that in the second line gathering sill Exist or overlapping both threads.Such as when line gathering sill is polluted by chip and/or when line guides system to run not When stablizing and/or vibrate, wire jumper can occur.If it occur that wire jumper, then overlapping line can destroy wafer, and drops Low production yield rate and/or reduction cut quality.Line monitoring system 100 can detect the generation of wire jumper, and jumps Line can such as be corrected by operator.
Fig. 2 illustrates according to embodiment described herein wire sawing apparatus schematic with line monitoring system 100 Cross-sectional side view.Fig. 3 illustrates the cross-sectional schematic side view of Fig. 2 wire sawing apparatus, wherein wire sawing apparatus Gauze 20 be arch.
Wire sawing apparatus is illustrated as an example as including that line 22 or gauze 20, described line or gauze are by two lines Guide cylinder 10 (also referred to as " wire guider " or " pulley ") guides along line length.Line length can be substantially On be parallel to line 22 or gauze 20 moving direction extend (representing with arrow 24).Can parallel alignment The part of 22, thus form gauze 20.The line 22 provided is especially in the cutting zone of wire sawing apparatus Form gauze 20.Term " gauze " can relate to by two line guide cylinders 10 between the gauze that formed of line 22 20.It should be appreciated that line 22 can form more than one gauze 20, described gauze is defined as performing saw The region of cutting process.According to certain embodiments described herein, line 22 can form multiple gauze, the most all It is applicable to cut workpiece or two gauzes of ingot bar 30.Workpiece or ingot bar 30 are installed on workbench 40, Configure described workbench to move to cut ingot bar 30 against line 22 or gauze 20.
In certain embodiments, line guide cylinder 10 is suitable for rotating to transmit line 22 or gauze 20.Line Guide cylinder 10 can be configured to the peripheral speed with at least 5m/s or even 10m/s (i.e. at exterior periphery Speed) rotate.Such as, operation wire sawing apparatus between 5m/s and 30m/s during operation, and During starting and stopping, described speed can be less.Especially can operate wire sawing apparatus under at least 25m/s, and And especially can operate wire sawing apparatus under about 25m/s.Additionally, online 22 or gauze 20 move back and forth In the case of, line 22 or gauze 20 are slowed down frequently to accelerate in the opposite direction.
During cutting, line 22 or gauze 20 generally move along line length, and described line length can be line The longitudinal length of 22.Term " generally " answers specified packet to contain vibration or fellow.Described movement and workpiece or The vertical movement of ingot bar 30 (such as quasiconductor ingot bar) is compared can be the rapidest.According to some embodiments, line 22 or the movement of gauze 20 the most unidirectional, the most in a forward direction.According to other embodiments, line 22 or the movement of gauze 20 may be included in the movement in backward directions, specifically, described movement can be Moving back and forth of line 22 or gauze 20, modified line 22 or the moving direction of gauze 20 the most repeatedly.Behaviour In work, make line 22 or gauze 20 contact ingot bar 30 and ingot bar 30 is cut into the most multiple wafer.
According to some embodiments, can relative to ingot bar 30 portable cord 22 or a plurality of line forming gauze 20, Ingot bar 30 can be moved relative to line 22 or gauze 20, maybe can be moved relative to line 22 or gauze 20 With both ingot bars 30.
When pressing ingot bar 30 and line 22 (such as gauze 20) the most against each other, ingot bar 30 it is applied to Resulting force on line 22 or gauze 20 causes line 22 or gauze 20 to become arch.The orientation of line bow and cutting Direction overlaps, and can be essentially perpendicular to line 22 or the moving direction of gauze 20.Can be by bow height definition For difference or distance along cut direction between online 22 or the arcuate state of gauze 20 and non-arcuate state.? In Fig. 3, owing to ingot bar 30 is pressed in the cutting direction, line 22 or gauze 20 become bow.When line bends When increasing too much, may result in the fracture of line 22.In order to avoid this situation, embodiment described herein fair Permitted bow become excessive before detect line bow, and additionally, allow trigger appropriate reaction in order to avoid line 22 ruptures. This reaction can be for example and reduces the speed of the ingot bar 30 against line 22 and/or increase linear velocity.The most anti- Should be containing amount or the paste composition etc. revising provided slurry.
According to some embodiments that can combine with other embodiments as described herein, line monitoring system 100 includes Controller 140, configures described controller and controls the shifting of at least one sensor during the operation of wire sawing apparatus Dynamic.Such as, Configuration Control Unit 140 at least one biography the most mobile between the first location and the second location Sensor, in region between the first location and the second location, at least some of location of its center line.First Put the region between the second position and can include at least some of of gauze 20 width, and can especially wrap The whole width of vinculum net 20.In other words, the distance between primary importance and the second position can be equal to line The width of net 20, and can be especially bigger than the width of gauze 20.Primary importance and the second position can be divided Dui Yingyu the marginal portion of gauze 20 or end section.
According to some embodiments that can combine with other embodiments as described herein, the shifting of at least one sensor Dynamic speed is in the range of 0.005 to 1m/s, is specifically in the range of 0.01 to 0.5m/s, And more specifically it is about 0.01m/s.In certain embodiments, the translational speed of at least one sensor It is smaller than 0.1m/s.Such as, between such as two specified points of primary importance and the second position, at least one The translational speed of sensor can be about 0.1m/s or the least.In certain embodiments, in primary importance And the frequency of periodically movement is in the range of 0.25 to 2 circulation per minute between the second position, and 0.3 to 0.5 circulation the most per minute.Such as, described frequency may correspond to every 2 minutes or every 3 A minute circulation.One circulation can be defined as one of at least one sensor be moved rearwards by with one to Front movement.Such as, a circulation can be defined as moving to the second position from primary importance and returning to first Position.According to some embodiments, described frequency can be depending on the speed of table, material to be cut and breaks At least one in critical bow before line.In certain embodiments, described frequency can be adjustable.Example As, without problem being detected, frequency may correspond to every 2 minutes or circulation in every 3 minutes, and such as Fruit detects such as problems such as high line bows, then can increase frequency.
Controller 140 can will be sent to, at controller by least one sensor measurement and the data collected In can process data further, as assessment data.Such as, the logic level (i.e. 0 of at least one sensor Or 1 result) can be used for monitoring the progress of line bow.
In certain embodiments, controller 140 may be configured to determine that whether bow is beyond bow threshold value.When determining When bow is beyond bow threshold value, controller 140 operation of stop line saw device maybe can increase the translational speed of line. Optionally or it addition, controller 140 can reduce the work speed against line or gauze.Bow threshold value may correspond to The predetermined value of bow height.Bow threshold value can be a value of definition when bending too high.Bow highly can be defined as Along difference or the distance of cut direction between online or the arcuate state of gauze and non-arcuate state.
Fig. 4 illustrates the gauze 20 and line being positioned on line guide cylinder 10 according to further embodiment described herein The front schematic view of monitoring system 200.
According to an aspect of the present invention, it is provided that a kind of line monitoring system for wire sawing apparatus.Line monitoring system Arrange 110 including sensor, configure the arrangement of described sensor and be positioned generally proximate line or the gauze 20 of wire sawing apparatus, Wherein sensor arrangement 110 is suitable for detecting line or the bow of gauze 20, and wherein sensor arrangement 110 includes One single-sensor, configures described sensor and moves during the operation of wire sawing apparatus, and moving direction is generally It is perpendicular to line or the moving direction of gauze 20;And controller, configure the described controller behaviour at wire sawing apparatus Control the movement of at least one sensor during work, wherein configure described controller at primary importance and second Between putting, at least one sensor periodically mobile, its center line or gauze 20 is positioned at least partially In region between one position and the second position.
As shown in exemplary in Fig. 4, the single-sensor (also referred to as " bow sensor ") of sensor arrangement 110 Moving along clamping device 120, described clamping device can be roof beam structure or horizontal roof beam structure.Line monitoring system 200 wraps Include actuator 130 (also referred to as " motorization ") and for being accurately positioned at least one relative to line or gauze 20 The encoder 132 of individual sensor.At actuator 130 or near (such as, in rest position) provide Reference point 210.Reference point 210 can be at least one sensor device such as, relative to actuator 130 0mm position and/or the yardstick that defined by clamping device 120.In certain embodiments, can be similar to " around Line device (trancanner) " configure actuator 130 and/or encoder 132.Can such as configure bobbin winoler guide line (from bobbin, such as, unclamp line and recoil line).Such as along spool flange two can determine that position is back and forth Portable cord.Here movement can be continuous print.Device also can have two and determine extreme position, this two Device is moved back and forth between individual extreme position.
According to can with its described in other embodiments combination some embodiments, at least one sensor can quilt It is configured to detect at least one gauze position 220, and the original position (" IN ") of especially gauze 20 And/or terminal position (" OUT ").Such as, at least one sensor can be configured to automatically to detect to A few gauze position 220.During cutting technique, gauze 20 original position (" IN ") with (such as, periodically) at least one sensor is moved back and forth between terminal position (" OUT ").Fig. 4 Illustrating two exemplary gauze positions 220, wherein position can be depending on the moving direction of at least one sensor (representing by drawing reference numeral 230), which the gauze position in two gauze positions 220 is defined as initiateing Which gauze position in position and two gauze positions 220 is defined as terminal position.Such as, start bit Putting can be the gauze position that on specific moving direction, at least one sensor arrives first at during movement 220, and terminal position can be at least one sensor second or on specific moving direction during movement The gauze position 220 of rear arrival.
In some implementations, when arriving Len req, the gauze position detected can be used to stop gauze 20.According to some embodiments, can automatically calibrate original position (" IN ") and/or the end position of gauze 20 Put (" OUT ") and with offer and/or change data, without there being the time loss of amendment sensing station (such as, if the diameter of line guide cylinder 10 is smaller or greater: when more thread-changing guide cylinder 10, it may be determined that The diameter of line guide cylinder 10).Such as, when sensor detects and such as there is line or gauze, arrive line Or the ad-hoc location of gauze.Arrive the length of gauze at this hour, and wire sawing apparatus can be automatically stopped.This Situation can be similar for wire guider: if there is new wire guider, then diameter is bigger.Use Wire guider (can be for example and again slot) less.Sensor can be configured to measure and line or gauze The distance of (there is not bow during structure gauze).
According to can with its described in other embodiments combination some embodiments, line monitoring system 200, and And especially at least one sensor, wire jumper detection can be arranged to.Such as, line monitoring system 200, And especially at least one sensor, can be arranged to detect the jumper location 240 on gauze 20.? In some embodiments, at least one sensor can at jumper location 240 or above mobile two or more times. At least one sensor can collect data relevant to jumper location 240 (such as, each encoder arrive or During indicating jumper wire position 240).Such as, line monitoring system 200 can provide wire jumper to elapse the most in time to drill The curve (software development) become and/or the 3D shape of gauze 20.Line monitoring according to the embodiment described System 200 can especially be configured to detect wire jumper and wire jumper develops, thus provides the Monitoring Performance of improvement.
According to a further aspect in the invention, it is provided that a kind of wire sawing apparatus.Wire sawing apparatus includes line monitoring system. Can be according to embodiment described herein the described line monitoring system of configuration.
Fig. 5 illustrates according to embodiment described herein method 300 flow process for monitoring the line in wire sawing apparatus Figure.
During the operation that method 300 is included in wire sawing apparatus, running fix is in the line of adjacent threads saw device or line At least one sensor of net is with detection line bow and/or wire jumper (square frame 310).In block 320, method 300 determine line bow or line bow height and/or whether there is wire jumper.When determining that bow or bow height are less than a threshold value And/or when there is not wire jumper, cutting technique proceeds.When determine bow or bow height higher than described threshold value and/ Or when there is wire jumper, stop cutting technique and/or notify operator.
According to some embodiments, sensor moves and includes periodically moving between the first location and the second location Sensor, in region between the first location and the second location, at least some of location of its center line.First Position and the second position can correspond respectively to marginal portion or the end section of gauze.
In some implementations, described method includes determining that whether bow is beyond bending threshold value and/or whether there is wire jumper. When determining that bow, beyond when bending threshold value and/or there is wire jumper, performs following at least one step: stop line saw device Operation, increases the translational speed of line;Reduce the speed of table;Amendment or change mobile working Taiwan investment material (example As, against line or the work speed of gauze or the speed of table), revise or change line circulation, revise or change Modified line tension force, revises or changes coolant flow, and revise or change coolant pressure.Bow threshold value can be corresponding Predetermined value in bow height.One value of definition when bow threshold value can be to bend too high.Bow highly can be defined as Difference in cut direction or distance between online or the arcuate state of gauze and non-arcuate state.
Embodiments of the invention can detect line bow and can prevent because line bow becomes broken string that is too high and that cause.Can subtract Avoid the reduction of cut quality and/or wafer quality less or even.Embodiments of the invention also can detect on gauze Wire jumper.The present invention can provide whole net or the extensive information of net bow, and cannot when using fixing sensor Obtain these information.By using movable sensor, it is possible to decrease the cost relevant to line monitoring system is (such as, Production cost and/or maintenance cost).
Although foregoing is for embodiment described herein, but can be without departing from elemental range of the present invention In the case of design other and further embodiment, and the scope of the present invention is by right above Claim determines.

Claims (15)

1., for a line monitoring system for wire sawing apparatus, comprise:
Sensor arranges, and configures the arrangement of described sensor and is positioned generally proximate the line of described wire sawing apparatus, Qi Zhongsuo State sensor arrangement and be suitable for detecting bow and/or the wire jumper of described line,
The arrangement of wherein said sensor comprises at least one sensor, and configuration at least one sensor described is in institute Move during stating the operation of wire sawing apparatus.
2. the system as claimed in claim 1, it is characterised in that configuration at least one sensor described is substantially On be perpendicular to the moving direction of described line and move.
3. system as claimed in claim 1 or 2, it is characterised in that described sensor includes that inductance senses At least one in device, capacitance sensor and touch sensor.
4. system as claimed any one in claims 1 to 3, it is characterised in that farther include to control Device, configures described controller and controls the shifting of at least one sensor described during the operation of described wire sawing apparatus Dynamic.
5. system as claimed in claim 4, it is characterised in that configure described controller primary importance with The most mobile at least one sensor described between the second position, at least some of location of wherein said line In region between described primary importance and the described second position.
6. the system as according to any one of claim 1 to 5, it is characterised in that farther include clamping Device, described clamping device is arranged to clamping at least one sensor described, the most wherein said extremely A few sensor is movably mounted on described clamping device.
7. system as claimed in claim 6, it is characterised in that described clamping device is essentially perpendicular to institute The moving direction stating line extends, and the most wherein said clamping device includes track or guide rail.
8. the system as according to any one of claim 1 to 7, it is characterised in that at least one biography described The translational speed of sensor is in the range of 0.005 to 1m/s, is specifically in 0.01 to 0.5m/s In the range of, and more specifically it is about 0.01m/s.
9. the system as according to any one of claim 1 to 8, it is characterised in that farther include to activate Device, configure described actuator during the operation of described wire sawing apparatus mobile be configured described at least one passes Sensor.
10. system as claimed in claim 9, it is characterised in that described actuator includes encoder, Described encoder is arranged to relative to described line location at least one sensor described.
11. 1 kinds, for the line monitoring system of wire sawing apparatus, comprise:
Sensor arranges, and configures the arrangement of described sensor and is positioned generally proximate the line of described wire sawing apparatus, Qi Zhongsuo Stating sensor arrangement and be suitable for detecting bow and/or the wire jumper of described line, the arrangement of wherein said sensor comprises one Single sensor, configures described sensor and moves, described sensing during the operation of described wire sawing apparatus The moving direction of device is essentially perpendicular to the moving direction of described line;With
Controller, configures described controller and controls at least one biography described during the operation of described wire sawing apparatus The movement of sensor, wherein configures described controller the most mobile described between the first location and the second location At least one sensor, wherein said line be positioned at described primary importance and described second at least partially In region between putting.
12. 1 kinds of wire sawing apparatus, comprising the line monitoring as according to any one of claim 1 to 11 is System.
13. 1 kinds, for the method monitoring the line in wire sawing apparatus, comprise:
During the operation of described wire sawing apparatus, running fix is in the sensor of the line of neighbouring described wire sawing apparatus To detect bow and/or the wire jumper of described line.
14. methods as claimed in claim 13, it is characterised in that the movement of described sensor includes:
The most mobile described sensor, at least the one of wherein said line between the first location and the second location It is partially located in the region between described primary importance and the described second position.
15. methods as described in claim 13 or 14, it is characterised in that described method includes following Step:
Determine that whether described bow is beyond bending threshold value and/or determining whether there is wire jumper;With
When determine described bow beyond bow threshold value and/or when determine there is wire jumper time, perform in following steps extremely Few one:
Stop the operation of described wire sawing apparatus;
Increase the translational speed of described line;
Reduce the speed of table;With
In change mobile working Taiwan investment material, line circulation, line tension, coolant flow and coolant pressure extremely Few one.
CN201510090766.8A 2014-10-29 2015-02-28 Wire monitoring system, wire saw device and method for monitoring wire Pending CN105984042A (en)

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Application publication date: 20161005